Vacuum induction welding furnace with good sealing performance

Abstract

The utility model provides a vacuum induction welding furnace with good sealing performance, which relates to the field of semiconductor device processing equipment and comprises a vacuum cavity, an inductor and a product moving device. The inductor is fixed in the vacuum cavity; a cooling water pipe communicated with the inside and outside of the vacuum cavity is hermetically fixed on the vacuum cavity; the cooling water pipe is communicated with the sensor and a water source outside the vacuum cavity; the product moving device can drive the product to move in the horizontal direction and the vertical direction. According to the vacuum induction welding furnace with the good sealing performance, the problem that in the prior art, the sealing performance of a vacuum induction welding furnace is poor is solved, and the sealing performance of the vacuum cavity of the vacuum induction welding furnace can be improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor device processing equipment especially relates to the good vacuum induction welding furnace of sealing. BACKGROUND

[0002] The particularity of induction brazing is that it achieves the purpose of welding by means of the resistance heat formed in the welding piece by the induced current. Unlike the traditional heating method, the heat is not conducted to the workpiece from the external environment or medium, but the high-frequency or power-frequency electric energy is transmitted to the metal workpiece by the induction coil, so that eddy current is generated in the workpiece due to induction, and then heat is generated. It belongs to the workpiece itself heat generation to melt the solder and promote its spread, realizing the brazing process.

[0003] In the prior art, for example, a kind of vacuum induction brazing device and its using method disclosed in Chinese patent application No.202010297249.9 is a kind of welding equipment using induction brazing principle. From its technical solution "lifting motor drives screw rod rotation, lifting adjusting plate realizes downward movement by the limiting cooperation of lifting nut and guide rod, and then the induction coil is accurately moved to the workpiece welding position", it can be clearly seen that the device adopts the method of fixing the workpiece first and then moving the induction coil close to the workpiece to implement the welding operation. However, whether it is the induction coil in this patent or the inductor in general category, a large amount of waste heat will be generated during work. If the heat generated cannot be dissipated in time, the inductor will be damaged once the heat generated exceeds the limit that the inductor material can withstand, which directly endangers the normal operation of the induction heating equipment.

[0004] Under normal circumstances, to solve this problem, cooling water is connected to cool the inductor. However, in the special environment of vacuum welding, cooling water generally needs to be introduced from the outside to the inside of the vacuum cavity. At this time, if the inductor is in a moving state, the cooling water pipe system matched with it also has to move to adapt to the inductor at different positions in the vacuum cavity. However, in this way, it is extremely difficult to effectively seal the cooling water pipe under the moving state in the vacuum cavity working environment that requires strict sealing. On the one hand, the frequent displacement of the pipe during the moving process is easy to cause the loosening of the sealing connection, causing the risk of leakage; on the other hand, the complexity of the pipe moving track also makes it difficult for conventional sealing means to cover all aspects, so it is difficult to ensure that the sealing property of the vacuum cavity is not affected, which may lead to the destruction of the vacuum environment and affect the welding quality and equipment stability. UTILITY MODEL CONTENTS

[0005] In view of the above technical problems, the good vacuum induction welding furnace with good sealing property provided by the utility model can improve the sealing property of the vacuum cavity of the vacuum induction welding furnace.

[0006] To achieve the above purpose, the technical scheme adopted by the utility model is:

[0007] The utility model provides a good vacuum induction welding furnace of sealing, including vacuum cavity, inductor and product moving device, the inductor is fixed in the inside of vacuum cavity, the cooling water pipe of the intercommunication of vacuum cavity outside is fixedly installed on the vacuum cavity, the cooling water pipe intercommunication inductor with the water source outside vacuum cavity, product moving device can drive product horizontal and vertical direction removal.

