Mask clamping device and photoetching machine

Abstract

The utility model relates to the technical field of microelectronics, in particular to a mask clamping device and a photoetching machine. According to the mask clamping device, the driving mechanism is arranged, the driving part of the driving mechanism is in transmission connection with the driving wheel, the driven wheel is rotationally installed on the installation base, the transmission part is connected between the driving wheel and the driven wheel, and the two clamping assemblies are connected with the forward side and the reverse side of the transmission part respectively; accordingly, when the driving wheel rotates, the two clamping assemblies can get close to or away from each other to clamp the workpiece, the structure is simple, the two clamping assemblies are consistent in running speed and high in clamping precision, in addition, the driving wheel can clamp and release the workpiece through forward rotation and reverse rotation, the clamping operation is simplified, and then the clamping efficiency is improved. According to the photoetching machine provided by the utility model, the driving mechanism is simple in structure, and the clamping precision of the mask clamping device is relatively high, so that the clamping operation is simplified, and the clamping efficiency is further improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to microelectronic technology field especially relates to a mask plate clamping device and photoetching machine. BACKGROUND

[0002] Photoetching is the most complex and the most critical process step in the semiconductor chip production flow, and is time-consuming and high-cost. The mask plate is a metal layer film or a photoresist layer film with information such as patterns and characters recorded on the surface, and is a pattern master used in photoetching process in microelectronic and integrated optoelectronic manufacturing. Therefore, the mask plate is an indispensable component in the photoetching process.

[0003] The mask plate is very sensitive to particles or contaminants as a precision component, and therefore is stored in a special mask plate box. Only in the exposure process, the mask plate is taken out from the mask plate box by a mechanical hand and placed on a mask plate table for exposure. However, the existing mechanical hand or mask plate clamping device has a complex structure, and the existing mechanical hand or mask plate clamping device has two movable ends to clamp the workpiece, and the two movable ends are usually driven by two driving members. Therefore, the two movable ends cannot move synchronously, resulting in poor clamping precision and efficiency. SUMMARY

[0004] The first purpose of the utility model is to provide a mask plate clamping device to solve the technical problems of complex structure, poor clamping precision and low clamping efficiency of the mask plate clamping device in the prior art.

[0005] The second purpose of the utility model is to provide a photoetching machine to solve the technical problems of complex structure, poor clamping precision and low clamping efficiency of the mask plate clamping device in the prior art.

[0006] According to the above idea, the technical scheme adopted by the utility model is as follows:

[0007] A mask plate clamping device comprises a mounting seat, two clamping assemblies are oppositely arranged on the mounting seat, the two clamping assemblies are slidingly arranged on the mounting seat and can clamp a workpiece, a driving mechanism is further installed on the mounting seat, the driving mechanism comprises a driving member, a driving wheel, a transmission member and a driven wheel, the driving member is in transmission connection with the driving wheel, the driven wheel is rotatably installed on the mounting seat, the transmission member is connected between the driving wheel and the driven wheel, the rotation axes of the driving wheel and the driven wheel are consistent, and are perpendicular to the sliding direction of the clamping assemblies, one clamping assembly is connected to the transmission member on the forward travel side of the transmission member, and the other clamping assembly is connected to the transmission member on the reverse travel side of the transmission member, and the rotation of the driving wheel can make the two clamping assemblies approach or move away from each other to clamp the workpiece.

[0008] Optionally, the driving wheel and the driven wheel are belt wheels, and the transmission member is a transmission belt; or,

[0009] The driving wheel and the driven wheel are sprocket wheels, and the transmission member is a chain.

[0010] Optionally, the driving wheel and the driven wheel are synchronous belt wheels.

[0011] The inner side of the transmission belt has a tooth portion engaged with the driving wheel and the driven wheel.

[0012] Optionally, the driving mechanism further comprises a first linkage assembly and a second linkage assembly, the first linkage assembly comprises a first fixing member and a first connecting member, the first fixing member is installed on the forward running side of the transmission member, and the first connecting member is connected between the first fixing member and one of the clamping assemblies.

[0013] The second linkage assembly comprises a second fixing member and a second connecting member, the second fixing member is installed on the reverse running side of the transmission member, and the second connecting member is connected between the second fixing member and the other clamping assembly.

