Silicon wafer caching device

Abstract

The utility model relates to the technical field of new energy silicon wafer manufacturing, and provides a silicon wafer temporary storage device. The power assembly comprises a driving device and a driving shaft, and the driving device provides power for rotation of the driving shaft; the lifting assembly comprises a lifting chain and a lifting plate, and the lifting chain drives the lifting plate to ascend or descend when the driving shaft rotates; the stock bin is connected to the lifting plate and moves synchronously with the lifting plate; the conveying line assembly comprises a warehouse-in conveying line and a warehouse-out conveying line, the warehouse-in conveying line is arranged on the feeding side of the rack, a warehouse-out conveying belt is arranged on the discharging side of the rack, the warehouse-in conveying line and the warehouse-out conveying line are each provided with a temporary storage assembly used for containing silicon wafers, and each temporary storage assembly comprises a jacking mechanism used for jacking the silicon wafers; the warehouse-in and warehouse-out assembly comprises a warehouse-in mechanism and a warehouse-out mechanism. According to the silicon wafer caching device, full-automatic production of the silicon wafers on the aspects of selection, classification and caching processes can be achieved, the automation degree is improved, the production efficiency is greatly improved, and the production cost is reduced.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of new energy silicon wafer manufacturing, in particular to a silicon wafer buffering device. BACKGROUND

[0002] In recent years, China's new energy technology has been developing, and energy industry has achieved a series of outstanding achievements. The solar photovoltaic technology belongs to one of the new energy technologies, which is a technology for converting solar energy into electricity directly by using solar cells. With the progress of modern process technology, the conversion efficiency of photovoltaic power generation will be improved year by year, and the market demand will be larger and larger, and higher requirements for the technology and quality of photovoltaic related products are put forward.

[0003] During the manufacturing process of the solar cell wafer, the silicon wafers manufactured in the previous process are stacked together according to certain rules, and after selection, classification and buffering, they are packed in the same packaging box according to certain rules. Generally, the silicon wafers packed in the same packaging box need to be the same specification and the same batch of products. Nowadays, the silicon wafer selection, classification and buffering technologies of the related silicon wafer manufacturers are mainly manual production, supplemented by part of the semi-automatic equipment, the automation degree is low, the production efficiency is limited, and the product quality is difficult to guarantee.

[0004] Therefore, the prior art still needs to be improved and developed. CONTENT OF THE INVENTION

[0005] The application aims to provide a silicon wafer buffering device which can effectively improve the production efficiency, reduce the production cost and guarantee the product quality.

[0006] To achieve the above-mentioned purpose, the technical scheme adopted by the application is as follows: a silicon wafer buffering device is provided, which comprises:

[0007] a rack;

[0008] a power assembly comprising a driving device arranged on the rack and a driving shaft connected in transmission with the driving device, the driving device providing power for the rotation of the driving shaft;

[0009] a lifting assembly comprising a lifting chain and a lifting plate, the lifting chain being connected in transmission between the driving shaft and the lifting plate, and the lifting chain driving the lifting plate to rise or fall when the driving shaft rotates;

[0010] a stock bin arranged in the rack and used for buffering the silicon wafers, the stock bin being connected with the lifting plate and moving synchronously with the lifting plate;

[0011] The conveying line assembly comprises an in-warehouse conveying line and an out-warehouse conveying line, the in-warehouse conveying line is arranged at the feeding side of the rack, the out-warehouse conveying line is arranged at the discharging side of the rack, and the in-warehouse conveying line and the out-warehouse conveying line are both provided with a buffer assembly for placing a silicon wafer, the buffer assembly comprises a jacking mechanism for jacking the silicon wafer.

[0012] The in-out warehouse assembly comprises an in-warehouse mechanism and an out-warehouse mechanism, the in-warehouse mechanism is connected to the in-warehouse conveying line and used for pushing the silicon wafer on the in-warehouse conveying line into the storage bin, and the out-warehouse mechanism is connected to the rack and used for pushing the silicon wafer in the storage bin onto the out-warehouse conveying line.

[0013] Further, the rack comprises a base frame, left and right frames arranged at both sides of the base frame, and an upper cross beam transversely connected to the top of the left and right frames, a panel is arranged between the base frame, the left and right frames, and the upper cross beam, and the panel surrounds to form a containing bin, and the storage bin is located in the containing bin.

