Precise and uniform gluing limiting and calibrating device of gluing developing machine

Abstract

The utility model discloses an accurate and uniform gluing limiting calibration device of a gluing developer, which comprises a calibration rack mounted at the top in a case of the gluing developer, and the calibration rack comprises a storage cabinet for storage and an adjusting seat for calibrating the planeness of a substrate bearing table in the gluing developer, a dial indicator used for flatness measurement is arranged in an adjusting seat of the leftward calibration rack, the dial indicator is used for conducting internal calibration detection on a substrate bearing table in the gluing developing machine, meanwhile, the dial indicator fixing rack is stored and stored, the rack is prevented from occupying too many positions in the gluing developing machine, and the gluing developing machine is prevented from being damaged. The internal technological process of the gluing developer is influenced and interfered, the calibration detection position of the micrometer is prolonged through the extendable racks on the two sides, the positioning position detected and calibrated by the dial indicator is intelligently recorded, the calibration position of the dial indicator is accurately controlled, the situation that the calibration position needs to be readjusted in each calibration operation is avoided, and the calibration steps are automatically simplified.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of gluing developing machine, specifically a kind of gluing developing machine accurate uniform gluing limit calibration device. BACKGROUND

[0002] Gluing developing equipment is the gluing, baking and developing equipment used with photoetching machine in photoetching process, including glueing machine, glue spraying machine and developing machine. Such equipment is generally on-line with photoetching equipment to form supporting wafer processing and photoetching production line, and cooperate with photoetching machine to complete fine photoetching process flow;

[0003] The specific relationship between gluing developing and gluing developing equipment: in gluing developing equipment, gluing and developing are continuous process. First, the equipment will uniformly coat photoresist on wafer, and then pre-bake. Then, wafer is sent into exposure machine for pattern exposure, and then sent back to gluing developing equipment for developing treatment, to complete the chemical fixation of pattern, and the precise control ability of gluing developing equipment is crucial for optimizing gluing developing process.

[0004] Different kinds of photoresist and gluing developing equipment are needed in wafer manufacturing. Micron level line width often adopts different kinds of photoresist and gluing developing equipment in wafer manufacturing; and substrate carrier in gluing developing machine is one of core components, which mainly provides stable support and precise operation platform for photoetching process in semiconductor manufacturing. Among them, the carrier substrate is used to place silicon wafer, glass substrate and other processing substrates, to ensure that they remain horizontal and flat during gluing, developing and other processes. Vacuum suction / mechanical clamping: the substrate is fixed by vacuum suction cup or mechanical clamp to prevent offset or uneven gluing caused by movement or vibration. In gluing stage, the rotation speed and acceleration of carrier directly affect the uniformity of photoresist. In developing stage, the substrate can be kept horizontal to ensure uniform coverage of developing liquid and avoid pattern defects.

[0005] Currently, photoetching needs to accurately transfer pattern on mask to silicon wafer. If carrier position deviates, it will cause multi-layer pattern misalignment. In gluing, carrier rotates at high speed. In developing, nozzle needs to uniformly cover liquid medicine. If platform is not flat or rotates eccentrically, it will cause uneven photoresist thickness to affect exposure depth, and uneven developing liquid distribution to cause pattern defects. At present, substrate carrier suction force and plane are recalibrated after regular cleaning of gluing developing machine. Currently, carrier needs to be separately disassembled to outside of gluing developing machine for calibration when calibrating gluing developing machine, or calibration equipment is manually inserted into gluing developing machine through reserved gap of gluing developing machine to calibrate carrier. It is difficult to accurately control the calibration position of carrier.

[0006] The application aims to calibrate and detect the substrate bearing table inside the glue coating and developing machine by using a micrometer, store the micrometer fixing rack, avoid occupying too much space inside the glue coating and developing machine, affect the process inside the glue coating and developing machine, extend the calibration and detection position of the micrometer by the extendable racks on both sides, intelligently record the positioning position of the micrometer detection and calibration, accurately control the calibration position of the micrometer, and automatically simplify the calibration steps. Content of the utility model

[0007] The utility model discloses a glue coating and developing machine accurate and uniform glue coating limiting calibration device, which aims to solve the problems in the prior art.

