Water-cooled heat shield and single crystal furnace

Abstract

The utility model discloses a water-cooled heat shield and a single crystal furnace, and belongs to the technical field of silicon wafer production, the water-cooled heat shield comprises: a cylinder having an opening; the first pipe fitting and the second pipe fitting are located in the first direction of the barrel body, and the first pipe fitting and the second pipe fitting are connected with the barrel body; the supporting piece, the first pipe fitting and the second pipe fitting are located on the same side of the barrel in the first direction, the supporting piece is connected with the barrel, and the supporting piece, the first pipe fitting and the second pipe fitting are arranged in the circumferential direction of the opening at intervals. When the water-cooled heat shield is matched with the single crystal furnace for use, the supporting piece is arranged on the water-cooled heat shield, so that the position of the barrel can be adjusted in the interval direction of the first pipe fitting and the second pipe fitting, and the barrel can be moved in other directions through the supporting piece, so that the position of the barrel can be flexibly adjusted according to the growth condition of crystals; and the barrel body can be adjusted in multiple directions, so that a good thermal environment is provided for crystal growth.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of silicon wafer production equipment, and particularly relates to a water-cooled heat shield and a single crystal furnace. BACKGROUND

[0002] In the process of crystal pulling of a single crystal furnace, the latent heat of crystallization of a crystal bar can be taken away by cooling water circulating in a water-cooled heat shield, so that the crystal growth speed is accelerated, and thus the equipment productivity is improved. In the use process of the water-cooled heat shield, the position of a barrel body is generally adjusted through a water inlet pipe and a water outlet pipe thereon, and the adjustment direction is relatively single. CONTENT OF THE UTILITY MODEL

[0003] The utility model aims at overcoming the technical problem that the position adjustment direction of the barrel body is relatively single, and another object of the utility model is to provide a single crystal furnace.

[0004] TECHNICAL SCHEME The utility model discloses a water-cooled heat shield, which comprises:

[0005] A barrel body has an opening.

[0006] A first pipe fitting and a second pipe fitting are located on a first direction X of the barrel body, and the first pipe fitting and the second pipe fitting are connected with the barrel body respectively.

[0007] A support is located on the same side of the barrel body along the first direction with the first pipe fitting and the second pipe fitting, the support is connected with the barrel body, and the support, the first pipe fitting and the second pipe fitting are arranged at intervals along the circumference of the opening.

[0008] In some embodiments, the barrel body has a central axis, the support and the first pipe fitting have a central angle A with the central axis as the center, the support and the second pipe fitting have a central angle B with the central axis as the center, and A is greater than B.

[0009] In some embodiments, the support comprises:

[0010] A guide portion extends along the first direction X.

[0011] A connecting portion is connected between the guide portion and the barrel body.

[0012] In some embodiments, the connecting portion comprises:

[0013] A first rod extends along the first direction X and is connected to the barrel body, the first rod is projected on the barrel body along the first direction, and the guide portion is projected outside the barrel body along the first direction.

[0014] A second rod extends in a second direction Y, the first rod is connected with the guide portion through the second rod, and the second direction Y intersects the first direction X.

[0015] In some embodiments, the connecting portion comprises:

[0016] A first lap block and a second lap block are respectively connected to two ends of the second rod in the second direction Y, and a projection of the second rod in the second direction Y is completely located on the first lap block or the second lap block.

[0017] The first rod is connected to the second rod through the first lap block, a projection of the first rod in the first direction X is completely located on the first lap block, the guide portion is connected to the second rod through the second lap block, and a projection of the guide portion in the first direction X is completely located on the second lap block.

[0018] In some embodiments, the support comprises:

[0019] A bearing portion is located on a side of the connecting portion away from the barrel and is connected with the connecting portion.

[0020] A first buffer portion is located on a side of the bearing portion away from the connecting portion and is connected with the bearing portion.

[0021] In some embodiments, the first buffer portion is arranged to protrude from the connecting portion in the first direction.

[0022] In some embodiments, the support comprises:

[0023] A second buffer portion is connected to a side of the second lap block facing the guide portion and is arranged to surround the guide portion.

[0024] A single crystal furnace comprises:

[0025] A cover has a through hole.

[0026] The water-cooled heat shield according to any one of the preceding items penetrates the cover, the support of the water-cooled heat shield is arranged through the through hole and is spaced apart from the inner wall of the through hole.

[0027] In some embodiments, the single crystal furnace comprises:

[0028] A sealing member covers the through hole and is respectively connected to the cover and the support.

