Improved observation window for coating chamber

Abstract

The utility model discloses an improved observation window for a coating chamber. The improved observation window comprises an observation window main body and a rotary stroboscopic unit mounted on the observation window main body, the observation window main body comprises a main shell and a window unit, and an observation position and a stroboscopic position are formed on the main shell; the window unit is mounted on the observation position and comprises a window frame flange penetrating through the main shell and an anti-radiation metal net and a lead glass sheet which are mounted in the window frame flange in tandem, and observation can be performed from the observation position to the coating chamber through the anti-radiation metal net and the lead glass sheet; the rotary stroboscopic unit comprises a stroboscopic driving motor arranged on the outer surface of the stroboscopic position and a stroboscopic turntable arranged on the inner surface of the stroboscopic position, a driving shaft of the stroboscopic driving motor is connected with the stroboscopic turntable, the stroboscopic driving motor drives the stroboscopic turntable to rotate, and the window unit is located in the rotation range of the stroboscopic turntable. And an observation slit is formed in the stroboscopic turntable along the diameter direction. According to the utility model, coating materials and radiation light can be blocked.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to an improved observation window for coating chambers. Background Technology

[0002] Vacuum coating systems are closed systems, generally divided into unwinding and winding sections, winding transmission sections, and coating sections. The vacuum coating process takes place within the coating chamber. Depending on the coating principle, vacuum coating generally includes thermal evaporation coating, magnetron sputtering coating, ion implantation coating, and electron beam coating. To maintain the airtightness of the vacuum coating environment, the coating equipment typically uses steel walls, with sealing rings connecting the opening and closing points to form a sealed space. To observe the internal operation of the equipment, non-coating sections usually have openings in the walls of the coating equipment, using flanges, glass, and sealing rings to create transparent viewing windows. The coating section is the main area where the coating process is carried out; however, simply opening a glass window allows the coating material in the coating area to quickly deposit on the glass, making observation impossible. Furthermore, high-energy coating processes generate glow discharge, secondary electrons, and X-rays and gamma rays, which a simple glass window cannot filter or isolate, potentially causing injury. Utility Model Content

[0003] The purpose of this invention is to provide an improved observation window for a coating chamber.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] An improved observation window for a coating chamber includes an observation window body mounted on the outer wall of the coating chamber and a rotating strobe unit mounted on the observation window body.

[0006] The observation window body is operable relative to the coating chamber and includes a main housing and a window unit. The main housing has an observation position and a strobe position formed thereon. The window unit is installed on the observation position and includes a window frame flange that passes through the main housing and a radiation-proof metal mesh and a lead glass plate installed in the window frame flange one in front and one behind. It is possible to observe from the observation position into the coating chamber through the radiation-proof metal mesh and the lead glass plate.

[0007] The rotating stroboscopic unit includes a stroboscopic drive motor disposed on the outer surface of the stroboscopic position and a stroboscopic turntable disposed on the inner surface of the stroboscopic position. The drive shaft of the stroboscopic drive motor is connected to the stroboscopic turntable, and the stroboscopic drive motor drives the stroboscopic turntable to rotate. The window unit is located within the rotation range of the stroboscopic turntable. An observation slit is provided on the stroboscopic turntable along the diameter direction, so that the observation slit can be used to observe the coating chamber as the stroboscopic turntable rotates, and the coating material and radiation light can be blocked by the stroboscopic turntable.

[0008] As a further technical solution of this utility model: an improved observation window for a coating chamber, including an inner shielding unit installed on the outer wall of the coating chamber. The inner shielding unit includes a rotating handle disposed on the outer surface of the outer wall, an inner baffle disposed on the inner surface of the outer wall that can swing, and a swing transmission assembly that passes through the outer wall and connects one end of the rotating handle to the inner baffle. By pushing and pulling the rotating handle, the swing transmission assembly causes the inner baffle to swing.

[0009] As a further technical solution of this utility model: the inner blocking unit is located above the main body of the observation window, so that when the inner baffle hangs down naturally under the action of gravity, the other end of the inner baffle is located directly behind the window unit, blocking the window unit.

[0010] As a further technical solution of this utility model: one side of the main housing is hinged to the outer wall, and the other side of the main housing is provided with a handle.

[0011] As a further technical solution of this utility model: the outer surface of the main housing is provided with a cover to protect the strobe drive motor.

[0012] As a further technical solution of this utility model: the swing transmission assembly is provided with a positioning nut on its outside, which is used to position the rotating handle within the rotation range of the rotating handle.

