Online swing type adjustable magnetic bar for magnetron sputtering

Abstract

The utility model discloses an on-line swing type adjustable magnetic bar for magnetron sputtering. The on-line swing type adjustable magnetic bar comprises a shell assembly, a magnet yoke assembly and an adjusting assembly, the shell assembly is provided with a containing cavity, and the magnet yoke assembly is located below the shell assembly. The adjusting assemblies are independently controlled, are arranged in the length direction of the magnet yoke assembly and are arranged in the containing cavity. The output end of each adjusting assembly is perpendicular to the magnet yoke assembly to do linear reciprocating motion, penetrates out of the side wall of the containing cavity towards the side where the magnet yoke assembly is located and is hinged to the magnet yoke assembly so as to drive the magnet yoke assembly to partially or completely change the distance between the magnet yoke assembly and the surface of the sputtering target. The multiple adjusting assemblies are arranged, the adjusting assemblies and the magnet yoke assemblies are provided with the multiple connecting point positions, the output ends of the adjusting assemblies act to drive the magnet yoke assemblies at the corresponding point positions to locally change the distance between the magnet yoke assemblies and the surface of the sputtering target (close to or away from the surface of the sputtering target), and then the local magnetic field intensity is adjusted; the real-time online control on the coating thickness of the surface of the sputtering target is realized, so that the coating thickness of a coating product tends to be consistent.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of magnetron sputtering technology, and particularly relates to an online swing type adjustable magnetic bar for magnetron sputtering. BACKGROUND

[0002] Physical vapor deposition using sputtering has become a standard technique for tailoring the properties of, for example, glass sheets or other rigid or flexible materials. "Sputtering" refers to the ballistic ejection of atoms of a coating material from a sputtering target using positively charged ions (typically argon ions) accelerated by an electric field directed at the negatively charged sputtering target. The positive ions are formed by collision ionization in the low-pressure gas phase. The ejected atoms impact on a substrate to be coated, where they form a dense, well-adhering coating. The drawback is that the magnetron has to be opened, so that in order to allow adjustment the vacuum has to be removed and after the adjustment has been completed the vacuum has to be re-applied. This is very time-consuming. One of the process problems faced is that a magnetic field generator has to be included in the sputtering target. The magnetic field generator, which is oriented towards the substrate to be coated, is usually held stationary while a cylindrical sputtering target rotates in front of it. High-performance permanent magnets based on iron-neodymium-boron (Fe-Nd-B) alloys or cobalt-samarium (Co-Sm) alloys are used to generate the magnetic field. Since the magnetic field component parallel to the surface of the sputtering target determines the extent of the electrons in the plasma, it is important to control this component along the length of the tube. Unfortunately, the magnetic induction of this component (in tesla) usually decreases at least as the square of the distance to the magnetic field generator, and is therefore very sensitive to the position of the magnetic field generator relative to the surface of the sputtering target. The distance between the surface of the sputtering target and the magnetic field generator must therefore be well controlled, otherwise the plasma will exhibit local variations in intensity which in turn can lead to non-uniform coating profiles on the substrate.

[0003] In the field of magnetron sputtering industry, the most widely used is a cylindrical target material, and the inner diameter of the target cylinder is 125mm, so as to obtain the best uniformity of the magnetron sputtering product. Especially in the LowE market, the online adjustable magnetic bar has become an indispensable choice for producing high-end LowE products. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing an online swing type adjustable magnetic bar for magnetron sputtering, which aims at solving the problems that.

[0005] In order to solve the above technical problems, the utility model aims at realizing the following:

[0006] The application discloses an on-line swing type adjustable magnetic rod for magnetron sputtering, which comprises a shell assembly, a magnetic yoke assembly and an adjusting assembly; the shell assembly is provided with a containing cavity; the magnetic yoke assembly is located outside the shell assembly; the adjusting assembly is provided with a plurality of adjusting assemblies which are arranged along the length direction of the magnetic yoke assembly and are located in the containing cavity; the output ends of the adjusting assemblies are arranged on the side of the containing cavity and are connected with the magnetic yoke assembly, so that the magnetic yoke assembly is driven to linear reciprocate and the local or whole magnetic yoke assembly changes the distance with the surface of the sputtering target. By arranging the plurality of adjusting assemblies, the adjusting assembly and the magnetic yoke assembly are connected with a plurality of connecting points, the output end of the adjusting assembly drives the magnetic yoke assembly at the corresponding connecting point to change the distance with the surface of the sputtering target, so that the local magnetic field intensity is adjusted, the film thickness of the surface of the sputtering target is controlled in real time, the film thickness of the plated product is consistent, the quality of the plated product is improved, and the production efficiency is improved without removing the vacuum.

[0007] As a preferred scheme of the above scheme, the on-line swing type adjustable magnetic rod further comprises a swing assembly, a first terminal assembly and a second terminal assembly; the swing assembly drives the magnetic rod to swing along the swing axis; the first terminal assembly and the second terminal assembly are arranged at the two ends of the shell assembly and are coaxial with the swing axis of the magnetic rod. The first terminal assembly and the second terminal assembly are arranged coaxial with the swing axis of the magnetic rod, which does not adversely affect the swing of the magnetic rod and simplifies the structure of the equipment.

