High-uniformity chemical vapor deposition silicon carbide coating carrier plate

Abstract

The utility model provides a high-uniformity chemical vapor deposition silicon carbide coating carrier plate, and mainly relates to the technical field of chemical vapor deposition silicon carbide coating carrier plates. A high-uniformity chemical vapor deposition silicon carbide coating carrier plate comprises a carrier plate body, a plurality of clamping grooves which are evenly distributed are formed in the bottom face of the carrier plate body, a supporting base is arranged below the carrier plate body, and a plurality of strip-shaped grooves which are evenly distributed are formed in the top face of the supporting base. The tray has the beneficial effects that the supporting base is matched with the supporting clamping block, so that the tray body can be supported, the supporting stability of the tray body is improved, and the tray body is convenient to support and take; meanwhile, through adjustment of the adjusting device, the position of the supporting clamping block can be adjusted, so that the supporting requirements of carrying disc bodies of different sizes are met, and the applicability of the device is improved; and under the cooperation of the sleeve rod and the sleeve, the height of the supporting clamping block can be adjusted, so that the supporting height is adjusted, and convenience is brought to use.

Description

Technical Field

[0001] This utility model mainly relates to the field of chemical vapor deposition silicon carbide coating carrier technology, specifically a highly uniform chemical vapor deposition silicon carbide coating carrier. Background Technology

[0002] Existing MOCVD reactors typically include: a spray head and a graphite disk positioned opposite each other. The spray head provides the reaction gas, and the graphite disk has multiple grooves, each corresponding to a substrate. Below the graphite disk is a heating device to heat the disk. The heated graphite disk heats the substrate through thermal radiation and conduction. During the MOCVD process, the reaction gas enters the reaction area above the graphite disk through the small holes of the spray head. The substrate reaches a certain temperature due to the heat conduction from the heating device, which allows the reaction gases to undergo a chemical reaction, thereby depositing an epitaxial material layer on the substrate surface.

[0003] Patent CN215713365U discloses a high-strength, high-toughness silicon carbide coated graphite carrier disk, comprising a body, a carrier groove on the top of the body, a threaded ring directly below the body, a retaining arc at the bottom of the threaded ring, a retaining groove at the bottom of the retaining arc, a plurality of retaining grooves arranged in a circumferential array, a sleeve directly below the retaining groove, a support rod slidably fitted on the top of the sleeve, a retaining block fixedly fitted into the retaining groove at the bottom of the support rod, a support foot facing outwards from the body at the bottom of the sleeve, a threaded groove at the bottom of the body, a threaded ring threadedly installed in the threaded groove, and a retaining rod on the sleeve for adjusting the extension length of the support rod within the sleeve.

[0004] The high-strength and high-toughness silicon carbide coated graphite carrier disk in the above patent has the following shortcomings: 1. The above patent supports the carrier disk body by setting a sleeve and support feet on the arc, but multiple support feet support independently, resulting in poor stability. When placing the carrier disk body, the support feet are prone to tipping over; 2. Multiple support feet support independently, requiring multiple handling and placement, which increases the physical labor of operators. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides a highly uniform chemical vapor deposition silicon carbide coating carrier. This invention, through the cooperation of a support base and a support block, can support the carrier body, improving its stability and facilitating support and removal. Simultaneously, the position of the support block can be adjusted via an adjustment device to meet the support requirements of carrier bodies of different sizes, thus improving the applicability of the device. Furthermore, the height of the support block can be adjusted via a sleeve and a rod, thereby adjusting the support height and providing convenience for use.

[0006] To achieve the above objectives, this utility model employs the following technical solution:

[0007] A highly uniform chemical vapor deposition silicon carbide coating carrier disk includes a carrier disk body with several evenly distributed slots on the bottom surface of the carrier disk body. A support base is provided below the carrier disk body, and several evenly distributed strip-shaped grooves are provided on the top surface of the support base. Each strip-shaped groove is provided with an adjustment device, and each adjustment device is equipped with a sleeve. Each sleeve is slidably provided with a rod, and each rod is equipped with a support block at its top. Each support block can be engaged into a corresponding slot, and each sleeve is equipped with a locking bolt. One end of each locking bolt can be connected to the corresponding rod.

[0008] Furthermore, the adjusting device includes an adjusting screw, one end of which is rotatably connected to a corresponding strip groove. A moving block is threaded onto the adjusting screw, and the moving block slides into contact with the strip groove. A connecting plate is mounted on the top surface of the moving block, and the bottom surface of the sleeve is connected to the top surface of the connecting plate.