[0014] The first linkage assembly and the second linkage assembly are located between the two clamping assemblies.

[0015] Optionally, the first fixing member and the first connecting member are both plate-shaped, and the extension direction of the first fixing member is perpendicular to the extension direction of the first connecting member.

[0016] And / or, the second fixing member and the second connecting member are both plate-shaped, and the extension direction of the second fixing member is perpendicular to the extension direction of the second connecting member.

[0017] Optionally, along the length direction of the forward running side of the transmission member, the first fixing member is adjustably arranged on the forward running side of the transmission member.

[0018] Along the length direction of the reverse running side of the transmission member, the second fixing member is adjustably arranged on the reverse running side of the transmission member.

[0019] Optionally, the driving mechanism further comprises a support member, the support member is installed on the mounting seat, and the driven wheel is rotatably installed on one side of the support member.

[0020] Optionally, the two clamping assemblies each comprise a support arm and a clamping member connected to the bottom of both ends of the support arm, the support arm is slidingly arranged on the mounting seat, the forward running side of the transmission member is connected to one of the support arms, the reverse running side of the transmission member is connected to the other support arm, and the upper side of the clamping member has a clamping surface capable of abutting against the lower side of the workpiece.

[0021] Optionally, the clamping member is provided with a suction hole in the vertical direction, and the mask clamping device further comprises a vacuum pipeline, one end of the vacuum pipeline is communicated with the suction hole, and the other end is communicated with a vacuum source.

[0022] A photolithography machine comprises a transfer device, and the photolithography machine further comprises the mask clamping device, and an output end of the transfer device is connected with the mask clamping device.

[0023] The mask clamping device has the advantages that:

[0024] The mask clamping device provided by the utility model has the advantages that: the two clamping assemblies are arranged on the mounting seat for clamping workpieces, and a driving mechanism comprising a driving member, a driving wheel, a transmission member and a driven wheel is arranged, the driving member is in transmission connection with the driving wheel, the driven wheel is rotatably arranged on the mounting seat, the transmission member is connected between the driving wheel and the driven wheel, the two clamping assemblies are connected with the transmission member on the positive side and the reverse side respectively, and when the driving wheel rotates, the two clamping assemblies can approach or move away from each other to clamp workpieces.

[0025] The photolithography machine provided by the utility model has the advantages that: the mask clamping device has a simple driving mechanism structure, high clamping precision, and cannot clamp workpieces due to incorrect assembly of the clamping assemblies, the driving wheel can clamp and release workpieces through forward rotation and reverse rotation, clamping operation is simplified, and clamping efficiency is improved. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the utility model, the drawings needed in the description of the embodiments of the utility model will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained according to the contents of the embodiments of the utility model and the drawings by those skilled in the art without creative labor.

[0027] Figure 1 is a structural schematic view of the mask clamping device hidden shell provided by the embodiments of the utility model;

[0028] Figure 2 is a structural schematic view of the mask clamping device from an oblique lower side provided by the embodiments of the utility model;

[0029] Figure 3 It is a structure schematic view of the mask plate clamping device with the shell.

[0030] In the figure:

[0031] 1, mounting seat; 11, long hole;

[0032] 2, clamping assembly; 21, support arm; 22, connecting foot; 221, vertical part; 222, inclined part; 23, clamping piece; 24, blocking piece;

[0033] 3, driving mechanism; 31, driving piece; 32, driving wheel; 33, driven wheel; 34, transmission piece; 35, support piece; 36, first linkage assembly; 361, first fixed piece; 362, first connecting piece; 37, second linkage assembly; 371, second fixed piece; 372, second connecting piece;

[0034] 4, slide rail;

[0035] 5, sliding block;

[0036] 6, pipe joint;

[0037] 7, position sensor;

[0038] 8, inductor;

[0039] 9, shell;

[0040] 10, connecting block. DETAILED DESCRIPTION

[0041] In order to make the technical problems solved by the utility model, the technical scheme adopted and the technical effects reached more clear, the technical scheme of the utility model will be further explained below by combining with the drawings and through specific embodiments. It can be understood that the specific embodiments described here are only used to explain the utility model, not to limit the utility model. In addition, it should be noted that, in order to facilitate the description, only the parts related to the utility model are shown in the drawings, not all.