[0008] As a preferred scheme of the above scheme, the on-line swing type adjustable magnetic rod further comprises a main control assembly; the first terminal assembly is a water inlet power supply connector assembly, and the second terminal assembly is an optical fiber communication connector assembly; a control signal is transmitted to the main control assembly through the first terminal assembly and / or the second terminal assembly. Since the whole magnetic rod is in a moving state, the second terminal assembly is coaxial with the swing axis of the magnetic rod, that is, the external optical communication end and the signal receiving end of the second terminal assembly are located on the same axis, so that the optical signal can be reliably transmitted regardless of the swing of the magnetic rod, and compared with the traditional cable communication mode, the problem of signal failure caused by the distortion or fatigue damage of the cable during the movement of the magnetic rod is avoided.

[0009] As a preferred scheme of the above scheme, the on-line swing type adjustable magnetic rod further comprises an energy storage assembly which supplies power to the swing assembly, the main control assembly and the adjusting assembly; the energy storage assembly is arranged in the containing cavity. The energy storage assembly arranged in the shell assembly can continuously and stably supply power to the adjusting assembly and the swing assembly, so that the stability and reliability of the whole equipment are ensured.

[0010] On the basis of the above scheme and as a preferred scheme of the above scheme: during the operation of the magnetron sputtering and or the intermittent period of the magnetron sputtering, the external power supply charges the energy storage assembly through the first terminal assembly. Since the swing assembly and the adjusting assembly consume the power of the energy storage assembly during the magnetron sputtering process, if the power is too low, it may be difficult to maintain reliable operation. Therefore, the energy storage assembly is continuously or intermittently charged by the external power supply to supplement the power in time.

[0011] On the basis of the above scheme and as a preferred scheme of the above scheme: the shell assembly includes a shell body and an upper cover plate group, the upper end of the shell body is provided with an opening, the opening communicates the accommodation chamber with the outside; the upper cover plate group is fixedly installed at the opening of the shell body, and the accommodation chamber is closed. By providing an upper opening, the adjusting assembly, the energy storage assembly, the swing assembly and the like can be installed in the accommodation chamber, and the opening is closed by the upper cover plate group to isolate the inside from the outside during the magnetron sputtering process, so as to prevent water or other media from entering the accommodation chamber and causing damage to the equipment.

[0012] On the basis of the above scheme and as a preferred scheme of the above scheme: the adjusting assembly further includes a mounting seat, the shell body is provided with a channel corresponding to the side where the magnet yoke assembly is located, the adjusting assembly is installed on the mounting seat, and the output end thereof passes downward through the channel and is connected with the magnet yoke assembly; the mounting seat closes the channel, and a seal is provided between the output end of the adjusting assembly and the mounting seat. The mounting seat is provided on one hand to facilitate the installation of the adjusting assembly, and on the other hand to facilitate the sealing of the channel, while realizing the flexible movement of the output end of the adjusting assembly while maintaining the sealing therebetween. Of course, when the seal is aging or leaking, it can also be more convenient to disassemble and replace.

[0013] On the basis of the above scheme and as a preferred scheme of the above scheme: the adjusting assembly includes a servo motor, a transmission assembly, a nut and a lead screw; the axis of the servo motor is perpendicular to the axis of the lead screw, the lead screw is connected with the magnet yoke assembly after passing through the mounting seat and the channel; the servo motor drives the lead screw to move linearly along its axial direction through the transmission assembly and the nut. By arranging the servo motor and the lead screw axis vertically, the size of the entire adjusting assembly can be significantly shortened, making it more suitable for installation in the shell assembly with limited space.

[0014] On the basis of the above scheme and as a preferred scheme of the above scheme: the magnet yoke assembly includes a connecting piece, and the connecting piece is detachably connected with the lead screw. The detachable connection structure is beneficial to assembly during production and also facilitates disassembly for later maintenance.

[0015] On the basis of the above scheme and as a preferred scheme of the above scheme: the connecting piece is provided with a mounting hole, the lead screw is inserted into the mounting hole, a pin shaft passes through the connecting piece and the lead screw from the side of the connecting piece, and the pin shaft is axially limited.

[0016] On the basis of the above scheme and as a preferred scheme of the above scheme: the adjusting assembly further comprises a mounting seat, a passage is formed on the side of the shell body corresponding to the position of the magnetic yoke assembly, the adjusting assembly is mounted on the mounting seat, and the output end thereof passes downward out of the mounting seat and through the passage to be connected with the magnetic yoke assembly; the mounting seat seals the passage, and a second seal is arranged between the output end of the adjusting assembly and the passage.

[0017] On the basis of the above scheme and as a preferred scheme of the above scheme: the second seal comprises a flexible sealing sleeve, the inner side edge of the sealing sleeve is connected with the output end of the adjusting assembly, and the outer side edge is connected with the outer edge of the passage to seal the output end of the adjusting assembly and the passage.

