Probe cleaning device

Abstract

The utility model discloses a probe cleaning device. The probe cleaning device comprises a cleaning assembly and an adjusting assembly, the cleaning assembly comprises a cleaning face and a mounting face which are arranged back to back, and the cleaning face is used for cleaning a probe. The adjusting assembly is connected to the mounting surface and can adjust the inclination of the cleaning assembly relative to the vertical direction so as to adjust the cleaning effect of the cleaning assembly on the probe. According to the probe cleaning device disclosed by the embodiment of the utility model, the inclination of the cleaning surface relative to the vertical direction can be adjusted by arranging the adjusting assembly, so that the probe cleaning device can have a better cleaning effect on the probe when the probe and the cleaning surface generate relative displacement in the horizontal direction.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor test, concretely relates to a probe cleaning device. BACKGROUND

[0002] With the development of semiconductor chip industry, the whole manufacturing process of semiconductor device can be divided into wafer manufacturing, wafer testing, wafer packaging and final testing etc. The equipment for wafer testing includes probe station, and the probe station carries out electrical property test to the die on the wafer touched by probe, so the accuracy of electrical property detection of die is related to the yield of product, in order to ensure the accuracy of wafer test result, the probe needs to be cleaned to remove the impurities adhered to the surface of probe after a certain number of tests. The cleaning of probe in the prior art is usually through automation technology, the probe is first contacted with the cleaning surface of cleaning assembly, and then the probe is moved back and forth to achieve the purpose of cleaning, but the cleaning of probe in the prior art has the problem of uneven cleaning degree. SUMMARY

[0003] The utility model discloses at least one of the prior art problems. To this end, the utility model provides a probe cleaning device, which can improve the cleaning effect of the probe.

[0004] The probe cleaning device according to the first aspect of the utility model comprises a cleaning assembly and an adjusting assembly, the cleaning assembly comprises a cleaning surface and a mounting surface arranged oppositely, and the cleaning surface is used for cleaning the probe. The adjusting assembly is connected to the mounting surface, and the adjusting assembly can adjust the inclination of the cleaning assembly relative to the vertical direction.

[0005] The probe cleaning device according to the utility model has at least the following beneficial effects: the cleaning surface in the prior art is not necessarily completely perpendicular to the probe, and when the cleaning surface has a certain inclination, the back-and-forth movement of the probe cannot clean all places on the surface of the probe well. For example, when the left side of the cleaning surface is inclined downward relative to the horizontal plane, the area that can be cleaned by the probe moving from right to left will gradually decrease, and the cleaning effect on the left side of the probe is lower than that on the right side, so the cleaning degree is uneven. The probe cleaning device according to the utility model embodiment can adjust the inclination of the cleaning surface relative to the vertical direction through the adjusting assembly, so that the probe cleaning device has better cleaning effect on the probe when the probe and the cleaning surface produce relative displacement in the horizontal direction.

[0006] According to some embodiments of the present application, the adjusting assembly comprises a first bottom plate, an adjusting plate and an adjusting bolt, the first bottom plate is movably connected with the adjusting plate, the adjusting bolt comprises a head and a screw rod, the screw rod is threadedly connected with any one of the first bottom plate and the adjusting plate, one end of the screw rod away from the head abuts against the other one of the first bottom plate and the adjusting plate, the adjusting plate is fixedly connected with the cleaning assembly, and the adjusting bolt is rotatable to adjust the distance between the first bottom plate and the adjusting plate.

[0007] According to some embodiments of the present application, the adjusting plate has two long sides and two short sides, the two long sides are spaced apart, two ends of the long side are connected with two short sides respectively, two ends of the short side are connected with two long sides respectively, the long side and the short side are perpendicular to each other, the adjusting bolt is provided with eight, and one adjusting bolt is provided at each end of the long side and each end of the short side respectively.

[0008] According to some embodiments of the present application, the adjusting assembly further comprises four connecting pieces, the connecting pieces connect the first bottom plate and the adjusting plate, any one of the connecting pieces is provided with one adjusting bolt adjacent to the direction of the long side spacing distribution, and any one of the connecting pieces is provided with one adjusting bolt adjacent to the direction of the short side spacing distribution.

