High-voltage testing device for semiconductor device

Abstract

The utility model relates to a high-voltage testing device for a semiconductor device, which is matched with external testing equipment for use and comprises a testing box. A chip assembly and an interface assembly are installed in the test box, a chip board in the chip assembly is electrically connected with the interface assembly, and the interface assembly is electrically connected with the test equipment; a top cover is arranged at the top of the test box; a first fixing assembly is arranged on the top cover; the first fixing assembly comprises a driving device, a first sliding frame and a second sliding frame, clamping grooves are formed in the side walls, close to each other, of the first sliding frame and the second sliding frame, the clamping grooves incline downwards, and upper groove openings of the clamping grooves extend to the upper end faces of the sliding frames and are used for containing clamping blocks arranged on test equipment; the driving device is arranged on the top cover and used for driving the first sliding frame and the second sliding frame to slide in the second direction, so that the clamping block located at the upper notch of the clamping groove moves to the bottom of the clamping groove, and the test equipment is fixed. According to the test device in the embodiment, the test equipment is more convenient and quicker to mount and dismount.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device testing equipment technology, and in particular to a high voltage testing device for semiconductor devices. Background Technology

[0002] Existing high-voltage testing devices for semiconductor devices work in conjunction with external testing equipment to test semiconductor devices. However, in order to ensure the electrical connection between the testing device and the high-voltage testing device, the testing device needs to be fixed to the top of the high-voltage testing device with many bolts. When the testing device needs to be disassembled, each bolt needs to be removed one by one. The entire installation and disassembly process of the testing device is cumbersome, time-consuming and labor-intensive. Therefore, a high-voltage testing device for semiconductor devices is proposed to solve the above problems. Utility Model Content

[0003] This invention provides a high-voltage testing device for semiconductor devices, making the installation and disassembly of the testing equipment more convenient and faster.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A high-voltage testing device for semiconductor devices, used in conjunction with external testing equipment, includes a test chamber;

[0006] The aforementioned test box contains a chip assembly and an interface assembly. The chip assembly includes multiple chip boards on which semiconductor devices are mounted. The chip boards are electrically connected to the interface assembly, and the interface assembly is electrically connected to the test equipment.

[0007] The test chamber is provided with a top cover, and the top cover is provided with a first fixing component for fixing the test equipment.

[0008] The aforementioned first fixing component includes a drive device, a first sliding frame, and a second sliding frame;

[0009] The first sliding frame and the second sliding frame are distributed on the outer side walls of both ends of the top cover along the first direction, and the two are parallel and slide along the second direction, and the second direction is perpendicular to the first direction.

[0010] The first sliding frame and the second sliding frame are provided with slots on their adjacent side walls, and the slots are inclined downwards. The upper opening of the slots extends to the upper surface of the sliding frame and is used to place the card blocks set on the test equipment.

[0011] The aforementioned driving device is located on the top cover and is used to drive the first sliding frame and the second sliding frame to slide along the second direction, so that the card block located at the slot opening moves along the inner side wall of the card slot to the bottom of the card slot to fix the aforementioned test equipment.

[0012] Preferably, the top cover is further provided with a second fixing component, which includes two fixing sub-components. The two fixing sub-components are distributed on the outer side walls of both ends of the top cover along the second direction. The two fixing sub-components are respectively located on the outer side of both ends of the test device along the second direction to fix the two ends of the test device along the second direction.

[0013] Preferably, the driving device includes a handle, a main connecting rod, a first rotating block, a second rotating block, a first sliding block, and a second sliding block;

[0014] One end of the handle is rotatably mounted on the inner side wall of the top cover, and the other end is detachably fixed to the top cover.

[0015] The first rotating block and the second rotating block are distributed on both sides of the handle along the first direction and are both connected to the inner sidewall of the top cover. The middle part of the main connecting rod is rotatably connected to the handle, and the two ends of the main connecting rod are rotatably connected to the first rotating block and the second rotating block, respectively.

