Adsorption barrel equipment
By designing an adsorption tank device, utilizing a flow guiding structure to extend the gas residence time, and employing an adsorbent, the problem of poor gas adsorption in vacuum pipelines was solved, achieving efficient gas purification and cost reduction.
Patent Information
- Application Number
- CN202520463544.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-17
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2035-03-17
AI Technical Summary
In existing technologies, the gas adsorption effect in vacuum pipelines is poor, resulting in the inability to effectively treat toxic and harmful gases, which increases production costs.
Design an adsorption tank device, comprising an adsorption tank structure, a flow guiding structure, and an adsorbent filling chamber. The flow guiding structure extends the residence time of gas in the adsorption tank, and adsorbents such as activated carbon, molecular sieves, or silica gel are used to adsorb toxic and harmful gases, thereby achieving gas purification.
It improves gas adsorption efficiency, reduces production costs, and increases production efficiency. By using an adsorption indicator to determine when to replace the adsorption tank, it reduces the workload of replacement and cleaning.
Smart Images
Figure CN223887712U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vacuum system technology, specifically to an adsorption tank device. Background Technology
[0002] The semiconductor manufacturing process releases toxic and harmful gases. These gases cannot be directly discharged; they need to be treated by special devices or equipment to become harmless before they can be released, which increases production costs for customers.
[0003] The conventional vacuum tube adsorption method usually involves setting up an adsorption section in the tube to achieve the adsorption function of gas. However, this straight tube allows the gas to pass through in a straight line, which results in a short residence time of the gas in the adsorption section, leading to poor adsorption effect.
[0004] In view of the above, it is necessary to propose an adsorption tank device to solve the above problems. Utility Model Content
[0005] The purpose of this invention is to solve the above-mentioned technical problems and provide an adsorption tank device.
[0006] To achieve the above objectives, this utility model adopts the following technical solution: an adsorption barrel device, including a pipeline installed on a vacuum system, an adsorption barrel structure installed on the pipeline, the pipeline connecting to the adsorption barrel structure to form an inlet pipe and an outlet pipe, the inlet pipe being connected to the lower side of the adsorption barrel structure, and the outlet pipe being connected to the top of the adsorption barrel structure, the adsorption barrel structure being a sealed device isolated from the outside; the adsorption barrel structure has an enlarged barrel belly in the middle, and a flow guiding structure is provided inside the barrel belly, the flow guiding structure guiding the airflow passing through the barrel belly from bottom to top in a circular manner, increasing the residence time of the gas in the barrel belly.
[0007] Furthermore, the adsorption tank structure has a partition net on the lower side of the tank body, which divides the interior of the adsorption tank structure into an adsorbent filling chamber and a gas distribution chamber. The adsorbent filling chamber is located above the gas distribution chamber. One end of the air inlet pipe is located outside the adsorption tank structure, and the other end is connected to enter the gas distribution chamber. The adsorbent filling chamber is used to fill adsorbent particles.
[0008] Furthermore, the middle of the separator is provided with a discharge pipe that connects to the bottom of the adsorption tank equipment. The upper end of the discharge pipe is connected to the adsorbent filling chamber, and the lower end passes through the bottom of the adsorption tank equipment and is sealed by a bottom blind plate.
[0009] Furthermore, an upper partition net is provided on the upper side of the barrel belly, and a barrel neck is provided on the upper side of the upper partition net. The upper end of the barrel neck is sealed by a top blind plate, and the vent pipe is connected to and installed on the top blind plate.
[0010] Furthermore, the flow guiding structure includes a central column and spiral partition plates. The central column is fixedly installed in the belly of the adsorption barrel along the axis of the adsorption barrel. Multiple spiral partition plates are distributed around the central column in a spiral manner. The spiral partition plates are spirally wound around the central column, and the edge of the spiral partition plate away from the central column is connected to the inner wall of the belly of the barrel, so that the spiral partition plates divide the space inside the belly of the barrel into several independent gas flow channels that spiral upward.
[0011] Furthermore, the air inlet pipe is provided with an annular distribution pipe in the gas distribution chamber. The annular distribution pipe is circular and is sleeved around the outer periphery of the discharge pipe. The side wall of the annular distribution pipe is provided with a through hole for gas to pass through.
[0012] Furthermore, the adsorbent particles are one or more of activated carbon, molecular sieves, and silica gel.