[0009] According to some embodiments of the present application, the cleaning assembly comprises a second bottom plate and a brush, one end of the brush is connected with the second bottom plate, the second bottom plate is connected with the adjusting assembly, and the other end of the brush is used for cleaning the probe.

[0010] According to some embodiments of the present application, the material of the brush is polybutylene terephthalate.

[0011] According to some embodiments of the present application, the probe cleaning device comprises a lifting mechanism, the lifting mechanism is connected with the adjusting assembly, and the lifting mechanism is used for driving the adjusting assembly to lift to make the cleaning assembly lift.

[0012] According to some embodiments of the present application, the probe cleaning device further comprises a first sensor and a second sensor spaced apart in a vertical direction, the first sensor is arranged above the second sensor, the probe cleaning device further comprises a sensing piece, the adjusting assembly is fixedly connected with the sensing piece, the second sensor can detect the sensing piece when the adjusting assembly is lowered to the lowest point, and the first sensor can detect the sensing piece when the adjusting assembly is raised to the highest point.

[0013] According to some embodiments of the present invention, the cleaning component includes a body and a protrusion. The protrusion protrudes relative to the body and is connected to the adjustment component on the side of the protrusion away from the body. The body and the adjustment component are spaced apart. There are two protrusions, which are symmetrically arranged at both ends of the body in the horizontal direction.

[0014] According to some embodiments of the present invention, the probe cleaning device further includes a translation mechanism connected to the adjustment component, the translation mechanism being used to drive the adjustment component to move in the horizontal direction so that the cleaning component moves in the horizontal direction.

[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0017] Figure 1 This is a perspective view of a probe cleaning device in one embodiment of the present invention;

[0018] Figure 2 This is an exploded view of a probe cleaning device in one embodiment of the present invention;

[0019] Figure 3 This is a first-state cross-sectional view of the probe cleaning device in one embodiment of the present invention;

[0020] Figure 4 This is a second-state cross-sectional view of the probe cleaning device in one embodiment of the present invention;

[0021] Figure 5 This is a top view of the adjustment plate of the probe cleaning device in one embodiment of the present invention;

[0022] Figure 6 This is a perspective view of the cleaning component of the probe cleaning device in one embodiment of the present invention.

[0023] Reference numerals: probe cleaning device 100, cleaning component 101, cleaning surface 102, adjusting component 103, first base plate 104, adjusting plate 105, second base plate 106, brush 107, lifting mechanism 108, back plate 109, adjusting bolt 201, first sensor 202, second sensor 203, sensing element 204, head 205, screw 206, probe 301, long side 501, short side 502, connecting element 503, mounting surface 601, body part 602, protrusion 603. DETAILED DESCRIPTION

[0024] Embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary only, and are used only for the purpose of explaining the present application, and are not to be construed as limiting the present application.

[0025] In the description of the present application, it is to be understood that, in relation to the orientation description, for example, the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0026] In the description of the present application, the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, etc. are understood as not including the number, above, below, etc. are understood as including the number. If it is described as first, second, it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the sequence of indicated technical features.

[0027] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0028] In the description of the present application, the description of the reference terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0029] Reference Figure 1 , Figure 2 and Figure 6According to the probe cleaning device 100 of the first aspect of the present application, the cleaning assembly 101 comprises a cleaning surface 102 and a mounting surface 601 arranged oppositely, and the cleaning surface 102 is used for cleaning the probe 301. The adjusting assembly 103 is connected to the mounting surface 601, and the adjusting assembly 103 can adjust the inclination of the cleaning assembly 101 relative to the vertical direction.

[0030] The cleaning surface 102 in the prior art is not necessarily perpendicular to the probe 301, and when the cleaning surface 102 has a certain inclination, the back-and-forth movement of the probe 301 cannot clean all parts of the surface of the probe 301 well. For example, when the left side of the cleaning surface 102 is inclined downward relative to the horizontal plane, the area that can be cleaned by the probe 301 when moving from right to left will gradually decrease, and the cleaning effect on the left side of the probe 301 is lower than that on the right side, and the cleaning degree is uneven. The probe cleaning device 100 of the present application embodiment can adjust the inclination of the cleaning surface 102 relative to the vertical direction through the adjusting assembly 103, so that the probe cleaning device 100 can have a better cleaning effect on the probe 301 when the probe 301 and the cleaning surface 102 produce relative displacement in the horizontal direction.

