Adsorption type tail gas treatment equipment for semiconductor

Abstract

The utility model relates to the technical field of tail gas treatment, and discloses adsorption type tail gas treatment equipment for semiconductors, which comprises a reaction filter vat assembly, a suction pipe is arranged on the outer wall of the reaction filter vat assembly, a fixing assembly is arranged on the inner wall of the suction pipe, and the fixing assembly comprises a limiting groove. When the filter screen is replaced, the baffle is pulled to move upwards, then the inserting block is pulled to be separated from the inserting opening, the fixing sleeve can be lifted upwards after the end of the inclined face elastic telescopic pile moves backwards to be separated from the clamping opening, and then the filter screen is replaced, so that bolts do not need to be disassembled through external tools when the filter screen is replaced; the problem that particles are clamped into precise threaded grooves is avoided, and when the filter screen is reset and installed, except that the insertion blocks are protected and limited by the baffles, the ends of the slope elastic telescopic piles are synchronously inserted into the bayonets, and then the filter frame and the filter screen can be installed in the suction pipe more stably.

Description

Technical Field

[0001] This utility model relates to the field of exhaust gas treatment technology, specifically to an adsorption-type exhaust gas treatment device for semiconductors. Background Technology

[0002] Today, most electronic products, such as computers, mobile phones, or digital recorders, are closely related to semiconductors in their core components. The exhaust gases from the semiconductor industry contain gases such as HF, HCl, and SO2 that need to be treated, which can pollute the outside air. Therefore, exhaust gas treatment equipment is needed for filtration.

[0003] According to a public announcement of a semiconductor exhaust gas treatment equipment adsorption reaction filter barrel (announcement number: CN218458934U), the above application connects the connecting pipe to the semiconductor processing exhaust gas. The exhaust gas enters the connecting pipe and is filtered by the filter screen to remove particulate impurities in the exhaust gas. After filtration, the exhaust gas enters the reaction filter barrel body through the outer sleeve and the gas transmission pipe for further filtration, and then the purified exhaust gas is discharged, thereby filtering particulate impurities in the exhaust gas.

[0004] However, in actual use, although the above-mentioned equipment can easily replace the filter screen, if there are residual exhaust gas particles on the inner wall of the threaded tube and the connecting tube when rotating the threaded tube to separate the threaded tube from the connecting tube and then moving the connecting tube away from the outer tube, the threaded tube will be worn and damaged when rotating, thus making it impossible for the threaded tube to be properly separated from the connecting tube; in view of this, we propose an adsorption-type exhaust gas treatment device for semiconductors. Utility Model Content

[0005] The purpose of this invention is to provide an adsorption-type exhaust gas treatment device for semiconductors to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an adsorption-type exhaust gas treatment device for semiconductors, comprising a reaction filter barrel assembly, an intake pipe provided on the outer wall of the reaction filter barrel assembly, a fixing component provided on the inner wall of the intake pipe, the fixing component including a limiting groove, the limiting groove being formed on the inner wall of the intake pipe, a bayonet being formed on the inner wall of the limiting groove, an insertion port being formed on the outer wall of the intake pipe, a fixing sleeve provided on the outer wall of the intake pipe, an installation sleeve being fixedly connected to the end of the fixing sleeve, a filter frame being fixedly connected to the end of the installation sleeve, a filter screen being provided on the inner wall of the filter frame, a U-shaped frame one being fixedly connected to the outer wall of the fixing sleeve, and a U-shaped frame two being fixedly connected to the outer wall of the U-shaped frame one;

[0007] A baffle is movably connected to the inner wall of the second U-shaped frame. A spring is fixedly connected to the inner wall of the second U-shaped frame. A movable plate is fixedly connected to the end of the spring. A transmission plate is fixedly connected to the end of the movable plate. A fixed plate is fixedly connected to the outer wall of the transmission plate. An inclined elastic telescopic post is fixedly connected to the outer wall of the fixed plate. A slot is opened on the outer wall of the mounting sleeve. An insertion block is fixedly connected to the end of the movable plate.

[0008] Preferably, the outer wall of the insertion block is adapted to the inner wall of the fixing sleeve, so that the insertion block can be moved smoothly.

[0009] Preferably, the center line of the U-shaped frame and the center line of the spring are on the same straight line.

[0010] Preferably, the inclined elastic expansion joints are set in two sets, and the two sets of inclined elastic expansion joints are set on both sides with the center plane of the fixed plate as a mirror image.

[0011] Preferably, the outer wall of the insertion block is provided with a rubbing component, the rubbing component includes a mounting groove, the mounting groove is formed on the outer wall of the insertion block, the inner wall of the mounting groove is fixedly connected to an arc-shaped friction block, and the outer wall of the baffle is fixedly connected to a friction plate.

