Horizontal vacuum furnace

Abstract

The utility model relates to the technical field of vacuum furnaces, in particular to a horizontal vacuum furnace. Comprising a furnace body, an electric heating device, a vacuum system and a power distribution cabinet, the furnace body comprises an external furnace shell and an internal hearth, the electric heating device is arranged between the furnace shell and the hearth, a sealing cover is arranged at the end of the furnace shell, two parallel lower sliding rails are arranged in the hearth, a bearing plate is jointly installed on the two lower sliding rails in a sliding mode, one side, facing the sealing cover, of the bearing plate is movably connected with a connecting rod, and the other end of the connecting rod is movably connected with the inner wall of the sealing cover. When the sealing cover is opened, the sealing cover pulls the bearing plate to move outwards through the pull rod, the end of the bearing plate leaks out of the hearth, and the crucible is convenient to place. When the sealing cover is closed, the sealing cover abuts against the bearing plate through the ejector rod and slides along the lower sliding rail to extend into the hearth. Therefore, the crucible can be taken and placed in the deep position of the hearth. Compared with push-pull of a hook rod, push-pull is more convenient and faster, use of additional parts is reduced, and the operation difficulty is lowered.

Description

Technical Field

[0001] This application relates to the field of vacuum furnace technology, and more particularly to a horizontal vacuum furnace. Background Technology

[0002] A vacuum furnace is a furnace chamber that uses a vacuum system (composed of a vacuum pump, vacuum measuring device, vacuum valves, and other components) to remove some of the material from the furnace chamber, so that the pressure inside the furnace chamber is less than one standard atmosphere, thus achieving a vacuum state.

[0003] In traditional vacuum furnaces, the crucible is placed on a pallet and then pushed deep into the furnace chamber using a hook. After processing, the lid is opened, and the crucible is pulled to the side of the pallet using the hook before being transferred. This process is not only cumbersome, but the hook makes it easy to tip or tilt the crucible, requiring a certain level of patience and skill.

[0004] Therefore, this application provides a horizontal vacuum furnace to improve the convenience of crucible handling. Utility Model Content

[0005] The purpose of this application is to propose a horizontal vacuum furnace to solve the problems existing in the prior art.

[0006] To achieve the above objectives, this application adopts the following technical solution:

[0007] A horizontal vacuum furnace includes a furnace body, an electric heating device, a vacuum system, and a power distribution cabinet;

[0008] The furnace body includes an outer furnace shell and an inner furnace chamber. The electric heating device is installed between the furnace shell and the furnace chamber. The furnace shell has a cover at its end. The furnace chamber has two parallel sliding rails. A bearing plate is slidably installed on the two sliding rails. A connecting rod is movably connected to the side of the bearing plate facing the cover. The other end of the connecting rod is movably connected to the inner wall of the cover.

[0009] Preferably, the bottom end of the bearing plate is symmetrically provided with two sets of ∩-shaped sliding blocks, and the two sets of sliding blocks are respectively fastened to two sliding rails.

[0010] Preferably, two upper slide rails are installed parallel to each other above the two lower slide rails inside the furnace, and brackets are fastened to both sides of the bearing plate, with ∩-shaped upper slides on the brackets corresponding to the lower slides.

[0011] Preferably, the bearing plate is provided with C-shaped connecting seats on the end facing the cover and on the inner wall of the cover. Bolts are fastened between the two cantilever arms of the connecting seats, and straight slot holes for bolts to pass through are provided at both ends of the connecting rod.

[0012] Preferably, the distance between the opposite sides of the upper and lower cantilever of the connecting seat is greater than the thickness of the connecting rod.

[0013] Preferably, the upper slide rail is curved upwards at the end facing the cover.

[0014] Preferably, the upper slide rail is shorter than the lower slide rail, and the ends of the upper and lower slide rails that extend deep into the furnace are level.