[0031] Reference Figure 1 , Figure 2 and Figure 5 In some embodiments of the present application, the adjusting assembly 103 comprises a first bottom plate 104, an adjusting plate 105 and an adjusting bolt 201. The first bottom plate 104 is movably connected to the adjusting plate 105. The adjusting bolt 201 comprises a head 205 and a screw rod 206. The screw rod 206 is threadedly connected to either one of the first bottom plate 104 and the adjusting plate 105, and the end of the screw rod 206 away from the head 205 abuts the other one of the first bottom plate 104 and the adjusting plate 105. The adjusting plate 105 is fixedly connected to the cleaning assembly 101. The adjusting bolt 201 can be rotated to adjust the distance between the first bottom plate 104 and the adjusting plate 105. Figure 2In the shown structure, the adjusting plate 105 is provided with a threaded hole, and the screw rod 206 is threadedly connected to the adjusting plate 105, and the end of the screw rod 206 away from the head 205 abuts against the first bottom plate 104, so that rotating the adjusting bolt 201 can make the screw rod 206 rotate in the adjusting plate 105, so that the end of the screw rod 206 away from the head 205 abuts against the first bottom plate 104 to increase or decrease the distance between the first bottom plate 104 and the adjusting plate 105, by changing the local distance between the first bottom plate 104 and the adjusting plate 105 at the position of the adjusting bolt 201, the inclination of the adjusting plate 105 relative to the vertical direction is changed, so that the inclination of the cleaning assembly 101 mounted on the adjusting plate 105 is changed. The way of adjusting bolt 201 to change the inclination is intuitive and convenient, rotating the adjusting bolt 201 can increase or decrease the distance to adjust the inclination, the structure of the adjusting bolt 201 is simple and easy to process, the corresponding size threaded hole can be provided in any one of the two plates that need to be adjusted, and the adjusting bolt 201 can be installed, and different positions and different numbers can be set according to the needs. In some embodiments of the present application, the first bottom plate 104 and the adjusting plate 105 can also be connected by bolts, and then a gasket is arranged between the two, and the inclination can also be changed by changing the thickness and number of the gasket, in this embodiment, the adjusting assembly 103 includes a gasket. The position of changing the inclination can also not be limited between the first bottom plate 104 and the adjusting plate 105, but an adjusting device can also be arranged between the mounting surface 601 and the adjusting plate 105, and finally the inclination of the cleaning surface 102 relative to the vertical direction can be changed. In some embodiments of the present application, threaded holes can also be provided on the first bottom plate 104, the adjusting bolt 201 is arranged on the first bottom plate 104, and abuts against the adjusting plate 105, and the same technical effect of adjusting the inclination can also be achieved.

[0032] Reference Figure 2 and Figure 5 In some embodiments of the present application, the adjusting plate 105 has two long edges 501 and two short edges 502, the two long edges 501 are spaced apart, the two ends of the long edge 501 are respectively connected to the two short edges 502, the two ends of the short edge 502 are respectively connected to the two long edges 501, the long edge 501 and the short edge 502 are perpendicular to each other, the adjusting bolt 201 is provided with eight, and one adjusting bolt 201 is arranged at the two ends of each long edge 501 and the two ends of each short edge 502. The rectangular shape with two long edges 501 and two short edges 502 can more intuitively see the inclination, when it is found that the cleaning surface 102 and the probe 301 do not keep vertical, the rectangular shape can see whether it is inclined to the left and right direction or the up and down direction, and eight adjusting bolts 201 are arranged and Figure 5The arrangement is to adjust better for the inclination, specifically, in some embodiments of the utility model, the adjusting plate 105 is parallel to the cleaning surface 102, when the cleaning surface 102 is inclined to the left, the two adjusting bolts 201 at the leftmost end are adjusted to increase the distance between the adjusting plate 105 at the position and the first bottom plate 104, if there is also inclination in the up-down direction, the adjusting bolt 201 at the up-down position is adjusted, the eight adjusting bolts 201 have greater adjustable space, can make the cleaning surface 102 as possible perpendicular to the probe 301. Figure 3 The eight adjusting bolts 201 and the arrangement position shown are one kind in the embodiments of the utility model, in some embodiments, the position and quantity of the adjusting bolt 201 can also be adjusted according to the accuracy requirement of inclination, the processing cost and the complexity of components, for example, when the accuracy requirement is low, one adjusting bolt 201 is also set at each corner of the adjusting plate 105. Figure 5 The eight adjusting bolts 201 and the arrangement position shown are one kind in the embodiments of the utility model, in some embodiments, the position and quantity of the adjusting bolt 201 can also be adjusted according to the accuracy requirement of inclination, the processing cost and the complexity of components, for example, when the accuracy requirement is low, one adjusting bolt 201 is also set at each corner of the adjusting plate 105.