[0008] To achieve the above object, the utility model provides the following technical scheme:

[0009] A glue coating and developing machine accurate and uniform glue coating limiting calibration device, the device body includes the calibration rack for installing at the top inside the glue coating and developing machine case, the calibration rack includes left calibration rack and right calibration rack, and the left calibration rack and the right calibration rack all include the storage cabinet for storage and the adjusting seat for calibrating the flatness of the substrate bearing table inside the glue coating and developing machine, the adjusting seat inside the left calibration rack is equipped with the micrometer for flatness measurement, the storage cabinet is equipped with the storage port for storing the adjusting seat, the side of the storage port close to the adjusting seat is equipped with the limiting unit for adjusting and limiting the position of the adjusting seat, and the adjusting seat is equipped with the calibration unit for calibrating the position of the micrometer.

[0010] By adopting the above technical scheme, the calibration rack can calibrate the substrate bearing table fixed inside the glue coating and developing machine, the adjusting seat can calibrate the flatness of the substrate bearing table inside the glue coating and developing machine, the storage cabinet can store the adjusting seat, the micrometer in the adjusting seat can measure the flatness of the substrate bearing table, the limiting unit can adjust and limit the position of the adjusting seat, the calibration unit can adjust the position of the micrometer to calibrate the substrate bearing table.

[0011] Further setting: the limiting unit includes a threaded rod for adjusting the height of the adjusting seat, the adjusting seat is equipped with a threaded port, the threaded rod is engaged in the threaded port, the position of the storage port close to the threaded rod is equipped with a rotating motor for rotating the threaded rod, the limiting block for limiting the adjusting seat is arranged between the storage cabinet and the adjusting seat, one end of the limiting block is detachably connected with the storage cabinet, the other end is provided with an extension plate, and the threaded rod is connected with the extension plate through a bearing.

[0012] By adopting the above technical scheme: the threaded rod is engaged in the adjusting seat, the threaded rod can be driven to rotate by the rotating motor, thereby operating the height of the adjusting seat, and driving the adjusting seat to move down from the storage opening in the storage cabinet to the position close to the substrate support table, the limiting block can support the storage cabinet and the adjusting seat, and the extension plate simultaneously limits the threaded rod and the adjusting seat.

[0013] Further provided: the calibration unit comprises a positioning measurement block for position calibration of the micrometer, wherein the positioning measurement block included in the left calibration rack is defined as a left positioning measurement block, the positioning measurement block included in the right calibration rack is defined as a right positioning measurement block, the inside of the adjusting seat on both sides is provided with a notch, the top of the notch is provided with a positioning slide rail, the left positioning measurement block and the right positioning measurement block are respectively slidably connected on the positioning slide rails on both sides, the left and right side walls of the left and right positioning measurement blocks are both provided with a moving groove, the inside of the moving groove is provided with a side guide rail, the side guide rail is provided with a support seat for damping fixation of the micrometer, the support seat is slidably connected on the side guide rail, the position of the adjusting seat close to the two support seats is provided with a multi-position air cylinder for simultaneously driving the two support seats to move, the relative position of the support seat and the adjacent support seat is provided with a buffer clamp for damping fixation of the micrometer, the inside of the support seat is provided with a lifting groove, the buffer clamp is movably connected in the lifting groove, and the buffer clamp and the support seat are provided with a spring damper for damping connection, and the spring damper is detachably connected with the support seat and the buffer clamp.

[0014] By adopting the above technical scheme: the left calibration rack and the right calibration rack can be simultaneously extended in different directions, the left positioning measurement block and the right positioning measurement block are moved on the positioning slide rails, thereby extending the positions of the left and right positioning measurement blocks, so that the micrometer is moved to the substrate support table for calibration, the side guide rail can drive the support seat to move, the buffer clamp on the support seat can move and clamp the micrometer, and the spring damper close to the buffer clamp on the support seat can secondarily damp the micrometer, thereby avoiding inaccurate calibration caused by vibration of the micrometer.

[0015] Further arrangement: the position of the left positioning measurement block and the right positioning measurement block near the substrate support table is provided with a calibration slot, the inside of the calibration slot of the left positioning measurement block is provided with a driving measurement block and a cylinder for driving the driving measurement block to move, the driving measurement block is slidably connected in the inside of the calibration slot, the inside of the driving measurement block is provided with a positioner for positioning the position of the micrometer, the bottom of the driving measurement block is provided with a notch, the inside of the notch is provided with a height adjustable telescopic rod, the inside of the height telescopic adjusting rod is provided with a height sensor for measuring the accurate height of the micrometer, and a plurality of scales for observing the height of the micrometer are arranged on the height telescopic adjusting rod, and the bottom of the height telescopic adjusting rod is provided with a measurement probe, the micrometer is built in the measurement probe, and a protective cover for preventing pollution and corrosion is arranged on the measurement probe.

