Heating mechanism of PVD electroplating evaporation source

Abstract

The utility model relates to the technical field of electroplating equipment, in particular to a heating mechanism of a PVD (physical vapor deposition) electroplating evaporation source, which comprises a vacuum chamber, a vacuumizing mechanism arranged at the upper end of the vacuum chamber, a fixed base station arranged in the vacuum chamber, a placement table and a fixed rod arranged at the upper end of the fixed base station, a placement groove arranged on the placement table, a crucible arranged in the placement groove and a fixed rod arranged on the fixed base station, an electronic gun is arranged at the upper end of the fixing table, the placement table is further provided with a first open groove and a second open groove, the first open groove and the second open groove are located in the upper end and the lower end of the placement groove respectively, the fixing base table is provided with a third open groove and a fourth open groove, and the third open groove and the first open groove are communicated to form a first condensation chamber. The fourth open groove is communicated with the second open groove to form a second condensation chamber, and condensation water pipes are arranged in the first condensation chamber and the second condensation chamber; according to the utility model, heat around the crucible can be fully taken away, so that the use safety and the service life of the crucible are ensured.

Description

Technical Field

[0001] This utility model relates to the field of electroplating equipment technology, and in particular to a heating mechanism for a PVD electroplating evaporation source. Background Technology

[0002] PVD electroplating evaporation coating technology refers to the use of low-voltage, high-current arc discharge technology under vacuum conditions to heat and evaporate the coating material into vapor. The gas molecules are directly injected onto the substrate and then condense on the substrate at a lower temperature to form a uniform thin film.

[0003] Existing evaporation technologies can be classified into resistance heating evaporation, electron gun beam evaporation, induction heating evaporation, and electric arc heating evaporation, depending on the type of evaporation source. They are commonly used in chip coating and optical coating fields.

[0004] When the electron gun beam evaporation source is working, the high-energy electron beam generated by the electron gun heats and evaporates the target material in the crucible, turning the target material into vapor for coating. However, during the evaporation process, the crucible is subjected to a large amount of high temperature, which can easily damage the crucible and cause serious failures. Utility Model Content

[0005] The purpose of this invention is to provide a heating mechanism for a PVD electroplating evaporation source that addresses the shortcomings of existing technologies. This invention can effectively remove heat from the area around the crucible, ensuring the safety and lifespan of the crucible.

[0006] This utility model is achieved through the following technical solution: a heating mechanism for a PVD electroplating evaporation source, comprising a vacuum chamber, a vacuum pumping mechanism at the upper end of the vacuum chamber, a fixed base inside the vacuum chamber, a mounting platform and a fixing rod at the upper end of the fixed base, the mounting platform and the fixing rod being on the same straight line, a mounting groove on the mounting platform, a crucible inside the mounting groove, an electron gun at the upper end of the fixing rod, a first slot and a second slot on the mounting platform, the first slot and the second slot being located at the upper and lower ends of the mounting groove respectively, a third slot and a fourth slot on the fixed base, the third slot being located directly below the first slot and communicating with the first slot to form a first condensation chamber, the fourth slot being located directly below the second slot and communicating with the second slot to form a second condensation chamber, condensate pipes being provided in both the first and second condensation chambers, a plurality of flow holes being provided between the first condensation chamber and the mounting groove, and a plurality of flow holes being provided between the second condensation chamber and the mounting groove.

[0007] Preferably, the condensate pipe includes several straight pipe sections and several bent pipe sections, with the straight pipe sections arranged in parallel and adjacent sets of straight pipe sections connected by bent pipe sections.

[0008] Preferably, the right end of the straight pipe section at the lowest end of the condensate pipe is connected to a water inlet pipe, the left end of the water inlet pipe is detachably connected to the right end of the straight pipe section, and the right end of the water inlet pipe extends to the outer end of the fixed base and is provided with a water inlet.

[0009] Preferably, a connection port is provided at the right end of the straight pipe section at the lowest end of the condensate pipe, and an internal thread is provided in the connection port. A connection end is provided at the left end of the water inlet pipe, and an external thread is provided on the outer circumference of the connection end.