[0033] Reference Figure 2 And Figure 5 In some embodiments of the utility model, the adjusting assembly 103 further includes four connecting pieces 503, the connecting piece 503 connects the first bottom plate 104 and the adjusting plate 105, any one connecting piece 503 is provided with one adjusting bolt 201 along the direction of interval distribution of the long side 501, any one connecting piece 503 is provided with one adjusting bolt 201 along the direction of interval distribution of the short side 502. The connecting piece 503 can make the first bottom plate 104 and the adjusting plate 105 not fall off when the adjusting bolt 201 is adjusted, improve the structural stability, specifically, in some embodiments of the utility model, the connecting piece 503 can use the connecting bolt, it needs to be explained that the adjustment of inclination is actually very small, because in the ideal case, the components will be set like Figure 3 And Figure 4The connection pieces 503 are perpendicular to the probe 301, so even if the connection pieces 503 are connected by bolts, the adjustment bolts 201 can still be fine-tuned. Four connection pieces 503 are provided and each of the connection pieces 503 is adjacent to one adjustment bolt 201 in the length and width directions, because the inclination between the adjustment plate 105 and the first bottom plate 104 is often caused by slight differences in the connection parts, for example, the position connected more tightly is relatively inclined downward, so that the adjustment bolt 201 and the connection piece 503 are adjacent to each other, which can better adjust the inclination of each position, and facilitate the adjustment of the inclination of the cleaning surface 102 relative to the vertical direction. It should be noted that the above-mentioned adjacent arrangement means that each connection piece 503 has the nearest adjustment bolt 201, and the nearest adjustment bolt 201 is located in the up-down direction or the left-right direction of the connection piece 503, and adjusting the adjustment bolt 201 at this position can directly affect the inclination of the adjustment plate 105 at the position of the connection piece 503.

[0034] Reference Figures 1 to 3 In some embodiments of the present application, the cleaning assembly 101 comprises a second bottom plate 106 and a brush 107, one end of the brush 107 is connected to the second bottom plate 106, the second bottom plate 106 is connected to the adjustment assembly 103, and the other end of the brush 107 is used to clean the probe 301. Since the cleaning assembly 101 needs to clean the probe 301, it is separately provided, a second bottom plate 106 is provided for connection with the adjustment assembly 103, and then a brush 107 specially used for cleaning the probe 301 is provided on the second bottom plate 106. It should be noted that when the brush 107 is used for cleaning, the cleaning surface 102 refers to the plane where the end of the brush 107 away from the second bottom plate 106 is located, and in actual use, a small part of the probe 301 will extend into the brush 107, at this time, in addition to the cleaning surface 102, the position adjacent to the end of the brush 107 also participates in cleaning. Using the brush 107 to clean can reduce physical damage to the needle of the probe 301, and the brush 107 cleaning can more gently remove dirt on the surface of the probe 301, maintain its original state, and the brush 107 cleaning method is relatively simple and does not require complex equipment and operation process.

[0035] It should be noted that reference Figure 3 and Figure 4 In some embodiments of the present application, the cleaning surface 102 is preferably provided as a flat plane, which can better adjust the inclination of the cleaning surface 102, when one position is perpendicular to the probe 301, the entire plane is also perpendicular to the probe 301, which can reduce the difficulty of adjustment.

[0036] It should be noted that, in some embodiments of the utility model, cleaning paper, cleaning cloth and the like can also be used for cleaning, and in this embodiment, the cleaning paper and the cleaning cloth are part of the cleaning assembly 101, and the cleaning surface 102 is located on the side surface of the cleaning paper and the cleaning cloth away from the adjusting assembly 103, so that the needle of the probe 301 can be cleaned.