[0013] Compared with existing technologies, the beneficial effects of this invention are as follows: By using this device at the end of the exhaust pipe, the extracted toxic and harmful gases are adsorbed by the adsorbent in the adsorption tank, transforming them into non-toxic and harmless gases that are directly discharged. The color change of the adsorption indicator installed on the outlet of the adsorption tank indicates when the adsorption tank needs to be replaced. The replacement adsorption tank is then removed and replaced with a new one. The replaced adsorption tank only requires periodic cleaning and replacement of the adsorbent. This improvement in the device reduces production costs and increases production efficiency for customers. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the structure of an adsorption tank device according to the present invention;
[0015] Figure 2 This is a schematic diagram of the flow guiding structure of this utility model;
[0016] In the diagram: 1. Adsorption tank structure; 2. Inlet pipe; 3. Outlet pipe; 4. Tank belly; 5. Flow guiding structure; 6. Separator mesh; 7. Adsorbent filling chamber; 8. Gas distribution chamber; 9. Discharge pipe; 10. Bottom blind plate; 11. Upper separator mesh; 12. Tank neck; 13. Top blind plate; 14. Central column; 15. Spiral separator plate; 16. Annular distribution pipe; 17. Through hole. Detailed Implementation
[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.
[0018] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. Identical components are indicated by the same reference numerals.
[0019] In the description of this utility model, it should be understood that the terms "center," "lateral," "upper," "lower," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Additionally, the term "comprising" and any variations thereof are intended to cover non-exclusive inclusion.
[0020] An adsorption tank device, such as Figure 1 , 2 As shown, the device includes pipelines installed on a vacuum system, with an adsorption tank structure 1 installed on the pipelines. The pipelines are connected to the adsorption tank structure 1 to form an inlet pipe 2 and an outlet pipe 3. The inlet pipe 2 is connected to the lower side of the adsorption tank structure 1, and the outlet pipe 3 is connected to the top of the adsorption tank structure 1. The adsorption tank structure 1 is a sealed device that isolates it from the outside world. The adsorption tank structure 1 has an enlarged barrel section 4 in the middle. The barrel section 4 has a flow guiding structure 5, which guides the airflow passing through the barrel section 4 from bottom to top, increasing the residence time of the gas in the barrel section 4.
[0021] The working principle of an adsorption tank is mainly based on the porosity and high specific surface area of the adsorbent, removing moisture or other impurities from gases through physical or chemical adsorption. The role of the adsorbent is its ability to effectively adsorb certain components from gases or liquids. An adsorbent is a solid substance with a large specific surface area, suitable pore structure, and surface structure, exhibiting a strong adsorption capacity for adsorbates. Adsorption can be divided into two types: physical adsorption and chemical adsorption. Physical adsorption fixes the adsorbate to the adsorbent surface through intermolecular forces; this adsorption is reversible and typically occurs at lower temperatures and higher relative humidity. Chemical adsorption, on the other hand, combines the adsorbate with the adsorbent through a chemical reaction to form a stable compound; this adsorption is usually irreversible.
[0022] In this embodiment, the adsorbent particles filled in the bulk 4 of the adsorption tank are one or more of activated carbon, molecular sieves, and silica gel. Activated carbon is the most common physical adsorbent, possessing a large specific surface area and excellent adsorption performance, and is commonly used in air purification, water treatment, and other fields. Molecular sieves are adsorbents with a microporous structure, commonly used for gas separation and purification. Silica gel is a porous solid with good hygroscopic properties, commonly used for drying and dehydration. Specifically, when gas passes through the adsorption tank, the adsorbent adsorbs moisture or other impurities from the gas, thereby achieving purification or drying. In the exhaust gas treatment equipment, when waste gas passes through the adsorption tank, harmful substances are adsorbed by the adsorbent, and the purified gas is discharged.
[0023] Specifically, the adsorption tank structure 1 has a partition net 6 on the lower side of the tank body 4. The partition net 6 divides the interior of the adsorption tank structure 1 into an adsorbent filling chamber 7 and a gas distribution chamber 8. The adsorbent filling chamber 7 is located above the gas distribution chamber 8. One end of the air inlet pipe 2 is located outside the adsorption tank structure 1, and the other end is connected to enter the gas distribution chamber 8. The adsorbent filling chamber 7 is used to fill adsorbent particles. The partition net 6 is used to support and separate the adsorbent, so that the gas can form a preliminary distribution in the lower gas distribution chamber 8, allowing the gas to be adsorbed more evenly through the tank body 4.
[0024] In a preferred embodiment, the separator 6 has a discharge pipe 9 in the middle that connects to the bottom of the adsorption tank. The upper end of the discharge pipe 9 is connected to the adsorbent filling chamber 7, and the lower end passes through the bottom of the adsorption tank and is sealed by a bottom blind plate 10. The discharge pipe 9 facilitates the replacement of adsorbent particles after a period of use.
