Magnet yoke assembly on-line swing device for magnetron sputtering

Abstract

The utility model discloses a magnet yoke assembly on-line swing device for magnetron sputtering, a magnet yoke assembly is connected to a shell assembly, the shell assembly and the magnet yoke assembly are located in a target material, and the magnet yoke assembly on-line swing device comprises a swing assembly, the first terminal assembly and the second terminal assembly are arranged at the two ends of the shell assembly respectively and are coaxial with the swing axis of the magnetic bar, and the shell assembly is rotatably connected to the rack through the first terminal assembly and the second terminal assembly; the magnet yoke assembly is connected to the shell assembly, the swing assembly drives the magnet yoke assembly to swing along the rotation axis of the magnet yoke assembly, in the forward or reverse rotation process of the swing motor, the outer shell can rotate in the opposite direction relative to the axis of the connector body, and through control over the rotation angle and the rotation amplitude, the connector body can rotate in the opposite direction. The magnetic rod is driven to swing along the rotation axis of the magnetic rod, so that the magnetic yoke assembly swings, the magnetic field of the cambered surface product is distributed more uniformly, and the uniformity of the coating surface of the product is improved.

Description

Technical Field

[0001] This utility model belongs to the field of magnetron sputtering technology, specifically relating to an online oscillation device for a magnetic yoke assembly used in magnetron sputtering. Background Technology

[0002] Physical vapor deposition (PVD) using sputtering has become a standard technique for customizing the properties of materials such as glass plates or other rigid or flexible materials. "Sputtering" refers to the projectile ejection of positively charged ions (typically argon ions) from a sputtering target. These positively charged ions are accelerated by an electric field directed at a negatively charged sputtering target. The positive ions are formed through impact ionization in a low-pressure gas phase. The ejected atoms bombard the substrate to be coated, forming a dense, well-adhered film. A drawback is the need to turn on the magnetron, requiring the vacuum to be removed for adjustment and then reapplied afterward. This is very time-consuming. One of the process challenges is the inclusion of a magnetic field generator within the sputtering target. Oriented towards the substrate, the magnetic field generator is typically kept stationary while the columnar sputtering target rotates in front of it. High-performance permanent magnets based on Fe-Nd-B or Co-Sm alloys are used to generate the magnetic field. Because the magnetic field component parallel to the sputtering target surface determines the range of electrons in the plasma, it is crucial to control this component along the length of the tube. Unfortunately, the magnetic flux density (in Tesla) of this component typically decreases at least with the square of the distance to the magnetic field generator, and is therefore highly sensitive to the position of the magnetic field generator relative to the sputtering target surface. The distance between the sputtering target surface and the magnetic field generator must therefore be carefully controlled; otherwise, the plasma will exhibit localized intensity variations, which can consequently lead to uneven coating profiles on the substrate. Currently, with advancements in industrial design and a greater pursuit of product differentiation, the demand for curved and arc-shaped products is increasing. Precisely because the position of the magnetic field generator relative to the sputtering target surface is so sensitive, a uniform magnetic field distribution across the entire arc surface is required to achieve a uniform coating on curved and arc-shaped products. Utility Model Content

[0003] The purpose of this invention is to provide an online oscillation device for a magnetic yoke assembly used in magnetron sputtering, which aims to enable the magnetic rod to oscillate within a certain range and amplitude, thereby achieving a uniform magnetic field distribution on curved or arc-shaped product surfaces and thus obtaining a uniform coating.

[0004] To solve the above-mentioned technical problems, the purpose of this utility model is achieved as follows:

[0005] An online oscillation device for a magnetic yoke assembly used in magnetron sputtering is disclosed, wherein the magnetic yoke assembly is connected to a housing assembly, the housing assembly and the magnetic yoke assembly are located within a target material, and the device includes an oscillation assembly; a first terminal assembly and a second terminal assembly are respectively disposed at both ends of the housing assembly and are coaxial with the oscillation axis of the magnetic rod, the housing assembly is rotatably connected to a frame through the first terminal assembly and the second terminal assembly; the magnetic yoke assembly is connected to the housing assembly, and the oscillation assembly drives the magnetic yoke assembly to oscillate along its rotation axis.

[0006] Based on the above scheme and as a preferred embodiment of the above scheme: the swing assembly includes a swing motor, the output end of the swing motor is coaxial with the axis of the first terminal assembly, the swing motor is fixedly mounted on the housing assembly, and the output end of the swing motor is restricted to rotate by the frame.