[0029] A lifting member is arranged on the side of the cover body away from the barrel body of the water-cooled heat shield, and is connected with the cover body and the support member respectively, and is used for lifting the support member in the first direction X.

[0030] Beneficial effects: The water-cooled heat shield of the embodiment of the application comprises a barrel body, the barrel body has an opening; a first pipe member and a second pipe member are located in the first direction of the barrel body, and the first pipe member and the second pipe member are connected with the barrel body respectively; a support member is located on the same side of the barrel body as the first pipe member and the second pipe member, and the support member is connected with the barrel body, and the support member, the first pipe member and the second pipe member are arranged at intervals in the circumferential direction of the opening. When the water-cooled heat shield is used in cooperation with a single crystal furnace, by arranging the support member on the water-cooled heat shield, the position of the barrel body can be adjusted in the direction in which the first pipe member and the second pipe member are spaced apart, and the barrel body can also be moved in other directions through the support member, so that the position of the barrel body can be adjusted more flexibly according to the growth of the crystal, and the barrel body can be adjusted in multiple directions, thereby providing a good thermal environment for the growth of the crystal. BRIEF DESCRIPTION OF DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can also be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0032] Figure 1 It is a perspective view of the water-cooled heat shield of the embodiment of the application;

[0033] Figure 2 It is a perspective view of the first pipe member, the second pipe member and the support member of the embodiment of the application;

[0034] Figure 3 It is a top view of the positions of the first pipe member, the second pipe member and the support member on the barrel body of the embodiment of the application;

[0035] Figure 4 It is a perspective view of the support member of the embodiment of the application, and a first buffer portion is arranged on the support member;

[0036] Figure 5 It is a structural schematic view of the bearing portion and the first buffer portion of the embodiment of the application;

[0037] Figure 6 It is a front view of the water-cooled heat shield of the embodiment of the application;

[0038] Figure 7 It is a perspective view of the support member of the embodiment of the application, and a second buffer portion is arranged on the support member;

[0039] Figure 8It is a partial sectional view of a single crystal furnace of an embodiment of the present application.

[0040] Figure 9 It is a structure schematic view of a water-cooled heat shield and a cover body connection of an embodiment of the present application.

[0041] Reference signs:

[0042] 10 - first pipe; 20 - second pipe; 30 - support; 31 - guide part; 32 - connecting part; 321 - first rod; 322 - second rod; 323 - first lap block; 324 - second lap block; 33 - bearing part; 34 - first buffer part; 35 - second buffer part; 40 - barrel; 41 - opening; 42 - central axis; 43 - reference surface; 50 - cover body; 51 - through hole; 60 - sealing element; 70 - lifting element; X - first direction; Y - second direction. DETAILED DESCRIPTION

[0043] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0044] In the description of the present application, it should be understood that the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more features. In the description of the present application, the meaning of "multiple" is two or more, at least one of which can be one, two or more, unless otherwise specifically limited.

[0045] In the crystal pulling process of the single crystal furnace, the latent heat of the crystal bar can be taken away by the cooling water circulating in the water-cooled heat shield, the crystal growth rate is accelerated, and the equipment productivity is improved. The water inlet pipe and the water outlet pipe are generally connected on the water-cooled heat shield for circulation of the cooling liquid. At the same time, the barrel on the water-cooled heat shield can be driven to move up and down through the water inlet pipe and the water outlet pipe, so that the height of the barrel and the crystal growth can be kept consistent, and the latent heat on the crystal bar can be continuously taken away. During the movement of the barrel, the distance between the barrel and the crystal may change, resulting in uneven heat dissipation of the barrel to the crystal. However, the water inlet pipe and the water outlet pipe can only drive the water-cooled heat shield to move in the direction between the barrel and the crystal, adjust the distance between the barrel and the crystal in this direction, and cannot adjust the position of the barrel in other directions, so that the adjustment direction is relatively single, which is not conducive to keeping the distance between the barrel and the crystal within a suitable range.

[0046] Therefore, the water-cooled heat shield is provided in the embodiments of the present application to overcome at least one of the above technical problems.

[0047] Please refer to Figure 1 and Figure 2 In the embodiments of the present application, the water-cooled heat shield comprises a cylinder 40, a first pipe 10, a second pipe 20 and a support 30.

[0048] The cylinder 40 has an opening 41; the first pipe 10 and the second pipe 20 are located on the first direction X of the cylinder 40, specifically, as shown in Figure 1 the first pipe 10 and the second pipe 20 are arranged on the outer periphery of the opening 41 and connected with the cylinder 40. The support 30 is located on the same side of the cylinder 40 along the first direction X as the first pipe 10 and the second pipe 20, the support 30 is connected with the cylinder 40, and the support 30, the first pipe 10 and the second pipe 20 are arranged at intervals along the circumferential direction of the opening 41.

