Electromagnetic valve suitable for ultra-vacuum

Abstract

The electromagnetic valve comprises a valve body and an iron core assembly, a vacuum opening, a volcano-shaped valve opening and a vacuumizing opening are formed in the valve body, and the iron core assembly comprises a movable iron core and a valve opening sealing piece which are installed on the upper side of the volcano-shaped valve opening in a sliding mode. One end of the movable iron core is concaved inwards to form a sealing element cavity, a placement opening is formed in the outer side end of the sealing element cavity, the inner side end of the sealing element cavity is expanded outwards to form an extrusion space, and the placement opening is expanded outwards to form a horn-shaped expansion absorption area; the valve port sealing element is arranged in the sealing element cavity from the placing opening in an extrusion mode, the expansion absorption area is used for absorbing the deformation amount of the valve port sealing element when the valve port sealing element is pressed at the volcano-shaped valve port, and therefore it is guaranteed that the sealing face of the valve port sealing element is always flat. The electromagnetic valve suitable for ultra-vacuum overcomes the defect that an existing vacuum electromagnetic valve is not suitable for ultra-vacuum scenes due to poor sealing performance.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of electromagnetic valve, in particular to a kind of electromagnetic valve suitable for super vacuum. BACKGROUND

[0002] Vacuum electromagnetic valve generally includes vacuum port, vacuum port, valve port, movable core and spring, vacuum port is communicated vacuum pump, vacuum port is communicated with container;When electromagnetic coil is powered on to generate magnetic field, movable core is moved upward and opens valve port by overcoming spring force, vacuum electromagnetic valve is opened, vacuum pump is opened, all pipelines are conducted, at this time, from vacuum pump to container through vacuum electromagnetic valve is all in vacuum state;If there is any place around vacuum electromagnetic valve that is not sealed, vacuum pump will be in working state, cannot be extracted to the required high vacuum state.When electromagnetic coil is powered off, movable core is moved downward and closes valve port under the action of spring force, at this time, vacuum electromagnetic valve is in closed state, vacuum is cut off, vacuum pump is closed and vacuum pump's vacuum breaking valve is opened, at this time, vacuum port end is atmospheric pressure, vacuum port end is super vacuum, at this time, if valve port is not sealed well, vacuum port and container cannot maintain super vacuum state.

[0003] The existing vacuum electromagnetic valve is not sealed well outside and / or inside, so that the range of its use vacuum degree is only limited to 10 -1 pa to 10 -4 pa.With the continuous development of science and technology and the continuous emergence of new industries, such as photovoltaic, new energy, artificial intelligence, etc. require higher vacuum electromagnetic valve to support application, and the existing vacuum electromagnetic valve is not suitable for super vacuum scene, and needs to be improved. UTILITY MODEL CONTENT

[0004] (I) technical problem to be solved

[0005] The problem to be solved by the utility model is to provide a kind of electromagnetic valve suitable for super vacuum, to overcome the defects that the existing vacuum electromagnetic valve is not suitable for super vacuum scene due to poor sealing.

[0006] (II) technical scheme

[0007] To solve the technical problem, the utility model provides a kind of electromagnetic valve suitable for super vacuum, comprising:

[0008] valve body, which is provided with vacuum port, volcano-shaped valve port and vacuum port, the vacuum port is communicated with the vacuum port through the volcano-shaped valve port;

[0009] The iron core assembly comprises a movable iron core slidingly installed on the upper side of the volcano-shaped valve port and a valve port sealing element used to open and close the volcano-shaped valve port; one end of the movable iron core towards the volcano-shaped valve port is concave to form a sealing element cavity, the outer side end of the sealing element cavity is provided with a placing port, the inner side end of the sealing element cavity is outwardly expanded to form an extrusion space, and the placing port is outwardly expanded to form a trumpet-shaped expansion absorption area; the valve port sealing element is loaded into the sealing element cavity through extrusion, the extrusion space is used to prevent the valve port sealing element from being extruded and deformed, and the expansion absorption area is used to absorb the deformation amount of the valve port sealing element when the valve port sealing element is pressed against the volcano-shaped valve port, so as to ensure that the sealing surface of the valve port sealing element is always flat.

