Image transmission visual device for semiconductor crystal growth furnace

Abstract

The utility model discloses an image transmission visual device for a semiconductor crystal growth furnace, which relates to the technical field of semiconductor crystal growth furnaces and comprises a machine body, an industrial camera, an ESP (electronic stability program) remote module and a cooling fan are arranged in the machine body, the ESP remote module is electrically connected with the industrial camera, and a magnetic suction slip sheet is arranged at the bottom end of the machine body; a guide rail is arranged at the bottom end of the machine body, the magnetic suction sliding piece slides in the guide rail, a crank arm is arranged on one side of the guide rail, and the end of the crank arm is connected with a flange observation opening. The method has the beneficial effects that the stability and the anti-interference capability of data transmission are ensured, and the convenience and the reliability of data transmission are effectively improved; the problem that equipment is overheated in a high-temperature environment is effectively solved, stable operation of the equipment is guaranteed, and the service life of the equipment is prolonged; monitoring requirements of different visual angles can be met, monitoring is more comprehensive and flexible, and the defect that the visual angle of a traditional camera is fixed is overcome.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor crystal growing furnace technical field, concretely related to a kind of image transmission vision device for semiconductor crystal growing furnace. BACKGROUND

[0002] In the crystal growth process, the temperature control in the growth furnace has a significant impact on the formation of crystal nucleus and the quality of growth. It is necessary to ensure constant temperature, prevent supercooling or overheating, and achieve different temperature gradient growth requirements, which requires real-time monitoring to ensure that the process parameters are in the best state, and then ensure the quality of the crystal. For example, in the growth of silicon carbide crystal, accurate control of growth temperature is extremely critical to reduce microtubules, polytype inclusions, dislocations and other defects. Only through real-time monitoring can temperature abnormalities be found in time and adjusted to avoid defects and improve crystal quality.

[0003] At present, the traditional monitoring method uses an industrial camera to shoot through a flange observation port, and transmits image data to the control system through a wire harness, but there are many problems.

[0004] 1) The traditional monitoring often uses an industrial camera to shoot through a flange observation port, and transmits image data through a wire harness. However, the high temperature environment of the crystal growing furnace can cause signal attenuation or unstable transmission of the wire harness. For example, high temperature can cause changes in the resistance of metal wires, affecting signal transmission quality, causing monitoring screen lag, blur, and even data loss. At the same time, the complex arrangement of wire harnesses increases the difficulty and cost of equipment maintenance. At the same time, the industrial camera and supporting electronic equipment are prone to overheating in the high temperature environment of the crystal growing furnace. Overheating not only affects the stability of the equipment, causing the photographed images to have more noise, color deviation and other problems, but also shortens the service life of the equipment, increasing the cost of equipment replacement and maintenance.

[0005] 2) The traditional camera fixing method cannot be adjusted flexibly, and cannot meet the needs of monitoring crystal growth from different angles. In actual production, different crystal growth stages and process requirements may require observation of the crystal from multiple angles, and the traditional monitoring method cannot fully and carefully observe the crystal growth process.

[0006] For the problems in the related art, no effective solution has been proposed so far. INVENTION CONTENTS

[0007] To overcome the above technical problems existing in the prior art, the utility model provides an image transmission vision device for a semiconductor crystal growing furnace.

[0008] The technical solution of the utility model is as follows:

[0009] A kind of for semiconductor crystal furnace, it includes: body, industrial camera, ESP remote module and heat dissipation fan are equipped in the body, the ESP remote module is electrically connected with the industrial camera, and the bottom of the body is equipped with magnetic slide piece;

[0010] The bottom of the body is equipped with guide rail, the magnetic slide piece slides in the guide rail, and the side of guide rail is equipped with curved arm, and the end of curved arm is connected with flange observation port.

[0011] Further, the body is equipped with display screen, and the display screen is electrically connected with the industrial camera.

[0012] Further, the side of the industrial camera is equipped with embedded filter.

[0013] Further, the guide rail is equipped with sliding groove, and the magnetic slide piece slides in the sliding groove.

[0014] Further, the heat dissipation fan is at least two groups, one group of the heat dissipation fan is used to heat dissipation for the industrial camera, and another group of the heat dissipation fan is used to heat dissipation for the whole inside the body.

