Storage device for semiconductor photoresist remover production

Abstract

The utility model discloses a storage device for producing a semiconductor photoresist remover, which is applied to the field of semiconductor production and comprises a storage tank, the top of the storage tank is communicated with a liquid inlet, and the top of the storage tank is bolted with a motor; the motor rotates to enable the first rotating shaft to drive the transmission rod to rotate, the transmission rod rotates to enable the gear ring to drive the gear to rotate, the gear rotates to drive the second rotating shaft to rotate, and the first rotating shaft and the second rotating shaft rotate to drive the stirring rod to rotate to stir the degumming agent, so that the purpose of stirring can be achieved, and the degumming agent is prevented from precipitating; when the internal pressure of the storage tank is too high, the pressure can push a blocking plate to move, and when the blocking plate moves to open a limiting ring, eliminate the pressure and reduce the pressure to the elastic force of a spring, the spring can push the blocking plate to block the limiting ring for sealing, so that the purpose of having an anti-explosion function can be achieved, and the safety of the storage tank is ensured; and loss is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor production especially relates to a kind of storage device for semiconductor degreasing agent production. BACKGROUND

[0002] Semiconductor refers to the electrically conductive performance between conductor and insulator at room temperature.Semiconductor material electrically conductive performance can be changed by doping, and the impurity concentration and polarity of the semiconductor into which the impurity is doped have a great influence on the electrically conductive characteristics of the semiconductor. The electrically conductive carrier of the semiconductor into which the donor impurity is doped is mainly the electron in the conduction band, and the semiconductor into which the acceptor impurity is doped is of hole type conduction. Semiconductor degreasing agent is a key material used for removing photoresist in semiconductor manufacturing, and its performance directly affects the device yield and process efficiency.

[0003] The existing storage device does not have stirring function. When the degreasing agent is stored in the general storage device, some components in the degreasing agent will stratify or precipitate after long-term storage, affecting the quality of the degreasing agent and thus affecting the use effect. The storage device also does not have explosion-proof function. The degreasing agent is volatile, and the volatilization amount is large at high temperature, which increases the pressure inside the storage tank. If not handled in time, the storage tank may burst, causing the degreasing agent to flow out and causing loss, which has certain safety hazards. In order to solve the above problems, we propose a kind of storage device for semiconductor degreasing agent production. UTILITY MODEL CONTENT

[0004] The utility model aims to provide a kind of storage device for semiconductor degreasing agent production, which has stirring function and explosion-proof function.

[0005] The above technical purpose of the utility model is realized by the following technical scheme: a kind of storage device for semiconductor degreasing agent production, including storage tank, the top of the storage tank is communicated with liquid inlet, the top of the storage tank is hinged with motor, the output end of the motor extends to the inside of storage tank and is connected with first rotating shaft through shaft coupling, and the bottom of first rotating shaft is rotatably connected with the inner wall of storage tank, the surface of first rotating shaft is rotatably sleeved with fixed shell, and the top of fixed shell is hinged with the inner wall of storage tank, the surface of first rotating shaft is hinged with transmission rod, the other end of transmission rod is hinged with gear ring, the surface of gear ring is engaged with gear, the shaft center of gear is fixedly sleeved with second rotating shaft, and second rotating shaft is rotatably sleeved with the inner wall of fixed shell, the surface of first rotating shaft and second rotating shaft is hinged with stirring rod.

[0006] Adopting the technical scheme, the first rotating shaft drives the transmission rod to rotate through the rotation of the motor, the transmission rod drives the gear ring to rotate through the rotation of the transmission rod, the gear drives the second rotating shaft to rotate through the rotation of the gear, and the first rotating shaft and the second rotating shaft drive the stirring rod to rotate through the rotation of the first rotating shaft and the second rotating shaft, so that the purpose of stirring function is achieved, the stripper is prevented from depositing, and the quality of the stripper is ensured.

[0007] The utility model further sets up: the top of storage tank is connected with exhaust pipe, the inner wall of exhaust pipe is fixed with the limit ring of sleeve, the inner wall of exhaust pipe is spliced with fixed frame, the inner wall of fixed frame is rotatory and is sleeved with screw rod, the surface of screw rod is connected with movable frame, and movable frame is connected with the inner wall of exhaust pipe slidingly, the inner wall of screw rod is penetrated and is provided with telescopic link, the bottom of telescopic link is spliced with baffle, and spring is arranged between the bottom of baffle and movable frame.

