Diaphragm device for collecting lens of electron microscope

Abstract

The utility model discloses a diaphragm device for a condenser of an electron microscope, which comprises the condenser, an end cover is fixedly mounted at the bottom of the condenser, and light holes are arranged in the middles of the condenser and the end cover; a conversion assembly is rotationally connected between the collecting lens and the end cover, and the conversion assembly is at least used for shielding the light holes with different apertures; a rotating mechanism is arranged on one side of the bottom of the collecting lens and at least used for rotation of the conversion assembly between the collecting lens and the end cover. A limiting module is arranged in the upper portion of the end cover and at least used for positioning the conversion assembly. According to the utility model, the end cover is arranged below the condensing lens, the light hole is reserved in the middle between the condensing lens and the end cover, and the conversion assembly is driven by the rotating mechanism to rotate, so that the switching of the apertures with different apertures is realized, and the apertures are positioned between the condensing lens and the end cover, thereby effectively controlling the size of beam spots.

Description

Technical Field

[0001] This utility model relates to the field of electron microscope technology, and specifically to an aperture device for a condenser lens of an electron microscope. Background Technology

[0002] An electron microscope is an important instrument for observing minute substances, capable of observing particles smaller than 0.25 nm. It uses an electron beam as the illumination source and magnetic or electrostatic lenses to deflect the electrons, achieving optical magnification. Electron microscopes have a very wide range of applications in physics, chemistry, materials science, scientific research, life sciences, geology, mineral exploration, machinery, and electronics industries, both in military and civilian fields.

[0003] Electron microscopes observe samples by illuminating them with an electron beam. The electron gun and condenser lens constitute the illumination system of an electron microscope. Electron microscopes require the condenser lens to provide the brightest electron beam, the electron beam aperture angle illuminating the sample must be adjustable within a certain range, and the size of the illumination spot can be selected as needed. The condenser lens images the sample using the intersection of the electron guns as the imaging object; typically, the size of the electron gun intersection is tens of micrometers. To maintain a certain height and minimize the impact of the electron beam spot on sample heating, the beam spot at the sample needs to be several micrometers. Therefore, the condenser lens must reduce the size of the electron beam spot. For high-performance electron microscopes, different samples require different beam spot sizes, and different illumination aperture angles should be selected for different samples. To address this, a second condenser lens device capable of continuously changing the illumination aperture angle has been designed. However, how to obtain different illumination aperture angles using the second condenser lens is a problem that needs to be solved. Therefore, it is urgent to design an aperture device for the condenser lens of an electron microscope to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide an aperture device for a condenser lens of an electron microscope to overcome the aforementioned shortcomings in the prior art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] An aperture device for a condenser lens of an electron microscope includes a condenser lens, an end cap fixedly mounted on the bottom of the condenser lens, and a light-transmitting hole provided in the middle of both the condenser lens and the end cap.

[0007] A conversion assembly is rotatably connected between the condenser lens and the end cap, and the conversion assembly is used at least to block the light-transmitting hole with different apertures.

[0008] A rotating mechanism is provided on one side of the bottom of the condenser lens, and the rotating mechanism is used at least for the rotation of the conversion assembly between the condenser lens and the end cap;

[0009] A limiting module is provided inside the upper part of the end cap, and the limiting module is used for at least the positioning of the conversion component.

[0010] Preferably, a groove is provided on the outer wall of the top of the end cap. The groove has an arc-shaped structure, and the conversion component is inserted into the inside of the groove.

[0011] Preferably, a connector is provided between the condenser lens and the end cap. The connector is a long screw, and the connector is threaded into the bottom end of the condenser lens by the bottom end of the end cap.

[0012] Preferably, the conversion component includes a rotating ring, a toothed ring is provided on the inner wall of the rotating ring, and a guide rail is provided on the inner wall of the rotating ring below the toothed ring;

[0013] The top outer wall of the rotating ring is provided with several through-hole apertures, the apertures of which are of different sizes;

[0014] The outer wall of the rotating ring is provided with a number of slots, and the position of each slot corresponds to the position of each aperture.

[0015] Preferably, the rotating mechanism includes a shaft mounted on one side of the top of the end cover, a transmission gear is provided on the outer wall of the bottom end of the shaft, and a synchronization gear is provided on the top end of the shaft;

[0016] One side of the synchronizing gear is meshed with a driving gear. The driving gear has a support shaft inside, the bottom of which is connected to the outer wall of the top of the end cover. A rotating disk is fixedly installed at the top of the support shaft.

[0017] Preferably, the limiting module includes a mounting groove disposed above the end cap, a spring is fixedly installed on one inner wall of the mounting groove, and a locking block that is inserted into the mounting groove is fixedly connected to one end of the spring.

[0018] In the above technical solution, the diaphragm device for the condenser lens of the electron microscope provided by this utility model has the following beneficial effects:

[0019] (1) By setting an end cap below the condenser lens, with a light-transmitting hole in the middle between the two, the switching component is driven by a rotating mechanism to switch the aperture of different apertures, so that the aperture is located between the condenser lens and the end cap, thereby effectively controlling the size of the beam spot.