[0015] The beneficial effects of the utility model are:

[0016] 1) the device realizes wireless image and data transmission of industrial camera and remote centralized control system by ESP remote module.This wireless transmission mode avoids the signal attenuation and instability problem caused by the influence of high temperature in traditional wire harness transmission, such as signal interruption in wire harness transmission under the high temperature environment of crystal furnace, but the device can stably transmit data;In addition, ESP remote module uses Wi-Fi or Bluetooth protocol, which ensures the stability and anti-interference ability of data transmission, effectively improves the convenience and reliability of data transmission.

[0017] 2) by setting at least two groups of heat dissipation fans, one group of heat dissipation fans is used to heat dissipation for the industrial camera, and another group of heat dissipation fans is used to heat dissipation for the whole inside the body, forming a double air cooling system.This can effectively solve the problem of equipment overheating under high temperature environment, guarantee the stable operation of equipment, and prolong the service life of equipment.For example, industrial camera continuously high frequency shooting, ESP remote module uninterrupted work, double air cooling system can take away heat in time, prevent equipment from failure due to overheating.

[0018] 3) through the combination design of guide rail, magnetic slide piece and curved arm, realize the camera multi-angle adjustment.Guide rail magnetic slide piece can slide in guide rail, the end of curved arm is connected with flange observation port, camera is installed at the bottom of body, by adjusting the position of magnetic slide piece on guide rail and the angle of curved arm, can satisfy the monitoring demand of different visual angle, make monitoring more comprehensive and flexible, overcome the defect that traditional camera visual angle is fixed.

[0019] The other features and advantages of the present application will be described in the following description, and become apparent from the description, or can be learned from the practice of the present application. The objectives and other advantages of the present application can be achieved and obtained by the structure particularly pointed out in the description and the accompanying drawings.

[0020] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0022] Fig. 1 is a structural schematic view of a picture transmission vision device for a semiconductor crystal growing furnace according to an embodiment of the present application;

[0023] Fig. 2 is a guide rail schematic view of a picture transmission vision device for a semiconductor crystal growing furnace according to an embodiment of the present application;

[0024] Fig. 3 is a machine body schematic view of a picture transmission vision device for a semiconductor crystal growing furnace according to an embodiment of the present application.

[0025] In the drawings:

[0026] 1, machine body; 2, industrial camera; 3, ESP remote module; 4, heat dissipation fan; 5, magnetic suction sliding piece; 6, guide rail; 7, sliding groove; 8, curved arm; 9, display screen; 10, optical filter. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art belong to the scope of protection of the present application.

[0028] According to an embodiment of the present application, a picture transmission vision device for a semiconductor crystal growing furnace is provided.

[0029] As Figs. 1-3As shown, a kind of image transmission vision device for semiconductor crystal growing furnace, comprising: body 1, industrial camera 2, ESP remote module 3 and heat dissipation fan 4 are equipped in body 1, ESP remote module 3 is electrically connected with industrial camera 2, and the bottom of body 1 is equipped with magnetic slide 5;

[0030] The bottom of body 1 is equipped with guide rail 6, and magnetic slide 5 slides in guide rail 6, and one side of guide rail 6 is equipped with curved arm 8, and the end of curved arm 8 is connected with flange observation port.

[0031] Wherein, slide groove 7 is equipped in guide rail 6, and magnetic slide 5 slides in slide groove 7. Wherein, body 1 is equipped with display screen 9, and display screen 9 is electrically connected with industrial camera 2. Wherein, one side of industrial camera 2 is equipped with embedded filter 10.

[0032] In addition, heat dissipation fan 4 is at least two groups, one group of heat dissipation fan 4 is used to heat dissipation for industrial camera 2, and another group of heat dissipation fan 4 is used to heat dissipation for the whole inside body 1.

[0033] The technical scheme, curved arm 8 is installed on flange observation port, and the end of curved arm 8 is connected with flange observation port, which plays a supporting and positioning role. Then, guide rail 6 is fixed in guide rail fixing groove (not mentioned specific number), assuming that guide rail fixing groove is cooperatively installed and fixed on curved arm 8 with guide rail 6, and slide groove 7 is equipped in guide rail 6, to provide track for subsequent sliding of magnetic slide 5.

[0034] Meanwhile, industrial camera 2 is installed in slide groove 7 of guide rail 6 through magnetic slide 5, and magnetic slide 5 can slide in slide groove 7, to facilitate adjusting the position of camera. ESP remote module 3 is electrically connected with industrial camera 2, to realize wireless transmission function of image and data. Embedded filter 10 is installed on one side of industrial camera 2, to filter interference light and improve image quality. Meanwhile, at least two groups of heat dissipation fan 4 are installed in body 1, one group is used for heat dissipation for industrial camera 2, and another group is used for heat dissipation for the whole inside body 1. In addition, display screen 9 is installed on body 1 and electrically connected with industrial camera 2, to facilitate adjusting camera parameters.