[0016] A first connecting rod is rotatably connected between the first sliding block and the first rotating block. The first sliding block is slidably disposed on the inner wall of the top cover in the second direction and passes through the inner wall of the top cover to connect with the first sliding frame.

[0017] A second connecting rod is rotatably connected between the second sliding block and the second rotating block. The second sliding block is slidably disposed on the inner side wall of the top cover along the second direction and passes through the inner side wall of the top cover to connect with the second sliding frame.

[0018] Preferably, the side wall of the top cover is provided with a first hook, the end of the handle away from its rotating connection end is provided with a connecting block, the connecting block is provided with a second hook, and the second hook is connected to the first hook.

[0019] Preferably, the inner wall of the top cover is provided with a main arc-shaped groove, a first arc-shaped groove, and a second arc-shaped groove;

[0020] A main rotating shaft is connected between the handle and the main connecting rod, and the protruding end of the main rotating shaft is located in the main arc-shaped groove.

[0021] The aforementioned main connecting rod and the aforementioned first connecting rod are each connected to the aforementioned first rotating block by a first rotating shaft, and both of the aforementioned first rotating shafts are located within the aforementioned first arc-shaped groove;

[0022] The main connecting rod and the second connecting rod are each connected to the second rotating block by a second rotating shaft, and both of the second rotating shafts are located within the second arc-shaped groove.

[0023] Preferably, the fixing sub-assembly includes a mounting block and a fixing hook. The mounting block has a vertical through groove at one end facing the test equipment. The fixing hook is rotatably disposed in the through groove, and the hook part of the fixing hook is located above the mounting block. The hook part of the fixing hook is used to cooperate with the fixing rod on the side wall of the test equipment.

[0024] The groove wall of the through groove is provided with positioning bolts, which are used to abut against the outer side wall of the fixing hook away from the groove after the fixing rod is located in the hook groove of the fixing hook, so as to fix the fixing hook.

[0025] Preferably, the outer wall of the top cover is provided with at least two positioning pins for the installation and positioning of the test equipment.

[0026] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0027] When fixing the test equipment, simply place the blocks distributed along the first direction into the corresponding slots on the first and second sliding frames, activate the drive device, and the first and second sliding frames slide along the second direction. The blocks located at the upper slot opening will move along the inner wall of the slot to the bottom of the slot, thus achieving the connection and fixation of the test equipment. When disassembly is required, simply activate the drive device again to drive the first and second sliding frames to slide in the opposite direction along the second direction, allowing the blocks to move from the bottom of the slot to the upper slot opening, completing the disassembly of the test equipment. Throughout the entire connection, fixation, and disassembly process of the test equipment, only the drive device needs to be operated, without any additional disassembly operations, making it convenient and fast. Attached Figure Description

[0028] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the installation of the test equipment in an embodiment of this utility model;

[0030] Figure 2 A top view of the test equipment installation in an embodiment of this utility model;

[0031] Figure 3This is a schematic diagram showing the connection of the testing device and testing equipment in an embodiment of this utility model;

[0032] Figure 4 This is a schematic diagram of the testing device in an embodiment of the present invention;

[0033] Figure 5 This is a schematic diagram of the top cover, the first fixing component, and the second fixing component in an embodiment of the present invention;

[0034] Figure 6 This is an embodiment of the present utility model. Figure 5 Enlarged diagram of A in the middle;

[0035] Figure 7 This is a bottom view of the top cover in an embodiment of the present invention. Figure 1 ;

[0036] Figure 8 This is a bottom view of the top cover in an embodiment of the present invention. Figure 2 ;

[0037] Figure 9 This is a schematic diagram of the handle connection in an embodiment of the present invention;

[0038] Figure 10 This is a schematic diagram of the testing equipment in an embodiment of this utility model.