[0049] It can be understood that the water-cooled heat shield is generally used on a single crystal furnace, specifically installed on the furnace cover of the single crystal furnace. When used together, the first pipe 10 and the second pipe 20 can serve as the input channel and output channel of the cooling medium, input the cooling medium (the cooling medium can be gas or liquid, such as water or argon, etc.) into the inside of the cylinder 40, and discharge the cooling medium in the inside of the cylinder 40. The cylinder 40 has a spiral-shaped pipeline connected with the first pipe 10 and the second pipe 20, which facilitates the circulation of the cooling medium. The support 30 is also arranged on the water-cooled heat shield, the bottom end of the support 30 is connected with the top end of the cylinder 40, at the same time, the bottom end of the first pipe 10 and the second pipe 20 is also connected with the top end of the cylinder 40, and the three are connected on the side of the cylinder 40 away from the heat source in the single crystal furnace, which can reduce the influence of the heat source in the furnace on the first pipe 10, the second pipe 20 and the support 30. The first pipe 10, the second pipe 20 and the support 30 on the cylinder 40 are arranged at intervals along the circumferential direction of the opening 41. In the process of crystal growth in the single crystal furnace, the cylinder 40 needs to dissipate heat for the growing crystal. In order to improve the uniformity of heat dissipation, the distance from the cylinder 40 to the crystal needs to be within a suitable range. However, the distance often deviates during the process of crystal growth, and the position of the cylinder 40 needs to be adjusted. By lifting the first pipe 10 and the second pipe 20, the position of the cylinder 40 in the direction between the first pipe 10 and the second pipe 20 (the direction between the first pipe 10 and the second pipe 20 is the direction of C1 to C2 in Figure 2 , wherein C1 is the center of the top surface of the first pipe 10, and C2 is the center of the top surface of the second pipe 20) can be adjusted, that is, the distance between the cylinder 40 and the crystal in this direction can be adjusted, so that the distance between the two in this direction is within a suitable range.

[0050] To adjust the position of the cylinder 40 in other directions, the position of the cylinder 40 can be adjusted using the lifting support 30, ensuring that the distance between the cylinder 40 and the crystal is within a suitable range in other directions. The support 30 is a solid structure (such as a solid metal structure). Compared to the first tube 10 and the second tube 20, the support 30 has higher structural strength, can withstand greater forces, and is less prone to deformation or damage, thus providing primary support for the cylinder 40. During the lifting and lowering process, the support 30 may need to be raised and lowered simultaneously with the first tube 10 or the second tube 20 to achieve a better adjustment effect. If the support 30 and the first tube 10 are raised and lowered, the position of the cylinder 40 can be adjusted in the direction between the support 30 and the first tube 10 (the direction between the support 30 and the first tube 10 is...). Figure 2 The direction from C1 to C3 (where C1 is the center of the top surface of the first tube 10 and C3 is the center of the top surface of the support 30) allows for adjustment of the distance between the cylinder 40 and the crystal in this direction, ensuring that the distance between them is within a suitable range. The position of the cylinder 40 can also be adjusted by raising and lowering the support 30 and the second tube 20, thereby adjusting the position of the cylinder 40 in the direction between the support 30 and the second tube 20 (the direction between the support 30 and the second tube 20 is...). Figure 2 The direction from C2 to C3 (where C2 is the center of the top surface of the second tube 20 and C3 is the center of the top surface of the support 30) allows for adjustment of the distance between the cylinder 40 and the crystal in this direction, ensuring that the distance between them is within a suitable range. Of course, the direction of adjustment for the cylinder 40 varies depending on the spacing between the first tube 10, the second tube 20, and the support 30, but all adjustments effectively regulate the distance between the cylinder 40 and the crystal, resulting in a better cooling effect from the cylinder 40 to the crystal. This structural design allows the cylinder 40 to have multiple adjustment directions, facilitating flexible position adjustment based on crystal growth. The cylinder 40 can be adjusted in multiple directions, ensuring that the distance between its inner wall and the crystal is within a suitable range, resulting in a more uniform temperature on the crystal surface and providing a favorable thermal environment for crystal growth.

[0051] By providing a support member 30 on the cylinder 40, the stability and consistency of the cylinder 40 during its vertical movement can be improved. Since the first pipe 10, the second pipe 20, and the support member 30 are all arranged at intervals along the circumference of the opening 41 of the cylinder 40 (that is, arranged at intervals on the circumference), the lines connecting the three form a triangular structure, which can improve the stability and consistency of the cylinder 40 during its lifting and lowering process.