[0018] On the basis of the above scheme and as a preferred scheme of the above scheme: the cross section of the sealing sleeve is skirt-shaped or sheet-shaped; and the side wall of the sealing sleeve is partially or entirely corrugated.

[0019] On the basis of the above scheme and as a preferred scheme of the above scheme: a first support ring is fixedly arranged on the inner side edge of the sealing sleeve, and a second support ring is fixedly arranged on the outer side edge of the sealing sleeve; the first support ring is detachably and sealingly connected with the output end of the adjusting assembly, and the second support ring is detachably and sealingly connected with the outer edge of the passage.

[0020] Compared with the prior art, the utility model has the advantages of: 1. Multiple adjusting assemblies are arranged, the adjusting assembly and the magnetic yoke assembly have multiple connection points, the output end of the adjusting assembly drives the magnetic yoke assembly at the corresponding point to change the distance from the sputtering target surface, thereby adjusting the local magnetic field intensity, realizing real-time online control of the film thickness of the sputtering target surface, making the film thickness of the film product consistent, improving the quality of the film product, and significantly improving the production efficiency without removing the vacuum. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1It is the overall structure front view of the utility model; Figure 2 It is the overall structure right view of the utility model;

[0022] Figure 3 It is the overall structure left view of the utility model; Figure 4 It is the overall structure exploded view of the utility model;

[0023] Figure 5 It is the inside component installation structure schematic view of the shell assembly;

[0024] Figure 6 It is the adjusting assembly structure schematic view;

[0025] Figure 7 It is the overall structure partial section view of the utility model; Figure 8 It is Figure 7 The partial enlarged view of III in it;

[0026] Figure 9 It is the magnetic yoke assembly structure schematic view;

[0027] Figure 10 It is Figure 9 The partial enlarged view of V in it;

[0028] Figure 11 It is the first terminal assembly exploded view;

[0029] Figure 12 Target material installation state structure schematic view;

[0030] Figure 13 It is Figure 12 The partial enlarged view of A in it;

[0031] Figure 14 It is the overall structure partial section view of the utility model embodiment two; Figure 15 It is Figure 14 The partial enlarged view of VI in it;

[0032] Figure 16 It is the swing assembly structure schematic view;

[0033] Figure 17 It is the fixed column structure schematic view;

[0034] Figure 18 It is the swing assembly structure section view;

[0035] Figure 19 It is Figure 18 The partial enlarged view of III in it. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical scheme and advantages of the present application clearer, the technical scheme in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments given, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0037] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the purpose of facilitating the description of the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0038] In the description of the present application, the terms "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features.

[0039] Embodiments

[0040] In conjunction Figures 1-11 The utility model discloses a kind of online swing type adjustable magnetic bar for magnetron sputtering, including shell assembly 10, magnetic yoke assembly 20 and adjusting assembly 50;Wherein, shell assembly 10 includes shell body 11 and upper cover plate group 12, shell body 11 is hollowly formed to accommodate chamber 111, and is provided with opening at its upper end, and the opening is communicated with the outside of accommodating chamber 111;Upper cover plate group 12 includes multiple upper cover plates, and after installing adjusting assembly 50 and other components in accommodating chamber, the upper cover plate is fixedly installed at the opening of shell body 11, and the accommodating chamber 111 is closed, and the opening is closed by upper cover plate group. By setting upper opening, it is convenient to install adjusting assembly, energy storage assembly, swing assembly and the like in accommodating chamber, and the opening is closed by upper cover plate group, so that it is isolated from the outside in the process of magnetron sputtering, avoid water or other medium into accommodating chamber,