[0010] The side wall of the movable iron core is provided with an exhaust hole in communication with the extrusion space, and the exhaust hole is used to exhaust the gas in the sealing element cavity when the valve port sealing element is installed; one end of the valve port sealing element is annularly and equidistantly provided with a plurality of arc-shaped buffer ribs.

[0011] In some embodiments, one end of the valve port sealing element towards the volcano-shaped valve port is provided with the sealing surface; the buffer ribs are outwardly convex and abut against the inner wall of the sealing element cavity, and an elastic area is formed between the sealing surface and the outer end surface of the buffer ribs.

[0012] In some embodiments, the outer circumferential wall of the movable iron core is wrapped with a plastic-coated wear-resistant ring, and the movable iron core is provided with an annular energy absorption cavity at a position close to the sealing element cavity, and the annular energy absorption cavity is located inside the plastic-coated wear-resistant ring.

[0013] In some embodiments, a magnetic isolation pipe assembly is further arranged on the upper side of the valve body and is sealingly connected with the valve body through a compression sealing assembly; the compression sealing assembly comprises a screw sleeve and a sealing ring, the valve body is provided with a threaded column extending towards the magnetic isolation pipe assembly, the end of the threaded column is provided with an annular groove, and the sealing ring is installed in the annular groove; the magnetic isolation pipe assembly is provided with an annular pressing block corresponding to the sealing ring, and the screw sleeve is sleeved on the magnetic isolation pipe assembly and is threadedly connected with the threaded column, so that the annular pressing block compresses the sealing ring.

[0014] In some embodiments, the magnetic isolation pipe assembly comprises a hollow magnetic isolation pipe and a static iron core partially inserted into the magnetic isolation pipe, and the annular pressing block is arranged on the magnetic isolation pipe; the static iron core is provided with a welding shoulder, the welding shoulder abuts against the end of the magnetic isolation pipe and is welded and fixed with the magnetic isolation pipe; the outer circumferential wall of the inserted part of the static iron core is provided with a magnetic isolation pipe sealing ring, and the end of the inserted part of the static iron core is contracted to form a tapered anti-scratch part.

[0015] In some embodiments, the movable iron core is slidingly installed in the magnetic isolation pipe, the static iron core has an attracting surface opposite to one end of the movable iron core, the attracting surface is provided with energy absorbing grooves, and an anti-collision sheet is installed outside the energy absorbing grooves.

[0016] In some embodiments, an iron core spring is installed between the movable iron core and the magnetic isolation pipe assembly, the iron core spring always makes the movable iron core have a tendency to move towards the volcano-shaped valve port; the lower end of the movable iron core is provided with an annular flange, the magnetic isolation pipe assembly is provided with a spring limiting groove, one end of the iron core spring is abutted against the annular flange, and the other end of the iron core spring is abutted in the spring limiting groove.

[0017] In some embodiments, an electromagnetic coil is sleeved on the magnetic isolation pipe assembly, and the electromagnetic coil is fixedly connected with the magnetic isolation pipe assembly through a fastening nut.

[0018] In some embodiments, the vacuum port and the vacuum extraction port are coaxially arranged, the volcano-shaped valve port, the iron core assembly and the magnetic isolation pipe assembly are coaxially arranged, the axis of the vacuum port is perpendicular to the axis of the volcano-shaped valve port, and the valve port sealing piece is in T shape.

[0019] (Three) beneficial effects

[0020] Compared with the prior art, the electromagnetic valve suitable for ultra-high vacuum has the following advantages:

[0021] 1) After the valve port sealing piece is extruded and installed in the sealing piece cavity, the valve port sealing piece will not be deformed due to extrusion, thereby affecting the sealing with the volcano-shaped valve port; the expansion absorption area is arranged, when the valve port sealing piece and the volcano-shaped valve port are extruded under the action of the iron core spring, the valve port sealing piece will be deformed, at this time, the expansion absorption area can absorb the deformation amount, so that the sealing surface always remains flat, and the internal sealing effect is excellent.

