Clamping mechanism and conveying system

Abstract

According to the clamping mechanism and the conveying system, the clamping mechanism comprises the bearing arm, the driving assembly, the fixing seats, the clamping parts and the first elastic parts, the fixing seats are arranged on the two sides of the bearing arm, the clamping parts are movably arranged in sliding grooves of the fixing seats, and therefore under driving of the driving assembly, the clamping parts can move in a reciprocating mode along the sliding grooves, and the first elastic parts are arranged on the clamping parts. When the ends of the two clamping parts extend out of the fixing base, the two clamping parts can clamp an object to be transferred. The clamping part moves in the sliding groove of the fixed seat, and relative friction between the clamping part and the fixed seat occurs in the fixed seat, so that chippings generated by interface friction can be prevented from falling into a production space, the damage of the chippings to the production environment is further avoided, and the reduction of the product yield caused by the interface friction is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor production equipment, and particularly relates to a clamping mechanism and a conveying system. BACKGROUND

[0002] In the field of semiconductor production, it is often necessary to transfer a production board from one station to another station for different process operations. The production board is usually fixed on a clamp, the clamp has a clamp connecting rod, a plurality of positioning holes are arranged on the bottom surface of the clamp connecting rod, a plurality of positioning pins are arranged on the clamping mechanism, each positioning pin is driven by a driving unit, under the driving of the driving units, the positioning pins are inserted into the positioning holes to fix the clamp. Then, under the action of the conveying system, the clamping mechanism together with the clamp and the production board are transferred from one station to another station.

[0003] However, in the above scheme, since the positioning accuracy is high, during the process of inserting and leaving the positioning pin into and out of the positioning hole, the relative movement of the positioning pin and the positioning hole will cause the interface friction between the positioning pin and the positioning hole, and the debris generated by the interface friction will fall into the production space during the process of inserting and leaving the positioning pin into and out of the positioning hole. In the field of semiconductor which has strict production environment requirements, the appearance of interface friction and debris will cause harm to the production environment, resulting in the decrease of product yield. CONTENT OF THE UTILITY MODEL

[0004] In order to solve the above technical problems, the present application provides a clamping mechanism and a conveying system.

[0005] In a first aspect of the present application, a clamping mechanism is provided, which comprises a bearing arm, a driving assembly, a fixing seat, a clamping part and a first elastic part; the fixing seat is arranged on both sides of the bearing arm, and a sliding groove is formed in the fixing seat; the clamping part and the first elastic part are arranged in the sliding groove; one end of the first elastic part is fixedly connected with the clamping part, and the other end is abutted with the inner wall of the fixing seat; the driving assembly is arranged on the fixing seat or the bearing arm; under the driving of the driving assembly, the clamping part moves along the sliding groove, and the end part thereof extends out of the fixing seat to clamp an object.

[0006] In some embodiments of the present application, the driving assembly comprises a first driving unit, a connecting part and a movable part; the first driving unit is arranged on the bearing arm; the output end of the first driving unit is fixedly connected with the connecting part; the movable part penetrates into the fixing seat, the first end part thereof is fixedly connected with the connecting part, and the second end part is formed with a first inclined surface arranged towards the clamping part.

[0007] In some embodiments of the present application, the first driving unit is a pneumatic cylinder or a linear screw motor.

[0008] In some embodiments of the present application, the clamping part is formed with a second inclined surface near one end of the movable part, which cooperates with the first inclined surface.

[0009] In some embodiments of the present application, the driving assembly comprises a second driving unit, a connecting part, a second elastic part and a movable part, the second driving unit is an electromagnet arranged on the fixed seat; the movable part penetrates into the fixed seat, the first end part thereof is fixedly connected with the connecting part, and the second end part is formed with a first inclined surface arranged towards the clamping part; the connecting part is a magnetic material; the two ends of the second elastic part are respectively abutted with the connecting part and the fixed seat.

[0010] In some embodiments of the present application, the lower part of the bearing arm is further provided with a positioning pin, and the object is provided with a positioning hole, the radial size of the positioning hole being greater than the radial size of the positioning pin.