[0016] By adopting the above technical scheme: the driving measurement block inside the calibration slot can move the micrometer horizontally, the cylinder can drive the driving measurement block to move inside the calibration slot at the bottom of the left positioning measurement block and the right positioning measurement block, so as to adjust the position of the micrometer in the horizontal position, the positioner can monitor the positioning position of the driving measurement block in real time, so that the buffer clamp on the side wall of the left positioning measurement block and the right positioning measurement block can fix and clamp the measurement probe, the height sensor can adjust the position of the micrometer in the vertical position, the height sensor can measure the accurate height of the micrometer in real time, and the vertical height of the micrometer can be more intuitively indicated through the scale, and the protective cover can protect the micrometer inside the measurement probe from being polluted in the inside of the glue coating developing machine.

[0017] Further arrangement: the opposite side of the left positioning measurement block and the right positioning measurement block away from the calibration slot and the moving slot is provided with a magnetic attraction for fixing the left positioning measurement block and the right positioning measurement block.

[0018] By adopting the above technical scheme: the magnetic attraction can fix the left positioning measurement block and the right positioning measurement block inside the left calibration rack and the right calibration rack, prolong the horizontal adjustment distance of the micrometer, and can also disassemble and place the left positioning measurement block and the right positioning measurement block, so as to reduce the occupied position of the left calibration rack and the right calibration rack in the inside of the glue coating developing machine.

[0019] Further arrangement: the inside of the storage port is provided with a first distance sensor for sensing the height of the adjusting seat position, the first distance sensor is electrically connected with the rotating motor, the inside of the adjusting seat is provided with a plurality of second distance sensors for sensing the position of the substrate support table, and the second distance sensors are electrically connected with the cylinders inside the calibration slot.

[0020] By adopting the above technical scheme: the first distance sensor can sense the height of the adjusting seat position, drive the rotating motor to rotate, the second distance sensor can sense the position of the substrate support table, and drive the cylinder to drive the measurement probe to the appropriate position for calibration measurement.

[0021] Compared with the prior art, the utility model discloses the beneficial effects are: in the inside utilization micrometer to the inside calibration detection of substrate bearing platform, the fixed frame of micrometer is handled simultaneously and is stored, avoids the frame to occupy the too much position in the inside of glueing developing machine, influences the process in the inside of interference glueing developing machine, and the calibration detection position of micrometer is prolonged through both sides extendable frame, and the positioning position of micrometer detection calibration is intelligently recorded, and the calibration position of micrometer is accurately controlled, avoids the need of readjusting calibration position when each time calibration operation, and the calibration step is simplified automatically. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to make the content of the utility model more easily be clearly understood, the following according to specific embodiment and combining with the drawings, the utility model is further detailed.

[0023] Fig. 1 It is the structure schematic diagram of the utility model a kind of glueing developing machine accurate uniform glueing limit calibration device;

[0024] Fig. 2 It is the partial view of the utility model a kind of glueing developing machine accurate uniform glueing limit calibration device;

[0025] Fig. 3 It is the overall sectional view of the utility model a kind of glueing developing machine accurate uniform glueing limit calibration device.

[0026] In the drawing, 1, left calibration frame;2, right calibration frame;3, adjusting seat;4, storage cabinet;5, threaded rod;6, limit block;7, left positioning measurement block;8, right positioning measurement block;9, support seat;10, buffer clamp;11, drive measurement block;12, second distance sensor;13, height adjusting telescopic rod;14, measurement probe;15, magnetic attraction. DETAILED DESCRIPTION

[0027] The technical scheme in the utility model embodiment will be described clearly and completely below in conjunction with the drawings of the utility model embodiments, and obviously, the described embodiments are only part of the embodiments of the utility model, not all embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0028] Please refer to Figs. 1-3The utility model discloses embodiments of a kind of accurate uniform gluing limit calibration device of gluing developing machine, device body includes the calibration rack for installing in the top inside gluing developing machine cabinet, calibration rack includes left calibration rack 1 and right calibration rack 2, left calibration rack 1 and right calibration rack 2 all include the storage cabinet 4 for being received and the adjusting seat 3 for calibrating the flatness of substrate support platform inside gluing developing machine, calibration rack can calibrate substrate support platform inside gluing developing machine by being fixed, the flatness of substrate support platform inside gluing developing machine is calibrated using adjusting seat 3, while adjusting seat 3 is received using storage cabinet 4, avoid occupying too many positions inside gluing developing machine, influence gluing operation;

[0029] Left calibration rack 1 includes the adjusting seat 3 inside and is equipped with the micrometer for carrying out flatness measurement, the micrometer in adjusting seat 3 can carry out flatness measurement to substrate support platform, storage cabinet 4 is equipped with the storage port for receiving adjusting seat 3, the side of storage port inside close to adjusting seat 3 is used for the position adjusting limit unit of adjusting seat 3, position adjusting limit unit can carry out position adjusting to adjusting seat 3, while receiving adjusting seat 3.