[0042] It should be noted that: similar signs and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0043] In the description of the utility model, unless another definite provision and limitation, the term "link", "connect", "fix" should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be two elements inside the communication or two element's mutual action relation.For the ordinary skill in the art, the above-mentioned terms can be understood in the specific meaning in the utility model according to specific circumstances.

[0044] In the utility model, unless another definite provision and limitation, the first feature is "on" or "under" the second feature can include the first and second features direct contact, also can include the first and second features are not direct contact but contact through the additional feature between them.Moreover, the first feature is "on", "above" and "on" the second feature includes the first feature is directly above and obliquely above the second feature, or just indicates that the horizontal height of the first feature is higher than the second feature.The first feature is "under", "below" and "under" the second feature includes the first feature is directly below and obliquely below the second feature, or just indicates that the horizontal height of the first feature is less than the second feature.In the description of the embodiment, if not special, "multiple" specifically refers to two or more than two.

[0045] In the description of the embodiment, the terms "on", "under", "right", etc.Orientation or position relationship is based on the orientation or position relationship shown in the drawing, just for the convenience of description and simplification of operation, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, so it cannot be understood as a limitation on the utility model.In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.

[0046] It should be noted that when an element is referred to as "fixed to" or "provided on" another element, it can be directly on another element or there can be a middle element.

[0047] The technical scheme of the utility model will be further illustrated below by combining the drawings and through specific embodiments.

[0048] The embodiment provides a mask clamping device and a photolithography machine, which are used for solving the technical problems of complex structure, poor clamping precision and low clamping efficiency of the mask clamping device in the prior art.

[0049] The photolithography machine of the embodiment comprises a transfer device and a mask clamping device, the mask clamping device is used for clamping a workpiece, the transfer device is connected with the mask clamping device and can drive the mask clamping device to translate and lift. The workpiece in the embodiment is taken as a mask for example. Understandably, the mask is a mold composed of a metal layer film or a photoresist layer film with information such as patterns and characters recorded on the surface and a glass carrier plate made of high-purity fused quartz, and is a pattern master used in photolithography process in microelectronic and integrated optoelectronic manufacturing. The mask is placed in a special mask box when stored, and is taken out from the mask box by the mask clamping device and placed on a mask table for exposure only during the exposure process. The mask clamping device of the embodiment can clamp the mask, and then the transfer device drives the mask clamping device to lift and translate, so as to place the mask on the mask table for exposure.

[0050] As shown in Figure 1 The mask clamping device comprises a mounting seat 1, two clamping assemblies 2 are oppositely arranged on the mounting seat 1, the two clamping assemblies 2 are slidingly arranged on the mounting seat 1 and can clamp the workpiece, a driving mechanism 3 is further arranged on the mounting seat 1, the driving mechanism 3 comprises a driving piece 31, a driving wheel 32, a transmission piece 34 and a driven wheel 33, the driving piece 31 is in transmission connection with the driving wheel 32, the driven wheel 33 is rotatably arranged on the mounting seat 1, the transmission piece 34 is connected between the driving wheel 32 and the driven wheel 33, the rotation axes of the driving wheel 32 and the driven wheel 33 are consistent and perpendicular to the sliding direction of the clamping assemblies 2, one clamping assembly 2 is connected to the transmission piece 34 on the forward side, and the other clamping assembly 2 is connected to the transmission piece 34 on the reverse side, and the rotation of the driving wheel 32 can make the two clamping assemblies 2 approach or move away from each other to clamp the workpiece.