[0013] As a further technical solution of this utility model: the rotation speed of the strobe turntable is 16 revolutions / second to 24 revolutions / second, and the width of the observation slit is 1 mm.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows: This utility model proposes an improved observation window for a coating chamber. Through the cooperation between the observation window body, the inner shielding unit, and the rotating strobe unit, when not observing, the inner baffle and the strobe turntable can block the coating material and radiation light outside the window unit, preventing the coating material from depositing on the lead glass plate. When observing, continuous observation can be achieved, and while observing, the rotating strobe turntable continues to prevent the coating material from depositing on the lead glass plate, making the coating state clearly presented. It also improves the stability, safety, and ease of maintenance of the observation window. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of an improved viewing window used in a coating chamber.

[0016] Figure 2 This is a cross-sectional view of the main body of the observation window and the rotating strobe unit.

[0017] Figure 3 This is a structural diagram of the inner shading unit.

[0018] Figure 4 This is a schematic diagram of the inner shading unit. Detailed Implementation

[0019] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of protection of this utility model.

[0020] Please see Figures 1 to 4 An improved observation window for a coating chamber includes an observation window body 10 and an inner shielding unit 20 mounted on the outer wall of the coating chamber, and a rotating strobe unit 30 mounted on the observation window body 10.

[0021] The observation window body 10 is openable relative to the coating chamber and includes a main housing 11 and a window unit 12. The main housing 11 has an observation position 101 and a strobe position 102 formed thereon. The window unit 12 is installed on the observation position 101 and includes a window frame flange 121 that passes through the main housing 11 and a radiation shielding metal mesh 122 and a lead glass sheet 123 installed in the window frame flange 121 one in front of the other. It is possible to observe the coating chamber from the observation position 101 through the radiation shielding metal mesh 122 and the lead glass sheet 123.

[0022] The rotating strobe unit 30 includes a strobe drive motor 31 disposed on the outer surface of the strobe position 102 and a strobe turntable 32 disposed on the inner surface of the strobe position 102. The drive shaft of the strobe drive motor 31 is connected to the strobe turntable 32, so that the strobe drive motor 31 drives the strobe turntable 32 to rotate. The window unit 12 is located within the rotation range of the strobe turntable 32. An observation slit 321 is provided on the strobe turntable 32 along the diameter direction. With the rotation of the strobe turntable 32, the observation slit 321 can be used to observe the coating chamber. At the same time, the strobe turntable 32 blocks the coating material and radiation light, preventing the coating material from depositing on the lead glass plate 123, making the observation more stable and reliable.

[0023] The inner shielding unit 20 is located above the main body of the observation window 10. It includes a rotating handle 21 disposed on the outer surface of the outer chamber wall, an inner baffle 22 disposed on the inner surface of the outer chamber wall that can swing, and a swing transmission assembly 23 that passes through the outer chamber wall and connects one end of the rotating handle 21 to one end of the inner baffle 22. By pushing and pulling the rotating handle 21, the swing transmission assembly 23 can drive the inner baffle 22 to swing. When the inner baffle 22 hangs down naturally under the action of gravity, its other end is located directly behind the window unit 12, shielding the window unit 12 and preventing the deposition of coating material.

[0024] Furthermore, in this embodiment, one side of the main housing 11 is hinged to the outer chamber wall, and the other side of the main housing 11 is provided with a handle 111 so that the observation window body 10 can be switched relative to the coating chamber.

[0025] Furthermore, in this embodiment, the outer surface of the main housing 11 is provided with a cover 112 to cover the strobe drive motor 31 for protection of the strobe drive motor 31.

[0026] Furthermore, in this embodiment, the swing transmission assembly 23 is provided with a positioning nut on its exterior to position the rotating handle 21 within the rotation range of the rotating handle 21, and to fix the inner baffle 22 in a position that is easy to observe, thus freeing up the hands.

[0027] Furthermore, in this embodiment, the rotation speed of the strobe turntable 32 is 16 to 24 revolutions per second, and the slit width of the observation slit 321 is 1 mm, so as to observe the coating chamber according to the "persistence of vision" phenomenon.

[0028] Furthermore, in this embodiment, the mesh of the radiation-shielding metal mesh 122 is a square with a side length of 1 to 3 mm.