[0030] Limit unit includes the screw rod 5 for driving adjusting seat 3 height adjustment, adjusting seat 3 is equipped with screw thread mouth inside, screw rod 5 is engaged in screw thread mouth inside, the position of storage port close to screw rod 5 is equipped with the rotating motor for driving screw rod 5 rotation, the limit block 6 for limiting adjusting seat 3 is equipped between storage cabinet 4 and adjusting seat 3, limit block 6 one end is detachably connected with storage cabinet 4, the other end is provided with extension plate, screw rod 5 is connected with extension plate through bearing, the first distance sensor for sensing the position height of adjusting seat 3 is equipped in storage port, first distance sensor is electrically connected with rotating motor;

[0031] Screw rod 5 is engaged in adjusting seat 3 inside, can be rotated by rotating motor driving screw rod 5, to operate the height of adjusting seat 3, drive adjusting seat 3 from the storage port inside storage cabinet 4 to move close to the position of substrate support platform, limit block 6 can support storage cabinet 4 and adjusting seat 3, extension plate is limited to screw rod 5 and adjusting seat 3 simultaneously, first distance sensor can sense the position height of adjusting seat 3, drive rotating motor rotation.

[0032] Adjusting seat 3 is equipped with the calibration unit for the position calibration of micrometer, calibration unit can adjust the position of positioning micrometer and calibrate substrate support platform.

[0033] The calibration unit comprises a positioning measuring block for position calibration of the dial gauge, wherein the positioning measuring block included in the left calibration rack 1 is defined as the left positioning measuring block 7, the positioning measuring block included in the right calibration rack 2 is defined as the right positioning measuring block 8, the inside of the two side adjusting seats 3 is provided with notches, the top of the notches is provided with positioning sliding rails, the inside of the positioning sliding rails is provided with electric cylinders, the left positioning measuring block 7 and the right positioning measuring block 8 are respectively slidably connected on the two side positioning sliding rails, the left and right side walls of the left positioning measuring block 7 and the right positioning measuring block 8 are both provided with moving grooves, the inside of the moving grooves is provided with side guides, the side guides are provided with support seats 9 for damping fixation of the dial gauge, the support seats 9 are slidably connected on the side guides, the positions of the adjusting seats 3 close to the two side support seats 9 are provided with multi-position cylinders for simultaneously driving the two side support seats 9 to move, the positions opposite to the adjacent support seats 9 of the support seats 9 are provided with buffer clamps 10 for damping fixation of the dial gauge, the inside of the support seats 9 is provided with lifting grooves, the buffer clamps 10 are movably connected in the lifting grooves, the buffer clamps 10 and the support seats 9 are provided with spring dampers for damping connection, and the spring dampers are respectively detachably connected with the support seats 9 and the buffer clamps 10.

[0034] The left calibration rack 1 and the right calibration rack 2 can be simultaneously elongated in different directions, the left positioning measuring block 7 and the right positioning measuring block 8 are moved on the positioning sliding rails, so that the positions of the left positioning measuring block 7 and the right positioning measuring block 8 are elongated, the transverse position of the dial gauge calibration adjustment is elongated, the dial gauge can be more accurately moved to the substrate support table for calibration, the side guides can drive the support seats 9 to move, the support seats 9 are provided with the buffer clamps 10 which can move and clamp the dial gauge, the spring dampers close to the buffer clamps 10 on the support seats 9 can secondarily damp the dial gauge, so that the dial gauge is not shaken to cause inaccurate calibration.

[0035] The positions close to the substrate support table of the bottoms of the left positioning measuring block 7 and the right positioning measuring block 8 are provided with calibration grooves, the inside of the calibration groove in the left positioning measuring block 7 is provided with a driving measuring block 11 and a cylinder for driving the driving measuring block 11 to move, the driving measuring block 11 is slidably connected in the calibration groove, the inside of the adjusting seat 3 is provided with a plurality of second distance sensors 12 for sensing the position of the substrate support table, the second distance sensors 12 are electrically connected with the cylinder in the calibration groove and the multi-position cylinder on the side guide, the second distance sensors 12 can sense the position of the substrate support table, drive the cylinder to drive the driving measuring block 11 to the appropriate position for calibration measurement.

