Tray fixing mechanism and semiconductor device
By setting a leveling component on the metal tray to cooperate with the shaft head, and using a rotary drive mechanism to drive the shaft head to rotate, the problems of high cost and poor stability of graphite trays are solved, and the horizontal rotation of the tray and the improvement of process stability are achieved.
Patent Information
- Application Number
- CN202520153882.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-22
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2035-01-22
AI Technical Summary
In existing thin film deposition equipment, graphite trays are expensive and prone to wear, resulting in poor process stability, while metal trays cannot guarantee horizontal rotation.
A metal tray is used with a leveling device on it. The leveling device works with the shaft head, and the shaft head is driven to rotate by a rotary drive mechanism to ensure that the tray remains horizontal during rotation.
The cost of the pallet was reduced, and the horizontal stability of the pallet during rotation was achieved through the cooperation of the leveling components and the shaft head, thereby improving the stability of the process.
Smart Images
Figure CN223892842U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and more specifically, to a tray fixing mechanism and a semiconductor device. Background Technology
[0002] Semiconductor equipment refers to the production equipment used to manufacture various semiconductor products, and they play a crucial role in the semiconductor industry chain. Among them, thin film deposition equipment is mainly used to deposit various thin film materials on chips, and the deposition methods include physical vapor deposition, chemical vapor deposition, and atomic layer deposition.
[0003] Some existing thin film deposition equipment uses graphite trays, which mainly utilize the self-lubricating properties of graphite to make the tray rotate horizontally under the centripetal force of high-speed rotation, so as to achieve uniform film formation. However, the graphite trays used in this method are expensive and easily worn, resulting in poor process stability. If the graphite trays are replaced with metal trays, the cost can be reduced, but the horizontal rotation of the tray cannot be guaranteed well. Utility Model Content
[0004] The purpose of this application includes, for example, providing a pallet fixing mechanism that can better ensure the horizontal rotation of the pallet.
[0005] The purpose of this application also includes providing a semiconductor device that can better ensure the horizontal rotation of the tray.
[0006] The embodiments of this application can be implemented as follows:
[0007] In a first aspect, embodiments of this application provide a pallet fixing mechanism, which includes a pallet, a shaft head, a rotary drive mechanism, and a leveling component. The center of the pallet is fixedly connected to the shaft head, and the rotary drive mechanism is fixedly connected to the shaft head to drive the shaft head to rotate around its own axis. The leveling component is disposed on the pallet and is used to cooperate with the shaft head to level the pallet so that the pallet remains horizontal during rotation.
[0008] Secondly, this application also provides a semiconductor device, including the aforementioned tray fixing mechanism.
[0009] The beneficial effects of the tray fixing mechanism and semiconductor device provided in this application include, for example, in order to ensure that the tray can rotate horizontally, a leveling component is provided on the tray. The leveling component can cooperate with the shaft head to level the tray. After the tray is leveled, the shaft head is driven to rotate around its own axis by a rotary drive mechanism. At this time, the shaft head can drive the tray to rotate synchronously, and the tray can maintain a better horizontal state during the rotation. Attached Figure Description
[0010] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0011] Figure 1 This is a schematic diagram of the pallet fixing mechanism in an embodiment of this application;
[0012] Figure 2 This is a partial cross-sectional schematic diagram of the pallet fixing mechanism in an embodiment of this application;
[0013] Figure 3 This is a partial schematic diagram of the pallet fixing mechanism in an embodiment of this application.
[0014] Icons: 100-Tray; 110-First surface; 120-Second surface; 130-First mounting hole; 140-Second mounting hole; 150-Through hole; 160-Second groove; 170-Third groove; 200-Shaft head; 210-Mating surface; 220-Third mounting hole; 230-First groove; 240-Second boss; 300-Rotating shaft; 310-First boss. Detailed Implementation
[0015] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0016] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0017] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0018] In the description of this application, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.
[0019] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.
[0020] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.