[0041] The problem of causing the device to be damaged. The magnetic yoke assembly 20 is located below the housing assembly 10; it includes a support plate 21 and a magnetic rod body 22 fixedly installed on the support plate 21; of course, a magnet containing cavity can also be provided on the support plate 21, and a plurality of magnets are arranged in the magnet containing cavity according to the required magnetic field, and then the magnet containing cavity is closed to sequentially form the magnetic yoke assembly. The adjusting assembly 50 has multiple and is independently controlled, is arranged along the length direction of the magnetic yoke assembly 20 and is arranged in the containing chamber 111; the output end of each adjusting assembly 50 vertically reciprocates linearly to the magnetic yoke assembly 20, and is arranged on the side of the containing chamber 111 to the side where the magnetic yoke assembly 20 is located, and is hinged to the magnetic yoke assembly 20, and the output end of the adjusting assembly 50 pushes the magnetic yoke assembly outward or pulls the magnetic yoke assembly inward, so that the magnetic yoke assembly 20 elastically deforms within the elastic deformation range or the range that the strength and shape can withstand. Since the magnetic field component parallel to the surface of the sputtering target determines the range of electrons in the plasma, it is important to control this component along the length of the tube. The magnetic induction of this component (in Tesla) usually decreases at least as the square of the distance to the magnetic field generator, and is therefore very sensitive to the position of the magnetic field generator relative to the surface of the sputtering target. In actual testing, the magnetic rod deformation within 4mm can fully meet the actual use requirements, thereby driving the magnetic yoke assembly 20 to partially or completely change the distance from the sputtering target surface. By arranging multiple adjusting assemblies, the adjusting assembly and the magnetic yoke assembly have multiple connection points, the output end of the adjusting assembly moves, drives the corresponding point of the magnetic yoke assembly to partially change the distance from the sputtering target surface, and adjusts the local magnetic field strength, realizes real-time online control of the film thickness of the sputtering target surface, makes the film thickness of the film product consistent, improves the quality of the film product, and does not need to remove the vacuum, which can significantly improve the production efficiency. Specifically, in the embodiment, the adjusting assembly 50 includes a servo motor 51, a first bevel gear 53, a second bevel gear 54, a nut 52 and a lead screw 55; the first bevel gear 53 is fixedly installed on the main shaft of the servo motor 51, the second bevel gear 54 is fixedly connected with the nut 52, the nut 52 is threadedly connected with the lead screw 55, and the first bevel gear 53 is engaged with the second bevel gear 54 to make the axis of the servo motor 51 perpendicular to the axis of the lead screw 55. The installation of the mounting seat 56 on one hand facilitates the installation of the adjusting assembly, and on the other hand facilitates the sealing of the channel, while realizing the flexible movement of the output end of the adjusting assembly and maintaining the sealing therebetween. Of course, when the sealing is aging or leaking, it can also be more convenient to disassemble, replace and reassemble, and through the perpendicular arrangement of the servo motor and the lead screw axis, the size of the entire adjusting assembly can be significantly shortened, which is more conducive to being installed in the housing assembly with small space.Further, the adjustment assembly 50 of the embodiment preferably further comprises a mounting seat 56, a passage 112 is formed on the side of the housing 11 facing the magnetic yoke assembly 20, the nut 53 is movably mounted on the mounting seat 56, and the screw rod 55 of the nut 53 passes through the middle part of the mounting seat 56 downward and is connected with the magnetic yoke assembly 20 after passing through the passage 112. The mounting seat 56 is in contact with the edge of the passage 112 on the bottom surface of the accommodating chamber, and a sealing element is arranged between the contact surface of the mounting seat 56 and the edge of the passage 112, so that the mounting seat 56 seals the passage 112. The nut 52 is mounted in the mounting hole in the middle part of the mounting seat 56, and a sealing element such as a skeleton oil seal is arranged between the mounting hole and the outer circumferential surface of the nut 52, so that the nut 52 and the mounting seat 56 are sealed. It should be noted that the threaded hole 521 on the nut 52 connected with the threaded section 552 of the screw rod 55 is a blind hole, which only needs to ensure that the outer circumferential surface of the nut 52 and the mounting seat 56 are reliably sealed, and there is no leakage problem between the threaded gap of the screw rod 55 and the threaded hole. In addition, in order to enable the nut 52 to rotate flexibly and withstand a certain axial force, the upper end surface of the nut 52 and / or the mounting hole of the mounting seat 56 are preferably provided with a combination of a thrust bearing and an angular contact bearing; of course, necessary axial limiting members are also included to limit the axial movement of the nut 52, such as the limiting plate 57 shown in FIG. 11. Figure 8 The limiting plate 57 is connected to the mounting seat 56 and limits the axial movement of the nut 52. The magnetic yoke assembly 20 in the embodiment comprises a connecting piece 23 fixedly mounted on the end surface of the support plate 21 facing the housing, and the connecting piece 23 is detachably connected with the lower end of the screw rod 55. Specifically, as shown in Figure 8 and Figure 10 The connecting piece 23 is provided with a mounting hole 231, the screw rod 55 is inserted into the mounting hole 231, a pin shaft 553 passes through the connecting piece 23 and the screw rod 55 from the side of the connecting piece 23, and the pin shaft 553 is axially limited by an elastic lock 554. The connecting structure of the pin shaft is simple and reliable, and the disassembly and assembly are very convenient.