[0007] Based on the above scheme and as a preferred embodiment of the above scheme: the first terminal component includes a connector body, the front end of the connector body is provided with a pin head interface, and the output end of the swing motor is connected to the connector body in a transmission manner; it also includes a drive component, the drive component includes a spacer, the spacer is fixedly connected to the frame, and the spacer is provided with a central support fixing pin, the central support fixing pin is inserted into the pin head interface.

[0008] Based on the above solution and as a preferred embodiment of the above solution: it further includes a fixing pin, which is fixed to the rear end of the connector body and inserted into the flange hole of the output flange of the swing assembly.

[0009] Based on the above scheme and as a preferred embodiment of the above scheme: the drive shaft of the swing assembly is a hollow structure and extends to the rear end of the swing motor to form a cable channel c at the front and rear ends of the swing motor.

[0010] Based on the above scheme and as a preferred embodiment of the above scheme: the first terminal component further includes a contact component including a first contact, a second contact, and a contact assembly, wherein the contact assembly includes a plurality of moving contacts disposed on the end face of the first contact and a plurality of stationary contacts disposed on the end face of the second contact; an elastic component presses the first contact against the second contact so that the first contact and the second contact remain in contact; the cable channel c is connected to the rear end of the second contact.

[0011] The outstanding and beneficial technical effects of this utility model compared with the prior art are as follows: When the output flange of the swing assembly rotates, it will drive the pin head interface to rotate with it. However, since the spacer restricts the rotation of the joint body through the cooperation of the central support fixing pin and the pin head interface, the reaction force generated by the joint body will act on the swing motor through the output flange. Since the swing motor is fixed to the outer shell through the motor fixing seat, the outer shell will be twisted around the axis of the output flange under the action of the reaction force, which will drive the entire magnetic rod to rotate, thus realizing the swing. During the forward or reverse rotation of the swing motor, the outer shell will rotate in the opposite direction relative to the axis of the joint body. By controlling the rotation angle and rotation amplitude, the magnetic rod can be driven to swing along its rotation axis, thereby realizing the swing of the magnetic yoke assembly, so as to achieve a more uniform distribution of the magnetic field on the curved surface product and improve the uniformity of the product coating surface. Attached Figure Description

[0012] Figure 1 This is a front view of the overall structure of this utility model;

[0013] Figure 2 This is a right view of the overall structure of this utility model;

[0014] Figure 3 This is a left view of the overall structure of this utility model;

[0015] Figure 4 This is an exploded view of the overall structure of this utility model;

[0016] Figure 5 This is a schematic diagram of the internal component installation structure of the outer shell assembly;

[0017] Figure 6 Schematic diagram of the target installation state;

[0018] Figure 7 yes Figure 6 Enlarged view of a portion of point A in the middle;

[0019] Figure 8 This is a disassembled diagram of the first terminal component;

[0020] Figure 9 This is a schematic diagram of the swing assembly structure;

[0021] Figure 10 This is a schematic diagram of a fixed column structure;

[0022] Figure 11 This is a cross-sectional view of the swing component structure;

[0023] Figure 12 yes Figure 11 Enlarged view of section XII. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the given embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] In the description of this application, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0026] In the description of this application, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated.