[0011] In some embodiments of the present application, the bearing arm is provided with a first sensor, which is used for detecting the presence or absence of the object and the distance between the bearing arm and the object.

[0012] In some embodiments of the present application, the fixed seat is provided with a second sensor, which is used for detecting whether the clamping part is returned to the initial position.

[0013] In some embodiments of the present application, the fixed seat is two groups, and the two groups of fixed seats are arranged at intervals; the object is provided with a clamping groove.

[0014] In the second aspect of the present application, a conveying system is provided, comprising the above-mentioned clamping mechanism and a motion system, the clamping mechanism is arranged on the motion system; the clamping mechanism clamps the object, and under the driving of the motion system, the object is transferred.

[0015] Compared with the prior art, the clamping mechanism of the present application has the following advantages and beneficial effects: the clamping mechanism of the present application comprises a bearing arm, a driving assembly, a fixed seat, a clamping part and a first elastic part, the fixed seat is arranged on both sides of the bearing arm, the clamping part is movably arranged in the sliding groove of the fixed seat, thus, under the driving of the driving assembly, the clamping part can reciprocate along the sliding groove, when the end part thereof extends outside the fixed seat, the two clamping parts can clamp the object to be transferred; the clamping part moves in the sliding groove of the fixed seat, the relative friction between the clamping part and the fixed seat occurs in the interior of the fixed seat, thus, the debris generated by the interface friction can be avoided from falling into the production space, and further, the harm of the debris to the production environment can be avoided, and the product yield reduction caused by the interface friction can be avoided.

[0016] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0017] The accompanying drawings, which are part of this document, serve to provide further understanding of the present document, the illustrative embodiments of the present document and the description thereof serve to explain the present document and do not constitute an improper limitation of the present document. In the drawings:

[0018] Figure 1 is a structural schematic view of a clamping mechanism provided by an exemplary embodiment of the present application;

[0019] Figure 2 is a front view of a clamping mechanism provided by an exemplary embodiment of the present application;

[0020] Figure 3 is Figure 2 a sectional view at A-A in FIG. 1;

[0021] Figure 4 is Figure 3 an enlarged view at A in FIG. 1;

[0022] Figure 5 is Figure 2 a sectional view at C-C in FIG. 1.

[0023] in the drawings:

[0024] 10A, object;

[0025] 101, carrying arm; 102, driving assembly; 1021, first driving unit; 1022, connecting portion; 1023, movable portion; 103, fixed seat; 1031, sliding groove; 104, clamping portion; 105, positioning pin; 106, first sensor; 107, first reinforcing rib; 108, second reinforcing rib; 109, first elastic portion. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme of the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. It should be noted that, in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other at will.

[0027] In the field of semiconductor production, it is often required to transfer a production board from one station to another for different process operations. The production board is usually transferred by fixing it on a clamp, which has a clamp connecting rod with a plurality of positioning holes formed on the bottom surface of the clamp connecting rod, and a plurality of positioning pins are provided on the clamping mechanism, each of which is driven by a driving unit. Under the driving of the driving units, the positioning pins are inserted into the positioning holes to fix the clamp. Then, under the action of the conveying system, the clamping mechanism is driven together with the clamp and the production board to transfer from one station to another.

[0028] However, in the above scheme, since the positioning accuracy is high, during the process of inserting and leaving the positioning pin into and out of the positioning hole, the interface friction between the positioning pin and the positioning hole caused by the relative movement of the positioning pin and the positioning hole will cause the debris generated by the interface friction to fall into the production space during the process of inserting and leaving the positioning pin into and out of the positioning hole. In the field of semiconductor production, which requires strict production environment, the appearance of interface friction and debris will cause harm to the production environment, resulting in a decrease in product yield.

[0029] Therefore, based on this, the exemplary embodiments of the present application provide a clamping mechanism and a conveying system. The clamping mechanism includes a bearing arm, a driving assembly, a fixing seat, a clamping part and a first elastic part. The fixing seat is symmetrically arranged on both sides of the bearing arm. The clamping part is movably arranged in the sliding groove of the fixing seat. Thus, under the driving of the driving assembly, the clamping part can reciprocate along the sliding groove, and when the end part of the clamping part extends outside the fixing seat, the two clamping parts can clamp the object to be transferred. The relative friction between the clamping part and the fixing seat occurs inside the fixing seat when the clamping part moves in the sliding groove of the fixing seat. Therefore, the debris generated by the interface friction can be prevented from falling into the production space, thereby avoiding the harm of the debris to the production environment and avoiding the decrease in product yield caused by the interface friction.