[0036] The driving measurement block 11 is internally provided with a positioner for positioning the position of the micrometer, the bottom of the driving measurement block 11 is provided with a notch, the inside of the notch is provided with a height adjustable telescopic rod 13, the inside of the height telescopic adjusting rod is provided with a height sensor for measuring the accurate height of the micrometer, and a plurality of scales for observing the height of the micrometer are arranged on the height telescopic adjusting rod, the bottom of the height telescopic adjusting rod is provided with a measuring probe 14, the micrometer is built in the measuring probe 14, and a protective cover for preventing pollution and corrosion is arranged on the measuring probe 14.

[0037] The calibration groove is internally provided with the driving measurement block 11, which can move the micrometer in the horizontal direction, the cylinder can drive the driving measurement block 11 to move in the calibration groove at the bottom of the left positioning measurement block 7 and the right positioning measurement block 8, so as to adjust the position of the micrometer in the horizontal position, the positioner can monitor the positioning position of the driving measurement block 11 in real time, so that the buffer clamp 10 on the side wall of the left positioning measurement block 7 and the right positioning measurement block 8 can fix and clamp the buffer of the measuring probe 14, the height sensor can adjust the position of the micrometer in the vertical position, the height sensor can measure the accurate height of the micrometer in real time, and the vertical height of the micrometer can be more directly indicated through the scale, and the protective cover can protect the micrometer in the measuring probe 14 from being polluted in the inside of the glue coating developing machine.

[0038] The opposite side of the left positioning measurement block 7 and the right positioning measurement block 8 away from the calibration groove and the moving groove is provided with a magnetic attraction 15 for fixing the left positioning measurement block 7 and the right positioning measurement block 8.

[0039] The magnetic attraction 15 can fix the left positioning measurement block 7 and the right positioning measurement block 8 in the left calibration rack 1 and the right calibration rack 2, prolong the horizontal adjustment distance of the micrometer, and can also disassemble and place the left positioning measurement block 7 and the right positioning measurement block 8, so as to reduce the occupied position of the left calibration rack 1 and the right calibration rack 2 in the inside of the glue coating developing machine.

[0040] The working principle of the utility model is: the operator respectively installs left calibration frame 1 and right calibration frame 2 in different horizontal positions of the top of the gluing developing machine, and left calibration frame 1 and right calibration frame 2 are opposite to the substrate support table position, when the gluing operation of the gluing developing machine is finished, the rotating motor drives threaded rod 5 to rotate, thereby adjusting the height of two sides adjusting seat 3, driving adjusting seat 3 to move from the storage port inside storage cabinet 4 to the position close to the substrate support table, the first distance sensor can sense the height of adjusting seat 3 position, when left calibration frame 1 and right calibration frame 2 are at the same horizontal height close to the substrate support table position, the electric cylinder on the positioning slide rail drives left positioning measurement block 7 and right positioning measurement block 8 to move and extend to be connected through magnetic attraction 15, the second distance sensor 12 can sense the substrate support table position, through the position signal, the cylinder drive drives measurement block 11 to move to the appropriate position inside the calibration groove for calibration measurement, at the same time, driving support seat 9 on the side guide rail to move, the buffer clamp 10 of support seat 9 can move with the micrometer, and the buffer clamp 10 can clamp and buffer, through the spring shock absorber on support seat 9 close to buffer clamp 10 position, the micrometer is buffered again, the position meter real-time monitoring positioning position of drive measurement block 11, and the substrate support table position monitored by the second distance sensor 12 are real-time corresponding, when the positions of both sides are perpendicular, height adjusting telescopic rod 13 drives measurement probe 14 to move down to the substrate support table for calibration, the height sensor real-time measurement micrometer accurate height, and the accurate calibration position of the micrometer is marked at the same time.

[0041] It is obvious for those skilled in the art that the utility model is not limited to the details of the above-mentioned exemplary embodiments, and the utility model can be realized in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point, the embodiments should be regarded as exemplary and non-restrictive, the scope of the utility model is defined by the appended claims instead of the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims should be included in the utility model. Any figure mark in the claims should not be regarded as limiting the involved claims.