[0039] Explanation of reference numerals in the attached figures:

[0040] 1. Test box; 11. Top cover; 12. Main arc groove; 13. First arc groove; 14. Second arc groove; 2. Chip assembly; 3. Interface assembly; 4. First fixing assembly; 41. Drive device; 411. Handle; 412. Main connecting rod; 413. First rotating block; 414. Second rotating block; 415. First sliding block; 416. Second sliding block; 417. Main rotating shaft; 418. First rotating shaft; 419. Second rotating shaft; 42. First sliding frame; 43. Second sliding frame; 44. Slot; 5. First hook; 6. Second hook; 7. Fixing sub-assembly; 71. Mounting block; 72. Fixing hook; 73. Positioning bolt; 8. Positioning pin; 9. Test equipment; 91. Locking block; 92. Fixing rod. Detailed Implementation

[0041] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0042] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0043] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0044] like Figures 1-10 As shown, this utility model embodiment provides a high-voltage testing device for semiconductor devices, which is used in conjunction with an external testing device 9. The high-voltage testing device includes a test box 1, in which a chip assembly 2 and an interface assembly 3 are installed. The chip assembly 2 includes a frame and multiple chip boards with semiconductor devices installed in the frame. The interface assembly 3 is installed on the upper surface of the frame. All chip boards are electrically connected to the interface assembly 3, and the interface assembly 3 is electrically connected to the testing device 9, thereby realizing the electrical connection between the testing equipment and the chip boards. The testing equipment can perform high-voltage testing on the semiconductor devices on the chip boards.

[0045] Specifically, such as Figures 1-2As shown, the test device 9 is generally fixed on the top of the test box 1. To make the fixing process of the test device 9 more convenient and faster, a first fixing component 4 is installed on the top cover 11 of the test box 1. The first fixing component 4 includes a driving device 41, a first sliding frame 42, and a second sliding frame 43. The first sliding frame 42 and the second sliding frame 43 are arranged parallel to each other on the outer side wall of the top cover 11. They are distributed on the outer side walls of the top cover 11 at both ends along the first direction and are arranged parallel to each other. Here, they both slide along the outer side wall of the top cover 11 in the second direction. The side walls of the first sliding frame 42 and the second sliding frame 43 that are close to each other are provided with slots 44. The slots 44 are inclined downwards. The upper slot of the slot 44 extends and is set to the upper end face of the sliding frame. The upper slot is used to place the card block 91 set on the test device 9. Correspondingly, the driving device 41 is installed on the top cover 11. The driving device 41 is used to drive the first sliding frame 42 and the second sliding frame 43 to slide along the second direction. When connecting the test device 9 to the top cover 11, the locking blocks 91 distributed along the first direction of the test device 9 are first placed in the corresponding slots 44 on the first sliding frame 42 and the second sliding frame 43. Then, the drive device 41 is activated, which drives the first sliding frame 42 and the second sliding frame 43 to slide along the second direction. The locking blocks 91 located at the upper opening of the slot 44 will move along the inner side wall of the slot 44 to the bottom of the slot 44, thereby achieving the connection and fixation of the test device 9. When disassembly is required, the drive device 41 is activated again, which drives the first sliding frame 42 and the second sliding frame 43 to slide in the opposite direction along the second direction, so that the locking blocks 91 can move from the bottom of the slot 44 to the upper opening, thus completing the disassembly of the test device 9. In summary, in the process of connecting and disassembling the test device 9, by setting the first sliding frame 42, the second sliding frame 43 and the drive device 41, only the drive device 41 needs to be operated, and no additional disassembly operation is required, which is convenient and fast.

[0046] Furthermore, such as Figures 5-6 As shown, a second fixing component is also provided on the top cover 11. The second fixing component includes two fixing sub-components 7, which are distributed on the outer side walls of the top cover 11 at both ends along the second direction. They are used to fix the two ends of the test device 9 distributed along the second direction, respectively. Thus, the two fixing sub-components 7 are distributed along the second direction, and the first sliding frame 42 and the second sliding frame 43 are distributed along the first direction, thereby forming a cuboid fixing cavity. The lower end of the test device 9 is fixed in the cuboid fixing cavity, realizing the all-round fixed connection of the four side walls of the test device 9, and further ensuring that the test device 9 is stably connected to the top cover 11 of the test box 1.