[0014] Further, a linear guide rail extending along the lifting direction of the storage bin is arranged on the rack, and the lifting plate is in sliding fit with the linear guide rail.

[0015] In some embodiments, the bottom of the lifting plate is provided with a supporting plate protruding from the side surface of the lifting plate, the side surface of the lifting plate is used for abutting against the end surface of the storage bin, and the supporting plate is used for bearing the bottom surface of the storage bin.

[0016] Further, the driving device comprises a servo motor, a first sprocket is shaft-connected to the output shaft of the servo motor, a second sprocket is arranged on the driving shaft, and a synchronous chain is arranged between the first sprocket and the second sprocket.

[0017] In some embodiments, the in-warehouse conveying line and the out-warehouse conveying line both comprise a conveying frame body and a conveying belt arranged on the conveying frame body, and the buffer assembly is connected to the conveying belt.

[0018] Further, the jacking mechanism comprises a jacking plate, a jacking driving member, a photoelectric sensor connected to the jacking plate, a blocking plate, and a blocking driving member, the jacking driving member and the blocking driving member are arranged on the conveying frame body and located at the lower part of the conveying belt, the jacking driving member is used for driving the jacking plate to ascend and descend relative to the conveying belt, and the blocking driving member is used for driving the blocking plate to ascend and descend relative to the conveying belt.

[0019] In some embodiments, the cache assembly further comprises a carrier arranged on the conveyor belt, the carrier being used to cache the silicon wafer, the lifting plate abutting against the bottom of the carrier when lifted, the blocking plate abutting against the sidewall of the carrier when lifted, the carrier comprising a carrier plate and a blocking plate arranged circumferentially on the carrier plate, the top surface of the carrier plate being inclined to the horizontal plane by an angle a, 1°≤a≤10°, the top surface of the carrier plate being inclined towards the blocking plate.

[0020] Further, the warehouse-in mechanism comprises a warehouse-in mounting frame and a warehouse-in cylinder connected to the warehouse-in mounting frame, the warehouse-in mounting frame being connected to the warehouse-in conveying line, the warehouse-in cylinder being provided with a warehouse-in push rod.

[0021] The warehouse-out mechanism comprises a warehouse-out mounting frame and a warehouse-out cylinder connected to the warehouse-out mounting frame, the warehouse-out mounting frame being connected to the rack, the warehouse-out cylinder being provided with a warehouse-out push rod.

[0022] In some embodiments, the hopper comprises a plurality of warehouse bins formed by a hopper bottom plate, a hopper top plate, a hopper vertical plate and a hopper partition plate, the warehouse bin having a warehouse-in port and a warehouse-out port, the warehouse-in port being directed towards the warehouse-in conveying line, the warehouse-out port being directed towards the warehouse-out conveying line.

[0023] The silicon wafer cache device provided by the present application has at least the following beneficial effects: the silicon wafer cache device of the present application can replace manual work, realize full automation of the silicon wafer in the processes of picking, sorting and caching, facilitate the work of subsequent processes, effectively improve the degree of automation, greatly improve the production efficiency, reduce the production cost and ensure the product quality. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort.

[0025] Figure 1 A perspective view of the silicon wafer cache device provided by the present application;

[0026] Figure 2 A structural schematic view of the rack provided by the present application;

[0027] Figure 3 A structural schematic view of the driving device provided by the present application;

[0028] Figure 4 A structural schematic view of the lifting chain provided by the present application;

[0029] Figure 5 A structural schematic diagram of a conveying line assembly provided for an embodiment of the present application is shown in FIG. 1.

[0030] Figure 6 A structural schematic diagram of a jacking mechanism provided for an embodiment of the present application is shown in FIG. 2.

[0031] Figure 7 A structural schematic diagram of an in-warehouse mechanism and an out-warehouse mechanism provided for an embodiment of the present application is shown in FIG. 3.

[0032] Figure 8 A structural schematic diagram of a carrier provided for an embodiment of the present application is shown in FIG. 4.

[0033] Figure 9 A structural schematic diagram of a hopper provided for an embodiment of the present application is shown in FIG. 5.