[0030] Embodiment 1:

[0031] In an exemplary embodiment of the present application, a clamping mechanism is provided, as shown in Figures 1 to 4 The clamping mechanism includes a bearing arm 101, a driving assembly 102, a fixing seat 103, a clamping part 104 and a first elastic part 109. The fixing seat 103 is arranged on both sides of the bearing arm 101, and the two fixing seats 103 are arranged at intervals to form a space for accommodating the object 10A. The fixing seat 103 forms a sliding groove 1031 inside. The clamping part 104 and the first elastic part 109 are arranged in the sliding groove 1031. The inner side wall of the fixing seat 103 forms a through hole for the clamping part 104 to extend into and out of the sliding groove 1031. The clamping part 104 can be a rod-shaped structure. When the clamping part 104 extends out of the sliding groove 1031 by a predetermined length, the two oppositely arranged clamping parts 104 clamp the two side surfaces of the object 10A, respectively. Figure 5As shown, one end of the first elastic part 109 is fixedly connected with the clamping part 104, and the other end is in abutment with the inner wall of the fixed seat 103; the first elastic part 109 is preferably a compression spring. The driving assembly 102 is arranged on the fixed seat 103 or the bearing arm 101; under the driving of the driving assembly 102, the clamping part 104 moves along the sliding groove 1031, and the end thereof extends out of the fixed seat 103 to clamp the object 10A. After the clamping is completed, the driving assembly 102 does not act on the clamping part 104, and under the action of the first elastic part 109, the clamping part 104 is reset to the initial position.

[0032] When the clamping part 104 clamps the object 10A to be transported, the relative friction between the clamping part 104 and the fixed seat 103 occurs inside the fixed seat 103, so that the debris generated by the interface friction can be avoided from falling into the production space, thereby avoiding the harm of the debris to the production environment and the reduction of product yield caused by the interface friction.

[0033] Preferably, in order to form a stable clamping action, the fixed seat 103 is two groups, and the two groups of fixed seats 103 are arranged at intervals; each group of fixed seats 103 includes two fixed seats 103 arranged oppositely, and the two fixed seats 103 are fixedly connected below the bearing arm 101 by an installation plate. In order to increase the stability of clamping, the two side surfaces of the object 10A are each provided with a clamping groove, the size of the clamping groove is greater than the size of the end surface of the clamping part 104, and the clamping part 104 can extend into the clamping groove, so as to form a more stable clamping on the object 10A.

[0034] Further, the two fixed seats 103 in each group of fixed seats 103 are symmetrically arranged, so that the center of gravity of the clamping mechanism is distributed at the center position, and the overall stability of the clamping mechanism is improved. When the object 10A is clamped and conveyed, the overall center of gravity can be kept at the center position, and the clamping mechanism is not easy to deform, and has good stability.

[0035] Preferably, as shown in FIG. 6, the clamping part 104 is provided with a plurality of clamping grooves 1041 arranged at intervals, and the clamping grooves 1041 are arranged in the same direction as the sliding grooves 1031 of the fixed seat 103. Figure 1 and 4As shown, the driving assembly 102 comprises a first driving unit 1021, a connecting part 1022 and a movable part 1023; the first driving unit 1021 is arranged on the bearing arm 101; the movable part 1023 penetrates into the fixed seat 103, and a first end part thereof is fixedly connected with the connecting part 1022, and a second end part thereof is formed with a first inclined surface arranged towards the clamping part 104. Preferably, the first driving unit 1021 can be a pneumatic cylinder or a linear motor. When the first driving unit 1021 is a pneumatic cylinder, a driving rod of the pneumatic cylinder is fixedly connected with the connecting part 1022, and the connecting part 1022 can be driven to reciprocate in the vertical direction; when the first driving unit 1021 is a linear motor, a sliding block of the linear motor is fixedly connected with the connecting part 1022, and the connecting part 1022 can be driven to reciprocate in the vertical direction. The connecting part 1022 can be simultaneously connected with multiple movable parts 1023, and thus the first driving unit 1021 can simultaneously drive the multiple movable parts 1023 to move, so that the multiple clamping parts 104 can synchronously clamp the object 10A. An end of the clamping part 104 close to the movable part 1023 is formed with a second inclined surface matched with the first inclined surface. When the first driving unit 1021 drives the movable part 1023 to move downwards, under the joint action of the first inclined surface and the second inclined surface, the clamping part 104 moves away from the movable part 1023, the end of the clamping part 104 extends outside the fixed seat 103, and the object 10A is clamped. After the clamping is completed, the first driving unit 1021 drives the connecting plate and the movable part 1023 to move upwards, and the clamping part 104 is reset to the initial position under the action of the first elastic part 109.