[0022] 2) A sealing ring is arranged between the magnetic isolation pipe assembly and the valve body, when the rotary spiral sleeve is rotated, the annular pressing block can stably press the sealing ring, the sealing ring will not be damaged, the sealing is reliable and stable. The design of relying on rotation for pressing is broken, the sealing ring will not be twisted, turned over and deformed due to rotation, and the external sealing effect is effectively improved; in order to ensure absolute sealing, a magnetic isolation pipe sealing ring is arranged at the middle position of the static iron core, which provides a guarantee for sealing and ensures the reliability of external sealing.

[0023] 3) The design of adding a buffer rib on the valve port sealing piece increases the height of the elastic area, so that the overall elastic space is larger, the strong elastic force can be ensured during the assembly and extrusion process, the sealing surface can always remain flat, and the air at the end of the valve port sealing piece can also flow out from the air outlet hole more smoothly. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of an electromagnetic valve suitable for ultravacuum according to the present invention;

[0026] Figure 2 This is a schematic diagram of the structure of a solenoid valve core assembly suitable for ultravacuum according to the present invention;

[0027] Figure 3 This is a schematic diagram of the structure of a movable iron core for an electromagnetic valve suitable for ultravacuum applications according to this utility model.

[0028] Figure 4 This is a schematic diagram of the connection between the movable iron core and the valve port seal of a solenoid valve suitable for ultravacuum according to this utility model.

[0029] Figure 5 This is a schematic diagram of the structure of a valve port seal for an electromagnetic valve suitable for ultra-vacuum applications, used to close a volcano-shaped valve port.

[0030] Figure 6 This is a schematic diagram of the structure of a valve port seal for an electromagnetic valve suitable for ultra-vacuum applications according to this utility model.

[0031] Figure 7 This is a top-view structural schematic diagram of a valve port seal for an electromagnetic valve suitable for ultra-vacuum applications according to this utility model.

[0032] Figure 8 This is a schematic diagram of the structure of a solenoid valve compression sealing assembly suitable for ultra-vacuum applications according to this utility model.

[0033] Figure 9 This is a schematic diagram of the structure of a solenoid valve magnetic shielding tube assembly suitable for ultravacuum according to the present invention;

[0034] Corresponding component names of various reference numerals in the figure are as follows: 1, valve body; 101, vacuum port; 102, volcano-shaped valve port; 103, vacuum extraction port; 104, threaded column; 105, annular groove; 2, iron core assembly; 21, movable iron core; 22, valve port sealing element; 23, plastic-coated wear-resistant ring; 211, sealing element cavity; 212, inlet; 213, extrusion space; 214, expansion absorption area; 215, exhaust hole; 216, annular energy absorption cavity; 217, annular flange; 221, sealing surface; 222, buffer rib; 223, elastic area; 3, fastening nut; 4, magnetic isolation tube assembly; 41, magnetic isolation tube; 42, static iron core; 43, magnetic isolation tube sealing ring; 44, anti-collision sheet; 401, annular pressing block; 402, spring limiting groove; 421, welded shoulder; 422, conical anti-scratch part; 423, energy absorption groove; 5, compression sealing assembly; 51, spiral sleeve; 52, sealing ring; 6, iron core spring; 7, electromagnetic coil. DETAILED DESCRIPTION

[0035] The present application will be described in detail below with reference to the drawings and specific embodiments.

[0036] The embodiments of this application are illustrated by way of example in the following drawings and specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present application from the disclosure. Obviously, the described embodiments are only a part of the embodiments of the present application, not all. The present application can also be implemented or applied by other different specific embodiments, and the details in the specification can be modified or changed based on different views and applications without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0037] It should be noted that the various aspects of the embodiments described below are within the scope of the appended claims. It should be apparent that the aspects described herein can be embodied in a wide variety of forms and that any specific structure and / or function described herein is merely illustrative. Based on the present application, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, the devices and / or methods can be implemented using any number and combination of the aspects set forth herein. In addition, this device and / or method can be implemented using other structures and / or functionality in addition to or other than one or more of the aspects set forth herein.