[0025] Furthermore, an upper partition 11 is provided on the upper side of the barrel belly 4, and a barrel neck 12 is provided on the upper side of the upper partition 11. The upper end of the barrel neck 12 is sealed by a top blind plate 13, and the vent pipe 3 is connected to the top blind plate 13. When replacing the adsorbent, the bottom blind plate 10 is opened to release the adsorbent particles, and then the bottom blind plate 10 is closed. Then the top blind plate 13 and the upper partition 11 are opened to open the inner barrel belly 4, and new adsorbent particles are poured in from the barrel neck 12. After filling is completed, the upper partition 11 and the top blind plate 13 are reset to complete the process.
[0026] Preferably, the flow guiding structure 5 includes a central column 14 and spiral partition plates 15. The central column 14 is fixedly installed in the belly portion 4 of the adsorption tank along the axis of the adsorption tank. Multiple spiral partition plates 15 are distributed circumferentially around the central column 14. The spiral partition plates 15 are spirally wound around the central column 14, and the edge of the spiral partition plate 15 away from the central column 14 is connected to the inner wall of the belly portion 4, so that the spiral partition plates 15 divide the space inside the belly portion 4 into several independent and spirally rising gas channels. The air inlet pipe 2 is provided with an annular distribution pipe 16 in the gas distribution chamber 8. The annular distribution pipe 16 is circular and is sleeved on the outer periphery of the discharge pipe 9. The side wall of the annular distribution pipe 16 is provided with a through hole 17 for gas to pass through. The gas can be evenly distributed around the discharge pipe 9 by the annular distribution pipe 16, and directly aligned with the inlet end of the gas flow channel formed by each spiral partition plate 15 through the through hole 17, so that the gas flow rate entering each gas flow channel is equal. When the gas passes through the spiral rising gas channel formed by the spiral partition plate 15, it can increase the gas movement distance and increase the residence time, further enhancing the adsorption effect.
[0027] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
Claims
1. An adsorption tank device, comprising pipelines installed on a vacuum system, characterized in that, An adsorption tank structure is installed on the pipeline. The pipeline is connected to the adsorption tank structure to form an air inlet pipe and an air outlet pipe. The air inlet pipe is connected to the lower side of the adsorption tank structure, and the air outlet pipe is connected to the top of the adsorption tank structure. The adsorption tank structure is a sealed device that is isolated from the outside world. The adsorption tank structure has an enlarged diameter belly in the middle. A flow guide structure is provided inside the belly. The flow guide structure guides the airflow passing through the belly from bottom to top in a circular manner, increasing the residence time of the gas in the belly.
2. The adsorption tank device according to claim 1, characterized in that, The adsorption tank structure has a partition net on the lower side of the tank body, which divides the interior of the adsorption tank structure into an adsorbent filling chamber and a gas distribution chamber. The adsorbent filling chamber is located above the gas distribution chamber. One end of the air inlet pipe is located outside the adsorption tank structure, and the other end is connected to enter the gas distribution chamber. The adsorbent filling chamber is used to fill adsorbent particles.
3. The adsorption tank device according to claim 2, characterized in that, The middle part of the separator is provided with a discharge pipe that connects to the bottom of the adsorption tank equipment. The upper end of the discharge pipe is connected to the adsorbent filling chamber, and the lower end passes through the bottom of the adsorption tank equipment and is sealed by a bottom blind plate.
4. The adsorption tank device according to claim 1, characterized in that, The upper part of the barrel is provided with an upper partition net, and the upper part of the upper partition net is provided with a barrel neck. The upper end of the barrel neck is sealed by a top blind plate, and the vent pipe is connected to and installed on the top blind plate.
5. The adsorption tank device according to claim 3, characterized in that, The flow guiding structure includes a central column and spiral partition plates. The central column is fixedly installed in the belly of the adsorption tank along the axis of the adsorption tank. Multiple spiral partition plates are distributed around the central column. The spiral partition plates are spirally wound around the central column, and the edge of the spiral partition plate away from the central column is connected to the inner wall of the belly of the tank, so that the spiral partition plates divide the space inside the belly of the tank into several independent gas flow channels that spiral upward.
6. The adsorption tank device according to claim 5, characterized in that, The air inlet pipe has an annular distribution pipe in the gas distribution chamber. The annular distribution pipe is circular and is sleeved around the outer periphery of the discharge pipe. The side wall of the annular distribution pipe has a through hole for gas to pass through.
7. The adsorption tank device according to claim 2, characterized in that, The adsorbent particles are one or more of activated carbon, molecular sieves, and silica gel.