[0035] In addition, start heat dissipation fan 4, to ensure that the device can effectively dissipate heat during operation, and guarantee stable operation of equipment. Turn on industrial camera 2, and adjust image parameters of industrial camera 2, such as resolution, exposure and contrast, through display screen 9 on body 1. After adjustment, industrial camera 2 starts to work, to shoot images of crystal growth process in the inside of crystal growing furnace, and image data is transmitted to remote centralized control system through ESP remote module 3, to realize remote real-time monitoring of crystal growth process in the inside of crystal growing furnace.

[0036] Specifically, in application, the display screen 9 installed on the machine body 1 is electrically connected with the industrial camera 2 to provide a graphical user interface 2. The user can directly debug the image parameters such as resolution, exposure, contrast, etc. of the industrial camera 2 on the display screen 9 through touch or button operation, without complex on-site operation, simplifying the debugging process and improving the operation efficiency.

[0037] In summary, by means of the above technical scheme of the utility model, the following effects can be achieved:

[0038] 1. The device realizes wireless image and data transmission between the industrial camera 2 and the remote centralized control system by means of the ESP remote module 3. This wireless transmission mode avoids the problems of signal attenuation and instability caused by the influence of high temperature on the traditional wire harness transmission. For example, in the high-temperature environment of a crystal growth furnace, the wire harness transmission is prone to signal interruption, but the device can stably transmit data. In addition, the ESP remote module 3 adopts Wi-Fi or Bluetooth protocol, ensuring the stability and anti-interference ability of data transmission, effectively improving the convenience and reliability of data transmission.

[0039] 2. By arranging at least two groups of cooling fans 4, one group directly cools the industrial camera 2, and the other group cools the whole inside of the machine body 1, forming a double air-cooled cooling system 5. This can effectively solve the problem of equipment overheating in a high-temperature environment, ensure stable operation of the equipment, and prolong the service life of the equipment. For example, the industrial camera continuously shoots at a high frequency, and the ESP remote module works uninterruptedly. The double air-cooled cooling system can timely take away heat to prevent the equipment from malfunctioning due to overheating.

[0040] 3. By the combined design of the guide rail 6, the magnetic sliding sheet 5, and the curved arm 8, multi-angle adjustment of the camera is realized. The magnetic sliding sheet 5 can slide in the guide rail 6, and the curved arm 8 is connected to the flange observation port at the end. The camera is installed at the bottom end of the machine body 1. By adjusting the position of the magnetic sliding sheet 5 on the guide rail 6 and the angle of the curved arm 8, the monitoring demand of different angles can be met, making the monitoring more comprehensive and flexible, and overcoming the defect of fixed angle of the traditional camera.

[0041] The above is only a preferred embodiment of the utility model, and does not limit the utility model. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the utility model shall be included in the protection scope of the utility model.

Claims

1. A vision device for a semiconductor crystal growth furnace, comprising: The utility model discloses a machine body (1) is characterized by being equipped with industrial camera (2), ESP remote module (3) and heat dissipation fan (4) in the machine body (1), ESP remote module (3) is electrically connected with industrial camera (2), and the bottom of machine body (1) is equipped with magnetic slide (5). The bottom of machine body (1) is equipped with guide rail (6), magnetic slide (5) slides in guide rail (6), and one side of guide rail (6) is equipped with curved arm (8), and the end of curved arm (8) is connected with flange observation port.

2. The image transmission vision device for a semiconductor crystal growing furnace according to claim 1, wherein Machine body (1) is equipped with display screen (9), and display screen (9) is electrically connected with industrial camera (2).

3. The apparatus according to claim 1, wherein the camera is arranged to capture images of the surface of the melt in the growth chamber. One side of industrial camera (2) is equipped with embedded optical filter (10).

4. The apparatus according to claim 1, wherein the apparatus is characterized by: The guide rail (6) is equipped with sliding groove (7), and the magnetic slide (5) slides in the sliding groove (7).

5. The apparatus according to claim 1, wherein the apparatus is used for a semiconductor crystal growth furnace. The heat dissipation fan (4) is at least two groups, one group of heat dissipation fan (4) is used for heat dissipation to industrial camera (2), and another group of heat dissipation fan (4) is used for the whole heat dissipation to the inside of machine body (1).

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