[0037] In some embodiments of the utility model, the material of the brush 107 is polybutylene terephthalate. Polybutylene terephthalate, also known as PBT, is a thermoplastic polyester. PBT is relatively soft and has good elasticity, so that when the wafer probe 301 is cleaned, the brush 107 can better fit the surface of the probe 301, effectively remove dirt, and at the same time, the probe 301 is not easily damaged. Good elasticity ensures that the brush 107 can still maintain good cleaning effect after long-term use. In addition, PBT also has good wear resistance, heat resistance and chemical stability, and is easy to clean and does not breed bacteria. The cleaned PBT brush 107 can quickly restore its original cleaning ability to ensure that it still achieves good cleaning effect next time. It should be noted that, in some embodiments of the utility model, the brush 107 can also use nanometer stainless steel, nylon and the like.

[0038] Reference Figure 1 , Figure 3 and Figure 4 In some embodiments of the utility model, the probe cleaning device 100 comprises a lifting mechanism 108. The lifting mechanism 108 is connected to the adjusting assembly 103, and the lifting mechanism 108 is used to drive the adjusting assembly 103 to lift so as to lift the cleaning assembly 101. The height of the cleaning assembly 101 can be adjusted by using the lifting mechanism 108 to adjust the height of the cleaning surface 102, so that the probe 301 can be better cleaned, and the lifting can change the cleaning surface 102 of the cleaning assembly 101 in the vertical direction of the probe 301, thereby improving the cleaning ability of the probe cleaning device 100. It should be noted that, in some embodiments of the utility model, the lifting mechanism 108 can use the cylinder transmission as shown in Figure 1 , and can also use screw rod transmission and the like to realize lifting.

[0039] Reference Figure 3 and Figure 4 In some embodiments of the utility model, the probe cleaning device 100 further comprises a first sensor 202 and a second sensor 203 which are spaced apart in the vertical direction, the first sensor 202 is arranged above the second sensor 203, and the probe cleaning device 100 further comprises a sensing piece 204, the adjusting assembly 103 is fixedly connected with the sensing piece 204, when the adjusting assembly 103 is lowered to the lowest point, the second sensor 203 can detect the sensing piece 204, and when the adjusting assembly 103 is raised to the highest point, the first sensor 202 can detect the sensing piece 204. It should be noted that,Figure 3 The state shown is the state when the adjusting assembly 103 is lowered to the lowest point, Figure 4 The state shown is the state when the adjusting assembly 103 is raised to the highest point, the first sensor 202 and the second sensor 203 can detect the position of the adjusting assembly 103 in the vertical direction, so that the current state of the probe cleaning device 100 is more intuitive, and when the adjusting assembly 103 is at the highest point or the highest point, the first sensor 202 and the second sensor 203 are triggered due to the driving of the inductor 204, thereby preventing damage to the equipment caused by the adjusting assembly 103 being too high or too low.

[0040] Reference Figure 2 And Figure 6 In some embodiments of the present application, the cleaning assembly 101 comprises a body part 602 and a protruding part 603, the protruding part 603 protrudes relative to the body part 602, one side of the protruding part 603 away from the body part 602 is connected with the adjusting assembly 103, the body part 602 is distributed with the adjusting assembly 103, the protruding part 603 is provided with two, the two protruding parts 603 are symmetrically arranged at both ends of the body part 602 in the horizontal direction. Such design can ensure the flatness of the connection between the cleaning assembly 101 and the adjusting assembly 103, and at the same time, the side surface of the entire body part 602 towards the adjusting assembly 103 does not need to be processed with high flatness, reducing the processing difficulty and cost, and the symmetrically arranged protruding parts 603 at both ends of the body part 602 in the horizontal direction can make the connection between the protruding parts 603 and the adjusting assembly 103 more stable.

