Graphite base plate with silicon carbide coating

Abstract

The utility model provides a graphite base plate with a silicon carbide coating, and mainly relates to the technical field of graphite base plates with silicon carbide coatings. A graphite base plate with a silicon carbide coating comprises a base and a plurality of base plate bodies, an annular groove is formed in the top face of the base, internal threads are formed in the annular groove, a plurality of evenly-distributed fan-shaped clamping grooves are formed in the top face of the base, and a fan-shaped clamping block is arranged on the bottom face of each base plate body. Compared with the prior art, the base disc has the advantages that the base disc bodies are assembled through the arrangement of the multiple base disc bodies and under the cooperation of the arc-shaped clamping blocks and the annular clamping grooves, then the base disc bodies can be replaced in time when damaged, meanwhile, replacement of the whole base disc body is avoided, and the use cost is reduced; and under the cooperation of the annular plate, the base and the pressing device, the multiple spliced base disc bodies can be rapidly limited and fixed, the stability of the base disc bodies is improved, and then convenience is brought to use.

Description

Technical Field

[0001] This utility model mainly relates to the technical field of graphite base disks with silicon carbide coating, specifically a graphite base disk with silicon carbide coating. Background Technology

[0002] MOCVD is a novel vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxial growth. During the MOCVD epitaxial growth process, epitaxial growth materials such as GaN and AlN will inevitably adhere to the surface of the graphite disk, which serves as the substrate carrier. Graphite disks are valuable and need to be reused repeatedly. However, the residual deposits on the surface of the graphite disks can lead to abnormalities or even failures in epitaxial growth.

[0003] As the size of graphite disks increases, their value also rises. As a relatively expensive consumable in the MOCVD process, graphite disks are coated with a silicon carbide protective layer to prevent corrosion from gases such as ammonia and hydrogen.

[0004] Chinese invention patent with publication number CN107058978B discloses a graphite disk base including a base body and multiple pockets for growing epitaxial wafers. The pockets include a first pocket and multiple second pockets. The first pocket is located at the center of the base body, and the second pockets are distributed circumferentially around the center of the base body. The depth of the first pocket is greater than the depth of the second pockets. The first pocket has a bottom surface and annular sidewalls.

[0005] Regarding the aforementioned technologies, the inventors believe that current graphite disks cannot be repaired after damage and can only be scrapped as a whole, which has the drawback of significantly increasing the cost of epitaxial processes. This not only increases the cost of use but also easily leads to the waste of resources, thus causing inconvenience to users. Utility Model Content

[0006] To address the shortcomings of existing technologies, this invention provides a graphite base plate with a silicon carbide coating. This invention assembles multiple base plate bodies using arc-shaped locking blocks and annular slots, enabling timely replacement of damaged base plate bodies while avoiding the need to replace the entire base plate, thus reducing operating costs. Furthermore, the combination of annular plates, a base, and a clamping device allows for rapid positioning and fixation of the assembled base plate bodies, improving stability and enhancing usability.

[0007] To achieve the above objectives, this utility model employs the following technical solution:

[0008] A graphite substrate with a silicon carbide coating includes a base and multiple substrate bodies. The top surface of the base has an annular groove with an internal thread. The top surface of the base has several evenly distributed fan-shaped slots. The bottom surface of each substrate body has a fan-shaped locking block that can be engaged in the fan-shaped slot. An annular plate is provided above the base. An annular connecting block is installed on the bottom surface of the annular plate. The annular connecting block has an external thread on its outer circumference and can be threaded into the annular slot. A clamping device is installed inside the arc-shaped plate.

[0009] Furthermore, the clamping device includes a pressure ring fixing plate, which is installed inside the annular plate. Several evenly distributed arc-shaped pressure plates are installed on the bottom surface of the annular fixing plate via springs, and the arc-shaped pressure plates can contact and cooperate with the base plate body.

[0010] Furthermore, an arc-shaped rubber pad is installed on the bottom surface of each of the aforementioned arc-shaped pressure plates.