[0027] Combination Figure 1-12As shown, this utility model discloses an online oscillating adjustable magnetic rod for magnetron sputtering, comprising a housing assembly 10, a yoke assembly 20, and an adjustment assembly 50. The housing assembly 10 includes a housing body 11 and an upper cover plate assembly 12. The housing body 11 is hollow, forming a receiving chamber 111, and has an opening at its upper end, connecting the receiving chamber 111 to the outside. The upper cover plate assembly 12 includes multiple upper cover plates. After the adjustment assembly 50 and other components are installed in the receiving chamber, the upper cover plates are fixedly installed at the opening of the housing body 11, sealing the receiving chamber 111. The upper cover plate assembly seals the opening. By providing the upper opening, it is convenient to install the adjustment assembly, energy storage assembly, oscillation assembly, etc., in the receiving chamber. The upper cover plate assembly seals the opening, isolating it from the outside during magnetron sputtering and preventing water or other media from entering the receiving chamber and causing equipment damage. The magnetic yoke assembly 20 is located below the outer shell assembly 10; it includes a support plate 21 and a magnetic rod body, with the magnetic rod body fixedly mounted on the support plate 21; alternatively, a magnet receiving cavity can be provided on the support plate 21, and several magnets can be arranged in the magnet receiving cavity according to the required magnetic field, and then the magnet receiving cavity can be closed to form the magnetic yoke assembly. Multiple adjustment components 50 are independently controlled and are arranged along the length of the magnetic yoke assembly 20 and located within the receiving chamber 111; the output end of each adjustment component 50 reciprocates linearly perpendicularly to the magnetic yoke assembly 20, and all protrude from the side wall of the receiving chamber 111 toward the side where the magnetic yoke assembly 20 is located, hinged to the magnetic yoke assembly 20. By adjusting the output end of the adjustment component 50, the magnetic yoke assembly is locally pushed outward or pulled inward, so that the magnetic yoke assembly 20 will elastically deform within its elastic deformation range or within the range that its strength and shape can withstand. Since the magnetic field component parallel to the sputtering target surface determines the range of electrons in the plasma, it is important to control this component along the length of the tube. The magnetic flux density (in Tesla) typically decreases by at least the square of the distance to the magnetic field generator, making it highly sensitive to the position of the magnetic field generator relative to the sputtering target surface. In actual testing, a deformation of less than 4 mm in the magnetic rod is sufficient to meet practical requirements, thereby causing the magnetic yoke assembly 20 to partially or completely change its distance from the sputtering target surface. By setting multiple adjustment components with multiple connection points to the magnetic yoke assembly, the output of the adjustment components causes the corresponding magnetic yoke assembly to locally change its distance from the sputtering target surface, moving closer or further away. This adjusts the local magnetic field strength, enabling real-time online control of the coating thickness on the sputtering target surface. This ensures a more uniform coating thickness on the coated products, improving product quality without the need for vacuum removal, thus significantly increasing production efficiency.

[0028] In one application scenario of magnetron sputtering, the magnetic yoke assembly needs to oscillate within a certain range to allow the magnetic field of magnetron sputtering to cover a wider area. Simultaneously, the position of the magnetic rod can be adjusted according to the actual coating thickness requirements, thereby adjusting the magnetic field distribution and changing the coating distribution. Therefore, in this embodiment, to achieve the oscillation of the magnetic rod, an oscillation assembly 80, a drive assembly 90, a first terminal assembly 30, and a second terminal assembly 40 are provided within the accommodating chamber 111; the first terminal assembly 30 and the second terminal assembly 40 are respectively located at both ends of the outer shell assembly 10. See details... Figure 9-12 As shown, the swing assembly 80 in this embodiment includes a swing motor 81, an output flange 82, and a motor mounting base 83. The output flange 82 is fixedly installed on the output shaft of the swing motor 81, and a flange hole is provided on the output flange 82. The output flange 82 is coaxial with the axis of the first terminal assembly 30. The motor mounting base 83 fixes the swing motor 81 on the outer casing 10. The drive assembly 90 is fixedly mounted on the machine body and includes a drive end 91, a spacer 92, a protective tube 93, a drive component 94, and a transmission belt 95. The drive end 91 is fixedly connected to one end of the drive component 94 adjacent to the magnetic rod. The spacer 92 passes through the drive component 94, and the protective tube 93 passes through the spacer 92. Preferably, a support block 933 is provided between the inner hole of the protective tube 93 and the spacer 92. The two ends of the target material 100 are clamped onto the drive end 91. A sealing ring 911 is provided between the drive end 91 and the target material 100 to form a coolant channel a between the target material 100, the drive end 91, and the outer shell 11 of the magnetic rod. A fluid channel is provided on the support plate 31 to form a coolant channel b between the fluid channel, the spacer 92, and the protective tube 93. See details. Figure 6 The coolant flow direction indicated by the middle arrow shows that the coolant is ultimately introduced from the external pipeline through the interface on the drive assembly 90 and fills the coolant channel a. Then, the coolant flows back from the coolant channel b through another return interface on the drive assembly 90 to the external cooling device, thus cooling the target material 100. The protective tube 93 has an end 931 near the magnetic rod. See [link / reference]. Figure 1 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7As shown, the first terminal component 30 in this embodiment includes a first mounting plate 31, a fixing pin 32, an outer spacer 33, a connector body 34, a bearing 36, and a sealing component 37. The connector body 34 is hollow and is fitted outside the outer spacer 33. The end 931 extends into the outer spacer 33, and the contact component 35 is located inside the outer spacer 33. Sealing rings are provided between the outer spacer 33 and the connector body 34, and between the end 931 and the inner wall of the outer spacer 33. Of course, considering the positioning of the sealing rings, this embodiment preferably provides annular grooves on the inner wall of the connector body 34 and the inner wall of the outer spacer 33, and embeds the O-rings in the annular grooves. This achieves multiple seals between the connector body 34, the outer spacer 33, and the end 931 to prevent moisture from entering the interior of the outer casing during use. To enable the oscillating component to drive the magnetic rod to oscillate, in this embodiment, a fixing pin 32 is fixed to the rear end of the connector body 34. The fixing pin 32 is inserted into the flange hole of the output flange 82 of the oscillating component 80. The connector body 34 is fitted with a sealing component 36 and a bearing 37 on the outer side of the rear end to allow the outer shell to rotate relative to the connector body 34 while maintaining a reliable seal. Furthermore, a pin head interface 341 is provided at the front end of the connector body 34, and a central support fixing pin 921 is provided on the spacer 92. After the first terminal component 30 is fitted into the insertion port of the drive component 90, the central support fixing pin 921 is inserted into the pin head interface 341. Thus, due to the fixing of the spacer 92, the oscillating motor 81 is fixed to the outer shell via the motor mounting base 83. Therefore, when the output flange 82 of the oscillating component 80 rotates... When the pin head interface 341 rotates, the spacer 92 restricts the rotation of the connector body 34 through the cooperation of the central support fixing pin 921 and the pin head interface 341. This causes the reaction force generated by the connector body 34 to act on the swing motor 81 through the output flange 82. Since the swing motor 81 is fixed to the outer shell through the motor fixing seat 83, the outer shell will be twisted around the axis of the output flange 82 under the action of the reaction force. This will cause the entire magnetic rod to rotate, thus realizing the swing. During the forward or reverse rotation of the swing motor 81, the outer shell will rotate in the opposite direction relative to the axis of the connector body 34. By controlling the rotation angle and the rotation amplitude, the magnetic rod can be driven to swing along its rotation axis.