[0009] Furthermore, a fixing plate is installed on the strip groove, and the adjusting screw passes through the fixing plate and is rotatably connected to the fixing plate.

[0010] Furthermore, a connecting block is installed at the other end of the adjusting screw.

[0011] Furthermore, the cross-section of the support block is trapezoidal.

[0012] Furthermore, several evenly distributed placement slots are formed on the top surface of the carrier body, and the inner wall of the carrier body is coated with a silicon carbide coating.

[0013] Furthermore, the bottom surface of the support base is equipped with an anti-slip pad.

[0014] Compared with the existing technology, the beneficial effects of this utility model are:

[0015] 1. This utility model, through the cooperation of the support base and the support block, can support the tray body, improve the support stability of the tray body, and facilitate support and handling.

[0016] 2. At the same time, the position of the support block can be adjusted by adjusting the adjustment device, thereby meeting the support requirements of different sized carrier bodies and improving the applicability of this device;

[0017] 3. With the cooperation of the sleeve and the socket, the height of the support block can be adjusted, thereby adjusting the support height and making it more convenient to use. Attached Figure Description

[0018] Appendix Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Appendix Figure 2 yes Figure 1 A bottom view;

[0020] Appendix Figure 3 yes Figure 1 The main view;

[0021] Appendix Figure 4 This is a structural diagram of the supporting base;

[0022] Appendix Figure 5 yes Figure 4 Top view;

[0023] Appendix Figure 6 This is a schematic diagram of the supporting card block structure;

[0024] Appendix Figure 7 This is a bottom view of the carrier disk body;

[0025] The following are the reference numerals in the attached diagram: 1. Carrier plate body; 2. Slot; 3. Support base; 4. Strip groove; 5. Sleeve; 6. Sleeve rod; 7. Support block; 8. Locking bolt; 9. Adjusting screw; 10. Moving block; 11. Connecting plate; 12. Fixing plate; 13. Connecting block; 14. Placement slot. Detailed Implementation

[0026] The present invention will be further described in conjunction with the accompanying drawings and specific embodiments. It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Furthermore, it should be understood that after reading the teachings of this invention, those skilled in the art can make various alterations or modifications to the present invention, and these equivalent forms also fall within the scope defined in this application.

[0027] like Figure 1-7As shown, the present invention discloses a high-uniformity chemical vapor deposition silicon carbide coating carrier disk, comprising a carrier disk body 1, wherein several uniformly distributed slots 2 are formed on the bottom surface of the carrier disk body 1, the slots 2 having a trapezoidal cross-section, a support base 3 is provided below the carrier disk body 1, and several uniformly distributed strip grooves 4 are formed on the top surface of the support base 3, each strip groove 4 having an adjustment device, each adjustment device having a sleeve 5 installed, each sleeve 5 having a sliding rod 6, each sleeve rod 6 having a support block 7 installed at its top, each support block 7 being able to engage with the corresponding slot 2, each sleeve 5 having a locking bolt 8 installed, and one end of each locking bolt 8 being able to abut against the corresponding sleeve rod 6.

[0028] Specifically, the adjusting device includes an adjusting screw 9, one end of which is rotatably connected to a corresponding strip groove 4. A movable block 10 is threaded onto the adjusting screw 9, and the movable block 10 slides into contact with the strip groove 4. A connecting plate 11 is mounted on the top surface of the movable block 10, and the bottom surface of the sleeve 5 is connected to the top surface of the connecting plate 11. By rotating the adjusting screw 9, the movable block 10 can move along the adjusting screw 9, thereby driving the connecting plate 11 to move. The movement of the connecting plate 11 drives the sleeve 5 to move, which in turn drives the support block 7 to move, thereby adjusting the position of the support block 7 to meet the support requirements of different sized carrier bodies 1, thus improving the applicability of this device.

[0029] Specifically, a fixing plate 12 is installed on the strip-shaped groove 4, and the adjusting screw 9 passes through the fixing plate 12 and is rotatably connected to the fixing plate 12. The fixing plate 12 provides support for the adjusting screw 9, thereby improving the stability of the adjusting screw 9.

[0030] Specifically, a connecting block 13 is installed at the other end of the adjusting screw 9. By setting the connecting block 13, it is convenient for the operator to rotate the adjusting screw 9, while avoiding direct contact between the operator's hand and the adjusting screw 9, thereby improving the operator's hand comfort.