[0047] Specifically, in this embodiment, such as Figures 7-9As shown, the drive device 41 includes a handle 411, a main connecting rod 412, a first rotating block 413, a second rotating block 414, a first sliding block 415, and a second sliding block 416. One end of the handle 411 is rotatably connected to the inner wall of the top cover 11 via a rotating shaft, and the other end is detachably fixed to the top cover 11. The first rotating block 413 and the second rotating block 414 are distributed along a first direction on both sides of the handle 411 and are both connected to the inner wall of the top cover 11. The middle part of the main connecting rod 412 is rotatably connected to the handle 411 via a rotating shaft, and both ends of the main connecting rod 412 are rotatably connected to the first rotating block 413 and the second rotating block 414 via rotating shafts. The connection includes a first connecting rod rotatably connecting the first sliding block 415 and the first rotating block 413. The first sliding block 415 is slidably mounted on the inner wall of the top cover 11 along a second direction and connects to the first sliding frame 42 through a second through hole in the inner wall of the top cover 11. A second connecting rod rotatably connects the second sliding block 416 and the second rotating block 414. The second sliding block 416 is slidably mounted on the inner wall of the top cover 11 along a second direction and connects to the second sliding frame 43 through a second through hole in the inner wall of the top cover 11. Thus, by rotating the handle 411 clockwise, the main connecting rod 412 is moved, and the main connecting rod 412 drives the two sides respectively. The first rotating block 413 and the second rotating block 414 rotate clockwise, causing the first sliding block 415 to slide forward along the second direction, and the corresponding first sliding frame 42 to slide forward. The second sliding block 416 slides backward along the second direction, and the corresponding second sliding frame 43 slides backward, until the slots 44 on the first sliding frame 42 and the second sliding frame 43 are aligned in the second direction. At this time, the locking blocks 91 of the testing device 9 distributed along the first direction are located at the bottom of the slots 44 on the first sliding frame 42 and the second sliding frame 43. At this time, the handle 411 is fixed to achieve complete fixation of the testing device 9. Conversely, when it is necessary to disassemble the testing device 9, the handle is first... Release the fixation of 411, then rotate handle 411 counterclockwise to move the main connecting rod 412. The main connecting rod 412 drives the first rotating block 413 and the second rotating block 414 on both sides to rotate counterclockwise, so that the first sliding block 415 slides in the opposite direction along the second direction, and the corresponding first sliding frame 42 slides in the opposite direction. The second sliding block 416 slides in the forward direction along the second direction, and the corresponding second sliding frame 43 slides in the forward direction, until the card blocks 91 distributed along the first direction of the test device 9 correspond to the upper slots of the card slots 44 on the first sliding frame 42 and the second sliding frame 43. Then the test device 9 can be removed, and the complete disassembly of the test device 9 is completed.

[0048] The first sliding through hole and the second sliding through hole are arranged along the second direction, and the lengths of the first sliding through hole and the second sliding through hole are the same. The lengths of the first sliding through hole and the second sliding through hole are the sliding lengths of the first sliding block 415 and the second sliding block 416 along the second direction, and also the sliding lengths of the first sliding frame 42 and the second sliding frame 43. In this embodiment, when the first sliding block 415 slides from the first sliding through hole along the second direction from the head to the tail, the locking block 91 on the testing device 9 moves from the upper slot of the slot 44 to the bottom of the slot 44. When the first sliding block 415 slides from the first sliding through hole along the second direction from the tail to the head, the locking block 91 on the testing device 9 moves from the bottom of the slot 44 to the upper slot of the slot 44. The outer wall of the top cover 11 is respectively provided with a first slide rail and a second slide rail. The first sliding frame 42 is slidably disposed on the first slide rail, and the second sliding frame 43 is slidably disposed on the second slide rail.