[0052] The water-cooled heat shield with the support 30 is tested for stability and consistency. Three fixed points M, N, Q on the cylinder 40 are selected, and three fixed points m, n, q on the inner wall of the cover 50 of the single crystal furnace are selected. The water-cooled heat shield is raised and lowered 10 times, and each time it stops at the lower limit position. After stopping, the distance between the M point and the m point, the N point and the n point, and the Q point and the q point in the direction perpendicular to the first direction X (horizontal distance) is measured. The consistency test is shown in Table 1:

[0053] Table 1

[0054] Times M point to m point distance (mm) N point to n point distance (mm) Q point to q point distance (mm) 1 630 632 638 2 630 632 638 3 630 632 638 4 630 632 638 5 630 632 638 6 630 632 638 7 630 632 638 8 630 632 638 9 630 632 638 10 630 632 638

[0055] A force perpendicular to the first direction X is applied to the cylinder 40. Similarly, three fixed points M, N, Q on the cylinder 40 are selected, and three fixed points m, n, q on the inner wall of the cover 50 are selected. The water-cooled heat shield is raised and lowered 10 times, and each time it stops at the lower limit position. After stopping, the distance between the M point and the m point, the N point and the n point, and the Q point and the q point in the direction perpendicular to the first direction X (horizontal distance) is measured. The stability test is shown in Table 2:

[0056] Table 2

[0057] Times M point to m point distance (mm) N point to n point distance (mm) Q point to q point distance (mm) 1 630 632 638 2 630 632 638 3 630 632 638 4 630 632 638 5 630 632 638 6 630 632 638 7 630 632 638 8 630 632 638 9 630 632 638 10 630 632 638

[0058] The water-cooled heat shield without the support 30 is tested for consistency (only the first pipe 10 and the second pipe 20 move the cylinder 40). Three fixed points E, F, G on the cylinder 40 are selected, and three fixed points e, f, g on the inner wall of the cover 50 are selected. The water-cooled heat shield is raised and lowered 10 times, and each time it stops at the lower limit position. After stopping, the distance between the E point and the e point, the F point and the f point, and the G point and the g point in the direction perpendicular to the first direction X (horizontal distance) is measured. The consistency test is shown in Table 3:

[0059] Table 3

[0060]

[0061]

[0062] A force perpendicular to the first direction X is applied to the cylinder 40 without the support 30. Similarly, three fixed points E, F, G on the cylinder 40 are selected, and three fixed points e, f, g on the inner wall of the cover 50 are selected. The water-cooled heat shield is raised and lowered 10 times, and each time it stops at the lower limit position. After stopping, the distance between the E point and the e point, the F point and the f point, and the G point and the g point in the direction perpendicular to the first direction X (horizontal distance) is measured. The stability test is shown in Table 4:

[0063] Table 4

[0064] Times E point to e point distance (mm) F point to f point distance (mm) G point to g point distance (mm) 1 638 634 633 2 638 633 632 3 638 633 633 4 638 633 632 5 638 633 633 6 638 634 632 7 638 633 633 8 638 632 633 9 638 633 632 10 638 633 633

[0065] As can be seen from Table 1, Table 2, Table 3 and Table 4, when the support 30 is arranged on the water-cooled heat screen, the horizontal distance between the fixed point on the cylinder 40 and the corresponding fixed point on the cover 50 remains unchanged when the water-cooled heat screen is lifted up and down for 10 times. When the support 30 is not arranged on the water-cooled heat screen, the horizontal distance between the fixed point on the cylinder 40 and the corresponding fixed point on the cover 50 will have a certain deviation when the water-cooled heat screen is lifted up and down for 10 times. That is, when the support 30 is not arranged on the water-cooled heat screen, the position of the cylinder 40 in the horizontal direction can change when the cylinder 40 moves up and down. In the process of crystal processing, the distance between one side of the cylinder 40 and the crystal can be too large or too small, which affects the uniformity of the temperature on the crystal. Therefore, by arranging the support 30 on the water-cooled heat screen, the stability and consistency of the cylinder 40 can be effectively improved, the position deviation of the cylinder 40 in the horizontal direction in the lifting process can be avoided, and the uniformity of the temperature on the crystal can be ensured.

