Built-in filter of mask box

Abstract

The utility model discloses a built-in filter for a mask box, which relates to the technical field of filters for mask boxes and comprises a box body, a filter mechanism is arranged below the box body and comprises a mounting box, the upper surface of the mounting box is fixedly connected with the bottom surface of the box body, and a connecting pipe is fixedly mounted on the inner bottom wall of the mounting box. The top end of the connecting pipe penetrates into the box body, a dustproof net is fixedly installed on the inner wall of the connecting pipe, a reciprocating lead screw is rotationally connected into the connecting pipe, a moving frame is in threaded connection with the outer surface of the reciprocating lead screw, a rack plate is fixedly installed on the inner wall of the connecting pipe, and a rotating shaft is rotationally connected into the moving frame. A connecting gear is fixedly installed at the top end of the rotating shaft, the outer surface of the connecting gear is meshed with the back face of the rack plate, a rotating disc is fixedly installed at the bottom end of the rotating shaft, and a connecting column is fixedly installed on the bottom face of the rotating disc. The filter is convenient for workers to clean the filter medium and does not need to be frequently disassembled by the workers for cleaning.

Description

Technical Field

[0001] This utility model relates to the technical field of filters for photomask boxes, specifically a built-in filter for a photomask box. Background Technology

[0002] The built-in filter in the photomask box is a key component in semiconductor manufacturing, photolithography, or the production of precision electronic components. It is mainly used to maintain the ultra-high cleanliness of the photomask storage environment and prevent contamination of the photomask surface.

[0003] In the use of existing built-in filters, most built-in filters require workers to remove the filter media from the filter for cleaning, which increases the tediousness of cleaning the filter media. If it is not cleaned, impurities will gradually accumulate on the filter media, causing the filter pores to become smaller or even completely blocked, greatly reducing the filtration effect and affecting the air cleanliness inside the mask box.

[0004] To address this issue, we provide a mask box with an integrated filter. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a filter built into a mask box.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a mask box built-in filter, including a box body, a filtering mechanism disposed below the box body, the filtering mechanism including a mounting box, the upper surface of the mounting box being fixedly connected to the bottom surface of the box body, a connecting pipe being fixedly installed on the inner bottom wall of the mounting box, the top end of the connecting pipe penetrating into the interior of the box body, a dustproof mesh being fixedly installed on the inner wall of the connecting pipe, a reciprocating screw being rotatably connected inside the connecting pipe, a movable frame being threadedly connected to the outer surface of the reciprocating screw, a rack plate being fixedly installed on the inner wall of the connecting pipe, a rotating shaft being rotatably connected inside the movable frame, a connecting gear being fixedly installed at the top end of the rotating shaft, the outer surface of the connecting gear meshing with the back of the rack plate, a rotating disk being fixedly installed at the bottom end of the rotating shaft, a connecting column being fixedly installed on the bottom surface of the rotating disk, a connecting frame being disposed below the rotating disk, the inner wall of the connecting frame being slidably connected to the outer surface of the connecting column, and a brush frame being fixedly installed at the end of the connecting frame near the dustproof mesh.

[0007] Furthermore, a box lid is snapped into the inside of the box body, and a sealing ring is fixedly installed on the bottom surface of the box lid.

[0008] Furthermore, two sets of placement platforms are fixedly installed on the inner bottom wall of the box, and a rubber pad is fixedly installed on the inner wall of each placement platform.

[0009] Furthermore, locking blocks are fixedly installed on both the front and back of the box lid, and locking frames are fixedly installed on both the front and back of the box body, with each locking block snapping into the inside of the locking frame.

[0010] Furthermore, two slide rods are fixedly installed on the inner wall of the connecting pipe, and the outer surface of each slide rod is slidably connected to the inner wall of the movable frame.

[0011] Furthermore, the right end of the reciprocating lead screw passes through the mounting box and is fixedly mounted with a rotating disk, and a handle is rotatably connected to the right side of the rotating disk.

[0012] Furthermore, a limiting block is slidably connected to the outer surface of the connecting frame, and the upper surface of the limiting block is fixedly connected to the inner wall of the movable frame.

[0013] Compared with existing technologies, this mask box built-in filter has the following advantages:

[0014] This invention comprises a housing, a mounting box, a connecting pipe, and a dustproof net. The dustproof net filters the air entering the housing, minimizing the entry of external dust and ensuring the cleanliness of the mask. A reciprocating screw, a moving frame, and a brush holder are included. By rotating the reciprocating screw, the brush holder moves back and forth, cleaning dust adhering to the dustproof net and preventing dust from obstructing airflow. A rack, a rotating shaft, a connecting gear, a rotating disk, a connecting column, and a connecting frame are also included. The rack and gear, along with the rotating shaft, rotating disk, connecting column, and connecting frame, drive the brush holder to move back and forth, causing it to vibrate and tap the dustproof net, facilitating dust removal and further enhancing the cleaning effect. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the box body of this utility model.