[0051] Understandably, the driving member 31 drives the driving wheel 32 to rotate, the driving wheel 32 drives the transmission member 34 to rotate, the transmission member 34 has a forward running side and a reverse running side and the running speed of the forward running side and the reverse running side is consistent, when the rotation axis of the driving wheel 32 and the driven wheel 33 is perpendicular to the sliding direction of the clamping assembly 2, the running direction of the transmission member 34 is parallel to the sliding direction of the clamping assembly 2, then when the two clamping assemblies 2 are connected to the forward running side and the reverse running side of the transmission member 34 respectively, the driving wheel 32 rotates forward to drive the transmission member 34 to run, the two clamping assemblies 2 will move towards or away from each other, the driving wheel 32 reverses to make the two clamping assemblies 2 move away from or towards each other, so that the clamping assembly 2 can selectively clamp or release the workpiece. The transmission member 34 drives the two clamping assemblies 2, which not only has a simple structure, but also can act on the two clamping assemblies 2 at the same time, so that the running speed of the two clamping assemblies 2 is consistent, so the clamping accuracy is higher, and it is difficult to appear that the clamping assembly 2 is misaligned and cannot clamp the workpiece. In addition, the driving wheel 32 can realize clamping and releasing of the workpiece by forward rotation and reverse rotation, which simplifies the clamping operation and improves the clamping efficiency.

[0052] Exemplarily, the driving member 31 is a servo motor, of course, other power elements can also be selected in other embodiments, which are not limited here.

[0053] Exemplarily, the driving wheel 32 and the driven wheel 33 are belt wheels, and the transmission member 34 is a transmission belt; or the driving wheel 32 and the driven wheel 33 are chain wheels, and the transmission member 34 is a chain. This setting can realize that the running speed of the forward running side of the transmission member 34 and the reverse running side of the transmission member 34 is consistent, which improves the clamping accuracy of the clamping assembly 2. Further, the driving wheel 32 and the driven wheel 33 are synchronous belt wheels, and the inner side of the transmission member 34 has a tooth portion meshing with the driving wheel 32 and the driven wheel 33, that is, the transmission member 34 is a synchronous belt. This setting can prevent the transmission member 34 from slipping with the driving wheel 32, which improves the running stability of the driving mechanism 3 and further improves the use reliability of the mask clamping device.

[0054] Of course, in other embodiments, the driving wheel 32 and the driven wheel 33 can be selected as other types of wheels, and the transmission member 34 can also be selected as other types of transmission connecting members, as long as the running speed of the forward running side and the reverse running side of the transmission member 34 is consistent, which is not limited here.

[0055] Optionally, the driving mechanism 3 further comprises a first linkage assembly 36 and a second linkage assembly 37, the first linkage assembly 36 comprises a first fixing member 361 and a first connecting member 362, the first fixing member 361 is installed on the positive running side of the transmission member 34, and the first connecting member 362 is connected between the first fixing member 361 and a clamping assembly 2; the second linkage assembly 37 comprises a second fixing member 371 and a second connecting member 372, the second fixing member 371 is installed on the reverse running side of the transmission member 34, and the second connecting member 372 is connected between the second fixing member 371 and another clamping assembly 2, and the first linkage assembly 36 and the second linkage assembly 37 are located between the two clamping assemblies 2. This arrangement facilitates the connection between the clamping assembly 2 and the transmission member 34, and at the same time, the first linkage assembly 36 and the second linkage assembly 37 located between the two clamping assemblies 2 also avoid interference between the two clamping assemblies 2, improving the structural rationality of the mask plate clamping device.

[0056] The first fixing member 361 and the first connecting member 362 are both plate-shaped, and the extension direction of the first fixing member 361 is perpendicular to the extension direction of the first connecting member 362; the second fixing member 371 and the second connecting member 372 are both plate-shaped, and the extension direction of the second fixing member 371 is perpendicular to the extension direction of the second connecting member 372. The plate-shaped design not only saves materials, but also forms a larger fitting area, thereby improving the connection strength; the perpendicular design facilitates the selection of the connection position of the transmission member 34 and the clamping assembly 2 as needed, improving the structural rationality of the mask plate clamping device.

[0057] In other embodiments, only the first fixing member 361 and the first connecting member 362 can be designed as plate-shaped and perpendicular to each other, or only the second fixing member 371 and the second connecting member 372 can be designed as plate-shaped and perpendicular to each other, without too many limitations here.

[0058] Optionally, along the length direction of the positive running side of the transmission member 34, the first fixing member 361 is adjustably arranged on the positive running side of the transmission member 34; along the length direction of the reverse running side of the transmission member 34, the second fixing member 371 is adjustably arranged on the reverse running side of the transmission member 34. This arrangement can reset and correct the clamping and opening positions of the two clamping assemblies 2, improving the functional rationality of the mask plate clamping device.