[0011] Furthermore, each of the base disks has several evenly distributed placement slots on its top surface, and each of the base disks is coated with a silicon carbide coating.

[0012] Furthermore, handles are installed on both sides of the annular plate, and each handle is fitted with an elastic pad around its outer periphery.

[0013] Furthermore, an anti-slip pad is installed on the bottom surface of the base.

[0014] Compared with the existing technology, the beneficial effects of this utility model are:

[0015] 1. This utility model sets up multiple base plate bodies and, with the cooperation of arc-shaped locking blocks and annular locking grooves, realizes the assembly of the base plate bodies. This allows for timely replacement when the base plate body is damaged, while avoiding the replacement of the entire base plate body and reducing the cost of use.

[0016] 2. With the cooperation of the annular plate, base and clamping device, the assembled multiple base plates can be quickly fixed and positioned, which improves the stability of the base plates and makes them more convenient to use. Attached Figure Description

[0017] Appendix Figure 1 This is a schematic diagram of the structure of this utility model;

[0018] Appendix Figure 2 yes Figure 1 Sub-view;

[0019] Appendix Figure 3 This is a schematic diagram of the base structure;

[0020] Appendix Figure 4 This is a schematic diagram of a ring-shaped plate structure;

[0021] Appendix Figure 5 yes Figure 4 A bottom view;

[0022] Appendix Figure 6 This is a schematic diagram of the base plate's main structure;

[0023] Appendix Figure 7 yes Figure 6 A bottom view;

[0024] The following are the reference numerals in the attached diagram: 1. Base; 2. Base plate body; 3. Annular groove; 4. Fan-shaped slot; 5. Fan-shaped block; 6. Annular plate; 7. Annular connecting block; 8. Annular fixing plate; 9. Spring; 10. Arc-shaped pressure plate; 11. Placement groove; 12. Handle; 13. Internal thread; 14. External thread. Detailed Implementation

[0025] The present invention will be further described in conjunction with the accompanying drawings and specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Furthermore, it should be understood that after reading the teachings of this invention, those skilled in the art can make various alterations or modifications to the present invention, and these equivalent forms also fall within the scope defined in this application.

[0026] like Figure 1-7 As shown, the graphite substrate with silicon carbide coating of this utility model includes a base 1 and multiple substrate bodies 2, which can be assembled into a circle. The top surface of the base 1 has an annular groove 3 with an internal thread 13. The top surface of the base 1 has several evenly distributed fan-shaped slots 4. The bottom surface of each substrate body 2 is provided with a fan-shaped locking block 5, which can be locked into the fan-shaped slot 4. An annular plate 6 is provided above the base 2. An annular connecting block 7 is installed on the bottom surface of the annular plate 6. The annular connecting block 7 has an external thread 14 on its outer periphery and can be threadedly engaged with the annular slot 4. A clamping device is installed in the arc plate 6.

[0027] Specifically, the clamping device includes a pressure ring fixing plate 8, which is installed inside an annular plate 6. Several evenly distributed arc-shaped pressure plates 10 are mounted on the bottom surface of the annular fixing plate 8 via springs 9. These arc-shaped pressure plates 10 can contact and engage with the base plate body 2. With the threaded engagement of the connecting block 7 and the annular groove 3, the arc-shaped pressure plates 10 contact the top surface of the base plate body 2. Under the elastic force of the springs 9 and the cooperation of the annular fixing plate 8, the arc-shaped pressure plates 10 press downwards against the base plate body 2, thereby limiting the top surface of the base plate body 2 and ensuring its stability.

[0028] Specifically, each of the arc-shaped pressure plates 10 has an arc-shaped rubber pad installed on its bottom surface. The arc-shaped rubber pad prevents the arc-shaped pressure plate 10 from directly contacting the base plate body 2, avoids scratching the base plate body 2, and improves the service life of the base plate body 2.