[0066] Please refer to Figure 1 and Figure 3 , in combination with the above embodiments, in some embodiments, the cylinder 40 has a center axis 42 (the shape of the cylinder 40 is similar to a cylindrical structure, and the center axis 42 of the cylinder 40 is a dashed line in Figure 1 ), and the support 30 and the first pipe 10 have a central angle A with the center axis 42 as the center, and the support 30 and the second pipe 20 have a central angle B with the center axis 42 as the center, which satisfy: A≥B.

[0067] It can be understood that when the first pipe 10, the second pipe 20 and the support 30 are arranged along the circumference of the opening 41, the support 30, the first pipe 10 and the second pipe 20 are located on the same circle, the central angle between the line connecting the support 30 to the center axis 42 and the line connecting the first pipe 10 to the center axis 42 is A (central angle A), and the central angle between the line connecting the support 30 to the center axis 42 and the line connecting the second pipe 20 to the center axis 42 is B (central angle B), so that A is greater than or equal to B, and the position of the cylinder 40 in other directions can be adjusted by the arranged support 30. Preferably, A can be equal to B, that is, the distance between the support 30 and the first pipe 10 is equal to the distance between the support 30 and the second pipe 20, and the lines connecting the support 30, the first pipe 10 and the second pipe 20 form an isosceles triangle structure (the support 30 is located at the center position of the arc-shaped segment of the first pipe 10 to the second pipe 20 on the cylinder 40, such as Figure 3The support 30 is arranged at the position, and the positions of the first pipe 10, the second pipe 20 and the support 30 to the cylinder 40 are adjusted in multiple directions, which is convenient for quickly adjusting the position of the cylinder 40, reduces the difficulty of adjustment and improves the efficiency of adjustment. Meanwhile, the isosceles triangle structure formed by the first pipe 10, the second pipe 20 and the support 30 has good symmetry, and if force analysis, angle relationship analysis and the like of the three are needed, the calculation amount can be reduced and the calculation efficiency can be improved.

[0068] Please refer to Figure 1 and Figure 4 , in combination with the above embodiment, in some embodiments, the support 30 comprises a guide portion 31 and a connecting portion 32. The guide portion 31 extends along the first direction X. The guide portion 31 is connected with the cylinder 40 through the connecting portion 32.

[0069] It can be understood that when the support 30 is arranged, the guide portion 31 on the support 30 can be arranged in a straight rod structure, the guide portion 31 of the straight rod structure extends along the first direction X, and can directly penetrate the cover 50 of the single crystal furnace and can move along the first direction X relative to the cover 50. The guide portion 31 is connected with the cylinder 40 through the connecting portion 32, and the connecting portion 32 can be arranged in various forms, such as a horizontal straight rod, or a straight rod inclined to the horizontal direction, or a connection composed of multiple rods in different directions. The guide portion 31 is connected with the cylinder 40 through the connecting portion 32, which is convenient for moving the cylinder 40 through the guide portion 31, so as to adjust the position of the cylinder 40.

[0070] Please refer to Figure 1 and Figure 4 , in combination with the above embodiment, in some embodiments, the connecting portion 32 comprises a first rod 321 and a second rod 322. The first rod 321 extends along the first direction X and is connected with the cylinder 40, and the orthographic projection of the first rod 321 along the first direction X is located on the cylinder 40, and the orthographic projection of the guide portion 31 along the first direction X is located outside the cylinder 40. The second rod 322 extends along the second direction Y, the first rod 321 is connected with the guide portion 31 through the second rod 322, and the second direction Y intersects with the first direction X, and preferably, the second direction Y is perpendicular to the first direction X.

[0071] It can be understood that the connecting portion 32 can be composed of multiple straight rods connected together. The connecting portion 32 is provided in a multi-segment structure, which can better adapt to the structural environment inside the single crystal furnace, facilitate the avoidance of some structures, and realize a reasonable structural layout. For example, the connecting portion 32 includes a first rod 321 and a second rod 322. The first rod 321, the second rod 322, and the guide portion 31 are all solid structures. The extension direction of the first rod 321 is the same as the extension direction of the guide portion 31, and the first rod 321 extends along the first direction X. The bottom end of the first rod 321 is connected to the cylinder 40. Preferably, the first rod 321 is connected to the outer circumferential position of the opening 41. The orthographic projection of the first rod 321 along the first direction X is located on the cylinder 40, and the orthographic projection of the guide portion 31 along the first direction X is located outside the cylinder 40 (outside the cylinder 40 refers to the outside of the cylinder 40, excluding the cavity inside the cylinder 40). That is, the minimum distance from the guide portion 31 to the center axis 42 is greater than the minimum distance from the first rod 321 to the center axis 42, and the extension direction of the guide portion 31 is the same as that of the first rod 321. Therefore, the guide portion 31 will not be arranged directly above or below the cylinder 40, and will not block the upward growth of the crystal during use. The second rod 322 on the connecting portion 32 extends along the second direction Y and connects the guide portion 31 and the first rod 321. The guide portion 31 drives the first rod 321 to move through the second rod 322, thereby driving the cylinder 40 to move and adjusting its position.