[0059] Optionally, the driving structure further comprises a support member 35, the support member 35 is installed on the mounting seat 1, and the driven wheel 33 is rotatably installed on one side of the support member 35. The support member 35 provides a mounting position for the driven wheel 33, improving the mounting stability of the driven wheel 33, and thereby improving the use reliability of the mask plate clamping device.

[0060] As Figures 1-2As shown, each of the two clamping assemblies 2 comprises a support arm 21 and a clamping piece 23 connected to the bottom of the two ends of the support arm 21, the support arm 21 is slidingly arranged on the mounting base 1, the positive side of the transmission member 34 is connected to one support arm 21, the reverse side of the transmission member 34 is connected to the other support arm 21, the upper side of the clamping piece 23 has a clamping surface, the clamping surface is below the support arm 21 and can abut the lower side of the workpiece. Understandably, each clamping assembly 2 comprises two clamping pieces 23, and the clamping surfaces of the four clamping pieces 23 of the two clamping assemblies 2 can be carried on the lower sides of the four corners of the workpiece, thereby forming stable clamping of the mask in four directions, preventing the mask from falling off, and improving the use reliability of the mask clamping device.

[0061] In order to improve the sliding fluency and stability of the clamping assembly 2, the mask clamping device further comprises a sliding rail 4 and a sliding block 5, the sliding rail 4 is installed on the mounting base 1 and extends along the sliding direction of the clamping assembly 2, and the sliding block 5 is installed on the lower side of the support arm 21 and cooperates with the sliding rail 4.

[0062] Optionally, the sliding rail 4 is provided with two and is distributed on both sides of the mounting base 1. This arrangement can further improve the sliding stability of the clamping assembly 2 and improve the use reliability of the mask clamping device.

[0063] Optionally, the clamping assembly 2 further comprises a connecting foot 22 connected between the support arm 21 and the clamping piece 23. Understandably, the connecting foot 22 can extend the distance between the clamping piece 23 and the support arm 21, so that the clamping piece 23 has a greater carrying depth, and the adaptability to the thickness of the mask is improved.

[0064] Optionally, a plurality of long holes 11 are provided on the mounting base 1, the long holes 11 are provided one by one corresponding to the connecting feet 22 and extend along the sliding direction of the clamping assembly 2, the connecting feet 22 can pass through the long holes 11 and can move in the long holes 11 along the sliding direction of the clamping assembly 2. Understandably, the long holes 11 enable the clamping assembly 2 not to extend outside the mounting base 1, the support foot directly passes through the long hole 11, and can be extended to below the mounting base 1 to fix the mask by the clamping piece 23, thereby reducing the volume and occupied space of the mask clamping device, and the long holes 11 extend along the sliding direction of the clamping assembly 2, providing a sliding space for the sliding of the clamping assembly 2 and limiting the sliding range of the clamping assembly 2, preventing the clamping assembly 2 from moving excessively to damage the mask or interfere with other components, and improving the structural rationality of the mask clamping device.

[0065] In order to further improve the adaptability to the mask size and expand the clamping range, the connecting leg 22 comprises a vertical part 221 and an inclined part 222, the vertical part 221 vertically penetrates the long hole 11, and the inclined part 222 extends to the clamping piece 23 in a direction away from the other clamping assembly 2. The arrangement of the inclined part 222 enables the clamping piece 23 to clamp the mask with a larger size range, and expands the applicable scenarios of the mask clamping device.

[0066] In order to prevent the clamping piece 23 from damaging the mask, a buffer is arranged on the upper side of the clamping surface. The arrangement can form a certain buffering effect on the mask, thereby protecting the mask and improving the use reliability of the mask clamping device.

[0067] Exemplarily, the buffer is a flexible rebound pad. In other embodiments, the buffer can also be other parts with buffering capability, which are not limited herein.

[0068] Optionally, the clamping assembly 2 further comprises a blocking piece 24, which is arranged on the clamping piece 23 and located on the outer side of the clamping surface. The arrangement can ensure the safety of the mask and avoid the mask from falling off due to the stroke error when the clamping assembly 2 slides, thereby improving the use reliability of the mask clamping device.

