Measuring equipment

Abstract

The utility model discloses a measuring device which is characterized in that a first measuring block and a second measuring block are movably connected through a telescopic assembly, and the distance between the first measuring block and the second measuring block is changed, so that the first measuring block and the second measuring block are respectively abutted against a crucible and an outer guide support ring, and the first measuring block and the second measuring block are distributed in parallel; the first measuring block and the second measuring block are kept relatively parallel in a distance changing process; the first measuring block is fixedly connected with a ruler, the ruler and the first measuring block are arranged in parallel, the ruler is slidably connected with a sliding block, and the sliding block can drive the telescopic assembly to stretch out and draw back. Thus, the first measuring block abuts against the top face of the crucible, the telescopic assembly is driven by the sliding block until the second measuring block abuts against the bottom face of the outer guide supporting ring, the distance value between the first measuring block and the second measuring block is obtained through the corresponding position of the sliding block and the ruler, and therefore the limiting distance between the crucible and the outer guide supporting ring is obtained. And potential safety hazards in a thermal field are reduced.

Description

Technical Field

[0001] This application relates to the field of monocrystalline silicon manufacturing technology, and more specifically, to a measuring device. Background Technology

[0002] In the process of single-crystal silicon fabrication, a single-crystal furnace needs to be placed in a thermal field to provide the growth environment for the single-crystal silicon. Because the growth temperature of single-crystal silicon is relatively high, it is necessary to set the safety limiting distances for each component in the thermal field before single-crystal silicon fabrication. Specifically, it is necessary to limit the vertical safety distance between the crucible and the outer guide support ring of the single-crystal furnace. However, because the outer guide support ring obstructs the upper wall of the crucible, measuring the vertical distance between the crucible and the outer guide support ring is difficult, making it impossible to accurately set the safety limiting distance between the crucible and the outer guide support ring, posing a safety hazard.

[0003] In summary, accurately measuring the vertical distance between the crucible and the outer guide support ring to reduce safety hazards in the thermal field is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a measuring device to accurately measure the vertical distance between the crucible and the outer guide support ring, so as to reduce safety hazards in the thermal field.

[0005] To achieve the above objectives, this application provides the following technical solution:

[0006] A measuring device includes: a first measuring block, a second measuring block, a telescopic assembly, a slider, and a scale; wherein the first measuring block is used to abut against the top surface of a crucible, and the second measuring block is used to abut against the bottom surface of an outer guide support ring; the telescopic assembly is movably connected to the first measuring block and the second measuring block, and the first measuring block and the second measuring block are distributed parallel to each other; the scale is fixedly connected to the first measuring block and is arranged parallel to the first measuring block; the slider is slidably connected to the scale, and the slider is used to drive the telescopic assembly.

[0007] In some embodiments, the first measuring block includes a limiting block, which is perpendicular to the first measuring block and fixedly connected to the bottom surface of the first measuring block; the limiting block is used to abut against the inner surface of the crucible.

[0008] In some embodiments, the contact surface between the limiting block and the crucible is an arc surface; or, the contact surface between the limiting block and the crucible is a plane.

[0009] In some embodiments, the contact surface between the first measuring block and the crucible is a plane;

[0010] And / or, the contact surface between the second measuring block and the outer guide support ring is a plane.

[0011] In some embodiments, the telescopic assembly includes: a first rotating rod, one end of which is rotatably connected to the first measuring block, and the other end of which is movably connected to the second measuring block; a second rotating rod, one end of which is rotatably connected to the second measuring block, and the other end of which is rotatably connected to the slider; the first rotating rod and the second rotating rod are rotatably connected.

[0012] In some embodiments, the second measuring block is provided with a sliding groove, the first rotating rod is rotatably connected to the sliding groove, and the first rotating rod is capable of sliding along the sliding groove.

[0013] In some embodiments, the telescopic components are in two sets, with the two sets of telescopic components respectively disposed on both sides of the scale.

[0014] In some embodiments, the slider includes: a retaining pin that detachably and securely connects the scale and the slider; and a pointer that is fixedly connected to the slider and corresponds to a graduation on the scale.

[0015] In some embodiments, the retaining pin is threadedly engaged with the slider, and the retaining pin abuts against the scale.

[0016] In some embodiments, the slider is fixedly connected to at least one pulley, and the pulley is slidably connected to the scale.