[0036] For example, in order to improve the clamping precision, the lower part of the bearing arm 101 is further provided with a positioning pin 105, and the object 10A to be transferred is provided with a positioning hole, and the positioning pin 105 and the positioning hole can be used for preliminary positioning, and the radial dimension of the positioning hole is larger than that of the positioning pin 105, so that interface friction will not be generated in the matching process of the positioning pin 105 and the positioning hole, and a large amount of debris will not be generated.

[0037] Preferably, the bearing arm 101 is provided with a first sensor 106, which is used for detecting whether the object 10A exists and the distance between the bearing arm 101 and the object 10A. Before the preliminary positioning, the first sensor 106 can detect whether the object 10A exists; after the preliminary positioning is achieved through the positioning pin 105 and the positioning hole, the first sensor 106 can detect the distance between the bearing arm 101 and the object 10A, and then determine whether the clamping position is appropriate. When it is detected that the distance between the bearing arm 101 and the object 10A reaches a predetermined distance, the driving assembly 102 drives the clamping part 104 to clamp the object 10A.

[0038] The second sensor can be arranged in the fixed seat 103, and the second sensor is used to detect whether the clamping part 104 is returned to the initial position, so as to find the failure problem of the first elastic part 109 in time and maintain in time. The second reinforcing rib 108 is arranged on the upper part of the bearing arm 101, and the first reinforcing rib 107 is arranged between the mounting plate of the fixed seat 103 and the bearing arm 101, so as to increase the stability of the clamping mechanism.

[0039] Embodiment 2

[0040] On the basis of the above-mentioned embodiment 1, the difference between the embodiment and the embodiment 1 is that the driving assembly 102 can further include a rolling part, which can be in a spherical shape or a roller shape. For example, the rolling part can be a bearing or a ball. A first inclined surface can be arranged on the lower end surface of the movable part 1023, and the end part of the clamping part 104 can not be provided with a second inclined surface. Alternatively, a second inclined surface can be arranged on the end part of the clamping part 104, and the lower end surface of the movable part 1023 is not provided with a first inclined surface. At this time, the rolling part is arranged between the movable part 1023 and the clamping part 104. When the movable part 1023 moves downward, the rolling part moves along the first inclined surface or the second inclined surface, thereby pushing the clamping part 104 to move away from the movable part 1023, and achieving clamping of the object 10A.

[0041] Embodiment 3

[0042] On the basis of the above-mentioned embodiment 1, the difference between the embodiment and the embodiment 1 is that the driving assembly 102 is different. In the embodiment, the driving assembly 102 includes a second driving unit, a connecting part 1022, a second elastic part, and a movable part 1023. The second driving unit is an electromagnet arranged on the upper part of the fixed seat 103. The connecting part 1022 is a magnetic material. The fixed seat 103 can be a non-magnetic material. The movable part 1023 penetrates into the fixed seat 103, and the first end part thereof is fixedly connected with the connecting part 1022, and the second end part thereof is formed with a first inclined surface arranged towards the clamping part 104. The two ends of the second elastic part are respectively in abutment with the connecting part 1022 and the fixed seat 103. By applying current to the second driving unit, the connecting part 1022 is attracted to move towards the fixed seat 103, thereby driving the movable part 1023 to move downward, and further pushing the clamping part 104 to move along the sliding groove 1031, so that the end part of the clamping part 104 extends outside the fixed seat 103, and further clamps the object 10A. When there is no current flowing through the second driving unit, the connecting part 1022 and the movable part 1023 are restored to the initial position under the driving of the second elastic part, and the clamping part 104 is restored to the initial position under the driving of the first elastic part 109.