[0020] (2) The rotating mechanism drives the conversion component to rotate. When the bayonet on the outside of the conversion component is in conjunction with the limit module, it is easier for people to change the position of the conversion component. There is no need to control the rotation angle and accuracy, which improves the efficiency of aperture adjustment. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0022] Figure 1 This is a three-dimensional structural view of an embodiment of an aperture device for a condenser lens of an electron microscope according to the present invention.

[0023] Figure 2 This is a structural cross-sectional view of an embodiment of the condenser aperture device for an electron microscope according to the present invention.

[0024] Figure 3 This is a top view of the structure of an embodiment of the condenser aperture device for an electron microscope according to the present invention.

[0025] Figure 4 This is a schematic diagram of the end cap structure provided in an embodiment of the aperture device for the condenser lens of an electron microscope according to the present invention.

[0026] Figure 5 This is a schematic diagram of the conversion component and rotation mechanism provided in an embodiment of the aperture device for the condenser lens of an electron microscope according to the present invention.

[0027] Figure 6 This invention provides an embodiment of an aperture device for a condenser lens in an electron microscope. Figure 4 Enlarged view of a local structure.

[0028] 1. Condenser lens; 2. End cap; 21. Slide groove; 22. Light transmission hole; 3. Connector; 4. Conversion assembly; 41. Rotating ring; 42. Aperture ring; 43. Bayonet; 44. Gear ring; 45. Guide rail; 5. Rotating mechanism; 51. Shaft; 52. Transmission gear; 53. Synchronizing gear; 54. Drive gear; 55. Rotating disk; 6. Limiting module; 61. Mounting slot; 62. Spring; 63. Locking block. Detailed Implementation

[0029] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0030] like Figure 1-6As shown in the figure, an aperture device for a condenser lens of an electron microscope provided by this utility model embodiment includes a condenser lens 1, an end cap 2 fixedly mounted on the bottom of the condenser lens 1, and a light-transmitting hole 22 provided in the middle of both the condenser lens 1 and the end cap 2; a conversion component 4 is rotatably connected between the condenser lens 1 and the end cap 2, the conversion component 4 being used at least to block the light-transmitting hole 22 with different apertures; a rotation mechanism 5 is provided on one side of the bottom of the condenser lens 1, the rotation mechanism 5 being used at least to rotate the conversion component 4 between the condenser lens 1 and the end cap 2; a limiting module 6 is provided inside the upper part of the end cap 2, the limiting module 6 being used at least to position the conversion component 4.

[0031] In this embodiment, a condenser lens 1 is included. Light shines downward through the light-transmitting hole 22 of the condenser lens 1. An end cap 2 is fixedly installed at the bottom of the condenser lens 1. Both the condenser lens 1 and the end cap 2 are provided with light-transmitting holes 22 in the middle. The light passing through the condenser lens 1 shines out through the light-transmitting hole 22 of the end cap 2.

[0032] Specifically, a groove 21 is provided on the outer wall of the top of the end cap 2. The groove 21 has an arc-shaped structure. The conversion component 4 is inserted into the inside of the groove 21, and the rotating ring 41 is slidably inserted into the inside of the groove 21, so that the rotating ring 41 rotates along the groove 21.

[0033] In this embodiment, a conversion component 4 is rotatably connected between the condenser lens 1 and the end cap 2. The conversion component 4 is at least used to block the light-transmitting hole 22 with different apertures. Through the rotational rotation of the rotating ring 41, the apertures 42 with different apertures on the rotating ring 41 are located between the light-transmitting hole 22 of the condenser lens 1 and the end cap 2, thereby changing the aperture size through which the light is emitted.

[0034] Specifically, the conversion component 4 includes a rotating ring 41, a gear ring 44 is provided on the inner wall of the rotating ring 41, and a guide rail 45 located below the gear ring 44 is provided on the inner wall of the rotating ring 41. The guide rail 45 moves along the inner side of the slide groove 21, which plays a guiding role and ensures the rotation accuracy of the rotating ring 41.

[0035] Specifically, a number of through-hole apertures 42 are provided on the top outer wall of the rotating ring 41. The apertures 42 have different diameters. Different apertures 42 are used to block the light-transmitting hole 22 to different degrees, thereby changing the beam spot of the light.

[0036] Specifically, the outer wall of the rotating ring 41 is provided with several slots 43, and the position of each slot 43 corresponds to the position of each aperture 42. When each aperture 42 is switched to the position of the light-transmitting hole 22, the slot 43 contacts the limiting module 6 to achieve cooperation. The limiting module 6 is used to adjust the position of the rotating ring 41 to ensure that the central axis of the aperture 42 coincides with the central axis of the light-transmitting hole 22.

[0037] In this embodiment, a rotating mechanism 5 is provided on one side of the bottom of the condenser lens 1. The rotating mechanism 5 is used at least for the rotation of the conversion assembly 4 between the condenser lens 1 and the end cap 2.