[0017] The measuring device provided in this application includes a first measuring block that abuts against the top surface of a crucible and a second measuring block that abuts against the bottom surface of an outer guide support ring. The first and second measuring blocks are movably connected by a telescopic assembly. The distance between the first and second measuring blocks is changed by extending and retracting the telescopic assembly, ensuring that the first and second measuring blocks abut against the crucible and the outer guide support ring respectively. The first and second measuring blocks are parallel to each other, maintaining relative parallelism during the distance change to guarantee the accuracy of the vertical distance measurement between the crucible and the outer guide support ring. A scale is fixedly connected to the first measuring block, parallel to it, and a slider is slidably connected to the scale, driving the telescopic assembly to extend and retract. In this way, the first measuring block abuts against the top surface of the crucible, and the slider drives the telescopic assembly until the second measuring block abuts against the bottom surface of the outer guide support ring. The distance between the first and second measuring blocks is obtained by the corresponding positions of the slider and the scale, thus determining the limiting distance between the crucible and the outer guide support ring and reducing safety hazards in the thermal field. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of the measuring device provided in an embodiment of this application from one perspective;

[0020] Figure 2 This is a schematic diagram of the structure of the measuring device provided in an embodiment of this application from another perspective;

[0021] Figure 3 for Figure 2 The front view of the measuring device shown;

[0022] Figure 4 for Figure 2 Top view of the measuring equipment shown;

[0023] Figure 5 This is a schematic diagram of the operation of the measuring device provided in the embodiments of this application;

[0024] Figure 6 for Figure 5 The diagram shown is a cross-sectional view of the working structure.

[0025] Figure 7 for Figure 6 The front view of the sectional structural diagram shown.

[0026] Explanation of reference numerals in the attached figures:

[0027] 1-First measuring block, 11-Limiting block, 2-Second measuring block, 21-Slide groove, 3-Telescopic assembly, 31-First rotating rod, 32-Second rotating rod, 4-Slider, 41-Fixing pin, 42-Pulley, 43-Pointer, 5-Scale;

[0028] 101-Outer guide support ring, 102-Insulation cylinder, 103-Crucible. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. The terminology used in the following embodiments is for the purpose of describing specific embodiments only and is not intended to be a limitation of this application. As used in the specification and appended claims of this application, the singular expressions "a," "an," "the," "the," "the," and "this" are intended to also include expressions such as "one or more," unless the context clearly indicates otherwise. It should also be understood that in the embodiments of this application, "one or more" refers to one, two, or more; "and / or" describes the relationship between related objects, indicating that three relationships may exist; for example, A and / or B can represent: A alone, A and B simultaneously, or B alone, where A and B can be singular or plural. The character " / " generally indicates that the preceding and following related objects are in an "or" relationship.

[0031] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0032] The "multiple" mentioned in the embodiments of this application refers to two or more. It should be noted that in the description of the embodiments of this application, terms such as "first" and "second" are used only for the purpose of distinguishing descriptions and should not be construed as indicating or implying relative importance, nor should they be construed as indicating or implying order.

[0033] The terms "parallel" and "perpendicular" used in this application refer to "basically parallel" and "basically perpendicular" in practical operation. "Basically parallel" can be understood as parallelism with a certain degree of error, and similarly, "basically perpendicular" can be understood as perpendicularity with a certain degree of error.

[0034] The “plane” referred to in this application is a “plane that is substantially parallel to the horizontal plane” in actual operation.

[0035] In existing single crystal furnace hot zones, such as Figure 5As shown, the single crystal product is melted inside the crucible 103. An insulation cylinder 102 is installed outside the crucible 103 for heat preservation. An external guide support ring 101 is installed at the top of the insulation cylinder 102 to ensure the normal growth of the single crystal product within the crucible 103. Before melting the single crystal product, a safe distance (usually set at 25mm-30mm) needs to be established between the bottom surface of the external guide support ring 101 and the top surface of the crucible 103. Too high a distance will affect the crystal pulling effect at the tail end of the single crystal, while too low a distance may cause interference between the crucible 103 and the external guide support ring 101. Therefore, a specified limiting distance needs to be maintained between the external guide support ring 101 and the crucible 103. However, because the external guide support ring 101 obstructs the top surface of the crucible 103, measuring the distance between the crucible 103 and the external guide support ring 101 is difficult. Measuring with a tape measure poses a safety hazard, and visual observation results in inaccurate data, affecting the subsequent crystal pulling process of the single crystal product.

[0036] This application provides a measuring device to accurately measure the vertical distance between the crucible and the outer guide support ring, thereby reducing safety hazards in the thermal field.