[0010] Preferably, the bottom of the fixing rod is provided with a fixing base, the fixing base is fixedly disposed on the upper end of the fixing platform, the upper end of the fixing rod is provided with a turntable, the upper end of the turntable is provided with a support, and the two ends of the middle part of the electron gun are provided with hinge shafts, both ends of the hinge shafts are hinged to the support.

[0011] Preferably, one of the hinge shafts is provided with an adjustment knob.

[0012] The beneficial effects of this invention are as follows: First, the condensate pipe is placed in the first and second condensate chambers, then the crucible is placed in the placement tank. After the coating process begins, the vacuum mechanism evacuates the vacuum chamber, the electron gun is aimed at the crucible, and the high-energy electron beam generated by the electron gun heats and evaporates the target material inside the crucible, causing the target material to turn into vapor for coating. The heat on the crucible is transferred to the first and second condensate chambers through the flow holes, where the condensate pipes exchange heat and carry away the heat from the crucible. This invention effectively removes heat from the area around the crucible, ensuring the safety and lifespan of the crucible, and providing excellent cooling. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model.

[0014] Figure 2 This is a three-dimensional structural diagram of the hidden vacuum chamber of this utility model.

[0015] Figure 3 This is an exploded structural diagram of the mounting platform and the fixed base of this utility model.

[0016] Figure 4 This is the right view of the present invention.

[0017] Figure 5 This is the left view of the present invention.

[0018] Figure 6 This is a schematic diagram of the structure of the condensate pipe of this utility model.

[0019] Figure 7 This is a schematic diagram of the structure of the fixing rod and electron gun of this utility model. Detailed Implementation

[0020] The following is in conjunction with the appendix Figure 1 To be continued Figure 7 The present invention will be further described in detail below, along with specific embodiments.

[0021] like Figures 1 to 5 As shown, a heating mechanism for a PVD electroplating evaporation source includes a vacuum chamber 1. A vacuum pumping mechanism 2 is installed at the upper end of the vacuum chamber 1. A fixed base 3 is installed inside the vacuum chamber 1. A mounting platform 4 and a fixing rod 5 are installed at the upper end of the fixed base 3. The mounting platform 4 and the fixing rod 5 are located on the same straight line. The mounting platform 4 has a mounting groove 41, and a crucible 6 is installed inside the mounting groove 41. An electron gun 7 is installed at the upper end of the fixing rod 5. The mounting platform 4 also has a first slot 42 and a second slot 43, which are located at the upper end of the mounting platform 41. At the upper and lower ends of the placement groove 41, the fixed base 3 is provided with a third groove 31 and a fourth groove 32. The third groove 31 is located directly below the first groove 42 and communicates with the first groove 42 to form a first condensation chamber 8. The fourth groove 32 is located directly below the second groove 43 and communicates with the second groove 43 to form a second condensation chamber 9. Condensate pipes 10 are provided in both the first condensation chamber 8 and the second condensation chamber 9. Several flow holes are provided between the first condensation chamber 8 and the placement groove 41, and several flow holes are provided between the second condensation chamber 9 and the placement groove 41.

[0022] In this embodiment, the condensate pipe 10 is first placed into the first condensation chamber 8 and the second condensation chamber 9, and then the crucible 6 is placed into the placement tank 41. After the coating process begins, the vacuum mechanism 2 evacuates the vacuum chamber 1, and the electron gun 7 is aimed at the crucible 6. The high-energy electron beam generated by the electron gun 7 heats and evaporates the target material inside the crucible 6, causing the target material to turn into vapor for coating. The heat on the crucible 6 is transferred to the first condensation chamber 8 and the second condensation chamber 9 through the flow holes. The condensate pipe 10 performs heat exchange, carrying away the heat from the crucible 6. This invention effectively removes the heat around the crucible 6, ensuring the safety and lifespan of the crucible 6, and providing good cooling effect.

[0023] like Figure 6As shown, in this embodiment, the condensate pipe 10 includes several straight pipe sections 101 and several bent pipe sections 102. The several straight pipe sections 101 are arranged in parallel, and two adjacent sets of straight pipe sections 101 are connected by bent pipe sections 102. The condensate pipe 10 of this utility model is in the shape of an S-shaped racetrack, which increases the heat exchange area and stroke of the condensate pipe 10, effectively ensuring that the heat generated by the condensate pipe 10 and the crucible 6 is fully exchanged, and improving the cooling effect.