[0049] Correspondingly, in this embodiment, the side wall of the top cover 11 is provided with a first hook 5, and the end of the handle 411 away from its rotating connection end is rotatably connected to a connecting block via a rotating shaft. The connecting block is correspondingly provided with a second hook 6. By hooking the second hook 6 to the first hook 5, the handle 411 can be fixed. By releasing the hook between the second hook 6 and the first hook 5, the handle 411 can be released from its fixed position, which is simple and convenient. In another embodiment, the side wall of the top cover 11 can also be provided with a snap-fit ​​interface, and the corresponding handle 411 is provided with a snap-fit ​​connector. By inserting the snap-fit ​​connector into the snap-fit ​​interface, the handle 411 can be fixed. Of course, other existing detachable connection structures are also acceptable, as long as they can satisfy the disassembly and fixing of the handle 411.

[0050] Specifically, the inner wall of the top cover 11 is provided with a main arc groove 12, a first arc groove 13, and a second arc groove 14. A main rotating shaft 417 is connected between the handle 411 and the main connecting rod 412, and the extended end of the main rotating shaft 417 is located in the main arc groove 12. A first rotating shaft 418 is connected between the main connecting rod 412 and the first connecting rod and the first rotating block 413. The extended ends of the two first rotating shafts 418 are located in the first arc groove 13. A second rotating shaft 419 is connected between the main connecting rod 412 and the second connecting rod and the second rotating block 414. The extended ends of the two second rotating shafts 419 are located in the second arc groove 14. Through the guidance of the rotating shaft by the main arc groove 12, the first arc groove 13, and the second arc groove 14, the movement of the main connecting rod 412, the first rotating block 413, and the second rotating block 414 is further guided, thereby making the drive of the entire drive device 41 more stable.

[0051] Specifically, such as Figure 6As shown, the fixing sub-assembly 7 includes a mounting block 71 and a fixing hook 72. The mounting block 71 has a vertical through-slot at one end facing the testing device 9. The fixing hook 72 is rotatably mounted in the through-slot via a rotating shaft, and a torsion spring is mounted on the rotating shaft to facilitate the repositioning of the fixing hook 72. Specifically, it is installed inside the bottom groove wall, allowing the fixing shaft to initially rotate circumferentially along the first direction. The hook portion of the fixing hook 72 is located above the mounting block 71. Fixing rods 92 are provided on both side walls of the testing device 9 along the second direction. The hook portion of the fixing hook 72 is used to cooperate with the fixing rods 92, meaning that during the placement of the testing device 9, the fixing rods 92 will... The fixed hook 72 is rotated by squeezing. Then, when the locking block 91 enters the bottom of the slot 44, the fixed shaft is located in the hook groove of the fixed hook 72. Then the fixed hook 72 is reset, and the test equipment 9 is limited and fixed at both ends along the second direction. Furthermore, a positioning bolt 73 is installed on the groove wall of the through groove. After the fixed rod 92 is located in the hook groove of the fixed hook 72, the positioning bolt 73 is tightened so that the positioning bolt 73 abuts against the outer wall of the fixed hook 72 away from the groove, so as to fix the fixed hook 72 and prevent it from rotating, which would cause the fixed rod 92 to fall out of the groove, thus ensuring the stable limitation and fixation of the test equipment 9 by the fixed hook 72.

[0052] Specifically, the outer wall of the top cover 11 is provided with at least two positioning pins 8 for the installation and positioning of the test equipment 9. Correspondingly, the bottom side wall of the test equipment 9 is provided with pin holes for the positioning pins 8 to be inserted, so that the test equipment 9 can be accurately placed at the fixed position of the top cover 11.