[0029] See details Figure 6-7As shown, this embodiment also includes a contact assembly 35, which includes a first contact 351, a second contact 352, and a contact assembly 353. The contact assembly 353 includes a plurality of moving contacts 353a disposed on the end face of the first contact 351 and a plurality of stationary contacts 353b disposed on the end face of the second contact 352. A first contact receiving cavity 9311 is provided on the end 931, and the first contact 351 is movably disposed in the first contact receiving cavity 9311. The moving contacts 353a of the first contact 351 correspond one-to-one with the stationary contacts 353b of the second contact 352 and are in contact with each other. A spring 354 is provided in the first contact receiving cavity 9311. The spring 354 is in contact with the end of the first contact 351 away from the moving contacts 353a, and keeps the first contact 351 pressed towards the direction of the second contact 352 so that the moving contacts 353a and the stationary contacts 353b are in contact. The stationary contact 353b is connected to the main control component 60 via a wire; the moving contact 353a is connected to an external power supply via a wire 110. It should be noted that each moving contact 353a preferably includes a contact terminal and a terminal spring. A receiving hole is provided on the end face of the first contact 351, and the terminal spring and the contact terminal are received in the receiving hole. Of course, it is preferable that the stationary contact 353b on the second contact 352 is a conductive metal material distributed on the end face of the second contact 352 in a ring or fan shape with a planar structure. It can be a sheet of metal fixed on the second contact 352, or it can be embedded on the end face of the second contact 352 and flush with the end face of the second contact 352. During the use of the entire magnetron sputtering system, there will be rotation and a certain degree of overall deformation. With this structural design, the first contact 351 and the second contact 352 can always maintain good contact through the elastic push of the terminal spring on the contact terminals, thereby ensuring stable power supply and improving the operational stability of the entire device.