[0016] Figure 2 This is a three-dimensional structural schematic diagram of the rear view of the mounting box of this utility model.

[0017] Figure 3 This is a three-dimensional structural schematic diagram of the cross-sectional view of the connecting pipe of this utility model.

[0018] Figure 4 This is a three-dimensional structural schematic diagram of the movable frame of this utility model, viewed from below in cross-section.

[0019] Figure 5 This is a three-dimensional structural schematic diagram of the box body of this utility model.

[0020] In the diagram: 1. Box body; 2. Filtering mechanism; 201. Mounting box; 202. Connecting pipe; 203. Dustproof net; 204. Reciprocating screw; 205. Moving frame; 206. Rack plate; 207. Rotating shaft; 208. Connecting gear; 209. Rotating disk; 210. Connecting column; 211. Connecting frame; 212. Brush holder; 213. Box cover; 214. Sealing ring; 215. Placement platform; 216. Rubber pad; 217. Locking block; 218. Locking frame; 219. Slide rod; 220. Rotating disk; 221. Handle; 222. Limiting block. Detailed Implementation

[0021] The principles and features of this utility model are described below with reference to the accompanying drawings. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0022] This embodiment provides a mask box with an internal filter. The device is designed to facilitate workers in cleaning the dustproof net 203 by providing a box body 1 and a filter mechanism 2, thereby reducing the complexity of worker operations.

[0023] Please refer to Figure 1 and Figure 5 A photomask box with built-in filter includes a box body 1, a filter mechanism 2 disposed below the box body 1, and a mounting box 201. The upper surface of the mounting box 201 is fixedly connected to the bottom surface of the box body 1. A box cover 213 is snapped into the inside of the box body 1, and a sealing ring 214 is fixedly installed on the bottom surface of the box cover 213. The installation of the box cover 213 and the sealing ring 214 serves to seal the box body 1, thereby facilitating the transportation and storage of the photomask.

[0024] Please refer to Figures 1-3 and Figure 5 A connecting pipe 202 is fixedly installed on the inner bottom wall of the mounting box 201. The top end of the connecting pipe 202 extends into the interior of the box body 1. A dustproof net 203 is fixedly installed on the inner wall of the connecting pipe 202. Two sets of placement platforms 215 are fixedly installed on the inner bottom wall of the box body 1. A rubber pad 216 is fixedly installed on the inner wall of each placement platform 215. The installation of the placement platform 215 and the rubber pad 216 serves to place the photomask.

[0025] Please refer to Figure 3 and Figure 4The connecting pipe 202 is rotatably connected to a reciprocating screw 204, and the outer surface of the reciprocating screw 204 is threadedly connected to a movable frame 205. Two slide rods 219 are fixedly installed on the inner wall of the connecting pipe 202. The outer surface of each slide rod 219 is slidably connected to the inner wall of the movable frame 205. The installation of the slide rods 219 restricts the movement trajectory of the movable frame 205, thereby preventing the movable frame 205 from rotating during movement and ensuring the stability of the movement of the movable frame 205.

[0026] Please refer to Figure 1 , Figure 3 , Figure 4 and Figure 5 A rack plate 206 is fixedly installed on the inner wall of the connecting pipe 202. A rotating shaft 207 is rotatably connected inside the movable frame 205. A connecting gear 208 is fixedly installed at the top of the rotating shaft 207. The outer surface of the connecting gear 208 meshes with the back of the rack plate 206. Locking blocks 217 are fixedly installed on both the front and back of the box cover 213. Locking frames 218 are fixedly installed on both the front and back of the box body 1. Each locking block 217 is snapped into the inside of the locking frame 218. The installation of the locking blocks 217 and the locking frames 218 serves to fix the box cover 213 on the box body 1, thereby preventing the box cover 213 from moving on its own and ensuring the stability of the box cover 213.

[0027] Please refer to Figures 2-4 A rotating disk 209 is fixedly installed at the bottom end of the rotating shaft 207. A connecting column 210 is fixedly installed on the bottom surface of the rotating disk 209. The right end of the reciprocating screw 204 passes through the mounting box 201 and is fixedly installed with a rotating disk 220. A handle 221 is rotatably connected to the right side of the rotating disk 220. The installation of the rotating disk 220 and the handle 221 makes it convenient for workers to rotate the reciprocating screw 204 outside the mounting box 201, thereby increasing the convenience for workers to rotate the reciprocating screw 204.