[0042] For an application scenario of magnetron sputtering, the magnetic yoke assembly needs to swing within a certain range to enable the magnetic field of the magnetron sputtering to cover a larger range, and at the same time, the position of the magnetic rod can be adjusted according to the actual thickness requirement of the coating layer, so as to adjust the distribution of the magnetic field and change the distribution of the coating layer. In order to realize the swinging of the magnetic rod in the embodiment, a swinging assembly 80, a driving assembly 90, a first terminal assembly 30 and a second terminal assembly 40 are arranged in the accommodating chamber 111; the first terminal assembly 30 and the second terminal assembly 40 are respectively arranged at the two ends of the housing assembly 10. Details are shown in Figures 16-19As shown, the swing assembly 80 in the embodiment includes a swing motor 81, an output flange 82, and a motor fixing seat 83. The output flange 82 is fixedly installed on an output shaft of the swing motor 81, and a flange hole is formed in the output flange 82. The output flange 82 is coaxial with the axis of the first terminal assembly 30. The motor fixing seat 83 fixedly installs the swing motor 81 on the outer housing 10. The drive assembly 90 is fixedly installed on the machine body, and includes a drive end 91, a spacer sleeve 92, a protection pipe 93, a drive piece 94, and a transmission belt 95. The drive end 91 is fixedly connected with one end of the drive piece 94 adjacent to the magnetic bar. The spacer sleeve 92 is arranged in the drive piece 94. The protection pipe 93 is arranged in the spacer sleeve 92. Preferably, a support block 933 is arranged between the protection pipe 93 and the inner hole of the spacer sleeve 92. The target material 100 is clamped on the drive end 91 at both ends. A sealing ring 911 is arranged between the drive end 91 and the target material 100, so that the cooling liquid passage a is formed between the target material 100, the drive end 91, and the outer housing 11 of the magnetic bar. The support plate 31 is provided with a fluid passage, so that the cooling liquid passage b is formed between the fluid passage, the spacer sleeve 92, and the protection pipe 93. Details are shown in Figure 12 The cooling liquid flows in the direction of the arrow. Finally, the cooling liquid is introduced into the cooling liquid passage a through the interface provided on the drive assembly 90, and fills the cooling liquid passage a. The cooling liquid is returned to the external cooling device through the other return interface on the drive assembly 90 through the cooling liquid passage b, so that the target material 100 and the magnetic yoke assembly 20 are cooled. The end 931 is arranged at one end of the protection pipe 93 adjacent to the magnetic bar. Figure 1 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 11As shown, the first terminal assembly 30 in the embodiment includes a first mounting plate 31, a fixing pin 32, an outer spacer sleeve 33, a joint body 34, a bearing 36 and a sealing assembly 37. The joint body 34 is hollow and is sleeved outside the outer spacer sleeve 33. The end head 931 extends into the outer spacer sleeve 33. The contact assembly 35 is located in the outer spacer sleeve 33. A sealing ring is arranged between the outer spacer sleeve 33 and the joint body 34 and between the end head 931 and the inner wall of the outer spacer sleeve 33. Of course, considering the positioning of the sealing ring, the embodiment preferably forms a ring groove on the inner wall of the joint body 34 and the inner wall of the outer spacer sleeve 33. The O-shaped sealing ring is embedded in the ring groove. In this way, multiple seals are formed between the joint body 34, the outer spacer sleeve 33 and the end head 931 to prevent water vapor from entering the inside of the outer shell during use. In order to realize the swinging of the magnetic rod by the swinging assembly, the fixing pin 32 in the embodiment is fixedly arranged at the rear end of the joint body 34. The fixing pin 32 is inserted into the flange hole of the output flange 82 of the swinging assembly 80. The joint body 34 is sleeved with the sealing assembly 36 and the bearing 37 outside the rear end to realize the rotation of the outer shell relative to the joint body 34 and reliable sealing. The front end of the joint body 34 is provided with a pin head interface 341. The spacer sleeve 92 is provided with a central support fixing pin 921. After the first terminal assembly 30 is embedded into the socket of the driving assembly 90, the central support fixing pin 921 is inserted into the pin head interface 341. Thus, since the spacer sleeve 92 is fixed, the swinging motor 81 fixes the outer shell through the motor fixing seat 83. When the output flange 82 of the swinging assembly 80 rotates, the pin head interface 341 will rotate with it. However, since the spacer sleeve 92 will limit the rotation of the joint body 34 through the cooperation of the central support fixing pin 921 and the pin head interface 341, the reaction force generated by the joint body 34 will act on the swinging motor 81 through the output flange 82. Since the swinging motor 81 is fixed on the outer shell through the motor fixing seat 83, the outer shell will be twisted around the axis of the output flange 82 under the action of the reaction force, thereby driving the entire magnetic rod to rotate, i.e., swinging. During the forward or reverse rotation of the swinging motor 81, the outer shell will rotate in the opposite direction relative to the axis of the joint body 34. Through the control of the rotation angle and the rotation amplitude, the magnetic rod can be swung along the rotation axis.

[0043] For details Figures 12-13As shown, the embodiment further comprises a contact assembly 35, which comprises a first contact 351, a second contact 352, and a contact point assembly 353, the contact point assembly 353 comprising a plurality of moving contact points 353a arranged on the end face of the first contact 351 and a plurality of static contact points 353b arranged on the end face of the second contact 352. The end head 931 is provided with a first contact accommodating cavity 9311, and the first contact 351 is movably arranged in the first contact accommodating cavity 9311, and the moving contact points 353a of the first contact 351 correspond to and contact the static contact points 353b of the second contact 352; in the first contact accommodating cavity 9311, a spring 354 is arranged, which contacts the end of the first contact 351 away from the moving contact points 353a, and keeps the first contact 351 pressed in the direction of the second contact 352, so that the moving contact points 353a and the static contact points 353b remain in contact. The static contact points 353b are in communication with the main control assembly 60 through wires; the moving contact points 353a are in communication with the external power supply through the wires 110; it should be noted that each moving contact point 353a preferably comprises a contact terminal and a terminal compression spring, and the terminal compression spring and the contact terminal are received in the accommodating hole on the end face of the first contact 351; of course, the static contact points 353b on the second contact 352 can be distributed annular or sector-shaped static contact points 353b with a planar structure on the end face of the second contact 352, which can be a sheet of metal fixed on the second contact 352 or inlaid on the end face of the second contact 352 flush with the end face of the second contact 352. During the use of the entire magnetron sputtering system, rotation and certain overall deformation will occur, and through such a structure, the terminal compression spring elastically pushes the contact terminal, and the first contact 351 and the second contact 352 can always maintain good contact, thereby ensuring stable power supply and improving the operation stability of the entire device.