[0037] like Figures 1-7 The measuring device provided in this application includes: a first measuring block 1, a second measuring block 2, a telescopic assembly 3, a slider 4, and a scale 5. The first measuring block 1 is used to abut against the top surface of the crucible 103, and the second measuring block 2 is used to abut against the bottom surface of the outer guide support ring 101. The telescopic assembly 3 movably connects the first measuring block 1 and the second measuring block 2, so that the distance between the first measuring block 1 and the second measuring block 2 can be changed by the extension and retraction of the telescopic assembly 3, so that the first measuring block 1 and the second measuring block 2 abut against the crucible 103 and the outer guide support ring 101 respectively, and the first measuring block 1 and the second measuring block 2 are parallel to each other, so that the first measuring block 1 and the second measuring block 2 can remain relatively parallel during the process of changing their relative distance, thereby ensuring the accuracy of the measurement of the vertical distance between the crucible 103 and the outer guide support ring 101.

[0038] The first measuring block 1 is fixedly connected to a scale 5, which is parallel to the first measuring block 1. A slider 4 is slidably connected to the scale 5, and the slider 4 can drive the telescopic component 3 to extend and retract. In this way, the first measuring block 1 is brought into contact with the top surface of the crucible 103. By pushing the slider 4, the slider 4 drives the telescopic component 3 to extend and retract until the second measuring block 2 is brought into contact with the top surface of the outer guide support ring 101. The distance between the first measuring block 1 and the second measuring block 2 is obtained by the corresponding position of the slider 4 and the scale 5, thereby obtaining the limiting distance between the crucible 103 and the outer guide support ring 101, reducing safety hazards in the thermal field.

[0039] Since the crucible 103 has a certain thickness, in order to ensure the stability of the contact process between the first measuring block 1 and the crucible 103, such as Figure 3 As shown, the first measuring block 1 includes a limiting block 11, which is perpendicular to the first measuring block 1 and fixedly connected to the bottom surface of the first measuring block 1. The limiting block 11 can abut against the inner surface of the crucible 103. Thus, as... Figure 6 As shown, the bottom surface of the first measuring block 1 is grounded with the top surface of the crucible 103, and the limiting block 11 abuts against the inner side surface of the crucible 103, so that the first measuring block 1 can maintain relative stability with the crucible 103, so as to facilitate subsequent measurements and improve the accuracy of the measurement data.

[0040] In some embodiments, in order to further improve the accuracy of the measurement, the contact surface between the limiting block 11 and the crucible 103 is an arc surface, and the arc surface of the limiting block 11 is adapted to the curvature of the inner surface of the crucible 103, so that the limiting block 11 can fit more closely to the crucible 103, thereby further ensuring the accuracy of the measurement data.

[0041] In some other embodiments, since the diameter of the crucible 103 differs significantly from the size of the limiting block 11, in order for the measuring device to be applicable to crucibles 103 of different sizes, the contact surface between the limiting block 11 and the crucible 103 is a plane, which can still ensure stable contact between the limiting block 11 and the crucible 103 and improve the applicability of the measuring device.

[0042] To further improve the accuracy of measurements, such as Figures 1-4 As shown, the contact surface between the first measuring block 1 and the crucible 103 is a plane, and the contact surface between the second measuring block 2 and the outer guide support ring 101 is a plane. This increases the contact area between the first measuring block 1 and the crucible 103, and also increases the contact area between the second measuring block 2 and the outer guide support ring 101, improving the stability of the measuring equipment during the measurement process and further enhancing the accuracy of the measurement.

[0043] like Figures 2-3 As shown, the telescopic assembly 3 includes: a first rotating rod 31, one end of which is rotatably connected to the first measuring block 1, and the other end of which is rotatably and slidably connected to the second measuring block 2; and a second rotating rod 32, one end of which is rotatably connected to the second measuring block 2, and the other end of which is rotatably connected to the slider 4, with the first rotating rod 31 and the second rotating rod 32 rotatably connected. Thus, during the process of the slider 4 pushing the second rotating rod 32, the rotation of the first rotating rod 31 and the second rotating rod 32 can push the second measuring block 2 towards the outer guide support ring 101 until the second measuring block 2 abuts against the outer guide support ring 101.

[0044] To facilitate the movement of the first rotating rod 31, such as Figure 3As shown, the second measuring block 2 has a sliding groove 21, the first rotating rod 31 is rotatably connected to the sliding groove 21, and the first rotating rod 31 can slide along the sliding groove 21 so that the telescopic component 3 can extend and retract.

[0045] like Figures 1-2 As shown, there are two sets of telescopic components 3, and the two sets of telescopic components 3 are respectively set on both sides of the scale 5 to improve the stability of the telescopic components 3 during operation, to ensure the smoothness of the measurement process, and to further reduce safety hazards.

