Evaporator

Abstract

The utility model discloses an evaporator which comprises a shell, a circular revolution frame, a revolution motor for driving the revolution frame to rotate, a plurality of plating pot frames uniformly distributed along the circumference of the revolution frame, a height adjusting mechanism for adjusting the height of each plating pot and an angle adjusting mechanism for adjusting the dip angle of each plating pot, the height adjusting mechanism is arranged on the upper part of the plating pot, the angle adjusting mechanism is arranged on the lower part of the plating pot, the height sensor is arranged on the height adjusting mechanism, and the swing angle sensor is arranged on the angle adjusting mechanism. And the machine table is automatically adjusted to the plating pot angle and the guide rail height corresponding to the layer of metal, so that the coating effect of the upper-layer metal on the lower-layer metal when the metal is overlapped is improved, the coating problem of the layer-by-layer overlapped metal in the coating process is improved, and the corrosion resistance and the stability of the chip are further improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of evaporation machines. BACKGROUND

[0002] In the existing evaporation machine, the wafer loaded in the public rotation planetary system is coated by the coating material of electron beam evaporation crucible. In high vacuum environment, high voltage current passes through electron gun filament to make it emit electron beam. The electron beam hits the evaporation source in the crucible, heats the source to near melting point, and makes it evaporate. The evaporated particles condense on the substrate to deposit thin film (usually metal structure is composed of multiple metals, such as Cr, Al, Ti, Pt, Au, etc.). In order to ensure the uniformity of the evaporation film thickness, the coating pot loaded with wafer continuously rotates and revolves during the evaporation process.

[0003] When the existing evaporation machine is used to coat multiple layers of film, it cannot complete a complete metal right trapezoidal pattern. The upper layer of metal will cover the lower layer of metal less and less, resulting in limited metal coverage. SUMMARY

[0004] The utility model aims to provide an evaporation machine to solve the problems raised in the background.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] An evaporation machine includes a housing, a circular revolving frame, a revolving motor for driving the revolving frame to rotate, and a plurality of coating pot frames evenly distributed along the circumference of the revolving frame. The lower end of each coating pot frame is provided with a coating pot. The utility model is characterized in that it further comprises a height adjustment mechanism for adjusting the height of the coating pot and an angle adjustment mechanism for adjusting the inclination angle of the coating pot.

[0007] Specifically, the height adjustment mechanism includes a mounting bracket arranged inside the housing, and a pair of electric push rods with their cylinder bodies mounted on the mounting bracket. The lower end of the push rod is provided with a push frame.

[0008] The top of the revolving frame is provided with a suspension circular rail, which rotates in the push frame.

[0009] A support rod is arranged between the two push frames, and the revolving motor is mounted on the support rod.

[0010] Specifically, the angle adjustment mechanism includes a mounting plate fixedly connected to the bottom of the revolving frame. The back of the mounting plate is provided with a motor, and the rotating shaft of the motor penetrates the mounting plate and is connected to a driving gear.

[0011] The top of the plating pot frame is provided with a horizontal part, and the top of the horizontal part is provided with a swing gear part, the swing gear part is connected to the mounting plate through a rotating shaft, and the driving gear is engaged with the swing gear part.

[0012] Optionally, the swing gear part is integrally formed with the plating pot frame.

[0013] Optionally, the two corners of the lower part of the mounting plate are rounded.

[0014] Optionally, the cross section of the suspension circular rail is T-shaped.

[0015] Optionally, the suspension circular rail is formed by splicing two semicircular single bodies.

[0016] Further, a first dust cover is arranged outside the push rod of the electric push rod, the height sensor is arranged in the first dust cover, and a lighting lamp is arranged in the first dust cover.

[0017] Further, a second dust cover is arranged outside the angle adjusting mechanism, the swing angle sensor is arranged in the second dust cover, and a lighting lamp is arranged in the second dust cover.