[0044] Of course, in order to realize the control of the swing assembly 80 and the adjusting assembly 50, the processing and execution of the control signal with the outside, or the feedback of the execution result to the upper computer, the embodiment further comprises a main control assembly 60 arranged in the accommodating chamber 111; the first terminal assembly 30 is preferably a water inlet power supply connector assembly, and the second terminal assembly 40 is an optical fiber communication connector assembly; the first terminal assembly 30 communicates the external power supply with the main control assembly 60, the control signal is transmitted to the main control assembly 60 through the second terminal assembly 40 and the internal optical fiber, and the signal is analyzed and processed by the main control assembly 60 to control the swing assembly 80 and the adjusting assembly 50 to make adaptive actions. For example, Figure 4As shown, the second terminal assembly 40 includes a second mounting plate, a second joint body fixedly mounted on the second mounting plate, and a fiber assembly 41, which can be an optical-electric conversion assembly or an optical path guiding assembly, for transmitting optical signals to the master control assembly 60 fixedly mounted in the second joint body. The second mounting plate is fixedly mounted on one end of the outer shell, and of course, there are necessary sealing elements between the second mounting plate and / or the second joint body and the mounting position of the outer shell to completely seal after installation. At the same time, there are also necessary sealing elements between the fiber assembly 41 and the second joint body. Since the entire magnetic rod is in a state of motion, the second terminal assembly is coaxial with the swing axis of the magnetic rod, that is, the external fiber communication end and the signal receiving end of the second terminal assembly are located on the same axis. Therefore, even if the magnetic rod swings, the optical signal can be reliably transmitted, and compared with the traditional cable communication mode, the problem of signal failure caused by cable distortion or fatigue damage during the movement of the magnetic rod is avoided. Thus, the optical signal conducted to the master control assembly 60 through the second terminal assembly 40 is analyzed and processed by the master control assembly 60, and the control and adjustment assembly 50 drives the corresponding point position of the magnetic yoke assembly to locally change the distance from the sputtering target surface to realize the adjustment of the local magnetic field strength, thereby realizing the real-time online control of the film thickness of the sputtering target surface. It also includes controlling the swing assembly 80 to swing a certain angle according to the required angle, driving the magnetic yoke assembly to swing a certain angle, so as to realize the adjustment of the magnetic field distribution range.

[0045] Of course, in the present embodiment, in order to more reliably and in multiple modes to realize communication with the master control assembly 60, the number and size of the movable contact 353a of the first contact 351 and the fixed contact 353b of the second contact 352 are further increased and adjusted in size in the present embodiment, and the size of the first contact 351 and the second contact 352 is adaptively selected. On the one hand, charging can be realized, and on the other hand, data communication through the RS485 communication interface can be realized through the increased contacts. Thus, through the first terminal assembly 30, water and electricity are supplied to the inside of the magnetic rod for charging and at the same time, RS485 data communication is realized, data communication with the master control assembly 60 in the adjustable magnetic rod is realized, and then the second terminal assembly 40 and the first terminal assembly 30 realize two-way or synchronous communication, realizing communication control of the adjustable magnetic rod, and then realizing reliable control of the magnetic rod, and at the same time, the compatibility and universality of the data and communication mode of the adjustable magnetic rod can be improved.

[0046] The energy storage assembly 70 is arranged in the accommodating cavity 111. During use, the whole adjustable magnet bar is located in the cylindrical target material, which greatly limits the volume and size of the adjustable magnet bar. Therefore, higher requirements are put forward for the installation of the energy storage assembly 70. If a whole lithium battery is used for installation, it is obviously difficult to achieve. Therefore, the energy storage assembly 70 is preferably a plurality of lithium battery groups, which are arranged between adjacent adjustment assemblies 50. Of course, the energy storage assembly 70 can also be arranged in other empty spaces in the accommodating space. Through the small volume dispersion, the design requirements of energy storage are met, and the installation space requirements are reduced. The energy storage assembly 70 is in communication with the main control assembly 60. On the one hand, the energy storage assembly 70 supplies power to the main control assembly 60. Thus, through the energy storage assembly arranged in the shell assembly, continuous and stable power supply to the adjustment assembly and the swing assembly can be maintained, so as to ensure the stability and reliability of the whole equipment. On the other hand, during the magnetron sputtering process, the swing assembly and the adjustment assembly consume the power of the energy storage assembly. If the power is too low, it may be difficult to maintain reliable operation. Therefore, during the magnetron sputtering operation and / or the magnetron sputtering interval, the external power supply can supply power to the main control assembly 60 through the first terminal assembly 30, and can also charge the energy storage assembly 70 through the main control assembly 60, and perform battery management and protection on the charging and discharging of the energy storage assembly 70. The external power supply continuously or intermittently charges the energy storage assembly 70, and timely supplements the power of the energy storage assembly 70, so that the energy storage assembly 70 is smoothly in the design required power range, and the stable operation of the whole system is ensured.