[0031] Specifically, the cross-section of the support block 7 is trapezoidal. The trapezoidal cross-section of the support block 7 facilitates the insertion of the cardboard block 7 into the slot 2.

[0032] Specifically, the top surface of the carrier plate body 1 has several evenly distributed placement slots 14, and the inner wall of the carrier plate body 1 is coated with a silicon carbide coating. The placement slots 14 can separate and place items to avoid mutual interference between materials.

[0033] Specifically, an anti-slip pad is installed on the bottom surface of the support base 3. The anti-slip pad increases the friction of the support base 3 and improves its stability.

[0034] Working principle:

[0035] When using this device, first place the support base 3 in the usage position. Then, according to the size of the tray body 1, rotate the adjusting bolt 9 to move the moving block 10, thereby moving the connecting plate 11. The movement of the connecting plate 11 moves the sleeve 5, which in turn moves the support block 7, thereby adjusting the position of the support block 7 to meet the support requirements of tray bodies 1 of different sizes. Then, according to the support height requirements, move the sleeve rod 6 up and down along the sleeve 5, thereby moving the support block 7, thereby adjusting the height of the support block 7 to meet the support requirements at different heights. Then, tighten the locking bolt 8 to fix the sleeve rod 6, and then let the support block 7 be inserted into the slot 2 on the bottom surface of the tray body 1, thereby making the support block 7 support the tray body 1.

[0036] This invention supports the tray body by using a support base and a support block, improving the stability of the tray body and facilitating support and removal. Simultaneously, the position of the support block can be adjusted by the adjustment device to meet the support needs of tray bodies of different sizes, thus improving the applicability of the device. Furthermore, the height of the support block can be adjusted by the cooperation of the sleeve rod and sleeve, thereby adjusting the support height and providing convenience for use.

[0037] In the description of this utility model, it should be understood that the terms "upper," "side," "inner," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the adjustable irrigation flushing gun or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. In addition, it should be noted that unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "connect" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal communication of two elements or the interaction relationship of two elements. Unless otherwise explicitly limited, those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A highly uniform chemical vapor deposition silicon carbide coating carrier disk, comprising a carrier disk body (1), characterized in that: The bottom surface of the carrier body (1) has several evenly distributed slots (2). The bottom of the carrier body (1) is provided with a support base (3). The top surface of the support base (3) has several evenly distributed strip grooves (4). Each strip groove (4) is provided with an adjustment device. Each adjustment device is equipped with a sleeve (5). Each sleeve (5) is slidably provided with a sleeve rod (6). Each sleeve rod (6) is equipped with a support block (7) at its top. Each support block (7) can be inserted into the corresponding slot (2). Each sleeve (5) is equipped with a locking bolt (8). One end of each locking bolt (8) can be connected to the corresponding sleeve rod (6).

2. The highly uniform chemical vapor deposition silicon carbide coating carrier disk according to claim 1, characterized in that: The adjusting device includes an adjusting screw (9), one end of which is rotatably connected to the corresponding strip groove (4), a moving block (10) is threadedly installed on the adjusting screw (9), the moving block (10) is slidably contacted with the strip groove (4), a connecting plate (11) is installed on the top surface of the moving block (10), and the bottom surface of the sleeve (5) is connected to the top surface of the connecting plate (11).

3. The highly uniform chemical vapor deposition silicon carbide coating carrier disk according to claim 2, characterized in that: A fixing plate (12) is installed on the strip groove (4), and the adjusting screw (9) passes through the fixing plate (12) and is rotatably connected to the fixing plate (12).

4. The highly uniform chemical vapor deposition silicon carbide coating carrier disk according to claim 3, characterized in that: The other end of the adjusting screw (9) is fitted with a connecting block (13).

5. The highly uniform chemical vapor deposition silicon carbide coating carrier disk according to claim 1, characterized in that: The cross-section of the support block (7) is trapezoidal.

6. The highly uniform chemical vapor deposition silicon carbide coating carrier disk according to claim 1, characterized in that: The top surface of the carrier body (1) has several evenly distributed placement slots (14), and the inner wall of the carrier body (1) is coated with a silicon carbide coating.

7. The highly uniform chemical vapor deposition silicon carbide coating carrier disk according to claim 1, characterized in that: The bottom surface of the support base (3) is equipped with an anti-slip pad.

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