[0018] Specifically, the second dust cover comprises a shell, the top of the shell is connected to the bottom of the revolving frame, the bottom of the shell is provided with a gap for avoiding the plating pot frame, and an elastic cover plate is arranged at the gap.

[0019] The upper end and the lower end of the elastic cover plate are respectively fixed to the two ends of the gap, the middle part of the elastic cover plate is fixedly connected to the plating pot frame, and the plating pot frame drives the elastic cover plate to move when rotating, so that the dustproof purpose can be achieved due to the fact that the gap is always covered.

[0020] Advantages:

[0021] 1. The height adjusting mechanism and the angle adjusting mechanism are arranged to automatically adjust the inclination angle and the height of the plating pot, the machine table is automatically adjusted to the plating pot angle and the guide rail height corresponding to each layer of metal during plating of each layer of metal, the cladding effect of the upper layer of metal on the lower layer of metal is improved when the metal is overlaid, the metal cladding problem of layer-by-layer overlaying in the plating process is improved, and the corrosion resistance and stability of the chip are further improved.

[0022] 2. The suspension circular rail is formed by splicing two semicircular single bodies, and the pushing frame is conveniently installed. DETAILED DESCRIPTION

[0023] Figure 1 It is a front view of the utility model;

[0024] Figure 2 It is an axial side view of the utility model;

[0025] Figure 3 It is the height adjusting mechanism schematic view of the utility model;

[0026] Figure 4 It is the push frame and the revolving frame section view of the height adjusting mechanism of the utility model;

[0027] Figure 5 It is the angle adjusting mechanism front view of the utility model;

[0028] Figure 6 It is the angle adjusting mechanism rear view of the utility model;

[0029] Figure 7 It is the first dust cover and the second dust cover schematic view of the utility model;

[0030] Figure 8 It is the first dust cover solid drawing of the utility model;

[0031] Figure 9 It is the second dust cover solid drawing of the utility model Figure 1 ;

[0032] Figure 10 It is the second dust cover solid drawing of the utility model Figure 2 ;

[0033] Figure 11 It is the product drawing before the implementation of the utility model;

[0034] Figure 12 It is the product drawing after the implementation of the utility model;

[0035] In the drawing:

[0036] 1-outer shell, 2-coating pot, 3-coating pot frame, 4-mounting frame, 5-revolving frame, 6-revolving motor, 7-electric push rod, 8-mounting plate, 9-driving gear, 10-motor, 11-crucible, 12-liner, 13-supporting platform, 14-first dust cover, 15-second dust cover, 16-tilt angle sensor, 17-height sensor;

[0037] 3.1-oscillating gear part;

[0038] 5.1-suspension circular rail;

[0039] 7.1-push frame, 7.2-supporting rod;

[0040] 151-housing, 152-elastic cover plate;

[0041] 151a-gap. DETAILED DESCRIPTION

[0042] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0043] Please refer to Figure 1 and Figure 2 The utility model provides a technical scheme:

[0044] A kind of evaporation machine, including shell 1, circular revolution frame 5, revolution motor 6 of driving revolution frame 5 rotation, 2 along the circumferential distribution of revolution frame 5 Plating pot frame 3, the lower end of each plating pot frame 3 is equipped with plating pot 2, bottom is equipped with support platform 13, support platform 13 is opposite revolution frame 5, support platform 13 is inverted conical table, is equipped with crucible 11 at its top center, is equipped with 2 with plating pot 2 corresponding lining plate 12 around the outer periphery of crucible 11;

[0045] Further include a height adjusting mechanism for adjusting plating pot height and angle adjusting mechanism for adjusting plating pot inclination, further include height sensor 17 arranged on the height adjusting mechanism and swing angle sensor 16 arranged on the angle adjusting mechanism, reference Figure 11 and Figure 12 Before and after the improvement contrast chart, by setting height adjusting mechanism and angle adjusting mechanism, the inclination and height of plating pot are automatically adjusted, when plating each layer of metal, machine table is automatically adjusted to the plating pot angle and guide rail height corresponding to the layer of metal, improve the cladding effect of upper layer metal on lower layer metal when metal is overlaid, improve the metal cladding problem of layer-by-layer overlay in plating process, further improve the corrosion resistance and stability of chip.