[0069] As shown in Figure 2 Optionally, the blocking piece 24 is in the form of a plate and has an L-shaped cross section, the vertical plate of the blocking piece 24 is mounted on the clamping piece 23, and the horizontal plate extends in the direction of the other clamping assembly 2. The vertical plate can form a blocking effect on the mask to prevent the mask from falling off the clamping piece 23, and the horizontal plate can prevent the mask from rubbing against the bottom surface of the mounting seat 1, thereby protecting the mask and improving the structural rationality of the mask clamping device.

[0070] In order to further improve the fixing strength of the clamping piece 23 to the workpiece, the clamping piece 23 is provided with a suction hole penetrating in the vertical direction, and the mask clamping device further comprises a vacuum pipeline, one end of which is communicated with the suction hole and the other end is communicated with a vacuum air source. After the mask is loaded on the clamping piece 23, the vacuum air source can be used to vacuum the suction hole, so as to adsorb the mask above the suction hole and prevent the mask from falling off during the transfer process, thereby improving the use reliability of the mask clamping device.

[0071] In order to ensure the airtightness of the connection between the suction hole and the vacuum pipeline, a pipeline joint 6 is arranged between the vacuum pipeline and the suction hole.

[0072] As shown in Figure 1As shown, optionally, a position sensor 7 is arranged on the upper side of the support arm 21, and a sensing piece 8 is arranged on the mounting base 1, and the position sensor 7 can identify the sensing piece 8 to determine the position of the support arm 21. Understandably, when the two clamping assemblies 2 move towards each other to the preset position, the clamping piece 23 can clamp the workpiece, and when the two clamping assemblies 2 move away from each other to the preset position, the clamping piece 23 can release the workpiece. By arranging the sensing piece 8 at the preset position of clamping and releasing the workpiece, when the position sensor 7 identifies the sensing piece 8 at different positions, it can be known whether it is currently in the clamping position or the releasing position, which is convenient for controlling the mask clamping device and improves the automation degree of the mask clamping device, thereby improving the user experience.

[0073] Illustratively, the position sensor 7 is a photoelectric sensor, and of course it can also be a contact resistance sensor in other embodiments, which is not the focus of the present embodiment and will not be described here.

[0074] As shown, Figure 3 Optionally, the mask clamping device further comprises a shell 9, which is arranged on the upper side of the mounting base 1. The shell 9 can protect the elements on the mounting base 1 and prevent the mask clamping device from being damaged, thereby improving the use reliability of the mask clamping device.

[0075] In order to facilitate the connection of the mask clamping device and the transfer device, optionally, a connecting block 10 is arranged on the upper side of the shell 9 for connecting the transfer device.

[0076] The operation process of the mask clamping device of the present embodiment is as follows:

[0077] The driving member 31 drives the driving wheel 32 to rotate, the positive side of the transmission member 34 drives one clamping assembly 2 to slide, and the reverse side of the transmission member 34 drives the other clamping assembly 2 to slide, and the two clamping assemblies 2 move away from each other until the two clamping assemblies 2 are in the open state.

[0078] After the transfer device drives the mask clamping device to move above the mask and then descends, the mask clamping device reaches the clamping position.

[0079] The driving member 31 drives the driving wheel 32 to rotate in the opposite direction, and the two clamping assemblies 2 move towards each other until the clamping surface of the clamping piece 23 is located below the four corners of the mask.

[0080] The transfer device drives the mask clamping device to rise, and the clamping surface of the clamping piece 23 abuts against the lower side of the mask, and the vacuum source is started to vacuum the suction holes to adsorb the mask on the upper side of the suction holes.

[0081] The transfer device drives the mask clamping device to move to the exposure table for exposure, and one clamping stroke is completed.

[0082] It should be noted that the above only the preferred embodiments of the present application and the use of technical principles. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, those skilled in the art can make various obvious changes, re-adjustment and replacement without departing from the scope of the present application. Therefore, although the above embodiments of the present application has been described in more detail, but the present application is not limited to the above examples, without departing from the concept of the present application, but also can include more other equivalent embodiments, and the scope of the present application is determined by the appended claims.