[0008] The utility model provides a good vacuum induction welding furnace of sealing, preferably, two opposite sides of the vacuum cavity are equipped with product entrance and product exit respectively, the product entrance with product exit all is provided with sealed gate, the sealed gate can close product entrance with product exit, product moving device includes slewing tray, horizontal drive mechanism and vertical drive mechanism, the horizontal drive mechanism with vertical drive mechanism all are fixed in the inside of vacuum cavity, the horizontal drive mechanism can drive slewing tray horizontal direction removal, the horizontal drive mechanism can move slewing tray to vertical drive mechanism, vertical drive mechanism can drive slewing tray vertical direction removal.

[0009] The utility model provides a good vacuum induction welding furnace of sealing, preferably, be provided with product clamp on the slewing tray.

[0010] The utility model provides a good vacuum induction welding furnace of sealing, preferably, product moving device still includes a plurality of positioning sensor.

[0011] The utility model provides a good vacuum induction welding furnace of sealing, preferably, the number of positioning sensor is two, the horizontal drive mechanism is provided with positioning sensor in the removal direction of slewing tray.

[0012] The utility model provides a good vacuum induction welding furnace of sealing, preferably, still be fixed with the temperature measurement head of vertical direction removal in the vacuum cavity.

[0013] The utility model provides a good vacuum induction welding furnace of sealing, preferably, the temperature measurement head can be fixed in the upside or downside in the vacuum cavity.

[0014] The above technical scheme has the following advantages or beneficial effects:

[0015] This utility model provides a vacuum induction welding furnace with good sealing performance, relating to the field of semiconductor device processing equipment. It includes a vacuum chamber, a sensor, and a product moving device. The sensor is fixed inside the vacuum chamber. A cooling water pipe connecting the inside and outside of the vacuum chamber is sealed and fixed to the vacuum chamber. The cooling water pipe connects the sensor to a water source outside the vacuum chamber. The product moving device can drive the product to move horizontally and vertically. This utility model provides a vacuum induction welding furnace with good sealing performance, solving the problem of poor sealing performance in existing vacuum induction welding furnaces and improving the sealing performance of the vacuum chamber. Attached Figure Description

[0016] The present invention, its features, shape, and advantages will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings. Like reference numerals denote like parts throughout the drawings. The drawings are not intentionally drawn to scale; the focus is on illustrating the gist of the invention.

[0017] Figure 1 This is a schematic diagram of the overall structure of the vacuum induction welding furnace with good sealing performance provided in Embodiment 1 of this utility model. Detailed Implementation

[0018] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. It should also be noted that the terminology used in this utility model is for describing specific implementations only and is not intended to limit the exemplary implementations according to this application.

[0019] The technical solutions of the present utility model will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, and not all of them. Therefore, the detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to illustrate selected embodiments of the present utility model. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without inventive effort are within the protection scope of the present utility model.

[0020] Example 1:

[0021] The vacuum induction welding furnace with good sealing performance provided in Embodiment 1 of this utility model, such as Figure 1 As shown, it includes a vacuum chamber 1, a sensor 2, and a product moving device 3; the sensor 2 is fixed inside the vacuum chamber 1; a cooling water pipe connecting the inside and outside of the vacuum chamber is sealed and fixed on the vacuum chamber 1; the cooling water pipe connects the sensor 2 to a water source outside the vacuum chamber 1; the product moving device 3 can drive the product to move horizontally and vertically.

[0022] The vacuum induction welding furnace with good sealing provided in Embodiment 1 of this utility model moves the product into the vacuum chamber 1 through the product moving device 3 during operation, bringing the product close to the inductor 2. The inductor 2 then heats the product for subsequent welding. Compared to the prior art method of moving the inductor 2, this embodiment sets the inductor 2 to be fixed. Therefore, the cooling system for cooling the inductor 2, especially the cooling water pipe that needs to be connected to the outside of the vacuum chamber 1, can be statically sealed. This ensures better sealing of the vacuum chamber 1 compared to moving the sealed cooling water pipe. The inductor is cooled by cooling water. For example, the induction heating device and heating method for liquid-cooled plate of new energy vehicle battery pack in application number 202311217195.0 includes a method for fixing the induction coil and the cooling water pipe. The specific structure for the cooperation between the inductor 2 and the cooling water pipe when the cooling water pipe is connected to the vacuum chamber 1 is prior art and will not be described in detail here.