[0047] Thus, by arranging the energy storage assembly 70, the main control assembly 60, and the first terminal assembly 30 and the second terminal assembly 40, the energy storage assembly 70 supplies power to the swing assembly and the adjustment assembly 60, the first terminal assembly 30 and the main control assembly 60 charge the energy storage assembly 70, and the first terminal assembly 30 and / or the second terminal assembly 40 realize optical fiber communication with the main control assembly 60, thereby improving the reliability and stability of the whole magnet bar control.

[0048] Furthermore, the drive shaft 821 of the swing assembly 80 is a hollow structure and extends to the rear end 811 of the swing motor 81 to form a cable channel c at the front and rear ends of the swing motor 81. The cable channel c is connected to the rear end of the second contact 352. Thus, the cable led out from the second contact 352 of the first terminal assembly 30 can be directly inserted into the housing assembly through the cable channel c, thereby connecting to the main control assembly 60 and / or the energy storage assembly 70 with the shortest path. This avoids the problems of long cable paths, high energy and signal loss on the cable, and susceptibility to interference caused by the cable having to bypass various devices through gaps. It also better protects the cable and avoids cable damage caused by the movement of various moving parts inside the housing assembly, reducing the difficulty of wiring.

[0049] Implementation of Column 2

[0050] like Figures 14-15 As shown, the difference between this embodiment and Embodiment 1 is that the adjustment component 50 further includes a mounting base 56, and the outer shell 11 has a channel 112 corresponding to the side where the magnetic yoke component 20 is located. The adjustment component 50 is mounted on the mounting base 56, and its output end extends downward through the mounting base 56, passes through the channel 112, and connects with the magnetic yoke component 20. The mounting base 56 closes the channel 112, and a second seal 120 is provided between the output end of the adjustment component 50 and the channel 112.

[0051] Specifically, in this embodiment, the second seal 120 includes a flexible sealing sleeve 121, which seals the output end of the adjusting component 50 to the channel 112. For example... Figure 15As shown, the inner side edge 1211 of the sealing sleeve 121 is fixedly provided with a first support ring 122, and the outer side edge 1212 is fixedly provided with a second support ring 123. The first support ring 122 is detachably and sealingly connected to the output end of the adjusting assembly 50, and the second support ring 123 is detachably and sealingly connected to the outer edge of the channel 112. The first support ring 122 is sleeved on the threaded segment 552 of the lead screw 55, and a pressing ring 124 is detachably connected to the threaded segment 552, for example, the pressing ring 124 is threadedly connected to the threaded segment 552 to limit the first support ring 122 on the threaded segment 552. Of course, in order to avoid leakage between the first support ring 122 and the threaded segment 552, the diameter of the connecting end 555 of the lead screw 55 and the connecting piece 23 is greater than that of the threaded segment 552. A ring groove is formed on the connecting side of the connecting end 555 and the threaded segment 552, and a first sealing ring 127 is embedded in the ring groove. The first support ring 122 is pressed on the first sealing ring 127 by the pressing ring 124, so as to realize the sealing between the first support ring 122 and the threaded segment 552. A ring groove is formed on the abutting surface of the first support ring 123 and the outer shell, and a second sealing ring 126 is embedded in the ring groove. The second support ring 123 is pressed on the outer shell by the screw 125, so as to realize the sealing between the second support ring 123 and the outer shell. In this way, the inner side edge of the sealing sleeve 121 is connected to the output end of the adjusting assembly 50, the outer side edge is connected to the outer edge of the channel 112, and the channel 112 is sealed. Since the lower end of the lead screw 55 is connected to the connecting piece 23, and in this embodiment, the position of the second sealing 120 is close to the connecting end of the two, in order to avoid interference between the connecting piece 23 and the sealing sleeve 121 during the movement of the lead screw 55, which may cause damage to the sealing sleeve 121, it is preferred that the cross section of the sealing sleeve 121 is skirt-shaped or sheet-shaped, which is buckled above the connecting piece 23, so as to avoid interference and impact on the sealing sleeve 121, and avoid damage to the sealing sleeve 121. In addition, during the adjustment of the magnetic rod, the sealing sleeve 121 will be pulled to deform elastically. In order to improve the stretching flexibility and range of the sealing sleeve 121, and avoid damage to the sealing sleeve 121 due to excessive stretching during a large stroke, it is preferred that the side wall of the sealing sleeve 121 is corrugated. The corrugated side wall structure greatly improves the stretching range of the sealing sleeve 121.