[0046] like Figures 2-4 As shown, the slider 4 includes: a fixing pin 41, which can detachably fix the scale 5 and the slider 4 so that when the slider 4 slides to the point where the second measuring block 2 abuts against the outer guide support ring 101, the fixing pin 41 can fix the relative position of the slider 4 and the scale 5 to ensure the accuracy of the measurement data; it also includes a pointer 43, which is fixedly connected to the slider 4 and corresponds to the scale of the scale 5. The pointer 43 makes it easier to read the measurement data and improves the accuracy of the data.

[0047] In some embodiments, the fixing pin 41 is threadedly engaged with the slider 4 and abuts against the scale 5. Thus, when it is necessary to fix the relative position of the slider 4, the fixing pin 41 is screwed into the slider 4 until the fixing pin 41 abuts against the scale 5 to fix the relative position of the slider 4 and the scale 5.

[0048] like Figure 4 As shown, in order to improve the stability of the sliding process of the slider 4 relative to the scale 5, at least one pulley 42 is fixedly connected to the slider 4. The sliding connection between the pulley 42 and the scale 5 makes the process of pushing the slider 4 smoother and improves the measurement efficiency.

[0049] like Figures 5-7 As shown, when the measuring device provided in this embodiment is in operation, the slider 4 is first pulled away from the first measuring block 1 so that the second measuring block 2 is close to the first measuring block 1, so that the measuring device can enter between the crucible 103 and the outer guide support ring 101, and the top surface of the first measuring block 1 is brought into contact with the crucible 103. Then the slider 4 is pushed until the second measuring block 2 is brought into contact with the bottom surface of the outer guide support ring 101. Then the slider 4 is fixed by the fixing pin 41. After the measuring device is taken out, the distance between the first measuring block 1 and the second measuring block 2 can be obtained by reading the corresponding scale on the pointer 43 and the scale 5, thereby realizing accurate measurement of the vertical distance between the crucible 103 and the outer guide support ring 101 and reducing safety hazards in the thermal field.

[0050] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A measuring device, characterized in that, include: First measuring block (1), second measuring block (2), telescopic assembly (3), slider (4) and scale (5); Wherein, the first measuring block (1) is used to abut against the top surface of the crucible (103), and the second measuring block (2) is used to abut against the bottom surface of the outer guide support ring (101); The telescopic component (3) is movably connected to the first measuring block (1) and the second measuring block (2), and the first measuring block (1) and the second measuring block (2) are distributed in parallel. The scale (5) is fixedly connected to the first measuring block (1), the scale (5) is set parallel to the first measuring block (1), the slider (4) is slidably connected to the scale (5), and the slider (4) is used to drive the telescopic component (3).

2. The measuring device according to claim 1, characterized in that, The first measuring block (1) includes a limiting block (11), the limiting block (11) is perpendicular to the first measuring block (1), and the limiting block (11) is fixedly connected to the bottom surface of the first measuring block (1); The limiting block (11) is used to abut against the inner side of the crucible (103).

3. The measuring device according to claim 2, characterized in that, The contact surface between the limiting block (11) and the crucible (103) is an arc surface; or, the contact surface between the limiting block (11) and the crucible (103) is a plane.

4. The measuring device according to claim 1, characterized in that, The contact surface between the first measuring block (1) and the crucible (103) is a plane; And / or, the contact surface between the second measuring block (2) and the outer guide support ring (101) is a plane.

5. The measuring device according to claim 1, characterized in that, The telescopic component (3) includes: The first rotating rod (31) has one end rotatably connected to the first measuring block (1), and the other end of the first rotating rod (31) away from the first measuring block (1) is movably connected to the second measuring block (2); The second rotating rod (32) has one end rotatably connected to the second measuring block (2), and the other end of the second rotating rod (32) away from the second measuring block (2) is rotatably connected to the slider (4); The first rotating rod (31) is rotatably connected to the second rotating rod (32).

6. The measuring device according to claim 5, characterized in that, The second measuring block (2) has a sliding groove (21), the first rotating rod (31) is rotatably connected to the sliding groove (21), and the first rotating rod (31) can slide along the sliding groove (21).

7. The measuring device according to claim 1, characterized in that, The telescopic components (3) are in two sets, and the two sets of telescopic components (3) are respectively arranged on both sides of the scale (5).

8. The measuring device according to claim 1, characterized in that, The slider (4) includes: A fixing pin (41) is provided, which detachably connects the scale (5) and the slider (4). The pointer (43) is fixedly connected to the slider (4), and the pointer (43) corresponds to the scale of the ruler (5).

9. The measuring device according to claim 8, characterized in that, The fixing pin (41) is threadedly engaged with the slider (4), and the fixing pin (41) abuts against the scale (5).

10. The measuring device according to any one of claims 1-9, characterized in that, The slider (4) is fixedly connected to at least one pulley (42), and the pulley (42) is slidably connected to the scale (5).

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