[0023] The vacuum induction welding furnace with good sealing performance provided in Embodiment 1 of this utility model solves the problem of poor sealing performance of vacuum induction welding furnaces in the prior art and can improve the sealing performance of the vacuum chamber of the vacuum induction welding furnace.

[0024] As a preferred solution, in the embodiment, the two opposite sides of the vacuum cavity 1 are respectively provided with a product inlet 11 and a product outlet 12; the product inlet 11 and the product outlet 12 are respectively provided with a sealing gate 13; the sealing gate 13 can close the product inlet 11 and the product outlet 12; the product moving device 3 comprises a rotary tray 32, a horizontal driving mechanism 33 and a vertical driving mechanism 34; the horizontal driving mechanism 33 and the vertical driving mechanism 34 are fixed inside the vacuum cavity 1; the horizontal driving mechanism 33 can drive the rotary tray 32 to move horizontally; the horizontal driving mechanism 33 can move the rotary tray 32 to the vertical driving mechanism 34; the vertical driving mechanism 34 can drive the rotary tray 32 to move vertically. The product inlet 11, the product outlet 12 and the sealing gate 13 are designed to allow the product to enter and leave the vacuum cavity 1; wherein a docking station 31 (such as a safety door device of a coating docking station and a coating docking station disclosed in Chinese patent application No. 202410052470.6) needs to be arranged outside the vacuum cavity 1; the docking station 31 can move the rotary tray 32 to the horizontal driving mechanism 33, realizing the automation of the rotary tray 32 moving from the outside to the inside of the vacuum cavity 1; the horizontal driving mechanism 33 and the vertical driving mechanism 34 are mechanisms for moving the rotary tray 32, which are prior art; in the embodiment, the horizontal driving mechanism 33 is driven by a motor to move horizontally, and the vertical driving mechanism 34 is driven by a cylinder to move vertically; the transmission belt needs to be provided with a hole through the support platform, and the support platform can be moved vertically through the hole on the transmission belt to lift the rotary tray 32 fixed on the transmission belt and move vertically.

[0025] In order to ensure the stability of the product during movement and welding, prevent the welding deviation caused by shaking and displacement, in the embodiment, the rotary tray 32 is provided with a product clamp 321.

[0026] As a preferred solution, in the embodiment, the product moving device 3 further comprises a plurality of positioning sensors 35. The positioning sensors 35 need to be communicatively connected to the control system, which is used to monitor the position of the product fixed on the rotary tray 32, and assist the horizontal driving mechanism 33 and the vertical driving mechanism 34 in moving the rotary tray 32 to the precise position.

[0027] As a preferred solution, in the embodiment, the number of positioning sensors 35 is two; the positioning sensors 35 are arranged in the moving direction of the horizontal driving mechanism 33 driving the rotation tray 32. Two positioning sensors 35 are arranged in the horizontal direction, which is to highlight the guarantee of the horizontal moving precision and ensure that the rotation tray 32 is positioned by the horizontal driving mechanism 33 to the position that can be moved by the vertical driving mechanism 34. In the embodiment, the positioning sensors 35 continuously emit signals, and when the rotation tray 32 is irradiated by the positioning sensors 35, there are two different feedback signals when the rotation tray 32 is not irradiated by the positioning sensors 35. When the two positioning sensors 35 can trigger the irradiation to the rotation tray 32 at the same time, it indicates that the rotation tray 32 has reached the specified position in the horizontal direction (i.e. the rotation tray 32 is moved to the position that can be moved by the vertical driving mechanism 34).