[0038] It is also need to be explained that the following provided figures in the embodiments only illustrate the basic ideas of the present application in a schematic way, and only show the components related to the present application in the figures, not drawn according to the number, shape and size of the components in actual implementation, the type, number and proportion of each component in actual implementation can be a random change, and the component layout type can also be more complex.

[0039] In addition, in the following description, specific details are provided in order to facilitate thorough understanding of examples. However, one skilled in the art will understand that the examples can be practiced without these specific details.

[0040] The technical solutions provided by the embodiments of the present application are described below in combination with the drawings.

[0041] Referring to Figures 1 to 9 The utility model provides a kind of electromagnetic valve suitable for ultra vacuum, including valve body 1, iron core assembly 2, magnetic isolation pipe assembly 4, compression sealing assembly 5, iron core spring 6 and electromagnetic coil 7.

[0042] Referring to Figure 1 And Figure 2 Valve body 1 is provided with vacuum port 101, volcano-shaped valve port 102 and vacuumizing port 103, vacuumizing port 103 is communicated with vacuum port 101 by volcano-shaped valve port 102;Wherein vacuum port 101 and vacuumizing port 103 are located at two sides of valve body 1 respectively, and vacuum port 101 and vacuumizing port 103 are coaxially arranged, the axis of vacuum port 101 and the axis of volcano-shaped valve port 102 are perpendicular. Iron core assembly 2 includes movable iron core 21 slidably installed on the upside of volcano-shaped valve port 102 and valve port sealing element 22 for opening and closing volcano-shaped valve port 102, valve port sealing element 22 is located directly above volcano-shaped valve port 102, and valve port sealing element 22 can open or close volcano-shaped valve port 102 under the driving of movable iron core 21.

[0043] Referring to Figures 2 to 5, the movable iron core 21 is concave inward at one end of the volcano-shaped valve port 102 to form a sealing member cavity 211, wherein the valve port sealing member 22 is T-shaped, and the sealing member cavity 211 is shaped to match the outer contour of the valve port sealing member 22. An insertion opening 212 is arranged at the outer end of the sealing member cavity 211, and an extrusion space 213 is formed outward at the inner end of the sealing member cavity 211, the extrusion space 213 being in communication with the sealing member cavity 211, and a trumpet-shaped expansion absorption zone 214 is formed outward at the insertion opening 212, the expansion absorption zone 214 being in communication with the insertion opening 212. The valve port sealing member 22 is inserted into the sealing member cavity 211 by extrusion, and the extrusion space 213 is arranged to allow a certain gap to exist between the outer wall of the end of the valve port sealing member 22 away from the sealing surface 221 and the inner wall of the sealing member cavity 211 after the valve port sealing member 22 is inserted, which can prevent the valve port sealing member 22 from being extruded and deformed, and can also absorb the deformation amount of the valve port sealing member 22 when the sealing surface 221 is pressed against the volcano-shaped valve port 102, thereby ensuring the flatness of the sealing surface 221 and improving the internal sealing performance. The expansion absorption zone 214 is used to absorb the deformation amount of the valve port sealing member 22 when the valve port sealing member 22 is pressed against the volcano-shaped valve port 102, thereby ensuring that the sealing surface 221 of the valve port sealing member 22 is always flat.

[0044] In the prior art, some vacuum solenoid valve manufacturers increase the spring force of the iron core to make the sealing surface and the valve port (internal sealing) more closely in contact to improve the sealing requirement, so as to achieve a better leakage value; but this often comes at a higher cost. In order to overcome the spring force, the coil volume is made larger and the power is made higher, which not only increases the cost, but also cannot meet the leakage value requirement in the actual application process. The increased spring force cannot work under the super vacuum condition.