[0021] As disclosed in the background section, some existing thin film deposition equipment uses graphite trays. These trays primarily utilize graphite's self-lubricating properties to rotate horizontally under centripetal force at high speed, achieving uniform film formation. However, graphite trays are expensive and prone to wear, easily leading to poor process stability. Replacing graphite trays with metal trays can reduce costs, but metal trays lack self-lubricating properties and cannot adequately guarantee horizontal rotation. Embodiments of this application provide a tray fixing mechanism, which at least addresses the aforementioned technical problems.
[0022] Please refer to Figures 1-3 The pallet fixing mechanism provided in the embodiments of this application includes a pallet 100, a shaft head 200, a rotary drive mechanism, and a leveling component (not shown). The pallet 100 is connected to the shaft head 200, and the rotary drive mechanism is connected to the shaft head 200 to drive the shaft head 200 to rotate around its own axis. The leveling component is disposed on the pallet 100 and is used to level the pallet 100 so that the pallet 100 remains horizontal during rotation.
[0023] The pallet 100 in this embodiment is a metal pallet, which can reduce the cost by more than half compared to a graphite pallet. The metal pallet can be an aluminum alloy pallet or an aluminum pallet, preferably an aluminum alloy pallet.
[0024] The shaft head 200 is located between the pallet 100 and the rotary drive mechanism, serving to connect the pallet 100 and the rotary drive mechanism. In addition, the shaft head 200 can work with the leveling component to level the pallet 100.
[0025] The rotary drive mechanism is a drive source used to drive the shaft head 200 to rotate. The shaft head 200 rotates under the drive of the rotary drive mechanism, and the rotation of the shaft head 200 can drive the tray 100 connected to the shaft head 200 to rotate synchronously.
[0026] To ensure that the metal pallet can rotate horizontally, a leveling component is provided on the pallet 100. The leveling component can work with the shaft head 200 to level the pallet 100. After the pallet 100 is leveled, the shaft head 200 is driven to rotate around its own axis by a rotary drive mechanism. At this time, the shaft head 200 can drive the pallet 100 to rotate synchronously, and keep the pallet 100 in a better horizontal state during the rotation.
[0027] In some embodiments, the tray 100 has a first surface 110 and a second surface 120 opposite to each other. The tray 100 has a first mounting hole 130 that passes through the first surface 110 and the second surface 120. The leveling member passes through the first mounting hole 130 and is used to abut against the shaft head 200.
[0028] The first surface 110 is the surface of the tray 100 facing away from the shaft head 200, and the second surface 120 is the surface of the tray 100 facing the shaft head 200. The first mounting hole 130 passes through the first surface 110 and the second surface 120, and the leveling component is assembled in the first mounting hole 130.
[0029] When the pallet 100 needs to be leveled, the leveling component moves along the opening direction of the first mounting hole 130. The leveling component extends out of the first mounting hole 130 and abuts against the shaft head 200, so that the side of the pallet 100 where the leveling component is located is raised or lowered until the pallet 100 is adjusted to a horizontal state.
[0030] In some embodiments, the leveling component is a set screw, the first mounting hole 130 cooperates with the set screw, and the shaft head 200 is provided with a mating surface 210 facing the second surface 120, and the set screw abuts against the mating surface 210.
[0031] The set screw, also known as a set screw, has an internal thread in the first mounting hole 130 that mates with the set screw thread. When the position of the set screw needs to be adjusted, the set screw is turned with an external tool, and the set screw can move along the opening direction of the first mounting hole 130, thereby causing the side of the tray 100 with the set screw to lift or lower relative to the mating surface 210.
[0032] It should be noted that when there is no wear on the tray 100 and the shaft head 200, and the second surface 120 of the tray 100 is fully in contact with the mating surface 210 of the shaft head 200, the tray 100 can maintain a horizontal state. However, during use, frictional wear occurs between the tray 100 and the shaft head 200, which causes the tray 100 to lose its horizontal state when its second surface 120 is fully in contact with the mating surface 210 of the shaft head 200. Therefore, when the set screw is in contact with the mating surface 210, turning the set screw will raise or lower the side of the tray 100 where the set screw is located, thereby achieving the leveling of the tray 100.