[0028] Please refer to Figure 4 A connecting frame 211 is provided below the rotating disk 209. The inner wall of the connecting frame 211 is slidably connected to the outer surface of the connecting column 210. A brush holder 212 is fixedly installed at one end of the connecting frame 211 near the dustproof net 203. A limit block 222 is slidably connected to the outer surface of the connecting frame 211. The upper surface of the limit block 222 is fixedly connected to the inner wall of the moving frame 205. The installation of the limit block 222 restricts the movement trajectory of the connecting frame 211, thereby preventing the connecting frame 211 from deviating from the movement trajectory when moving, and thus ensuring the stability of the movement of the connecting frame 211.

[0029] Working principle: In use, the worker first pulls handle 221, causing handle 221 to rotate the rotating disk 220, which in turn rotates the reciprocating screw 204. The reciprocating screw 204 then drives the moving frame 205 to move left and right reciprocally. During the movement of the moving frame 205, the meshing of the connecting gear 208 and the rack plate 206 causes the connecting gear 208 to rotate the rotating shaft 207 and the rotating disk 209. This, in turn, causes the rotating disk 209 to rotate the connecting column 210, which in turn rotates the connecting column 210. Under the restriction of the limit block 222, the connecting frame 211 is driven to move back and forth. At the same time, the connecting frame 211 drives the brush frame 212 to move back and forth and left and right. This allows the brush frame 212 to wipe and clean the dustproof net 203 while tapping and vibrating the dustproof net 203, causing the dust adhering to the dustproof net 203 to fall off. Afterwards, the worker pours out the dust cleaned inside the connecting pipe 202, so that the worker does not need to disassemble and clean the dustproof net 203, thus achieving the purpose of facilitating the worker to clean the dustproof net 203.

[0030] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A mask-mounted filter with built-in housing, comprising a housing (1), characterized in that: A filter mechanism (2) is provided below the box body (1). The filter mechanism (2) includes a mounting box (201). The upper surface of the mounting box (201) is fixedly connected to the bottom surface of the box body (1). A connecting pipe (202) is fixedly installed on the inner bottom wall of the mounting box (201). The top end of the connecting pipe (202) extends into the interior of the box body (1). A dustproof net (203) is fixedly installed on the inner wall of the connecting pipe (202). A reciprocating screw (204) is rotatably connected inside the connecting pipe (202). A movable frame (205) is threadedly connected to the outer surface of the reciprocating screw (204). A rack plate (206) is fixedly installed on the inner wall of the connecting pipe (202). The movable frame (205) is rotatably connected to a rotating shaft (207). A connecting gear (208) is fixedly installed at the top of the rotating shaft (207). The outer surface of the connecting gear (208) meshes with the back of the rack plate (206). A rotating disk (209) is fixedly installed at the bottom of the rotating shaft (207). A connecting column (210) is fixedly installed on the bottom surface of the rotating disk (209). A connecting frame (211) is provided below the rotating disk (209). The inner wall of the connecting frame (211) is slidably connected to the outer surface of the connecting column (210). A brush holder (212) is fixedly installed at one end of the connecting frame (211) near the dustproof net (203).

2. The mask cassette built-in filter according to claim 1, characterized in that: The box body (1) is fitted with a box cover (213), and a sealing ring (214) is fixedly installed on the bottom surface of the box cover (213).

3. A mask cassette built-in filter according to claim 1, characterized in that: Two sets of placement platforms (215) are fixedly installed on the inner bottom wall of the box (1), and a rubber pad (216) is fixedly installed on the inner wall of each placement platform (215).

4. A mask cassette built-in filter according to claim 2, characterized in that: Locking blocks (217) are fixedly installed on both the front and back of the lid (213), and locking frames (218) are fixedly installed on both the front and back of the box body (1). Each locking block (217) is snapped into the inside of the locking frame (218).

5. A mask cassette built-in filter according to claim 1, characterized in that: Two slide rods (219) are fixedly installed on the inner wall of the connecting pipe (202), and the outer surface of each slide rod (219) is slidably connected to the inner wall of the movable frame (205).

6. A mask cassette built-in filter according to claim 1, characterized in that: The right end of the reciprocating screw (204) passes through the mounting box (201) and is fixedly mounted with a rotating disk (220). A handle (221) is rotatably connected to the right side of the rotating disk (220).

7. A mask cassette built-in filter according to claim 1, characterized in that: The outer surface of the connecting frame (211) is slidably connected to a limiting block (222), and the upper surface of the limiting block (222) is fixedly connected to the inner wall of the movable frame (205).

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