[0008] Adopting the technical scheme, when the internal pressure of the storage tank is too high, the pressure will push the baffle to move, the movement of the baffle will open the limit ring, and the pressure will be eliminated. When the pressure is reduced to the elastic force of the spring, the spring will push the baffle to block the limit ring, and the sealing is performed. The purpose of having the explosion-proof function is achieved, the safety of the storage tank is ensured, and the loss is avoided.

[0009] The utility model further sets up: the surface of storage tank is inlayed with glass observation window, the surface of storage tank is hinged with sunshading board, the surface of sunshading board is provided with circular convex, the inner wall of storage tank is provided with circular recess, and circular convex and circular recess are clamped.

[0010] Adopting the technical scheme, by setting the glass observation window, the sunshading board, the circular convex and the circular groove, when observing the remaining amount of the stripper in the storage tank, the sunshading board is opened to make the circular convex and the circular groove disengage from the clamping, and the observation is performed. After the observation is completed, the sunshading board is covered, the circular groove and the circular convex are clamped, the sunshading board is fixed, the sunshading board shields the glass observation window, and the light is prevented.

[0011] The utility model further sets up: the surface of limit ring is inlayed with sealing gasket.

[0012] Adopting the technical scheme, by setting the sealing gasket, the air leakage is prevented.

[0013] The utility model further sets up: the top of screw rod is spliced with rotating head.

[0014] Adopting the technical scheme, by setting the rotating head, the screw rod is conveniently rotated.

[0015] The utility model further sets up: the top of storage tank is spliced with protection shell, and the motor is located at the inside of protection shell.

[0016] The technical scheme is adopted, the protective shell is arranged, and the motor is protected.

[0017] The utility model further provides: the surface of storage tank is connected with drain valve.

[0018] The technical scheme is adopted, the drain valve is arranged, and the adhesive is conveniently drained.

[0019] The utility model further provides: the bottom of storage tank is hinged with universal wheel.

[0020] The technical scheme is adopted, the universal wheel is arranged, and the storage tank is conveniently moved.

[0021] The utility model has the advantages of the following beneficial effects:

[0022] 1. The utility model discloses a mode that the first rotating shaft drives the transmission rod to rotate through the motor rotation, the transmission rod rotation drives the gear ring to drive the gear to rotate, the gear rotation drives the second rotating shaft to rotate, and the first rotating shaft and the second rotating shaft rotation drive the stirring rod to rotate to the adhesive remover stirring, can reach the purpose of stirring function, avoids the adhesive remover deposition, guarantees the quality of adhesive remover;

[0023] 2. The utility model discloses a mode that when the pressure in storage tank is too high, the pressure will push the blocking plate to move, and the blocking plate moves and makes the limiting ring open, and the pressure is eliminated, and when the pressure reduces to the elasticity of spring, the spring will push the blocking plate and block the limiting ring, and the mode can reach the purpose that has the explosion -proof function, guarantees the safety of storage tank, avoids the loss. DRAWINGS

[0024] Figure 1 It is the utility model structure perspective drawing;

[0025] Figure 2 It is the utility model structure section view;

[0026] Figure 3 It is the utility model local structure overhead section view;

[0027] Figure 4 It is the utility model Figure 2 A place structure enlarged view in;

[0028] Figure 5 It is the utility model Figure 2 B place structure enlarged view in.

[0029] : 1, storage tank; 2, motor; 3, first rotating shaft; 4, fixed shell; 5, transmission rod; 6, gear ring; 7, gear; 8, second rotating shaft; 9, stirring rod; 10, exhaust pipe; 11, limiting ring; 12, fixed frame; 13, screw rod; 14, movable frame; 15, telescopic rod; 16, blocking plate; 17, spring; 18, glass observation window; 19, light shield; 20, circular protrusion; 21, circular groove; 22, sealing gasket; 23, rotating head; 24, protective shell; 25, liquid discharge valve; 26, universal wheel; 27, liquid inlet. DETAILED DESCRIPTION

[0030] The utility model will be further explained in detail below in combination with the drawings.