[0052] The above embodiments are only preferred embodiments of the present application, and do not limit the protection scope of the present application. Therefore, equivalent changes made according to the structure, shape and principle of the present application should be covered within the protection scope of the present application.

Claims

1. An online oscillating adjustable magnetic rod for magnetron sputtering, characterized in that: The magnetron sputtering device comprises a housing assembly (10), a magnetic yoke assembly (20) and an adjusting assembly (50); the housing assembly (10) has a containing chamber (111), the magnetic yoke assembly (20) is located outside the housing assembly (10); the adjusting assembly (50) has a plurality of and is independently controlled, is arranged along the length direction of the magnetic yoke assembly (20) and is arranged in the containing chamber (111), and the output end thereof is led out to the side where the magnetic yoke assembly (20) is located by the side wall of the containing chamber (111) and is hinged to the magnetic yoke assembly (20) to drive the linear reciprocating movement of the magnetic yoke assembly (20) to change the distance between the magnetic yoke assembly (20) and the surface of the sputtering target.

2. The on-line swingable adjustable magnet bar for magnetron sputtering according to claim 1, characterized in that: The magnetron sputtering device further comprises a swing assembly (80), a first terminal assembly (30) and a second terminal assembly (40); the swing assembly (80) drives the magnetic rod to swing along the rotation axis thereof; the first terminal assembly (30) and the second terminal assembly (40) are respectively arranged at the two ends of the housing assembly (10) and are coaxial with the swing axis of the magnetic rod.

3. The on-line oscillating adjustable magnet bar for magnetron sputtering of claim 2, wherein: The swing assembly (80) comprises a swing motor (81), the output end of the swing motor (81) is coaxial with the axis of the first terminal assembly (30), the swing motor (81) is fixedly installed on the housing assembly (10), a driving assembly (90) is fixedly installed on the machine body, and the output end of the swing motor (81) is limited to rotate by the driving assembly (90).

4. The on-line swingable adjustable magnet bar for magnetron sputtering of claim 3, wherein: The first terminal assembly (30) comprises a joint body (34), a pin head interface (341) is formed in the front end of the joint body (34), and the output end of the swing motor (81) is in transmission connection with the joint body (34); the driving assembly (90) comprises a spacer sleeve (92), a central support fixed pin (921) is arranged on the spacer sleeve (92) and is inserted into the pin head interface (341).

5. The on-line oscillating adjustable magnet bar for magnetron sputtering of claim 2, wherein: The magnetron sputtering device further comprises a main control assembly (60); the first terminal assembly (30) is a water inlet power supply joint assembly, the second terminal assembly (40) is an optical fiber communication joint assembly, and a control signal is transmitted to the main control assembly (60) through the first terminal assembly (30) and / or the second terminal assembly (40).

6. The on-line oscillating adjustable magnet bar for magnetron sputtering of claim 5, wherein: The magnetron sputtering device further comprises an energy storage assembly (70), the energy storage assembly (70) supplies power to the swing assembly (80), the main control assembly (60) and the adjusting assembly (50), and the energy storage assembly (70) is arranged in the containing chamber (111).

7. The on-line oscillating adjustable magnet bar for magnetron sputtering of claim 6, wherein: During the operation of the magnetron sputtering and / or the intermittent period of the magnetron sputtering, an external power supply charges the energy storage assembly (70) through the first terminal assembly (30).

8. The on-line oscillating adjustable magnet bar for magnetron sputtering of claim 1, wherein: The housing assembly (10) comprises a housing body (11) and an upper cover plate group (12), the upper end of the housing body (11) is provided with an opening, the opening communicates the containing chamber (111) with the outside, and the upper cover plate group (12) is fixedly installed at the opening of the housing body (11) to close the containing chamber (111).

9. The on-line oscillating adjustable magnet bar for magnetron sputtering of claim 8, wherein: The adjusting assembly (50) further comprises a mounting base (56), a passage (112) is correspondingly formed on the side of the shell (11) facing the magnetic yoke assembly (20), the adjusting assembly (50) is mounted on the mounting base (56), and the output end of the adjusting assembly (50) penetrates downward through the mounting base (56) and the passage (112) and is connected with the magnetic yoke assembly (20); the mounting base (56) seals the passage (112), and a first seal is arranged between the output end of the adjusting assembly (50) and the mounting base (56).

10. The on-line oscillating adjustable magnet bar for magnetron sputtering of claim 9, wherein: The adjusting assembly (50) comprises a servo motor (51), a transmission assembly, a nut (52) and a lead screw (55); the axis of the servo motor (51) is perpendicular to the axis of the lead screw (55), the lead screw (55) penetrates through the mounting base (56) and the passage (112) and is hingedly connected with the magnetic yoke assembly (20); the servo motor (51) drives the lead screw (55) to linear reciprocate along the axis of the lead screw (55) through the transmission assembly and the nut (52).

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