[0028] In the embodiment, a temperature measuring head 14 vertically movable is also fixed in the vacuum cavity 1. The temperature measuring head 14 can approach the welding area of the product on the rotation tray 32 through vertical movement, so as to monitor the temperature of the welding area and feed back data to the controller. The controller adjusts the inductive power intensity and the welding time according to the feedback data, so as to ensure accurate temperature control in the welding process.

[0029] In order to meet the temperature measuring needs of different products and ensure accurate measurement of the temperature measuring head 14, in the embodiment, the temperature measuring head 14 can be fixed on the upper side or the lower side in the vacuum cavity 1. When the temperature measuring head 14 is installed on the upper side in the vacuum cavity 1, the temperature measuring end thereof faces downward and can directly measure the temperature of the product from above; when the temperature measuring head 14 is installed on the lower side in the vacuum cavity 1, the temperature measuring head 14 is below the inductor 2, the temperature measuring end thereof faces upward, and the temperature of the product can be monitored from below by means of the inductor 2 and the hole specially arranged on the rotation tray 32 and passing through the temperature measuring head 14. Such design takes into account the structural differences of different products and can avoid the problem that some products are difficult to measure due to special structures or materials on the upper side or the lower side.

[0030] In summary, the vacuum induction welding furnace with good sealing provided by the utility model relates to the field of semiconductor device processing equipment, and comprises a vacuum cavity, an inductor and a product moving device. The inductor is fixed in the vacuum cavity. A cooling water pipe that communicates between the inside and outside of the vacuum cavity is fixed on the vacuum cavity in a sealed manner. The cooling water pipe communicates between the inductor and a water source outside the vacuum cavity. The product moving device can drive the product to move in the horizontal and vertical directions. The vacuum induction welding furnace with good sealing provided by the utility model solves the problem of poor sealing of the vacuum induction welding furnace in the prior art and can improve the sealing performance of the vacuum cavity of the vacuum induction welding furnace.

[0031] The above merely describes preferred embodiments of the present application, and is not intended to limit the patent scope of the present application, and any equivalent structural transformation or direct or indirect application in other related technical fields based on the content of the present application specification and drawings are also included in the patent protection scope of the present application.

Claims

1. A vacuum induction welding furnace with good sealing performance, characterized in that, Includes vacuum chamber, sensors, and product movement device; The sensor is fixed inside the vacuum chamber; a cooling water pipe connecting the inside and outside of the vacuum chamber is sealed and fixed on the vacuum chamber. The cooling water pipe connects the sensor to a water source outside the vacuum chamber; The product moving device can drive the product to move horizontally and vertically.

2. The vacuum induction welding furnace with good sealing performance as described in claim 1, characterized in that, The vacuum chamber has a product inlet and a product outlet on two opposite sides, respectively; both the product inlet and the product outlet are equipped with sealing gates; the sealing gates can close the product inlet and the product outlet. The product moving device includes a rotary tray, a horizontal drive mechanism, and a vertical drive mechanism; Both the horizontal drive mechanism and the vertical drive mechanism are fixed inside the vacuum chamber; The horizontal drive mechanism can drive the rotary tray to move horizontally. The horizontal drive mechanism can move the rotary tray onto the vertical drive mechanism; the vertical drive mechanism can drive the rotary tray to move vertically.

3. The vacuum induction welding furnace with good sealing performance as described in claim 2, characterized in that, The rotary tray is equipped with product clamps.

4. The vacuum induction welding furnace with good sealing performance as described in claim 2, characterized in that, The product mobility device also includes several positioning sensors.

5. The vacuum induction welding furnace with good sealing performance as described in claim 4, characterized in that, The number of positioning sensors is two; The positioning sensor is located in the direction in which the horizontal drive mechanism moves the rotary tray.

6. The vacuum induction welding furnace with good sealing performance as described in claim 2, characterized in that, A temperature measuring head that can move vertically is also fixed inside the vacuum chamber.

7. The vacuum induction welding furnace with good sealing performance as described in claim 6, characterized in that, The temperature measuring head can be fixed to the upper or lower side inside the vacuum chamber.

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