[0033] In some other embodiments, the set screw may also be inserted into the shaft head 200 and abut against the second surface 120 of the tray 100. In this case, turning the set screw can also achieve the effect of raising or lowering the tray 100.
[0034] It is understood that in other embodiments, the leveling component is not limited to the set screw, but may also be a bolt, stud or other fastener, and there is no limitation thereto.
[0035] In some embodiments, a plurality of first mounting holes 130 are provided along the circumference of the tray 100, and the number of set screws matches the number of first mounting holes 130. The plurality of set screws are passed through the plurality of first mounting holes 130 in a one-to-one correspondence, and are all used to abut against the mating surface 210.
[0036] The angle between any two adjacent first mounting holes 130 and the line connecting them to the center of the tray 100 is equal, ensuring that the multiple first mounting holes 130 are evenly distributed along the circumference of the tray 100. If one side of the tray 100 tilts, it can be leveled by adjusting the set screws near the tilted side of the tray 100, resulting in better leveling. It is understood that when the tilted position of the tray 100 is close to that between two adjacent first mounting holes 130, it can be leveled by adjusting the set screws within those two adjacent first mounting holes 130.
[0037] For example, when there are three first mounting holes 130 along the circumference of the tray 100, the angle between the line connecting two adjacent first mounting holes 130 and the center of the tray 100 is 120°. Correspondingly, there are also three set screws, which are respectively inserted into the three first mounting holes 130.
[0038] When there are four first mounting holes 130 along the circumference of the tray 100, the angle between the line connecting two adjacent first mounting holes 130 and the center of the tray 100 is 90°. Correspondingly, there are also four set screws, which are respectively inserted into the four first mounting holes 130.
[0039] When there are six first mounting holes 130 along the circumference of the tray 100, the angle between the line connecting two adjacent first mounting holes 130 and the center of the tray 100 is 60°. Correspondingly, there are also six set screws, which are respectively inserted into the six first mounting holes 130.
[0040] It is understandable that the number of set screws and corresponding first mounting holes 130 can be determined according to the actual working conditions, and there is no limitation on this.
[0041] In some embodiments, the pallet fixing mechanism further includes a first fastener (not shown) that passes through the pallet 100 and the shaft head 200 in sequence to fix the pallet 100 and the shaft head 200 together.
[0042] The tray 100 has a second mounting hole 140 that penetrates the first surface 110 and the second surface 120. The mating surface 210 of the shaft head 200 has a blind hole that matches the position of the second mounting hole 140. The first fastener passes through the second mounting hole 140 and the blind hole on the shaft head 200 in sequence to fix the tray 100 and the shaft head 200 together.
[0043] The first fastener can be a screw. Of course, it is understood that in some other embodiments, the first fastener can also be a bolt, stud, retaining pin, etc.
[0044] In some embodiments, there are multiple first fasteners, and correspondingly, there are multiple second mounting holes 140 and blind holes, with each first fastener passing through the corresponding second mounting hole 140 and blind hole in sequence.
[0045] The angle between any two adjacent second mounting holes 140 and the center line of the tray 100 is equal, so that the multiple second mounting holes 140 are evenly distributed along the circumference of the tray 100. Optionally, the number of first mounting holes 130 and second mounting holes 140 is equal, and the first mounting holes 130 and second mounting holes 140 are arranged alternately along the circumference of the tray 100.
[0046] For example, when there are three second mounting holes 140 along the circumference of the tray 100, the angle between the line connecting two adjacent second mounting holes 140 and the center of the tray 100 is 120°, and correspondingly, the number of first fasteners and blind holes is also three.
[0047] With four second mounting holes 140 along the circumference of the tray 100, the angle between the line connecting two adjacent second mounting holes 140 and the center of the tray 100 is 90°. Correspondingly, there are also four first fasteners and four blind holes.
[0048] With six second mounting holes 140 along the circumference of the tray 100, the angle between the line connecting two adjacent second mounting holes 140 and the center of the tray 100 is 60°. Correspondingly, the number of first fasteners and blind holes is also six.