[0041] In some embodiments of the present application, the probe cleaning device 100 further comprises a translation mechanism, the translation mechanism is connected to the adjusting assembly 103, and the translation mechanism is used to drive the adjusting assembly 103 to move in the horizontal direction to make the cleaning assembly 101 move in the horizontal direction. The translation mechanism can make the cleaning assembly 101 move in the horizontal direction relative to the probe 301 during use, thereby realizing all-around cleaning of the probe 301 and improving the cleaning effect. Specifically, referring to Figure 1 In some embodiments of the present application, the probe cleaning device 100 further comprises a back plate 109, the back plate 109 is connected to the adjusting assembly 103, so that the translation mechanism can be installed on the back plate 109 to realize the movement of the adjusting assembly 103 and the cleaning assembly 101, and the specific structure and model of the back plate 109 can also be adjusted according to the model of the connecting end of the translation mechanism to adapt to different types of translation mechanisms. It should be noted that in some embodiments of the present application, the translation mechanism can also be connected to the probe 301 and drive the probe 301 to move in the horizontal direction, which can also realize all-around cleaning of the probe 301.

[0042] The utility model embodiment has been explained in detail above in combination with the drawings, but the utility model is not limited to the above-mentioned embodiment, still can make various changes in the knowledge range of the ordinary skill in the art who possesses under the premise of not departing from the utility model's tenet. Besides, the embodiment and the feature in the embodiment of the utility model can be combined mutually under the condition of not conflicting.

Claims

1. Probe cleaning device, characterized in that The probe cleaning device comprises: a cleaning assembly comprising a cleaning surface and a mounting surface arranged oppositely, the cleaning surface being used for cleaning the probe; an adjusting assembly connected to the mounting surface, the adjusting assembly being capable of adjusting the inclination of the cleaning assembly relative to the vertical direction; the adjusting assembly comprises a first bottom plate, an adjusting plate and an adjusting bolt, the first bottom plate and the adjusting plate being movably connected, the adjusting bolt comprising a head and a screw rod, the screw rod being threadedly connected to either one of the first bottom plate and the adjusting plate, the end of the screw rod away from the head abutting the other one, the adjusting plate being fixedly connected to the cleaning assembly, the adjusting bolt being rotatable to adjust the distance between the first bottom plate and the adjusting plate.

2. The probe cleaning apparatus of claim 1, wherein the adjusting plate has two long sides and two short sides, the two long sides being spaced apart, the two ends of the long sides being respectively connected to the two short sides, the two ends of the short sides being respectively connected to the two long sides, the long sides and the short sides being perpendicular to each other, the adjusting bolt being provided with eight, one adjusting bolt being provided at each end of the long side and each end of the short side.

3. The probe cleaning apparatus of claim 2, wherein the adjusting assembly further comprises four connecting pieces connecting the first bottom plate and the adjusting plate, any one of the connecting pieces being arranged adjacent to one adjusting bolt along the direction in which the long sides are spaced apart, and any one of the connecting pieces being arranged adjacent to one adjusting bolt along the direction in which the short sides are spaced apart.

4. The probe cleaning apparatus of claim 1, wherein the cleaning assembly comprises a second bottom plate and a brush, one end of the brush being connected to the second bottom plate, the second bottom plate being connected to the adjusting assembly, the other end of the brush being used for cleaning the probe.

5. The probe cleaning apparatus of claim 4, wherein the brush is made of polybutylene terephthalate.

6. The probe cleaning apparatus of claim 1, wherein The probe cleaning device comprises: a lifting mechanism connected to the adjusting assembly, the lifting mechanism being used for lifting the adjusting assembly to lift the cleaning assembly.

7. The probe cleaning apparatus of claim 6, wherein The probe cleaning device further comprises a first sensor and a second sensor spaced apart along the vertical direction, the first sensor being arranged above the second sensor, the probe cleaning device further comprising a sensing piece, the adjusting assembly being fixedly connected to the sensing piece, the second sensor being capable of detecting the sensing piece when the adjusting assembly is lowered to the lowest point, and the first sensor being capable of detecting the sensing piece when the adjusting assembly is raised to the highest point.

8. The probe cleaning apparatus of claim 1, wherein The cleaning assembly comprises a body portion and a protruding portion, the protruding portion being protruded relative to the body portion, one side of the protruding portion away from the body portion being connected to the adjusting assembly, the body portion being spaced apart from the adjusting assembly, the protruding portion being provided with two, the two protruding portions being symmetrically arranged at the two ends of the body portion along the horizontal direction.

9. The probe cleaning apparatus of claim 1, wherein The probe cleaning device further comprises a translation mechanism connected to the adjusting assembly, the translation mechanism being used for moving the adjusting assembly along the horizontal direction to move the cleaning assembly along the horizontal direction.

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