[0030] Of course, in order to control the swing assembly 80 and the adjustment assembly 50, and to process and execute external control signals or feed back the execution results to the host computer, this embodiment also includes a main control assembly 60 disposed in the accommodating chamber 111; in this embodiment, the first terminal assembly 30 is preferably a water inlet power supply connector assembly, and the second terminal assembly 40 is a fiber optic communication connector assembly; the first terminal assembly 30 connects the external power supply to the main control assembly 60, and the control signal is transmitted to the main control assembly 60 via the second terminal assembly 40 and the internal fiber optic cable. The main control assembly 60 analyzes and processes the signal to control the swing assembly 80 and the adjustment assembly 50 to perform adaptive actions. Figure 4As shown, the second terminal assembly 40 includes a second mounting plate, a second connector body, and an optical fiber assembly 41. The second connector body is fixedly mounted on the second mounting plate. The optical fiber assembly can be a photoelectric conversion component or an optical path guiding component, used to transmit the optical signal to the main control assembly 60 in time. It is fixedly mounted inside the second connector body. The second mounting plate is fixedly mounted on one end of the housing. Of course, there are necessary sealing elements between the second mounting plate and / or the second connector body and the mounting position of the housing to ensure complete sealing after installation. At the same time, there are also necessary sealing elements between the optical fiber assembly and the second connector body. Since the entire magnetic rod is in motion, and the second terminal assembly is coaxial with the swing axis of the magnetic rod, that is to say, the external optical fiber communication end and the signal receiving end of the second terminal assembly are also located on the same axis. Therefore, no matter how the magnetic rod swings, the optical signal can be reliably transmitted. Moreover, compared with the traditional cable communication method, it avoids the problem of signal failure caused by cable twisting or fatigue damage during the magnetic rod's movement. Therefore, the optical signal transmitted from the second terminal component 40 to the main control component 60 is analyzed and processed by the main control component 60. The control adjustment component 50 then drives the magnetic yoke component at the corresponding point to locally change its distance from the sputtering target surface, thereby adjusting the local magnetic field strength and realizing real-time online control of the coating thickness on the sputtering target surface. It also includes controlling the swing component 80 so that it drives the magnetic yoke component to swing at a certain angle according to the required angle, thereby adjusting the magnetic field distribution range.

[0031] Of course, in this embodiment, in order to achieve more reliable and multi-mode communication with the main control component 60, the number and size of the moving contact 353a of the first contact 351 and the stationary contact 353b of the second contact 352 are adaptively increased and their sizes are adjusted. At the same time, the sizes of the first contact 351 and the second contact 352 are adaptively selected. This allows charging to be achieved on the one hand, and data communication via the RS485 communication interface to be achieved through the added contacts on the other hand. Thus, the first terminal component 30 can simultaneously supply water and electricity to the inside of the magnetic rod for power supply and charging, and achieve RS485 data communication with the main control component 60 inside the adjustable magnetic rod. This allows the second terminal component 40 and the first terminal component 30 to communicate and control the adjustable magnetic rod in a two-choice or synchronous manner, thereby achieving reliable control of the magnetic rod and improving the compatibility and breadth of the data and communication modes of the adjustable magnetic rod.

[0032] It also includes an energy storage component 70, which supplies power to the oscillating component 80, the main control component 60, and the adjusting component 50. The energy storage component 70 is located within the accommodating chamber 111. Since the entire adjustable magnetic rod is located within the cylindrical target material during use, the volume and size of the adjustable magnetic rod are significantly limited. This places higher demands on the installation of the energy storage component 70. Using a single lithium battery for installation is obviously difficult. Therefore, in this embodiment, the energy storage component 70 is preferably a multi-cell lithium battery pack, positioned between adjacent adjusting components 50. Alternatively, it can be located in other vacant spaces within the accommodating space. This small-volume, distributed approach meets the energy storage design requirements while reducing the installation space requirements. The energy storage component 70 is connected to the main control component 60, supplying power to it. Thus, through the energy storage component built into the outer casing, a continuous and stable power supply to the adjusting and oscillating components can be maintained, ensuring the stability and reliability of the entire device operation. On the other hand, during magnetron sputtering, the oscillating and adjusting components consume power from the energy storage component. If the power level is too low, reliable operation may be difficult to maintain. Therefore, during magnetron sputtering operation and / or intermittent periods, an external power supply can supply power to the main control component 60 through the first terminal component 30, and simultaneously charge the energy storage component 70 through the main control component 60, performing battery management and protection for its charging and discharging. By continuously or intermittently charging the energy storage component 70 with an external power supply, its power is replenished in a timely manner, ensuring that the energy storage component 70 remains stably within the designed power range, thus guaranteeing the stable operation of the entire system.