[0029] Understandably, the improved observation window for a coating chamber according to this invention is used as follows: When not observing, the inner baffle 22 hangs down naturally under gravity, with its other end swinging to the rear of the window unit 12, blocking the window unit 12. The rotating strobe unit 30 is not activated, and the inner baffle 22 and the strobe turntable 32 can block the coating material and radiation light, preventing the coating material from depositing on the lead glass plate 123. When observation is needed, the rotating handle 21 is pushed or pulled, and the swing transmission component 23 causes the inner baffle 22 to swing. The rotating handle 21 is then positioned with a positioning nut, fixing the inner baffle 22 in a convenient observation position. Then, the rotating strobe unit 30 is activated, and with the rotation of the strobe turntable 32, the window unit 12 and the observation slit 321 are used to observe the coating chamber. In this way, not only can continuous observation be achieved, clearly presenting the coating state, but the stability, safety, and ease of maintenance of the observation window are also improved.

[0030] In summary, this utility model provides an improved observation window for a coating chamber. Through the cooperation of the observation window body 10, the inner shielding unit 20, and the rotating strobe unit 30, when not observing, the inner baffle 22 and the strobe turntable 32 can block the coating material and radiation light outside the window unit 12, preventing the coating material from depositing on the lead glass plate 123. During observation, continuous observation can be achieved, and while observing, the rotating strobe turntable 32 continues to prevent the coating material from depositing on the lead glass plate 123, making the coating state clearly presented. It also improves the stability, safety, and ease of maintenance of the observation window.

[0031] Any combination of different embodiments of this utility model, provided it does not violate the inventive concept of this utility model, shall be considered as the disclosure of this utility model; any simple modifications to the technical solution and any combination of different embodiments within the scope of the inventive concept of this utility model, without violating the inventive concept of this utility model, shall be within the protection scope of this utility model.

Claims

1. An improved observation window for a coating chamber, characterized in that: It includes an observation window body (10) installed on the outer wall of the coating chamber and a rotating strobe unit (30) installed on the observation window body (10); The observation window body (10) can be opened and closed relative to the coating chamber, including a main housing (11) and a window unit (12). The main housing (11) has an observation position (101) and a strobe position (102) formed thereon. The window unit (12) is installed on the observation position (101), and includes a window frame flange (121) that passes through the main housing (11) and a radiation-shielding metal mesh (122) and a lead glass plate (123) installed in the window frame flange (121) one in front and one behind. It is possible to observe from the observation position (101) into the coating chamber through the radiation-shielding metal mesh (122) and the lead glass plate (123). The rotating strobe unit (30) includes a strobe drive motor (31) disposed on the outer surface of the strobe position (102) and a strobe turntable (32) disposed on the inner surface of the strobe position (102). The drive shaft of the strobe drive motor (31) is connected to the strobe turntable (32), so that the strobe drive motor (31) drives the strobe turntable (32) to rotate. The window unit (12) is located within the rotation range of the strobe turntable (32). An observation slit (321) is provided on the strobe turntable (32) along the diameter direction, so that as the strobe turntable (32) rotates, the observation slit (321) can be used to observe the coating chamber and block the coating material and radiation light through the strobe turntable (32).

2. The improved observation window for a coating chamber according to claim 1, characterized in that: The device includes an inner shielding unit (20) installed on the outer wall of the coating chamber. The inner shielding unit (20) includes a rotating handle (21) disposed on the outer surface of the outer wall, an inner baffle (22) disposed on the inner surface of the outer wall that is capable of swinging, and a swing transmission assembly (23) that passes through the outer wall and connects one end of the rotating handle (21) to the inner baffle (22). By pushing and pulling the rotating handle (21), the swing transmission assembly (23) causes the inner baffle (22) to swing.

3. The improved observation window for a coating chamber according to claim 2, characterized in that: The inner blocking unit (20) is located above the main body of the observation window (10). When the inner baffle (22) hangs down naturally under the action of gravity, the other end of the inner baffle (22) is located directly behind the window unit (12), blocking the window unit (12).

4. The improved observation window for a coating chamber according to claim 1, characterized in that: One side of the main housing (11) is hinged to the outer wall, and the other side of the main housing (11) is provided with a handle (111).

5. The improved observation window for a coating chamber according to claim 1, characterized in that: The outer surface of the main housing (11) is provided with a cover (112) to cover the strobe drive motor (31) for protection.

6. The improved observation window for a coating chamber according to claim 2, characterized in that: The swing transmission assembly (23) has a positioning nut on its exterior to position the rotating handle (21) within the rotation range of the rotating handle (21).

7. The improved observation window for a coating chamber according to claim 1, characterized in that: The strobe turntable (32) rotates at a speed of 16 to 24 revolutions per second, and the slit width of the observation slit (321) is 1 mm.

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