Claims

1. A mask clamping device, comprising a mounting base (1), two clamping assemblies (2) are oppositely arranged on the mounting base (1), the two clamping assemblies (2) are slidingly arranged on the mounting base (1) and can clamp a workpiece in cooperation, characterized in that, The mounting base (1) is further provided with a driving mechanism (3), the driving mechanism (3) comprises a driving piece (31), a driving wheel (32), a transmission piece (34) and a driven wheel (33), the driving piece (31) is in transmission connection with the driving wheel (32), the driven wheel (33) is rotatably installed on the mounting base (1), the transmission piece (34) is connected between the driving wheel (32) and the driven wheel (33), the rotation axis directions of the driving wheel (32) and the driven wheel (33) are consistent, and are perpendicular to the sliding direction of the clamping assembly (2), the transmission piece (34) is connected with one clamping assembly (2) on the positive side, and is connected with another clamping assembly (2) on the reverse side, and the rotation of the driving wheel (32) can make the two clamping assemblies (2) approach or move away from each other to clamp the workpiece.

2. The mask clamping device according to claim 1, wherein The driving wheel (32) and the driven wheel (33) are both belt wheels, and the transmission piece (34) is a transmission belt. The driving wheel (32) and the driven wheel (33) are both chain wheels, and the transmission piece (34) is a chain.

3. The mask clamping device according to claim 2, wherein The driving wheel (32) and the driven wheel (33) are both synchronous belt wheels. The inner side of the transmission belt is provided with a tooth portion meshing with the driving wheel (32) and the driven wheel (33).

4. The reticle clamp apparatus of claim 1, wherein, The driving mechanism (3) further comprises a first linkage assembly (36) and a second linkage assembly (37), the first linkage assembly (36) comprises a first fixing piece (361) and a first connecting piece (362), the first fixing piece (361) is installed on the positive side of the transmission piece (34), and the first connecting piece (362) is connected between the first fixing piece (361) and one clamping assembly (2). The second linkage assembly (37) comprises a second fixing piece (371) and a second connecting piece (372), the second fixing piece (371) is installed on the reverse side of the transmission piece (34), and the second connecting piece (372) is connected between the second fixing piece (371) and another clamping assembly (2). The first linkage assembly (36) and the second linkage assembly (37) are located between the two clamping assemblies (2).

5. The mask clamping device according to claim 4, wherein The first fixing piece (361) and the first connecting piece (362) are both plate-shaped, and the extension direction of the first fixing piece (361) is perpendicular to the extension direction of the first connecting piece (362). And / or, the second fixing piece (371) and the second connecting piece (372) are both plate-shaped, and the extension direction of the second fixing piece (371) is perpendicular to the extension direction of the second connecting piece (372).

6. The mask clamping device according to claim 4, wherein The first fixing piece (361) is adjustably arranged on the positive side of the transmission piece (34) along the length direction of the positive side of the transmission piece (34). The second fixing piece (371) is adjustably arranged on the reverse side of the transmission piece (34) along the length direction of the reverse side of the transmission piece (34).

7. The mask clamping device according to claim 1, wherein The driving mechanism (3) further comprises a support (35) mounted on the mounting base (1), and the driven wheel (33) is rotatably mounted on one side of the support (35).

8. The mask clamping device according to claim 1, wherein Each of the two clamping assemblies (2) comprises a support arm (21) and a clamping piece (23) connected to the bottom of both ends of the support arm (21), the support arm (21) is slidingly arranged on the mounting base (1), the transmission member (34) is connected to one of the support arms (21) on the positive side, the transmission member (34) is connected to the other support arm (21) on the reverse side, and the clamping piece (23) has a clamping surface on the upper side, which can abut against the lower side of the workpiece.

9. The mask clamping device according to claim 8, wherein The clamping piece (23) is provided with a suction hole penetrating in the vertical direction, and the mask clamping device further comprises a vacuum pipeline, one end of the vacuum pipeline is communicated with the suction hole, and the other end is communicated with a vacuum air source.

10. A lithographic machine comprising a transfer device, characterized in that The photoetching machine further comprises the mask clamping device according to any one of claims 1-9, and the output end of the transfer device is connected with the mask clamping device.

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