[0046] Please refer to Figure 3 and Figure 4 And reference Figure 1 Give a kind of height adjusting mechanism, height adjusting mechanism includes installation frame 4 arranged in the inside of shell 1, revolution frame 5 is located just below installation frame 4, the cylinder of a pair of electric push rods 7 is installed on installation frame 4, the push rod lower end of electric push rod 4 is equipped with push frame 7.1;

[0047] The top of revolution frame 5 is equipped with suspension round rail 5.1, suspension round rail 5.1 rotates in push frame 7.1;

[0048] Two push frames 7.1 are equipped with support rod 7.2, revolution motor 6 is installed on support rod 7.2, when the push rod of electric push rod 4 extends downward, revolution motor 6 moves along with;

[0049] The electric push rod 4 first receives an instruction from the control system, which specifies the target height that the electric push rod 4 needs to reach, so as to adjust the height of the plating pot 2;

[0050] Figure 3 The rotation shaft of the revolution motor 6 is connected to the revolution frame 5 through a horizontal plate to drive the revolution frame 5 to rotate, which belongs to the prior art, and reference is made to the Peva-900E / I type electron beam high-precision control evaporation machine structure of Taiwan AST Company.

[0051] Please refer to Figure 3 In order to facilitate the installation of the push frame 7.1, the suspension circular rail 5.1 is composed of two semicircular single bodies, that is, the single semicircular single body is installed first, the push frame 7.1 is pushed into the single body, and then the other single body is installed. The installation mode of the single body and the revolution frame 5 can adopt a countersunk screw to be fixed.

[0052] Please refer to Figure 4 The cross section of the suspension circular rail 5.1 is T-shaped, which can prevent the suspension circular rail 5.1 from falling off.

[0053] Please refer to Figure 5 and Figure 6 An angle adjusting mechanism is given, which comprises a mounting plate 8 fixedly connected to the bottom of the revolution frame 5. The back of the mounting plate 8 is provided with a motor 10, the rotation shaft of the motor 10 penetrates the mounting plate 8 forward and is connected to a driving gear 9.

[0054] The top of the plating pot frame 3 is provided with a horizontal part, and the top of the horizontal part is provided with a swing gear part 3.1. In order to improve the strength, the swing gear part 3.1 is integrally formed with the plating pot frame 3. The swing gear part 3.1 is connected to the mounting plate 8 through a rotation shaft, the driving gear 9 is engaged with the swing gear part 3.1, the driving gear 9 is rotated to drive the swing gear part 3.1 to swing, and then the whole plating pot frame 3 is driven to swing, so as to adjust the angle of the plating pot 2.

[0055] In order to prevent the rotation of the plating pot frame 3 from interfering and prevent cutting hands, the lower two corners of the mounting plate 8 are rounded.

[0056] Please refer to Figure 7 Since dust will be generated when the evaporation machine is working, which will affect the work of the swing angle sensor 16 and the height sensor 17, a first dust cover 14 is sleeved outside the push rod of the electric push rod 7, and the height sensor 17 is in the first dust cover 14. Since there is no light in the first dust cover 14, a lighting lamp (not shown in the figure) is arranged in the first dust cover 14.

[0057] A second dust cover 15 is arranged outside the angle adjusting mechanism, and the swing angle sensor 16 is in the second dust cover 15. Similarly, a lighting lamp (not shown in the figure) is arranged in the second dust cover 15.

[0058] The height sensor 17 and the swing angle sensor 16 with integrated illuminating lamps can also be used.

[0059] The structure of the first dust cover 14 is shown in Figure 8 The first dust cover 14 is a rotary body and can be vertically compressed.