[0072] Please refer to Figure 4 In some embodiments, the connecting portion 32 includes a first lap block 323 and a second lap block 324, as described above. The first lap block 323 and the second lap block 324 are respectively connected to the two ends of the second rod 322 along the second direction Y, and the orthographic projection of the second rod 322 along the second direction Y is completely located on the first lap block 323 or the second lap block 324. The first rod 321 is connected to the second rod 322 through the first lap block 323, and the orthographic projection of the first rod 321 along the first direction X is completely located on the first lap block 323. The guide portion 31 is connected to the second rod 322 through the second lap block 324, and the orthographic projection of the guide portion 31 along the first direction X is completely located on the second lap block 324.

[0073] It can be understood that the first lap block 323 and the second lap block 324 are further arranged on the connecting portion 32, and the functions of the two are to facilitate the connection of the first rod 321 and the second rod 322, and to facilitate the connection of the second rod 322 and the guide portion 31. The first lap block 323 and the second lap block 324 are respectively arranged at two ends of the second rod 322 along the second direction Y, and the orthogonal projection of the second rod 322 along the second direction Y is completely located on the first lap block 323 or the second lap block 324, so as to facilitate the opening of the corresponding hole groove structure on the first lap block 323 and the second lap block 324, so that the second rod 322 is embedded into the corresponding hole groove structure and preliminarily connected with the first lap block 323 and the second lap block 324, and then the two are further connected by welding, which can improve the firmness of the connection of the second rod 322 and the first lap block 323 and the second lap block 324. Similarly, when the second rod 322 is connected with the first rod 321 through the first lap block 323, a corresponding hole groove structure can also be arranged on the first lap block 323 for the top end of the first rod 321 to be embedded therein, and then the two are further connected by welding; when the second rod 322 is connected with the guide portion 31 through the second lap block 324, a corresponding hole groove structure can also be arranged on the second lap block 324 for the bottom end of the guide portion 31 to be embedded therein, and then the two are further connected by welding. By arranging the first lap block 323 and the second lap block 324 to connect the corresponding rod-shaped structures, on the one hand, the hole groove insertion and welding can further improve the firmness of the connection of the corresponding rod-shaped structures, and on the other hand, it is convenient to connect two rod-shaped structures with different cross-sectional sizes and different cross-sectional shapes, so as to prevent the two rod-shaped structures with different cross-sectional sizes and different cross-sectional shapes from being connected insecurely.

[0074] Please refer to Figure 4 and Figure 5 , in combination with the above embodiments, in some embodiments, the support 30 includes a bearing portion 33 and a first buffer portion 34. The bearing portion 33 is located on the side of the connecting portion 32 away from the barrel 40, and is connected with the connecting portion 32. The first buffer portion 34 is located on the side of the bearing portion 33 away from the connecting portion 32, and is connected with the bearing portion 33.

[0075] It can be understood that the support 30 is also provided with a bearing portion 33 and a first buffer portion 34. The bearing portion 33 is arranged on the side of the connecting portion 32 away from the barrel 40, specifically, on the top of the second rod 322, and is connected to the second rod 322 by welding or bolt connection. Since the first rod 321, the second rod 322 and the guide portion 31 are all solid structures, the second rod 322 can be connected to other structures through the bearing portion 33 (for example, part of the structure in the single crystal furnace can be hung on the bearing portion 33), and a part of the weight of other structures can be borne by the support 30. The shape of the bearing portion 33 can be set as needed to facilitate connection with other structures in the single crystal furnace. The first buffer portion 34 can be arranged on the side of the bearing portion 33 away from the connecting portion 32. The first buffer portion 34 can be a relatively soft high-temperature-resistant structure, such as silicone rubber, ceramic fiber, etc. The bearing portion 33 can completely cover the top of the second rod 322, and the first buffer portion 34 can completely cover the top of the bearing portion 33, or even cover the top of the first lap joint 323. Since the structure in the single crystal furnace is relatively complex, for example, there can be multiple staggered structures on the inner side of the cover 50. If the second rod 322 extending along the second direction Y moves upward by too large an amplitude during the upward movement of the support 30, a collision with the staggered structures on the inner side of the cover 50 can occur. The first buffer portion 34 arranged on the second rod 322 can buffer the collision to some extent, avoiding the collision from causing the barrel 40 to shake and affecting the distance between the barrel 40 and the crystal.