[0053] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A high-voltage testing device for semiconductor devices, used in conjunction with external testing equipment, characterized in that, Including the test chamber; The test box contains a chip assembly and an interface assembly. The chip assembly includes multiple chip boards on which semiconductor devices are mounted. The chip boards are electrically connected to the interface assembly, and the interface assembly is electrically connected to the test equipment. The test chamber is provided with a top cover, and the top cover is provided with a first fixing component for fixing the test equipment; The first fixed component includes a drive device, a first sliding frame, and a second sliding frame; The first sliding frame and the second sliding frame are distributed on the outer side walls of both ends of the top cover along the first direction, and the two are parallel and both slide along the second direction, and the second direction is perpendicular to the first direction; The first sliding frame and the second sliding frame are provided with slots on their adjacent side walls, and the slots are inclined downwards. The upper opening of the slots extends to the upper end face of the sliding frame and is used to place the card blocks set on the test equipment. The driving device is located on the top cover and is used to drive the first sliding frame and the second sliding frame to slide along the second direction, so that the card block located at the slot opening moves along the inner side wall of the card slot to the bottom of the card slot to fix the test equipment.

2. The high-voltage testing device according to claim 1, characterized in that, The top cover is also provided with a second fixing component, which includes two fixing sub-components. The two fixing sub-components are distributed on the outer side walls of both ends of the top cover along the second direction. The two fixing sub-components are respectively located on the outer side of both ends of the test device along the second direction to fix the two ends of the test device along the second direction.

3. The high-voltage testing device according to claim 1, characterized in that, The driving device includes a handle, a main connecting rod, a first rotating block, a second rotating block, a first sliding block, and a second sliding block; One end of the handle is rotatably mounted on the inner side wall of the top cover, and the other end is detachably fixed to the top cover. The first rotating block and the second rotating block are distributed on both sides of the handle along the first direction and are both connected to the inner sidewall of the top cover. The middle part of the main connecting rod is rotatably connected to the handle, and the two ends of the main connecting rod are rotatably connected to the first rotating block and the second rotating block, respectively. A first connecting rod is rotatably connected between the first sliding block and the first rotating block. The first sliding block is slidably disposed on the inner side wall of the top cover along the second direction and passes through the inner side wall of the top cover to connect with the first sliding frame. A second connecting rod is rotatably connected between the second sliding block and the second rotating block. The second sliding block is slidably disposed on the inner side wall of the top cover along the second direction and passes through the inner side wall of the top cover to connect with the second sliding frame.

4. The high-voltage testing device according to claim 3, characterized in that, The top cover has a first hook on its side wall, and the handle has a connecting block at its end away from its rotating connection end. The connecting block has a second hook, and the second hook is connected to the first hook.

5. The high-voltage testing device according to claim 3, characterized in that, The inner wall of the top cover is provided with a main arc-shaped groove, a first arc-shaped groove, and a second arc-shaped groove; A main rotating shaft is connected between the handle and the main connecting rod, and the extended end of the main rotating shaft is located in the main arc-shaped groove; The main connecting rod and the first connecting rod are both connected to the first rotating block by a first rotating shaft, and both first rotating shafts are located in the first arc-shaped groove. The main connecting rod and the second connecting rod are each connected to the second rotating block by a second rotating shaft, and both second rotating shafts are located within the second arc-shaped groove.

6. The high-voltage testing device according to claim 2, characterized in that, The fixing sub-assembly includes a mounting block and a fixing hook. The mounting block has a vertical through groove at one end facing the test equipment. The fixing hook is rotatably disposed in the through groove, and the hook part of the fixing hook is located above the mounting block. The hook part of the fixing hook is used to cooperate with the fixing rod on the side wall of the test equipment. The groove wall of the through groove is provided with positioning bolts, which are used to abut against the outer side wall of the fixing hook away from the groove after the fixing rod is located in the hook groove of the fixing hook, so as to fix the fixing hook.

7. The high-voltage testing device according to claim 1, characterized in that, The outer wall of the top cover is provided with at least two positioning pins for the installation and positioning of the test equipment.

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