[0031] Example 1:

[0032] Reference Figure 1 、 Figure 2 and Figure 3 A kind of storage device for semiconductor degreasing agent production, including storage tank 1, the top of storage tank 1 is connected with liquid inlet 27, the top of storage tank 1 is bolted with motor 2, the output of motor 2 extends to the inside of storage tank 1 and is connected with first rotating shaft 3 by shaft coupling, and the bottom of first rotating shaft 3 is rotatably connected with the inner wall of storage tank 1, the surface of first rotating shaft 3 is rotatably sleeved with fixed shell 4, and the top of fixed shell 4 is bolted with the inner wall of storage tank 1, the surface of first rotating shaft 3 is bolted with transmission rod 5, the other end of transmission rod 5 is bolted with gear ring 6, the surface of gear ring 6 is engaged with gear 7, the shaft center of gear 7 is fixedly sleeved with second rotating shaft 8, and second rotating shaft 8 is rotatably sleeved with the inner wall of fixed shell 4, the surface of first rotating shaft 3 and second rotating shaft 8 is bolted with stirring rod 9, by rotating motor 2, first rotating shaft 3 drives transmission rod 5 to rotate, transmission rod 5 rotates and drives gear ring 6 to rotate, gear 7 rotates and drives second rotating shaft 8 to rotate, first rotating shaft 3 and second rotating shaft 8 rotate and drive stirring rod 9 to rotate, the mode of degreasing agent stirring, can reach the purpose of stirring function, avoid degreasing agent precipitation, ensure the quality of degreasing agent.

[0033] Reference Figure 1 、 Figure 2 and Figure 5The surface of the storage tank 1 is embedded with a glass observation window 18, the surface of the storage tank 1 is hinged with a light shield plate 19, the surface of the light shield plate 19 is provided with a circular protrusion 20, the inner wall of the storage tank 1 is provided with a circular groove 21, and the circular protrusion 20 and the circular groove 21 are clamped, by setting the glass observation window 18, the light shield plate 19, the circular protrusion 20 and the circular groove, when observing the remaining amount of the degreasing agent in the storage tank 1, the circular protrusion 20 and the circular groove 21 are disconnected by opening the light shield plate 19, and then the observation is carried out, after the observation is completed, the light shield plate 19 is covered, the circular groove 21 and the circular protrusion 20 are clamped, and the light shield plate 19 is fixed, the light shield plate 19 shields the glass observation window 18 to prevent light.

[0034] Reference Figure 1 And Figure 2 The top of the storage tank 1 is bolted with a protective shell 24, and the motor 2 is located in the interior of the protective shell 24, by setting the protective shell 24, the motor 2 is protected.

[0035] Reference Figure 1 And Figure 2 The surface of the storage tank 1 is communicated with a liquid discharge valve 25, by setting the liquid discharge valve 25, the degreasing agent is conveniently discharged.

[0036] Example 2:

[0037] Reference Figure 1 , Figure 2 And Figure 4 The top of the storage tank 1 is communicated with an exhaust pipe 10, the inner wall of the exhaust pipe 10 is fixedly sleeved with a limiting ring 11, the inner wall of the exhaust pipe 10 is bolted with a fixing frame 12, the inner wall of the fixing frame 12 is rotatably sleeved with a screw rod 13, the surface of the screw rod 13 is threadedly connected with a movable frame 14, and the movable frame 14 is slidably connected with the inner wall of the exhaust pipe 10, the inner wall of the screw rod 13 is penetratingly provided with a telescopic rod 15, the bottom of the telescopic rod 15 is bolted with a baffle plate 16, and the spring 17 is arranged between the baffle plate 16 and the bottom of the movable frame 14, by when the internal pressure of the storage tank 1 is too high, the pressure will push the baffle plate 16 to move, the baffle plate 16 moves to open the limiting ring 11, and the pressure is eliminated, when the pressure is reduced to the elastic force of the spring 17, the spring 17 will push the baffle plate 16 to block the limiting ring 11, and the sealing mode can achieve the purpose of having the explosion-proof function, ensures the safety of the storage tank 1, and avoids the loss.

[0038] Reference Figure 4 The surface of the limiting ring 11 is embedded with a sealing gasket 22, by setting the sealing gasket 22, the air leakage is prevented.

[0039] Reference Figure 4 The top of the screw rod 13 is bolted with a rotating head 23, by setting the rotating head 23, the screw rod 13 is conveniently rotated.

[0040] Reference Figure 1 AndFigure 2 The bottom of the storage tank 1 is provided with universal wheels 26.