[0015] Compared with the prior art, this application provides a horizontal vacuum furnace, which has the following advantages:

[0016] When opening the lid, the lid is pulled outward by a lever, causing the support plate to protrude from the furnace chamber, facilitating the placement of the crucible. When closing the lid, the lid slides into the furnace chamber along a lower rail, propelled by a push rod against the support plate. This allows for the placement and removal of the crucible deep within the furnace chamber. Compared to a push-pull mechanism, this method is more convenient and faster, reduces the need for additional components, and simplifies operation.

[0017] Other advantages, objectives and features of this application will be set forth in part in the description which follows; and in part will be apparent to those skilled in the art upon examination of the following description; or may be learned from practice of this application. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the front end of the furnace body in this application.

[0019] Figure 2 This is a schematic diagram of the rear end of the furnace body in this application.

[0020] Figure 3 This is a schematic diagram of the furnace body along its axis in this application.

[0021] Figure 4 For the purposes of this application Figure 3 Top view of the assembly of the load-bearing plate and accessories.

[0022] Figure 5 This is a schematic diagram of the furnace body in radial vertical section according to this application.

[0023] Figure 6 For the purposes of this application Figure 5 Front view of the load-bearing plate and accessories.

[0024] Figure 7 This is a side view of the carrier plate and accessories of this application.

[0025] Figure 8 This is a three-dimensional schematic diagram of the carrier plate and accessories of this application.

[0026] Figure 9 For the purposes of this application Figure 8 A partial schematic diagram of point A in the middle.

[0027] Figure 10 For the purposes of this application Figure 8 Partial view of section B and diagram showing the structure of the sliding block.

[0028] In the diagram: 1. Base; 2. Support; 3. Furnace shell; 4. Furnace chamber; 5. Cover; 6. High valve; 7. Diffusion pump; 8. Fore-stage valve; 9. Pre-extraction valve; 10. Roots pump; 11. Distribution cabinet; 12. Lower slide rail; 13. Bearing plate; 14. Lower slide block; 15. Upper slide rail; 16. Upper slide block; 17. Connecting seat; 18. Bolt; 19. Connecting rod. Detailed Implementation

[0029] The following will refer to the appendices in the embodiments of this application. Figure 1-10 The technical solutions in the embodiments of this application are clearly and completely described. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0030] Example 1: In order to solve the problems existing in the prior art, this example provides a horizontal vacuum furnace, including a furnace body, an electric heating device, a vacuum system, and a power distribution cabinet 11;

[0031] The furnace body includes an outer furnace shell 3 and an inner furnace chamber 4. The electric heating device is located between the furnace shell 3 and the furnace chamber 4. The furnace shell 3 is provided with a cover 5 at its end. The furnace chamber 4 is provided with two parallel sliding rails 12. A bearing plate 13 is slidably installed on the two sliding rails 12. A connecting rod 19 is movably connected to the side of the bearing plate 13 facing the cover 5. The other end of the connecting rod 19 is movably connected to the inner wall of the cover 5.

[0032] Principle details of this embodiment:

[0033] A horizontal vacuum furnace includes a base 1, a furnace body, an electric heating device, a vacuum system, and a power distribution cabinet 11.

[0034] The base 1 provides the supporting structure. Preferably, the bottom of the base 1 is equipped with casters, which can be moved and raised to maintain stability. A bracket 2 is fastened to one side of the base 1 to support the furnace body on which the vacuum furnace is installed.

[0035] The furnace body includes a furnace shell 3 securely mounted on a bracket 2. The furnace shell 3 is made of carbon steel or stainless steel, and the joint surfaces of detachable parts are sealed with vacuum sealing material. A furnace chamber 4 is mounted inside the furnace shell 3 via a frame. Both the furnace shell 3 and the furnace chamber 4 are open at the same end, and a cover 5 is rotatably mounted at the opening of the furnace shell 3. A snap-locking structure is provided between the cover 5 and the port of the furnace shell 3. The inner wall of the cover 5 has raised steps that extend into the furnace chamber 4 to seal it, thus sealing the port of the furnace chamber 4. An air-cooling device is also provided inside the furnace shell 3 to prevent deformation of the furnace shell 3 and deterioration of the sealing material due to heat, and to cool the surface of the furnace shell 3, preventing excessively high temperatures on the outer wall of the furnace shell 3 that could cause burns.