[0045] The internal sealing is crucial. In the utility model, after the valve port sealing member 22 is extruded and inserted into the sealing member cavity 211, the sealing member cavity 211 has an extrusion space (gap fit), so that the valve port sealing member 22 will not be deformed due to extrusion and affect the sealing with the volcano-shaped valve port 102. The expansion absorption zone 214 is arranged, and when the valve port sealing member 22 and the volcano-shaped valve port 102 are extruded under the action of the iron core spring 6, the valve port sealing member 22 will be deformed, and at this time, the expansion absorption zone 214 can absorb the deformation amount, so that the sealing surface 221 is always flat, and the internal sealing effect is excellent.

[0046] In some embodiments, as Figures 4 to 7As shown, the valve port seal 22 is provided with a sealing surface 221 at one end of the volcano-shaped valve port 102, and the sealing surface 221 corresponds to the expansion absorption area 214. The other end of the valve port seal 22 is annularly and equidistantly provided with a plurality of arc-shaped buffer ribs 222, and there are four buffer ribs 222 in this embodiment. The buffer ribs 222 are outwardly convex and abut against the inner wall of the seal cavity 211, and the elastic area 223 is formed between the sealing surface 221 and the outer end surface of the buffer rib 222. In this structure, the design of adding the buffer rib 222 to the valve port seal 22 increases the height of the elastic area 223, so that the overall elastic space is larger, which can not only ensure strong elastic force during the assembly and extrusion process, but also can always maintain the flatness of the sealing surface 221, and the air at the end of the valve port seal 22 can also flow out more smoothly from the exhaust hole 215.

[0047] In some embodiments, as shown in Figures 4 to 7 As shown, the side wall of the movable iron core 21 is provided with an exhaust hole 215 communicating with the extrusion space 213, and the exhaust hole 215 is used to exhaust the gas in the seal cavity 211 when the valve port seal 22 is installed. By providing the exhaust hole 215, the gas in the seal cavity 211 can be exhausted when the valve port seal 22 is installed by extrusion, so that the valve port seal 22 can be smoothly fitted in the seal cavity 211. The outer circumferential wall of the movable iron core 21 is wrapped with a plastic-wrapped wear-resistant ring 23, and the movable iron core 21 is provided with an annular energy absorption cavity 216 at a position close to the seal cavity 211, and the annular energy absorption cavity 216 is located inside the plastic-wrapped wear-resistant ring 23. The outer wall of the movable iron core 21 is wrapped with the plastic-wrapped wear-resistant ring 23, so that the up-and-down movement of the movable iron core 21 is smooth and the friction coefficient is reduced. In order to ensure that the plastic-wrapped wear-resistant ring 23 can wrap the movable iron core very closely, the annular energy absorption cavity is arranged on the surface to make the wrapping roundness and concentricity better.

[0048] In some embodiments, as shown in Figure 1 and Figure 8 As shown, the magnetic isolation tube assembly 4 is located on the upper side of the valve body 1, and the magnetic isolation tube assembly 4 is sealingly connected with the valve body 1 through the compression sealing assembly 5. The compression sealing assembly 5 includes a screw sleeve 51 and a sealing ring 52, and the valve body 1 is provided with a threaded column 104 extending towards the magnetic isolation tube assembly 4, and the end of the threaded column 104 is provided with an annular groove 105, and the sealing ring 52 is installed in the annular groove 105. The magnetic isolation tube assembly 4 is provided with an annular pressing block 401 corresponding to the sealing ring 52, and the annular pressing block 401 abuts against the sealing ring 52. The screw sleeve 51 is sleeved on the magnetic isolation tube assembly 4 and is threadedly connected with the threaded column 104, so that the annular pressing block 401 compresses the sealing ring 52.

[0049] In the ultra-vacuum environment, in addition to the internal sealing requirements are extremely high, the outer sealing is also one of the keys, the outer sealing mainly lies in the sealing between the magnetic tube assembly 4 and the valve body 1 and the sealing of the magnetic tube assembly 4 itself. The structure, the magnetic tube assembly and the valve body are provided with a sealing ring, when the rotating spiral sleeve 51 rotates, the annular pressing block 401 can stably press the sealing ring 52, and the sealing ring will not be damaged, the sealing is reliable and stable. Break the design of relying on rotation to press, the sealing ring will not be twisted, turned over and deformed due to rotation, effectively improve the sealing effect.