[0012] Preferably, the number of arc-shaped friction blocks is several, and the several arc-shaped friction blocks are arranged in a linear array on the inner wall of the mounting groove, so that the arc-shaped friction blocks can better contact the friction plate.

[0013] Compared with the prior art, the present invention provides an adsorption-type exhaust gas treatment device for semiconductors, which has the following beneficial effects:

[0014] 1. In this semiconductor adsorption-type exhaust gas treatment equipment, when the filter screen needs to be replaced, first pull the baffle upwards, then pull the insertion block to disengage it from the socket, and after the end of the inclined elastic telescopic post moves backwards and disengages from the bayonet, the fixing sleeve can be lifted up to replace the filter screen. This eliminates the need to use external tools to remove the bolts when replacing the filter screen and avoids the problem of particles getting stuck in the precision thread groove. When reinstalling the filter screen, in addition to the baffle protecting and limiting the insertion block, the end of the inclined elastic telescopic post will be inserted into the bayonet simultaneously, so that the filter frame and filter screen will be more stably installed in the suction pipe.

[0015] 2. This semiconductor adsorption-type exhaust gas treatment equipment, when accidentally touched by the outside, causes the baffle to shift. The set arc-shaped friction block will continuously squeeze the friction plate, so that the baffle can still maintain strong stability when accidentally touched by the outside. Ultimately, the baffle can better limit the position, thus further improving the overall practicality. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the suction tube and limiting groove structure of this utility model;

[0018] Figure 3 This is a schematic diagram of the socket structure of this utility model;

[0019] Figure 4 This is a schematic diagram of the filter frame and filter screen structure of this utility model;

[0020] Figure 5 This is a schematic diagram of the mounting sleeve and fixing plate structure of this utility model;

[0021] Figure 6 This is a schematic diagram of the spring and insertion block structure of this utility model;

[0022] Figure 7 This is a schematic diagram of the structure of U-shaped frame one and U-shaped frame two of this utility model;

[0023] Figure 8 This is a schematic diagram of the slot and fixing plate structure of this utility model;

[0024] Figure 9 This is a schematic diagram of the rubbing component structure of this utility model.

[0025] In the diagram: 1. Reaction filter barrel assembly; 2. Suction pipe; 3. Fixing assembly; 301. Limiting groove; 302. Bayonet; 303. Insertion port; 304. Fixing sleeve; 305. Mounting sleeve; 306. Filter frame; 307. Filter screen; 308. U-shaped frame one; 309. U-shaped frame two; 310. Baffle; 311. Spring; 312. Moving plate; 313. Transmission plate; 314. Fixing plate; 315. Inclined elastic telescopic post; 316. Groove; 317. Insertion block; 4. Rubbing assembly; 401. Mounting groove; 402. Arc-shaped friction block; 403. Friction plate. Detailed Implementation

[0026] like Figures 1-9As shown, this utility model provides a technical solution: an adsorption-type exhaust gas treatment device for semiconductors, including a reaction filter barrel assembly 1. The outer wall of the reaction filter barrel assembly 1 is provided with a suction pipe 2, and the inner wall of the suction pipe 2 is provided with a fixing assembly 3. The fixing assembly 3 includes a limiting groove 301, which is formed on the inner wall of the suction pipe 2. The inner wall of the limiting groove 301 is provided with a bayonet 302. The outer wall of the suction pipe 2 is provided with an insertion port 303. The outer wall of the suction pipe 2 is provided with a fixing sleeve 304. The end of the fixing sleeve 304 is fixedly connected to an installation sleeve 305. The end of the installation sleeve 305 is fixedly connected to a filter frame 306. The inner wall of the filter frame 306 is provided with a filter screen 307. The outer wall of the fixing sleeve 304 is fixedly connected to a U-shaped frame 308, and the outer wall of the U-shaped frame 308 is fixedly connected to a U-shaped frame 309.

[0027] Furthermore, the baffle 310 is movably connected to the inner wall of the U-shaped frame 309. A spring 311 is fixedly connected to the inner wall of the U-shaped frame 309. A movable plate 312 is fixedly connected to the end of the spring 311. A transmission plate 313 is fixedly connected to the end of the movable plate 312. A fixed plate 314 is fixedly connected to the outer wall of the transmission plate 313. An inclined elastic telescopic pile 315 is fixedly connected to the outer wall of the fixed plate 314. A slot 316 is opened on the outer wall of the mounting sleeve 305. An insertion block 317 is fixedly connected to the end of the movable plate 312.

[0028] In the embodiments of this utility model, the outer wall of the insertion block 317 is adapted to the inner wall of the fixing sleeve 304, so that the insertion block 317 can be moved smoothly. The center line of the U-shaped frame 308 and the center line of the spring 311 are on the same straight line. The number of inclined elastic telescopic piles 315 is two sets, and the two sets of inclined elastic telescopic piles 315 are mirrored on both sides with the center plane of the fixing plate 314.