[0036] The electric heating device is located between the furnace shell 3 and the furnace chamber 4. The electric heating device is a silicon molybdenum rod or an electric heating wire wound around the furnace chamber 4, used to provide stable heat energy for heat treatment inside the furnace chamber 4.

[0037] The vacuum system includes a connecting pipe that penetrates the furnace shell 3 and communicates with the cavity of the furnace chamber 4. A high-pressure valve 6 is detachably installed on the port of the connecting pipe located outside the furnace shell 3, and a filter is provided between the high-pressure valve 6 and the port of the connecting pipe. A diffusion pump 7, which is fastened to the base 1, is connected to the lower end of the high-pressure valve 6. A pre-evacuation valve 9 is connected to the side of the valve body, and a gas pipe is connected to the outlet of the pre-evacuation valve 9. The gas pipe is connected to a Roots pump 10, which is fastened to the base 1. A pre-stage valve 8 is provided between the outlet of the diffusion pump 7 and the gas pipe.

[0038] The power distribution cabinet 11 is equipped with an electrical control system and a temperature control system for the electric heating device, serving as the control center for the vacuum furnace.

[0039] To facilitate the placement and removal of the crucible:

[0040] In this embodiment, the furnace chamber 4 is provided with two parallel sliding rails 12, which are located below the center line of the furnace chamber 4. A support plate 13 is slidably mounted on both sliding rails 12. The support plate 13 has multiple grooves for placing crucibles, improving the stability of crucible placement. A connecting rod 19 is movably connected to the side of the support plate 13 facing the cover 5, and the other end of the connecting rod 19 is movably connected to the inner wall of the cover 5, forming a crank-slider mechanism.

[0041] Based on the above technical solution:

[0042] In use, the cover 5 is opened, and the cover 5 is pulled outward by the pull rod to move the support plate 13. The end of the support plate 13 protrudes from the furnace chamber 4, facilitating the placement of the crucible. After placing the crucible into the settling tank, the cover 5 is closed. The cover 5 slides along the lower rail 12 against the support plate 13 via the push rod and extends into the furnace chamber 4. This allows the crucible to be placed or removed deep within the furnace chamber 4. Compared to the push-pull method with a hook, this is more convenient and faster, reduces the use of additional parts, and lowers the difficulty of operation.

[0043] In a further embodiment of this solution, as described in Example 2, the bottom end of the support plate 13 is symmetrically provided with two sets of U-shaped sliding blocks 14, which are respectively fastened to two lower sliding rails 12. This allows the support plate 13 to be slidably installed on the two lower sliding rails 12.

[0044] In Example 3, a further embodiment of this solution, two upper slide rails 15 are installed parallel to each other above the two lower slide rails 12 inside the furnace 4. Supports 2 are fastened to both sides of the support plate 13, and each support 2 has a U-shaped upper slide block 16 corresponding to the lower slide block 14. The cooperation and restraint of the upper slide rails 15 and lower slide rails 12 prevent the support plate 13 from tilting or deviating during the pushing and pulling process of the connecting rod 19.

[0045] In a further embodiment of this solution, as described in Example 4, the bearing plate 13 facing the cover 5 and the inner wall of the cover 5 are both provided with C-shaped connecting seats 17. Each of the two cantilever arms of the two connecting seats 17 has a through-hole. A bolt 18 is inserted into the two holes of the two cantilever arms of the same connecting seat 17, passing through both holes. Nuts are threaded onto the ends of both bolts, which rest against the outer wall of the cantilever arm. Both ends of the connecting rod 19 have straight slots through which the bolts 18 pass. The connecting seats 17 and the bolts 18 enable a movable connection between the connecting rod 19 and the bearing seat and the cover 5.