[0060] The structure of the second dust cover 15 is shown in Figures 9 to 10 The second dust cover 15 comprises a shell 151, the top of the shell 151 is connected to the bottom of the revolving frame 5, the bottom of the shell 151 is provided with a gap 151a for avoiding the pot rack 3, and an elastic cover plate 152 is arranged at the gap.

[0061] The upper and lower ends of the elastic cover plate 152 are respectively fixed to the two ends of the gap, the middle part of the elastic cover plate 152 is fixedly connected to the pot rack 3, and the pot rack 3 drives the elastic cover plate 152 to move when rotating, so that the gap is always covered, and the dustproof purpose is achieved.

[0062] As shown in the figure, a guide strip is arranged outside the gap for limiting the elastic cover plate 152, and the guide strip is used for covering the side surface of the elastic cover plate 152.

[0063] The basic principle, main features and advantages of the utility model are shown and described above. It should be understood by those skilled in the art that the utility model is not limited by the above-mentioned embodiments, the above-mentioned embodiments and the description in the specification are only preferred examples of the utility model, and are not used to limit the utility model, various changes and improvements of the utility model can be made without departing from the spirit and scope of the utility model, and these changes and improvements all fall within the scope of the utility model which is claimed to be protected. The protection scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. An evaporation machine comprising a housing, a circular revolving frame, a revolving motor for driving the revolving frame to rotate, a plurality of evaporation pot frames evenly distributed along the circumference of the revolving frame, and an evaporation pot mounted at the lower end of each evaporation pot frame, characterized in that, The height adjusting mechanism is used for adjusting the height of the plating pot, and the angle adjusting mechanism is used for adjusting the angle of the plating pot. The height sensor is arranged on the height adjusting mechanism, and the swing angle sensor is arranged on the angle adjusting mechanism.

2. The evaporation machine according to claim 1, characterized in that The height adjusting mechanism comprises a mounting frame arranged inside the shell, a revolving frame arranged directly below the mounting frame, and a cylinder body of a pair of electric push rods arranged on the mounting frame. The top of the revolving frame is provided with a suspension circular rail which rotates in the push frame. A support rod is arranged between the two push frames, and the revolving motor is arranged on the support rod.

3. The evaporation machine according to claim 2, characterized in that The angle adjusting mechanism comprises a mounting plate fixedly connected to the bottom of the revolving frame. The back of the mounting plate is provided with a motor, and the rotating shaft of the motor penetrates the mounting plate and is connected to a driving gear.

4. The evaporation machine according to claim 3, characterized in that The top of the plating pot frame is provided with a horizontal part, and the top of the horizontal part is provided with a swing gear part.

5. An evaporation machine according to claim 4, characterized in that The swing gear part is connected to the mounting plate through a rotating shaft, and the driving gear is engaged with the swing gear part.

6. An evaporation machine according to claim 5, characterized in that The swing gear part is integrally formed with the plating pot frame.

7. An evaporation machine according to claim 6, characterized in that The two corners of the mounting plate are rounded.

8. An evaporation machine according to any one of claims 2 to 6, characterized in that The cross section of the suspension circular rail is T-shaped.

9. An evaporation machine according to any one of claims 3 to 6, characterized in that The suspension circular rail is formed by two semicircular bodies.

10. The evaporation machine according to claim 9, characterized in that A first dust cover is arranged outside the push rod of the electric push rod. The height sensor is arranged in the first dust cover, and a lighting lamp is arranged in the first dust cover. A second dust cover is arranged outside the angle adjusting mechanism. The swing angle sensor is arranged in the second dust cover, and a lighting lamp is arranged in the second dust cover. The second dust cover comprises a shell. The top of the shell is connected to the bottom of the revolving frame. The bottom of the shell is provided with a gap for avoiding the plating pot frame. The upper and lower ends of the elastic cover plate are respectively fixed to the two ends of the gap. The middle part of the elastic cover plate is fixedly connected to the plating pot frame. When the plating pot frame rotates, the elastic cover plate moves. Since the gap is always covered, the dustproof purpose can be achieved.

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