[0033] Therefore, by setting up an energy storage component 70, a main control component 60, a first terminal component 30, and a second terminal component 40, the energy storage component 70 provides electrical energy to the swing component and the adjustment component 60, the first terminal component 30 and the main control component 60 charge the energy storage component 70, and the first terminal component 30 and / or the second terminal component 40 achieve fiber optic communication with the main control component 60, thereby improving the reliability and stability of the entire magnetic rod control.

[0034] Furthermore, the drive shaft 821 of the swing assembly 80 is a hollow structure and extends to the rear end 811 of the swing motor 81 to form a cable channel c at the front and rear ends of the swing motor 81. The cable channel c is connected to the rear end of the second contact 352. Thus, the cable led out from the second contact 352 of the first terminal assembly 30 can be directly inserted into the housing assembly through the cable channel c, thereby connecting to the main control assembly 60 and / or the energy storage assembly 70 with the shortest path. This avoids the problems of long cable paths, high energy and signal loss on the cable, and susceptibility to interference caused by the cable having to bypass various devices through gaps. It also better protects the cable and avoids cable damage caused by the movement of various moving parts inside the housing assembly, reducing the difficulty of wiring.

[0035] The above embodiments are merely preferred embodiments of the present utility model and are not intended to limit the scope of protection of the present utility model. Therefore, all equivalent changes made to the structure, shape, and principle of the present utility model should be covered within the scope of protection of the present utility model.

Claims

1. An online oscillation device for a magnetic yoke assembly for magnetron sputtering, wherein the magnetic yoke assembly (20) is connected to a housing assembly (10), the housing assembly (10) and the magnetic yoke assembly (20) are located within a target material (100), characterized in that: The device includes a swing assembly (80) fixed inside the housing assembly (10), which is rotatably connected to the frame; a magnetic yoke assembly (20) is disposed outside the housing assembly (10), and the swing assembly (80) drives the housing assembly (10) to swing along its axis of rotation, thereby causing the magnetic yoke assembly (20) to swing along the axis of rotation of the housing assembly (10).

2. The online oscillation device for a magnetic yoke assembly for magnetron sputtering according to claim 1, characterized in that: The swing assembly (80) includes a swing motor (81), which is fixedly mounted on the housing assembly (10), and the output end of the swing motor (81) is restricted to rotate by the frame.

3. The online oscillation device for a magnetic yoke assembly for magnetron sputtering according to claim 2, characterized in that: It also includes a first terminal component (30), which is fixedly installed at one end of the housing component (10) and coaxial with its rotation axis; the housing component (10) is movably connected to the frame through the first terminal component (30); the output end of the swing motor (81) is coaxial with the axis of the first terminal component (30), and the output end of the swing motor (81) is connected to the first terminal component (30), and is connected to the frame through the first terminal component (30), thereby restricting the rotation of the output end of the swing motor (81).

4. The online oscillation device for a magnetic yoke assembly for magnetron sputtering according to claim 3, characterized in that: The first terminal assembly (30) includes a connector body (34), the output end of the swing motor (81) is connected to the connector body (34) in a transmission connection; the connector body (34) is connected to the frame.

5. The online oscillation device for a magnetic yoke assembly for magnetron sputtering according to claim 4, characterized in that: It also includes a fixing pin (32), which is fixed to the rear end of the connector body (34) and is inserted into the flange hole of the output flange (82) of the swing assembly (80).

6. The online oscillation device for a magnetic yoke assembly for magnetron sputtering according to claim 4, characterized in that: It also includes a drive assembly (90), which includes a spacer (92) that is fixedly connected to the frame and has a central support fixing pin (921) on the spacer (92). The front end of the connector body (34) is provided with a pin head interface (341) and the central support fixing pin (921) is inserted into the pin head interface (341).

7. The online oscillation device for a magnetic yoke assembly for magnetron sputtering according to claim 3, characterized in that: The drive shaft (821) of the swing assembly (80) is a hollow structure and extends to the rear end (811) of the swing motor (81) to form a cable channel c at the front and rear ends of the swing motor (81).

8. The online oscillation device for a magnetic yoke assembly for magnetron sputtering according to claim 7, characterized in that: The first terminal component (30) further includes a contact component (35) including a first contact (351), a second contact (352) and a contact component (353). The contact component (353) includes a plurality of moving contacts (353a) disposed on the end face of the first contact (351) and a plurality of stationary contacts (352) disposed on the end face of the second contact (352). An elastic component presses the first contact (351) against the second contact (352) so that the first contact (351) and the second contact (352) remain in contact. The cable channel c is connected to the rear end of the second contact (352).

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