[0076] Please refer to Figure 6 , in combination with the above embodiments, in some embodiments, the first buffer portion 34 protrudes from the connecting portion 32 along the first direction X.

[0077] It can be understood that the first buffer portion 34 protrudes from the top of the connecting portion 32 along the first direction X. The height of the top of the first buffer portion 34 is greater than the height of the top of the connecting portion 32. The plane on which the side of the barrel 40 facing the support 30 is located can be defined as the reference plane 43. When the bearing portion 33 and the first buffer portion 34 are arranged on the second rod 322, and the second lap joint 324 is arranged between the second rod 322 and the guide portion 31, the distance H1 from the top of the first buffer portion 34 to the reference plane 43 is greater than the distance H2 from the top of the second lap joint 324 to the reference plane 43 (the distance from the top of the first lap joint 323 to the reference plane 43 is also generally H2). During the upward movement of the support 30, the first buffer portion 34 can first contact the staggered structures on the inner side of the cover 50, avoiding the first lap joint 323 and the second lap joint 324 from colliding with the staggered structures, thereby protecting the first lap joint 323 and the second lap joint 324 to some extent, and avoiding the firmness of the connection between the first lap joint 323, the second lap joint 324 and the corresponding structures from being reduced due to the collision.

[0078] Please refer to Figure 7 and Figure 8 , in combination with the above embodiments, in some embodiments, the support 30 comprises a second buffer portion 35. The second buffer portion 35 is connected to one side of the second lap joint 324 towards the guide portion 31, and is arranged around the guide portion 31.

[0079] It can be understood that the second buffer portion 35 can be arranged on the second lap joint 324, and the second buffer portion 35 can be a relatively soft high-temperature-resistant structure such as silicone rubber, ceramic fiber, etc. The second buffer portion 35 is arranged on one side of the second lap joint 324 towards the guide portion 31, and can be an annular structure arranged around the guide portion 31. Since the inner side surface of the cover 50 is an arc-shaped structure, if the support 30 moves upward by too large a distance and no bearing portion 33 and first buffer portion 34 are arranged, the second lap joint 324 will first contact the cover 50 (see Figure 8 ), and the second buffer portion 35 arranged can play a certain buffering role for the collision between the second lap joint 324 and the cover 50, avoiding that the connection between the second lap joint 324 and other structures is reduced in firmness due to the influence of the collision.

[0080] Please refer to Figure 8 and Figure 9 , the present application also provides a single crystal furnace comprising a cover 50 and the water-cooled heat shield described above. The cover 50 has a through hole 51, the water-cooled heat shield penetrates the cover 50, and the support 30 of the water-cooled heat shield is arranged in the through hole 51 and spaced from the inner wall of the through hole 51.

[0081] It can be understood that the first pipe 10, the second pipe 20 and the support 30 on the water-cooled heat shield all penetrate the corresponding through hole 51 on the cover 50, so that the three can move up and down relative to the cover 50, facilitating the up and down movement of the cylinder 40 and the adjustment of the distance between the inner side thereof and the crystal. The aperture size of the through hole 51 is greater than the radial size of the corresponding parts on the first pipe 10, the second pipe 20 and the support 30, so that the first pipe 10, the second pipe 20 and the support 30 can move horizontally inside the corresponding through hole 51, which is conducive to the lifting of the three and the adjustment of the position of the cylinder 40.

[0082] Please refer to Figure 8 and Figure 9In combination with the above embodiments, in some embodiments, the single crystal furnace comprises a sealing member 60 and a lifting member 70. The sealing member 60 covers the through hole 51 and is connected to the cover 50 and the support 30 respectively. The lifting member 70 is arranged on the side of the cover 50 away from the cylinder 40 of the water-cooled heat shield and is connected to the cover 50 and the support 30 respectively, and is used to lift the support 30 in the first direction X.

[0083] It can be understood that, since the support 30 needs to pass through the corresponding through hole 51 on the cover 50, in order to ensure the sealing of the single crystal furnace, the sealing member 60 needs to be arranged at the position of the corresponding through hole 51 to seal and connect the support 30 and the cover 50. The sealing member 60 is made of a high-temperature-resistant and chemical-corrosion-resistant material, such as silicone rubber or fluororubber. The sealing member 60 can be a ring-shaped sealing sleeve or a rectangular sealing sleeve and is connected between the support 30 and the cover 50. The lifting member 70 is further arranged on the top of the cover 50. The lifting member 70 can be a gas cylinder structure, a hydraulic cylinder structure, a screw nut structure, etc. The lifting member 70 is connected to the support 30, specifically, can be connected to the guide portion 31 on the support 30, and can move the support 30 as a whole up and down, so as to adjust the position of the cylinder 40 without manual lifting. Meanwhile, a scale is further arranged on the lifting member 70. The height of the support 30 rising or falling can be determined through the scale, so as to determine the moving distance of the cylinder 40.