[0024] In this embodiment, the right end of the straight pipe section 101 located at the lowest end of the condensate pipe 10 is connected to a water inlet pipe 11. The left end of the water inlet pipe 11 is detachably connected to the right end of the straight pipe section 101. The right end of the water inlet pipe 11 extends to the outer end of the fixed base 3 and is provided with a water inlet 111. Condensate is injected into the condensate pipe 10 through the water inlet pipe 11. When the temperature of the condensate in the condensate pipe 10 is too high, the high-temperature condensate in the condensate pipe 10 can also be extracted through the water inlet 111 and replaced with new condensate.

[0025] In this embodiment, a connection port is provided at the right end of the straight pipe section 101 located at the lowest end of the condensate pipe 10, and an internal thread is provided in the connection port. A connection end 112 is provided at the left end of the water inlet pipe 11, and an external thread is provided on the outer circumference of the connection end 112, which facilitates the disassembly and installation of the water inlet pipe 11.

[0026] like Figure 7 As shown, in this embodiment, a fixed base 51 is provided at the bottom of the fixed rod 5, and the fixed base 51 is fixedly disposed on the upper end of the fixed base 3. A turntable 52 is provided at the upper end of the fixed rod 5, and a support 53 is provided at the upper end of the turntable 52. Hinges 71 are provided at both ends of the middle part of the electron gun 7, and both ends of the hinges 71 are hinged to the support 53. The irradiation angle of the electron gun 7 can be adjusted to ensure that the electron gun 7 can be aligned with the crucible 6, so as to quickly heat and evaporate the target material in the crucible 6.

[0027] In this embodiment, one of the hinge shafts 71 is provided with an adjustment knob 72.

[0028] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. A heating mechanism for a PVD electroplating evaporation source, characterized in that: The device includes a vacuum chamber, with a vacuum pumping mechanism at its upper end. A fixed base is located within the vacuum chamber, and a mounting platform and a fixing rod are positioned on the upper end of the fixed base, aligned on the same straight line. The mounting platform has a mounting groove containing a crucible. An electron gun is mounted on the upper end of the fixing rod. The mounting platform also has a first and a second slot, located at its upper and lower ends respectively. The fixed base has a third and a fourth slot. The third slot is directly below the first slot and communicates with it to form a first condensation chamber. The fourth slot is directly below the second slot and communicates with it to form a second condensation chamber. Both the first and second condensation chambers contain condensate pipes. Several flow holes are provided between the first and second condensation chambers and the mounting groove.

2. The heating mechanism of a PVD electroplating evaporation source according to claim 1, characterized in that: The condensate pipe includes several straight pipe sections and several bent pipe sections. The straight pipe sections are arranged in parallel, and two adjacent sets of straight pipe sections are connected by bent pipe sections.

3. The heating mechanism of a PVD electroplating evaporation source according to claim 2, characterized in that: A water inlet pipe is connected to the right end of the straight pipe section at the lowest end of the condensate pipe. The left end of the water inlet pipe is detachably connected to the right end of the straight pipe section. The right end of the water inlet pipe extends to the outer end of the fixed base and is provided with a water inlet.

4. The heating mechanism of a PVD electroplating evaporation source according to claim 3, characterized in that: A connection port is provided at the right end of the straight pipe section at the lowest end of the condensate pipe, and an internal thread is provided in the connection port. A connection end is provided at the left end of the water inlet pipe, and an external thread is provided on the outer circumference of the connection end.

5. The heating mechanism of a PVD electroplating evaporation source according to claim 1, characterized in that: The bottom of the fixed rod is provided with a fixed base, which is fixedly installed on the upper end of the fixed platform. The upper end of the fixed rod is provided with a turntable, and the upper end of the turntable is provided with a support. The two ends of the middle part of the electron gun are provided with hinge shafts, and both ends of the hinge shafts are hinged to the support.

6. The heating mechanism of a PVD electroplating evaporation source according to claim 5, characterized in that: One of the hinge axes is equipped with an adjustment knob.

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