[0046] In Example 5, a further embodiment of this solution, the distance between the opposite sides of the upper and lower cantilevered surfaces of the connecting seat 17 is greater than the thickness of the connecting rod 19, and the diameter of the straight slot hole is greater than the diameter of the bolt 18. This allows for a flexible connection between the connecting rod 19 and the connecting seat 17, providing a misalignment gap and preventing jamming during pushing and pulling.

[0047] In a further embodiment of this solution, as described in Example 6, the upper slide rail 15 is curved upwards at the end facing the cover 5. The length of the upper slide rail 15 is shorter than the length of the lower slide rail 12, and the ends of the upper slide rail 15 and the lower slide rail 12 that extend deep into the furnace chamber 4 are level with each other.

[0048] Based on the above technical solution:

[0049] During installation, the lower slider 14 at the bottom of the bearing plate 13 is fastened to the end of the lower slide rail 12, and then pushed into the furnace 4. The upper slider 16 can be directly fastened to the upper slide rail 15 without the need for manual adjustment and alignment, which is more convenient.

[0050] In this design, the upper slide rail 15, lower slide rail 12, upper slider 16, lower slider 14, connecting seat 17, connecting rod 19, bolt 18, nut, and bearing plate 13 are all made of high-temperature and corrosion-resistant materials, such as high-temperature alloys, tungsten-molybdenum alloys, cast steel wear-resistant alloys, hard alloys, stainless steel, and heat-resistant steel.

[0051] The above description is merely a preferred embodiment of this application, but the scope of protection of this application is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in this application, based on the technical solution and application concept of this application, should be included within the scope of protection of this application.

[0052] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0053] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A horizontal vacuum furnace, characterized in that, Includes furnace body, electric heating device, vacuum system, and distribution cabinet (11); The furnace body includes an outer furnace shell (3) and an inner furnace chamber (4). The electric heating device is set between the furnace shell (3) and the furnace chamber (4). The furnace shell (3) is provided with a cover (5) at the end. The furnace chamber (4) is provided with two parallel sliding rails (12). A bearing plate (13) is slidably installed on the two sliding rails (12). A connecting rod (19) is movably connected to the side of the bearing plate (13) facing the cover (5). The other end of the connecting rod (19) is movably connected to the inner wall of the cover (5).

2. A horizontal vacuum furnace according to claim 1, characterized in that, The bottom end of the bearing plate (13) is symmetrically provided with two sets of ∩-shaped sliding blocks (14), and the two sets of sliding blocks (14) are respectively fastened to the two sliding rails (12).

3. A horizontal vacuum furnace according to claim 2, characterized in that, Inside the furnace (4), two upper slide rails (15) are installed parallel above the two lower slide rails (12). Supports (2) are fastened to both sides of the bearing plate (13). On the support (2), there are ∩-shaped upper slides (16) corresponding to the lower slides (14).

4. A horizontal vacuum furnace according to claim 1, characterized in that, The bearing plate (13) facing the end of the cover (5) and the inner wall of the cover (5) are provided with C-shaped connecting seats (17). Bolts (18) are fastened between the two cantilever arms of the connecting seat (17). Straight slot holes for the bolts (18) to pass through are provided at both ends of the connecting rod (19).

5. A horizontal vacuum furnace according to claim 4, characterized in that, The distance between the upper and lower cantilever sides of the connecting seat (17) is greater than the thickness of the connecting rod (19).

6. A horizontal vacuum furnace according to claim 3, characterized in that, The upper slide rail (15) is curved upward at the end facing the cover (5).

7. A horizontal vacuum furnace according to claim 6, characterized in that, The upper slide rail (15) is shorter than the lower slide rail (12), and the upper slide rail (15) and the lower slide rail (12) are level at one end when they extend into the furnace (4).

Images