Claims

1. A precise and uniform adhesive coating limit calibration device for an adhesive coating and developing machine, characterized in that: The device body includes a calibration rack for installation on the top inside the coating and developing machine. The calibration rack includes a left calibration rack (1) and a right calibration rack (2). Both the left calibration rack (1) and the right calibration rack (2) include a storage cabinet (4) for storage and an adjustment seat (3) for calibrating the flatness of the substrate carrier platform inside the coating and developing machine. The adjustment seat (3) included in the left calibration rack (1) is equipped with a dial indicator for flatness measurement. The storage cabinet (4) is equipped with a storage port for storing the adjustment seat (3). The storage port has a limiting unit for position adjustment and limiting of the adjustment seat (3) on the side near the adjustment seat (3). The adjustment seat (3) is equipped with a calibration unit for position calibration of the dial indicator.

2. The precise and uniform glue coating limit calibration device for a glue coating and developing machine according to claim 1, characterized in that... The limiting unit includes a threaded rod (5) for adjusting the height of the adjusting seat (3). The adjusting seat (3) has a threaded opening inside, and the threaded rod (5) passes through and engages inside the threaded opening. A rotary motor for rotating the threaded rod (5) is provided near the storage port. A limiting block (6) for limiting the adjusting seat (3) is provided between the storage cabinet (4) and the adjusting seat (3). One end of the limiting block (6) is detachably connected to the storage cabinet (4), and the other end is provided with an extension plate. The threaded rod (5) is connected to the extension plate through a bearing.

3. The precise and uniform glue coating limit calibration device for a glue coating and developing machine according to claim 1, characterized in that... The calibration unit includes a positioning measuring block for calibrating the position of the dial indicator. The positioning measuring block included in the left calibration frame (1) is defined as the left positioning measuring block (7), and the positioning measuring block included in the right calibration frame (2) is defined as the right positioning measuring block (8). The two side adjustment seats (3) have slots inside, and positioning slide rails are provided at the top of the slots. The left positioning measuring block (7) and the right positioning measuring block (8) are slidably connected to the two side positioning slide rails. Moving slots are provided on both sides of the left positioning measuring block (7) and the right positioning measuring block (8). Side guide rails are provided inside the moving slots, and the side guide rails are equipped with features for calibrating the dial indicator. The support base (9) for damping and fixing the dial indicator is slidably connected to the side guide rail. The adjustment seat (3) is provided with a multi-position cylinder for simultaneously driving the two support bases (9) to move at the same time. The support base (9) and the adjacent support base (9) are provided with a buffer clamp (10) for damping and fixing the dial indicator. The support base (9) is provided with a lifting groove inside. The buffer clamp (10) is movably connected inside the lifting groove. A spring damper is provided between the buffer clamp (10) and the support base (9) for damping connection. The spring damper is detachably connected to the support base (9) and the buffer clamp (10).

4. The precise and uniform glue coating limit calibration device for a glue coating and developing machine according to claim 3, characterized in that... The left-side positioning measuring block (7) and the right-side positioning measuring block (8) are provided with calibration slots at the bottom near the substrate support platform. The calibration slot inside the left-side positioning measuring block (7) is provided with a drive measuring block (11) and a cylinder for driving the drive measuring block to move. The drive measuring block (11) is slidably connected inside the calibration slot. The drive measuring block (11) is provided with a positioning instrument for positioning the dial indicator. The bottom of the drive measuring block (11) is provided with a slot. The slot is provided with a height adjustment telescopic rod (13). The height telescopic rod is provided with a height sensor for measuring the precise height of the dial indicator. The height telescopic rod is provided with several scales for observing the height of the dial indicator. The bottom of the height telescopic rod is provided with a measuring probe (14). The dial indicator is built into the measuring probe (14). The measuring probe (14) is provided with a protective cover to prevent pollution and corrosion.

5. The precise and uniform glue coating limit calibration device for a glue coating and developing machine according to claim 3, characterized in that... The left positioning measuring block (7) and the right positioning measuring block (8) are provided with magnetic attraction (15) on opposite sides and away from the calibration slot and the moving slot for fixing the left positioning measuring block (7) and the right positioning measuring block (8).

6. The precise and uniform glue coating limit calibration device for a glue coating and developing machine according to claim 1, characterized in that... The storage port is equipped with a first distance sensor for sensing the position and height of the adjustment seat (3). The first distance sensor is electrically connected to the rotary motor. The adjustment seat (3) is equipped with several second distance sensors (12) for sensing the position of the substrate carrier. The second distance sensors (12) are electrically connected to the cylinder inside the calibration slot.

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