[0049] It is understandable that the number of the first fastener and the corresponding second mounting hole 140 and blind hole can be determined according to the actual working conditions, and there is no limitation on this.
[0050] In some embodiments, the rotary drive mechanism includes a drive member (not shown) and a rotary shaft 300 connected to the drive member. The drive member is used to drive the rotary shaft 300 to rotate, and the rotary shaft 300 is connected to the shaft head 200.
[0051] The driving component can be a drive motor, which is coaxially connected to the rotating shaft 300 to drive the rotating shaft 300 to rotate. The rotating shaft 300 is coaxially connected to the shaft head 200. When the drive motor drives the rotating shaft 300 to rotate, the shaft head 200 and the tray 100 rotate synchronously with the rotating shaft 300.
[0052] In some embodiments, the pallet fixing mechanism further includes a second fastener (not shown) that passes through the shaft head 200 and the rotating shaft 300 in sequence to fix the shaft head 200 and the rotating shaft 300 together.
[0053] The shaft head 200 has a third mounting hole 220 at its center, and the rotating shaft 300 has a blind hole that matches the position of the third mounting hole 220. The second fastener passes through the third mounting hole 220 and the blind hole on the rotating shaft 300 in sequence to fix the shaft head 200 and the rotating shaft 300 together. To facilitate the installation of the second fastener, the tray 100 also has a through hole 150 at its center for the second fastener to pass through.
[0054] The second fastener can be a screw. Of course, it is understood that in some other embodiments, the second fastener can also be a bolt, stud, retaining pin, etc.
[0055] In some embodiments, the rotating shaft 300 is provided with a first boss 310 and the shaft head 200 is provided with a first groove 230, and the first boss 310 and the first groove 230 cooperate with each other.
[0056] The first boss 310 is located at the center of the rotating shaft 300. The first boss 310 extends into the first groove 230. The outer side wall of the first boss 310 fits against the inner side wall of the first groove 230, so that the first boss 310 and the first groove 230 cooperate.
[0057] When the first boss 310 and the first groove 230 are engaged, the shaft head 200 is less likely to be horizontally displaced relative to the rotating shaft 300 during rotation, which can also improve the stability of the tray 100 during rotation.
[0058] When the first boss 310 is provided on the rotating shaft 300, the blind hole on the rotating shaft 300 is opened in the first boss 310, and the second fastener passes through the third mounting hole 220 and the blind hole on the first boss 310 in sequence to fix the shaft head 200 and the rotating shaft 300 together.
[0059] In some embodiments, the shaft head 200 is provided with a second boss 240, and the tray 100 is provided with a second groove 160, the second boss 240 and the second groove 160 cooperating.
[0060] The second boss 240 is located at the center of the shaft head 200. The second boss 240 protrudes from the mating surface 210 of the shaft head 200. The second groove 160 is formed on the second surface 120 of the tray 100. The second boss 240 extends into the second groove 160. The outer side wall of the second boss 240 fits against the inner side wall of the second groove 160, so that the second boss 240 and the second groove 160 mate.
[0061] With the second boss 240 and the second groove 160 in cooperation, the tray 100 is less likely to be horizontally displaced relative to the shaft head 200 during rotation, which can also improve the stability of the tray 100 during rotation.
[0062] When the shaft head 200 is provided with a second boss 240 and the rotating shaft 300 is provided with a first boss 310, the third mounting hole 220 passes through the second boss 240 and the top of the shaft head 200, and the second fastener passes through the third mounting hole 220 and the blind hole on the first boss 310 in sequence to fix the shaft head 200 and the rotating shaft 300 together.
[0063] In addition, the tray 100 is provided with a third groove 170 for supporting the base, and there may be multiple third grooves 170.
[0064] Embodiments of this application also provide a semiconductor device including the aforementioned tray fixing mechanism. The semiconductor device may be an ALD device or the like. The semiconductor device also includes a device body with a process chamber. The tray 100, shaft head 200, and leveling component are all disposed within the process chamber. A driving component is fixedly disposed outside the process chamber, and the rotating shaft 300 is at least partially located within the process chamber.