[0050] In some embodiments, as shown in Figure 1 and Figure 9 , the magnetic tube assembly 4 comprises a hollow magnetic tube 41 and a static core 42 partially inserted into the magnetic tube 41, and the annular pressing block 401 is arranged on the magnetic tube 41; the static core 42 is provided with a welding shoulder 421, which is abutted on the end of the magnetic tube 41 and is welded and fixed with the magnetic tube 41; the outer circumferential wall of the static core 42 is provided with a magnetic tube sealing ring 43, and the end of the static core 42 is contracted to form a tapered anti-scratch part 422. The movable core 21 is slidingly installed in the magnetic tube 41, and the end of the static core 42 opposite to the movable core 21 has an attraction surface, and the attraction surface is provided with an energy absorption groove 423, and the outer side of the energy absorption groove 423 is provided with a bumper 44.

[0051] Because the material will form a small welding pore after welding, in order to ensure the absolute sealing under the ultra-vacuum condition, a magnetic tube sealing ring 43 is arranged at the middle position of the static core 42, which increases a guarantee for sealing and ensures the reliability of external sealing. Because the static core 42 is provided with the tapered anti-scratch part 422, when the static core 42 is in interference fit with the magnetic tube 41, the metal will not be forcibly scratched to form metal powder and iron filings under the action of the tapered anti-scratch part 422, which affects the internal cleanliness of the electromagnetic valve. In addition, the bumper is arranged on the attraction surface of the static core, and even if it is continuously hit, the attraction surface can be ensured to be flat without impact powder under the action of the energy absorption groove.

[0052] In some embodiments, as shown in Figure 1 and Figure 5 , the magnetic tube assembly 4 is provided with a spring limiting groove 402, and the lower end of the movable core 21 is provided with an annular flange 217; one end of the core spring 6 is abutted on the annular flange 217, and the other end is abutted in the spring limiting groove 402. The magnetic tube assembly 4 is sleeved with an electromagnetic coil 7, and the electromagnetic coil 7 is fixedly connected with the magnetic tube assembly 4 through the fastening nut 3.

[0053] Throughout this specification the same or similar parts are denoted by the same or similar reference numerals, and each embodiment focuses on the differences from other embodiments.

[0054] The above description is only specific embodiments of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical scope disclosed by the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. An electromagnetic valve suitable for ultra-high vacuum, characterized by, The utility model relates to a valve body (1) which is provided with a vacuum port (101), a volcano-shaped valve port (102) and a vacuum extraction port (103) in the valve body (1), wherein the vacuum extraction port (103) is in communication with the vacuum port (101) through the volcano-shaped valve port (102); an iron core assembly (2) which comprises a movable iron core (21) slidingly installed on the upside of the volcano-shaped valve port (102) and a valve port sealing element (22) used to open and close the volcano-shaped valve port (102); the end of the movable iron core (21) facing the volcano-shaped valve port (102) is concave to form a sealing element cavity (211), the outside end of the sealing element cavity (211) is provided with a setting port (212), the inside end of the sealing element cavity (211) is expanded to form an extrusion space (213), the setting port (212) is expanded to form a trumpet-shaped expansion absorption zone (214); the valve port sealing element (22) is installed in the sealing element cavity (211) through extrusion, the extrusion space (213) is used to prevent the valve port sealing element (22) from being deformed by extrusion, and the expansion absorption zone (214) is used to absorb the deformation amount of the valve port sealing element (22) when the valve port sealing element (22) is pressed against the volcano-shaped valve port (102), so that the sealing surface (221) of the valve port sealing element (22) is always flat. The side wall of the movable iron core (21) is provided with an exhaust hole (215) in communication with the extrusion space (213), and the exhaust hole (215) is used to exhaust the gas in the sealing element cavity (211) when the valve port sealing element (22) is installed; one end of the valve port sealing element (22) is annularly and equidistantly provided with a plurality of arc-shaped buffer ribs (222). The end of the valve port sealing element (22) facing the volcano-shaped valve port (102) is provided with the sealing surface (221); the buffer ribs (222) are convexly arranged and abut against the inner wall of the sealing element cavity (211), and the elastic zone (223) is formed between the outer end surface of the sealing surface (221) and the buffer ribs (222). The outer circumferential wall of the movable iron core (21) is wrapped with a plastic-wrapped wear-resistant ring (23), and the movable iron core (21) is provided with an annular energy absorption cavity (216) at the position close to the sealing element cavity (211), and the annular energy absorption cavity (216) is located inside the plastic-wrapped wear-resistant ring (23).