[0084] In the above embodiments, the description of each embodiment has its own focus. The parts not described in detail in a certain embodiment can be referred to the related description of other embodiments.

[0085] The water-cooled heat shield and the single crystal furnace provided by the embodiments of the present application are described in detail above, and the principles and implementation manners of the present application are described by using specific examples. The above description of the embodiments is only used to help understand the technical solutions and the core ideas of the present application. Those skilled in the art should understand that the technical solutions recorded in the above embodiments can be modified or some technical features can be replaced equivalently; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A water-cooled heat shield characterized by, The application relates to a supporting device for a pipe, which comprises: a cylinder (40) having an opening (41); a first pipe (10) and a second pipe (20) located on a first direction (X) of the cylinder (40), the first pipe (10) and the second pipe (20) being connected with the cylinder (40) respectively; a support (30) located on the same side of the cylinder (40) along the first direction (X) as the first pipe (10) and the second pipe (20), the support (30) being connected with the cylinder (40), and the support (30), the first pipe (10) and the second pipe (20) being arranged at intervals along the circumference of the opening (41).

2. The water-cooled heat shield of claim 1, wherein The cylinder (40) has a central axis (42), the support (30) and the first pipe (10) have a central angle A, and the support (30) and the second pipe (20) have a central angle B, which satisfy the condition A >= B.

3. The water-cooled heat shield of claim 1, wherein, The support (30) comprises: a guide part (31) extending along the first direction (X); a connecting part (32) connecting the guide part (31) with the cylinder (40).

4. The water-cooled heat shield of claim 3, wherein, The connecting part (32) comprises: a first rod (321) extending along the first direction (X) and connected with the cylinder (40), the orthogonal projection of the first rod (321) along the first direction (X) being located on the cylinder (40), and the orthogonal projection of the guide part (31) along the first direction (X) being located outside the cylinder (40); a second rod (322) extending along a second direction (Y), the first rod (321) being connected with the guide part (31) through the second rod (322), and the second direction (Y) intersecting the first direction (X).

5. The water-cooled heat shield of claim 4, wherein, The connecting part (32) comprises: a first overlapping block (323) and a second overlapping block (324) connected with the two ends of the second rod (322) along the second direction (Y) respectively, the orthogonal projection of the second rod (322) along the second direction (Y) being completely located on the first overlapping block (323) or the second overlapping block (324); the first rod (321) being connected with the second rod (322) through the first overlapping block (323), the orthogonal projection of the first rod (321) along the first direction (X) being completely located on the first overlapping block (323), and the guide part (31) being connected with the second rod (322) through the second overlapping block (324), the orthogonal projection of the guide part (31) along the first direction (X) being completely located on the second overlapping block (324).

6. The water-cooled heat shield of claim 3, wherein The support (30) comprises: a bearing part (33) located on the side of the connecting part (32) away from the cylinder (40) and connected with the connecting part (32); a first buffer part (34) located on the side of the bearing part (33) away from the connecting part (32) and connected with the bearing part (33).

7. The water-cooled heat shield of claim 6, wherein, The first buffering portion (34) is arranged protruding from the connecting portion (32) along the first direction (X).

8. The water-cooled heat shield of claim 5, wherein, The support (30) comprises: A second buffering portion (35) is connected to one side of the second lap joint block (324) towards the guiding portion (31) and arranged around the guiding portion (31).

9. A single crystal furnace characterized by comprising: Comprise: A cover (50) having a through hole (51); The water-cooled heat shield according to any one of claims 1 to 8, wherein the water-cooled heat shield penetrates through the cover (50), the support (30) of the water-cooled heat shield is arranged through the through hole (51) and is spaced apart from the inner wall of the through hole (51).

10. The single crystal furnace of claim 9, wherein The single crystal furnace comprises: A sealing member (60) covering the through hole (51) and connected to the cover (50) and the support (30) respectively; A lifting member (70) arranged on the side of the cover (50) away from the barrel (40) of the water-cooled heat shield and connected to the cover (50) and the support (30) respectively, for lifting the support (30) in the first direction (X).

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