[0043] Embodiment 4

[0044] In an example embodiment of the present application, a conveying system is provided, comprising the clamping mechanism of any one of embodiments 1 to 3 and a motion system, which can be a magnetic levitation motion system, capable of horizontal and vertical motion; the clamping mechanism is arranged on the motion system; the clamping mechanism clamps the object 10A, and under the drive of the motion system, transfers the object 10A.

[0045] In this application, the terms "comprise", "contain", or any other variant thereof are intended to cover non-exclusive inclusions, so that the article or device comprising a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such article or device. Without more limitations, the elements defined by the statement "comprise" do not exclude the presence of other identical elements in the article or device comprising the elements.

[0046] Although the preferred embodiments of the present application have been described, those skilled in the art, once aware of the basic creative concept, can make additional changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present application.

[0047] Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalent technologies, the present application also intends to include these modifications and variations.

Claims

1. A clamping mechanism, characterized by, The clamping mechanism comprises a bearing arm, a driving assembly, a fixed base, a clamping part and a first elastic part; the fixed base is arranged on both sides of the bearing arm, and a sliding groove is formed in the fixed base; the clamping part and the first elastic part are arranged in the sliding groove; one end of the first elastic part is fixedly connected with the clamping part, and the other end is in abutment with the inner wall of the fixed base; the driving assembly is arranged on the fixed base or the bearing arm; Under the driving of the driving assembly, the clamping part moves along the sliding groove, and the end part thereof extends out of the fixed base to clamp the object.

2. The clamping mechanism of claim 1, wherein The driving assembly comprises a first driving unit, a connecting part and a movable part; the first driving unit is arranged on the bearing arm; the output end of the first driving unit is fixedly connected with the connecting part; the movable part penetrates into the fixed base, and the first end part thereof is fixedly connected with the connecting part, and the second end part is provided with a first inclined surface facing the clamping part.

3. The clamping mechanism of claim 2, wherein, The first driving unit is a gas cylinder or a linear screw motor.

4. The clamping mechanism of claim 2, wherein The end part of the clamping part close to the movable part is provided with a second inclined surface matched with the first inclined surface.

5. The clamping mechanism of claim 1, wherein, The driving assembly comprises a second driving unit, a connecting part, a second elastic part and a movable part; the second driving unit is an electromagnet arranged on the fixed base; the movable part penetrates into the fixed base, and the first end part thereof is fixedly connected with the connecting part, and the second end part is provided with a first inclined surface facing the clamping part; the connecting part is a magnetic material; the two ends of the second elastic part are in abutment with the connecting part and the fixed base respectively.

6. The chucking mechanism of claim 1, wherein, The lower part of the bearing arm is further provided with a positioning pin, and the object is provided with a positioning hole, and the radial dimension of the positioning hole is greater than the radial dimension of the positioning pin.

7. The chucking mechanism of claim 1, wherein A first sensor is arranged on the bearing arm, and the first sensor is used for detecting whether the object exists and the distance between the bearing arm and the object.

8. The chucking mechanism of claim 1, wherein, A second sensor is arranged in the fixed base, and the second sensor is used for detecting whether the clamping part is returned to the initial position.

9. The chucking mechanism of claim 1, wherein, The fixed base is in two groups, and the two groups of fixed bases are arranged at intervals; the object is provided with a clamping groove.

10. A delivery system characterized by, The clamping mechanism comprises a bearing arm, a driving assembly, a fixed base, a clamping part and a first elastic part; the fixed base is arranged on both sides of the bearing arm, and a sliding groove is formed in the fixed base; the clamping part and the first elastic part are arranged in the sliding groove; one end of the first elastic part is fixedly connected with the clamping part, and the other end is in abutment with the inner wall of the fixed base; the driving assembly is arranged on the fixed base or the bearing arm;

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