2. The electromagnetic valve suitable for ultra-high vacuum according to claim 1, characterized in that: ​ 3. The electromagnetic valve suitable for ultra-high vacuum according to claim 1, wherein: ​ 4. The electromagnetic valve suitable for ultra-high vacuum according to claim 1, wherein: The magnetically isolated pipe assembly (4) is arranged on the upper side of the valve body (1) and is in sealing connection with the valve body (1) through a compression sealing assembly (5); the compression sealing assembly (5) comprises a screw sleeve (51) and a sealing ring (52), the valve body (1) is provided with a threaded column (104) extending towards the magnetically isolated pipe assembly (4), the end of the threaded column (104) is provided with an annular groove (105), and the sealing ring (52) is mounted in the annular groove (105); the magnetically isolated pipe assembly (4) is provided with an annular pressing block (401) corresponding to the sealing ring (52), the screw sleeve (51) is sleeved on the magnetically isolated pipe assembly (4) and is in threaded connection with the threaded column (104), so that the annular pressing block (401) compresses the sealing ring (52).

5. The electromagnetic valve suitable for ultra-high vacuum according to claim 4, characterized in that: The magnetically isolated pipe assembly (4) comprises a hollow magnetically isolated pipe (41) and a static iron core (42) partially inserted in the magnetically isolated pipe (41), and the annular pressing block (401) is arranged on the magnetically isolated pipe (41); the static iron core (42) is provided with a welding shoulder (421) abutting against and fixedly welded to the end of the magnetically isolated pipe (41); the outer circumferential wall of the inserted part of the static iron core (42) is provided with a magnetically isolated pipe sealing ring (43), and the end of the inserted part of the static iron core (42) is contracted to form a tapered anti-scratching part (422).

6. The electromagnetic valve suitable for ultra-high vacuum according to claim 5, characterized in that: The movable iron core (21) is slidingly mounted in the magnetically isolated pipe (41), one end of the static iron core (42) opposite to the movable iron core (21) has an attracting surface, the attracting surface is provided with an energy absorbing groove (423), and an anti-collision sheet (44) is mounted outside the energy absorbing groove (423).

7. The electromagnetic valve suitable for ultra-high vacuum according to claim 4, characterized in that: An iron core spring (6) is mounted between the movable iron core (21) and the magnetically isolated pipe assembly (4), the iron core spring (6) always makes the movable iron core (21) have a tendency to move towards the volcano-shaped valve port (102); the lower end of the movable iron core (21) is provided with an annular flange (217), the magnetically isolated pipe assembly (4) is provided with a spring limiting groove (402), one end of the iron core spring (6) abuts against the annular flange (217), and the other end of the iron core spring (6) abuts against the spring limiting groove (402).

8. The electromagnetic valve suitable for ultra-high vacuum according to claim 4, wherein: An electromagnetic coil (7) is sleeved on the magnetically isolated pipe assembly (4), and the electromagnetic coil (7) is fixedly connected with the magnetically isolated pipe assembly (4) through a fastening nut (3).

9. The electromagnetic valve suitable for ultra-high vacuum according to claim 4, wherein: The vacuum port (101) and the vacuum-pumping port (103) are coaxially arranged, the volcano-shaped valve port (102), the iron core assembly (2) and the magnetically isolated pipe assembly (4) are coaxially arranged, the axis of the vacuum port (101) is perpendicular to the axis of the volcano-shaped valve port (102), and the valve port sealing element (22) is in T shape.

Images