[0041] Brief use process: the motor 2 rotates to drive the first rotating shaft 3 to rotate, the first rotating shaft 3 drives the transmission rod 5 to rotate, the transmission rod 5 drives the gear ring 6 to rotate, the gear ring 6 drives the gear wheel 7 to rotate, the gear wheel 7 drives the second rotating shaft 8 to rotate, the first rotating shaft 3 and the second rotating shaft 8 drive the stirring rod 9 to rotate, the degreasing agent is stirred, so that the purpose of having the stirring function is achieved; when the internal pressure of the storage tank 1 is too high, the pressure will push the blocking plate 16 to move, the movement of the blocking plate 16 makes the limiting ring 11 open, the pressure is eliminated, when the pressure is reduced to the elastic force of the spring 17, the spring 17 will push the blocking plate 16 to block the limiting ring 11, sealing, rotating the rotating head 23 to make the screw rod 13 rotate, the screw rod 13 drives the movable frame 14 to move, the movable frame 14 extrudes the spring 17, the elastic force of the spring 17 is increased, so that the pressure of the blocking plate 16 on the limiting ring 11 is increased, so that the required discharge pressure can be adjusted, the practicability is improved, so that the purpose of having the explosion-proof function is achieved.

[0042] The embodiment is only an explanation of the utility model, and is not a limitation of the utility model, and a person skilled in the art can make a modification without creative contribution according to the need after reading the specification, but as long as it is within the scope of the claims of the utility model, it is protected by the patent law.

Claims

1. A storage device for semiconductor stripper production, comprising a storage tank (1), characterized in that, The top of the storage tank (1) is connected with a liquid inlet (27), the top of the storage tank (1) is bolted with a motor (2), the output end of the motor (2) extends to the inside of the storage tank (1) and is connected with a first rotating shaft (3) through a shaft coupling, and the bottom of the first rotating shaft (3) is rotatably connected with the inner wall of the storage tank (1), the surface of the first rotating shaft (3) is rotatably sleeved with a fixed shell (4), and the top of the fixed shell (4) is bolted with the inner wall of the storage tank (1), the surface of the first rotating shaft (3) is bolted with a transmission rod (5), the other end of the transmission rod (5) is bolted with a gear ring (6), the surface of the gear ring (6) is engaged with a gear (7), the shaft center of the gear (7) is fixedly sleeved with a second rotating shaft (8), and the second rotating shaft (8) is rotatably sleeved with the inner wall of the fixed shell (4), the surfaces of the first rotating shaft (3) and the second rotating shaft (8) are both bolted with stirring rods (9).

2. The storage device for semiconductor decontaminating agent production of claim 1, wherein The top of the storage tank (1) is connected with an exhaust pipe (10), the inner wall of the exhaust pipe (10) is fixedly sleeved with a limiting ring (11), the inner wall of the exhaust pipe (10) is bolted with a fixed frame (12), the inner wall of the fixed frame (12) is rotatably sleeved with a screw rod (13), the surface of the screw rod (13) is threadedly connected with a movable frame (14), and the movable frame (14) is slidably connected with the inner wall of the exhaust pipe (10), the inner wall of the screw rod (13) is provided with a telescopic rod (15), the bottom of the telescopic rod (15) is bolted with a baffle (16), and the spring (17) is arranged between the baffle (16) and the bottom of the movable frame (14).

3. The storage device for semiconductor decontaminating agent production of claim 1, wherein The surface of the storage tank (1) is embedded with a glass observation window (18), the surface of the storage tank (1) is hinged with a light shield plate (19), the surface of the light shield plate (19) is provided with a circular protrusion (20), the inner wall of the storage tank (1) is provided with a circular groove (21), and the circular protrusion (20) and the circular groove (21) are clamped.

4. The storage device for semiconductor decontaminating agent production of claim 2, wherein The surface of the limiting ring (11) is embedded with a sealing gasket (22).

5. The storage device for semiconductor strip production according to claim 2, wherein The top of the screw rod (13) is bolted with a rotating head (23).

6. The storage device for semiconductor strip production according to claim 1, wherein The top of the storage tank (1) is bolted with a protective shell (24), and the motor (2) is located in the inside of the protective shell (24).

7. The storage device for semiconductor strip production according to claim 1, wherein The surface of the storage tank (1) is connected with a liquid discharge valve (25).

8. The storage device for semiconductor strip production according to claim 1, wherein The bottom of the storage tank (1) is bolted with a universal wheel (26).

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