[0038] Specifically, the rotating mechanism 5 includes a shaft 51 installed on one side of the top of the end cover 2, a transmission gear 52 is provided on the outer wall of the bottom end of the shaft 51, and a synchronization gear 53 is provided on the top end of the shaft 51.

[0039] Specifically, a drive gear 54 is meshed with one side of the synchronous gear 53. The drive gear 54 has a support shaft inside, the bottom of which is connected to the top outer wall of the end cover 2. A rotating disk 55 is fixedly installed at the top of the support shaft. A handle is fixedly installed on one side of the top of the rotating disk 55. The operator holds the handle to make the rotating disk 55 rotate. The rotating disk 55 drives the drive gear 54 to rotate through the support shaft. The drive gear 54 meshes with the synchronous gear 53. Therefore, the synchronous gear 53 and the transmission gear 52 rotate synchronously through the drive gear 54. The transmission gear 52 meshes with the gear ring 44, which enables the transmission gear 52 to drive the rotating ring 41 to rotate.

[0040] When the operator rotates the rotating disk 55, the rotation of the rotating ring 41 will squeeze the locking block 63, causing the locking block 63 to retract into the mounting groove 61. As the rotating ring 41 continues to rotate, when the next aperture 42 is in place, the locking block 63, under the action of the spring 62, will lock into the slot 43 on the outside of the aperture 42, thereby guiding and limiting the position of the aperture 42.

[0041] In this embodiment, a limiting module 6 is provided inside the upper part of the end cap 2. The limiting module 6 is used at least for the positioning of the conversion component 4.

[0042] Specifically, the limiting module 6 includes a mounting groove 61 set above the end cover 2. A spring 62 is fixedly installed on the inner wall of one side of the mounting groove 61. One end of the spring 62 is fixedly connected to a locking block 63 that is inserted into the mounting groove 61. Limiting blocks are set on both sides of the locking block 63. Under the action of the spring 62, the locking block 63 can slide inside the mounting groove 61 to realize the extension and retraction of the locking block 63.

[0043] In this embodiment, a connector 3 is provided between the condenser lens 1 and the end cap 2. The connector 3 is a long screw, and the connector 3 is threaded into the bottom end of the condenser lens 1 by the bottom end of the end cap 2.

[0044] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A condenser aperture device for an electron microscope, comprising a condenser (1), characterized in that, An end cap (2) is fixedly installed at the bottom of the condenser lens (1), and a light-transmitting hole (22) is provided in the middle of both the condenser lens (1) and the end cap (2); A conversion assembly (4) is rotatably connected between the condenser lens (1) and the end cap (2), and the conversion assembly (4) is used at least to block the light-transmitting hole (22) with different apertures; A rotating mechanism (5) is provided on one side of the bottom of the condenser lens (1), and the rotating mechanism (5) is used at least for the rotation of the conversion assembly (4) between the condenser lens (1) and the end cap (2); An internal limit module (6) is provided above the end cap (2), and the limit module (6) is used at least for positioning the conversion component (4).

2. The aperture device for the condenser lens of an electron microscope according to claim 1, characterized in that, The outer wall of the top of the end cap (2) is provided with a sliding groove (21), which is an arc-shaped structure, and the conversion component (4) is inserted into the inside of the sliding groove (21).

3. The aperture device for the condenser lens of an electron microscope according to claim 1, characterized in that, A connector (3) is provided between the condenser lens (1) and the end cap (2). The connector (3) is a long screw, and the connector (3) is threaded into the bottom end of the condenser lens (1) by the bottom end of the end cap (2).

4. The aperture device for the condenser lens of an electron microscope according to claim 1, characterized in that, The conversion component (4) includes a rotating ring (41), a toothed ring (44) is provided on the inner wall of the rotating ring (41), and a guide rail (45) located below the toothed ring (44) is provided on the inner wall of the rotating ring (41). The top outer wall of the rotating ring (41) is provided with a number of through apertures (42), the apertures (42) being of different sizes; The outer wall of the rotating ring (41) is provided with a plurality of slots (43), and the position of each slot (43) corresponds to the position of each aperture (42).

5. The aperture device for the condenser lens of an electron microscope according to claim 1, characterized in that, The rotating mechanism (5) includes a shaft (51) installed on one side of the top of the end cover (2), a transmission gear (52) is provided on the outer wall of the bottom end of the shaft (51), and a synchronous gear (53) is provided on the top end of the shaft (51). One side of the synchronous gear (53) is meshed with a drive gear (54). The drive gear (54) has a support shaft whose bottom end is connected to the top outer wall of the end cover (2). A rotating disk (55) is fixedly installed on the top end of the support shaft.

6. The aperture device for the condenser lens of an electron microscope according to claim 1, characterized in that, The limiting module (6) includes a mounting groove (61) disposed above the end cap (2). A spring (62) is fixedly installed on one side inner wall of the mounting groove (61), and a locking block (63) that is inserted into the mounting groove (61) is fixedly connected to one end of the spring (62).

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