[0029] Furthermore, the outer wall of the insertion block 317 is provided with a rubbing component 4, which includes a mounting groove 401. The mounting groove 401 is opened on the outer wall of the insertion block 317. An arc-shaped friction block 402 is fixedly connected to the inner wall of the mounting groove 401. A friction plate 403 is fixedly connected to the outer wall of the baffle 310. The number of arc-shaped friction blocks 402 is several, and the several arc-shaped friction blocks 402 are arranged in a linear array on the inner wall of the mounting groove 401, so that the arc-shaped friction blocks 402 can better press against the friction plate 403.

[0030] In this invention, during daily use, the filter screen 307 on the filter holder 306 performs initial filtration of the exhaust gas entering the suction pipe 2. When the filter screen 307 needs to be replaced, first pull the baffle 310 upward, then pull the insertion block 317 to disengage from the insertion port 303, and after the end of the inclined elastic telescopic post 315 moves backward and disengages from the bayonet 302, the fixing sleeve 304 can be lifted up to replace the filter screen 307. This eliminates the need to use external tools to remove the bolts when replacing the filter screen 307 and avoids the problem of particles getting stuck in the precision thread groove. When reinstalling the filter screen 307, in addition to the insertion block 317 being protected and limited by the baffle 310, the end of the inclined elastic telescopic post 315 will be simultaneously inserted into the bayonet 302, thus making the filter holder 306 and the filter screen 307 more stably installed in the suction pipe 2.

[0031] When the baffle 310 is accidentally touched by the outside, it will continuously squeeze the friction plate 403 through the arc-shaped friction block 402 when it is displaced. This allows the baffle 310 to maintain strong stability when it is accidentally touched by the outside, and ultimately allows the baffle 310 to better limit its position.

[0032] The exhaust gas, after initial filtration, enters the reaction filter assembly 1 for further purification and is then discharged from the exhaust port.

[0033] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the protection scope of the present invention.

Claims

1. A semiconductor adsorption-type exhaust gas treatment device, comprising a reaction filter assembly (1), wherein an intake pipe (2) is provided on the outer wall of the reaction filter assembly (1), characterized in that: The inner wall of the inhalation tube (2) is provided with a fixing component (3), the fixing component (3) comprising: A limiting groove (301) is provided on the inner wall of the suction tube (2). A bayonet (302) is provided on the inner wall of the limiting groove (301). An insertion port (303) is provided on the outer wall of the suction tube (2). A fixing sleeve (304) is provided on the outer wall of the suction tube (2). An installation sleeve (305) is fixedly connected to the end of the fixing sleeve (304). A filter frame (306) is fixedly connected to the end of the installation sleeve (305). A filter screen (307) is provided on the inner wall of the filter frame (306). A U-shaped frame one (308) is fixedly connected to the outer wall of the fixing sleeve (304). A U-shaped frame two (309) is fixedly connected to the outer wall of the U-shaped frame one (308). A baffle (310) is movably connected to the inner wall of the second U-shaped frame (309). A spring (311) is fixedly connected to the inner wall of the second U-shaped frame (309). A movable plate (312) is fixedly connected to the end of the spring (311). A transmission plate (313) is fixedly connected to the end of the movable plate (312). A fixed plate (314) is fixedly connected to the outer wall of the transmission plate (313). An inclined elastic telescopic pile (315) is fixedly connected to the outer wall of the fixed plate (314). A slot (316) is opened on the outer wall of the mounting sleeve (305). An insertion block (317) is fixedly connected to the end of the movable plate (312).

2. The adsorption-type tail gas treatment device for semiconductors according to claim 1, characterized in that: The outer wall of the insertion block (317) is adapted to the inner wall of the fixing sleeve (304).

3. The adsorption-type tail gas treatment device for semiconductors according to claim 1, characterized in that: The centerline of the U-shaped frame (308) and the centerline of the spring (311) are on the same straight line.

4. The adsorption-type tail gas treatment device for semiconductors according to claim 1, characterized in that: The inclined elastic expansion piles (315) are set in two sets, and the two sets of inclined elastic expansion piles (315) are set on both sides with the center plane of the fixing plate (314) mirrored.

5. The adsorption-type tail gas treatment device for semiconductors according to claim 1, characterized in that: The outer wall of the insertion block (317) is provided with a rubbing component (4), the rubbing component (4) includes a mounting groove (401), the mounting groove (401) is opened on the outer wall of the insertion block (317), the inner wall of the mounting groove (401) is fixedly connected with an arc-shaped friction block (402), and the outer wall of the baffle (310) is fixedly connected with a friction plate (403).

6. The adsorption-type tail gas treatment device for semiconductors according to claim 5, characterized in that: The number of the arc-shaped friction blocks (402) is several, and the several arc-shaped friction blocks (402) are arranged in a linear array on the inner wall of the mounting groove (401).

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