[0029] Specifically, each of the base disk bodies 2 has several evenly distributed placement slots 11 on its top surface, and each base disk body 2 is coated with a silicon carbide coating. The placement slots 11 can hold metal-organic materials, and the silicon carbide coating increases the durability and stability of the base disk body 2, and also enables it to maintain excellent chemical stability under high-temperature conditions.

[0030] Specifically, handles 12 are installed on both sides of the annular plate 6, and each handle 12 is fitted with an elastic pad on its outer periphery. The handles 12 facilitate the picking up and rotating of the annular plate 6, making it convenient to use.

[0031] Specifically, an anti-slip pad is installed on the bottom surface of the base 1. The anti-slip pad increases the friction of the base 1 and improves its stability.

[0032] Working principle:

[0033] When using this device, first place the base 1 in the usage position, then place the base plate body 2 on the base 1 in sequence, so that the fan-shaped locking block 5 is inserted into the corresponding fan-shaped locking slot 4, thereby assembling multiple base plate bodies 2 into a circular base plate while restricting the left and right sway of the base plate body 2. Then, insert the annular connecting block 7 into the annular groove 3 and thread it into the annular groove 3, thereby making the pressing device contact the top surface of multiple base plate bodies 2 and limit the top surface of the base plate body 2, ensuring the stability of the base plate body 2.

[0034] During use, when one of the base plate bodies 2 is damaged, the annular connecting block 7 separates from the annular groove 3, and the contact clamping device restricts the top surface of the base plate body 2. Then, the damaged base plate body 2 is removed and replaced with a new base plate body 2, thus eliminating the need for a complete replacement, reducing usage costs, minimizing resource waste, and providing convenience for users.

[0035] This invention uses multiple base plates, which are assembled with the help of arc-shaped locking blocks and annular slots. This allows for timely replacement of damaged base plates, avoiding the need to replace the entire base plate and reducing operating costs. Furthermore, the combination of the annular plate, base, and clamping device enables rapid positioning and fixation of the assembled base plates, improving their stability and enhancing usability.

[0036] In the description of this utility model, it should be understood that the terms "upper," "side," "inner," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the adjustable irrigation flushing gun or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In addition, it should be noted that unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "connect" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal communication of two elements or the interaction relationship of two elements. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A graphite substrate with a silicon carbide coating, comprising a base (1) and multiple substrate bodies (2), characterized in that: The base (1) has an annular groove (3) on its top surface and an internal thread (13) inside the annular groove (3). The base (1) has several evenly distributed fan-shaped slots (4) on its top surface. Each base plate body (2) has a fan-shaped block (5) on its bottom surface. The fan-shaped block (5) can be inserted into the fan-shaped slot (4). The base (2) has an annular plate (6) on its top surface and an annular connecting block (7) installed on its bottom surface. The annular connecting block (7) has an external thread (14) on its outer circumference and can be threaded into the annular slot (4). The arc plate (6) has a clamping device installed inside it.

2. The graphite-based disk with a silicon carbide coating according to claim 1, characterized in that: The clamping device includes a pressure ring fixing plate (8), which is installed inside the annular plate (6). Several evenly distributed arc-shaped pressure plates (10) are installed on the bottom surface of the annular fixing plate (8) through springs (9). The arc-shaped pressure plates (10) can contact and cooperate with the base plate body (2).

3. A graphite-based disk with a silicon carbide coating according to claim 2, characterized in that: Each of the aforementioned arc-shaped pressure plates (10) has an arc-shaped rubber pad installed on its bottom surface.

4. A graphite-based disk with a silicon carbide coating according to claim 1, characterized in that: Each of the base disk bodies (2) has several evenly distributed placement slots (11) on its top surface, and each of the base disk bodies (2) is coated with a silicon carbide coating.

5. A graphite-based disk with a silicon carbide coating according to claim 1, characterized in that: Handles (12) are installed on both sides of the annular plate (6), and each handle (12) is fitted with an elastic pad on its outer periphery.

6. A graphite-based disk with a silicon carbide coating according to claim 1, characterized in that: The base (1) has an anti-slip pad installed on its bottom surface.

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