[0065] The beneficial effects of the tray fixing mechanism and semiconductor device provided in this application embodiment include at least the following: after the tray 100 is leveled using the leveling component and the shaft head 200, the rotary drive mechanism drives the shaft head 200 to rotate. At this time, the shaft head 200 can drive the tray 100 to rotate synchronously and maintain a better horizontal state during the rotation. By providing multiple first mounting holes 130 and distributing them evenly along the circumference of the tray 100, it is convenient to level the tray 100 at different positions. When the first boss 310 cooperates with the first groove 230, the shaft head 200 is less likely to undergo horizontal displacement relative to the rotating shaft 300 during rotation. When the second boss 240 cooperates with the second groove 160, the tray 100 is less likely to undergo horizontal displacement relative to the shaft head 200 during rotation.
[0066] In summary, the embodiments of this application provide a tray fixing mechanism and a semiconductor device. By setting a leveling component on the tray 100, the leveling component can cooperate with the shaft head 200 to level the tray 100. After the tray 100 is leveled, the shaft head 200 is driven to rotate around its own axis by a rotary drive mechanism. At this time, the shaft head 200 can drive the tray 100 to rotate synchronously, and keep the tray 100 in a better horizontal state during the rotation.
[0067] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A pallet fixing mechanism, characterized in that, The device includes a tray (100), a shaft head (200), a rotary drive mechanism, and a leveling component. The tray (100) is connected to the shaft head (200), and the rotary drive mechanism is connected to the shaft head (200) to drive the shaft head (200) to rotate around its own axis. The leveling component is disposed on the tray (100) and is used to level the tray (100) so that the tray (100) remains horizontal during rotation.
2. The pallet fixing mechanism according to claim 1, characterized in that, The tray (100) has a first surface (110) and a second surface (120) opposite to each other. The tray (100) has a first mounting hole (130) that passes through the first surface (110) and the second surface (120). The leveling member passes through the first mounting hole (130) and is used to abut against the shaft head (200).
3. The pallet fixing mechanism according to claim 2, characterized in that, The leveling component is a set screw, the first mounting hole (130) is engaged with the set screw, and the shaft head (200) is provided with a mating surface (210) facing the second surface (120), and the set screw abuts against the mating surface (210).
4. The pallet fixing mechanism according to claim 3, characterized in that, The first mounting hole (130) is provided in a plurality of circumferential directions along the tray (100), and the number of the set screws matches the number of the first mounting holes (130). The plurality of set screws are respectively inserted into the plurality of the first mounting holes (130) and are all used to abut against the mating surface (210).
5. The pallet fixing mechanism according to claim 1, characterized in that, The pallet fixing mechanism further includes a first fastener, which passes through the pallet (100) and the shaft head (200) in sequence to fix the pallet (100) and the shaft head (200) together.
6. The pallet fixing mechanism according to claim 1, characterized in that, The rotary drive mechanism includes a drive member and a rotary shaft (300) connected to the drive member. The drive member is used to drive the rotary shaft (300) to rotate. The rotary shaft (300) is connected to the shaft head (200).
7. The pallet fixing mechanism according to claim 6, characterized in that, The pallet fixing mechanism further includes a second fastener, which passes through the shaft head (200) and the rotating shaft (300) in sequence to fix the shaft head (200) and the rotating shaft (300) together.
8. The pallet fixing mechanism according to claim 6, characterized in that, The rotating shaft (300) is provided with a first boss (310), and the shaft head (200) is provided with a first groove (230), the first boss (310) and the first groove (230) cooperate with each other.
9. The pallet fixing mechanism according to claim 1, characterized in that, The shaft head (200) is provided with a second boss (240), and the tray (100) is provided with a second groove (160), the second boss (240) and the second groove (160) cooperate with each other.
10. A semiconductor device, characterized in that, Includes the pallet fixing mechanism as described in any one of claims 1-9.