[0034] In the drawings, various reference numerals refer to the following:

[0035] 1, frame; 11, undercarriage; 12, left frame; 13, right frame; 14, upper cross beam; 15, linear guide rail;

[0036] 2, driving device; 21, driving shaft; 22, first sprocket; 23, second sprocket; 24, synchronous chain;

[0037] 3, lifting chain; 31, lifting plate; 32, supporting plate;

[0038] 4, hopper; 41, hopper bottom plate; 42, hopper top plate; 43, hopper vertical plate; 44, hopper partition plate; 45, warehouse hopper;

[0039] 5, conveying line assembly; 51, in-warehouse conveying line; 52, out-warehouse conveying line; 53, conveying frame body; 54, conveying belt;

[0040] 6, buffer assembly; 61, jacking mechanism; 62, jacking plate; 63, jacking driving member; 64, photoelectric sensor; 65, blocking plate; 66, blocking driving member;

[0041] 7, in-warehouse mechanism; 71, in-warehouse mounting frame; 72, in-warehouse air cylinder; 73, in-warehouse push rod;

[0042] 8, out-warehouse mechanism; 81, out-warehouse mounting frame; 82, out-warehouse air cylinder; 83, out-warehouse push rod;

[0043] 9, carrier; 91, carrier plate; 92, blocking plate. DETAILED DESCRIPTION

[0044] In order to make the technical problems, technical solutions and beneficial effects of the present application clearer, the present application will be further described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0045] It should be noted that when a component is referred to as being "fixed to" or "set to" another component, it can be directly or indirectly on the other component. When a component is referred to as being "connected to" another component, it can be directly or indirectly connected to the other component. The terms "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate the orientation or position based on the orientation or position shown in the drawings, and are only for the convenience of description, and cannot be understood as a limitation on the technical solutions. The terms "first", "second" are only for the convenience of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. The meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0046] The silicon wafer buffering device of the embodiment of the present application will be described below in conjunction with the drawings.

[0047] Please refer to Figure 1 , Figure 1 A perspective view of the silicon wafer buffering device of the present application is shown.

[0048] The buffering device of the silicon wafer includes a rack 1, a power assembly, a lifting assembly, a bin 4, a conveying line assembly 5, and an in-out warehouse assembly. The power assembly is arranged on the rack 1 and is used to provide lifting power for the lifting assembly. The lifting assembly is used to drive the bin 4 to lift. The conveying line assembly 5 is used to convey the silicon wafer. The in-out warehouse assembly is used to push the silicon wafer on the conveying line assembly 5 into the bin 4, or push the silicon wafer in the bin 4 onto the conveying line assembly 5.

[0049] Specifically, the power assembly includes a driving device 2 arranged on the rack 1 and a driving shaft 21 drivingly connected to the driving device 2. The driving device 2 provides power for the rotation of the driving shaft 21. The lifting assembly includes a lifting chain 3 and a lifting plate 31. The lifting chain 3 is drivingly connected between the driving shaft 21 and the lifting plate 31. The lifting chain 3 drives the lifting plate 31 to rise or fall when the driving shaft 21 rotates.

[0050] The bin 4 is arranged in the rack 1 and is used to buffer the silicon wafer. The bin 4 is connected to the lifting plate 31 and moves synchronously with the lifting plate 31. The conveying line assembly 5 includes an in-warehouse conveying line 51 and an out-warehouse conveying line 52. The in-warehouse conveying line 51 is arranged on the feeding side of the rack 1, and the out-warehouse conveying line is arranged on the discharging side of the rack 1. The in-warehouse conveying line 51 and the out-warehouse conveying line 52 are both provided with a buffering assembly 6 for placing the silicon wafer. The buffering assembly 6 includes a jacking mechanism 61 for jacking the silicon wafer.

[0051] The in-and-out warehouse assembly includes an in-warehouse mechanism 7 and an out-warehouse mechanism 8. The in-warehouse mechanism 7 is connected to the in-warehouse conveying line 51 and used to push the silicon wafer on the in-warehouse conveying line 51 into the warehouse 4. The out-warehouse mechanism 8 is connected to the rack 1 and used to push the silicon wafer in the warehouse 4 onto the out-warehouse conveying line 52.

[0052] The working principle of the present application is as follows:

[0053] When the silicon wafer needs to be put into the warehouse 4, the silicon wafer is put into the buffer assembly 6, and the buffer assembly 6 is transferred on the in-warehouse conveying line 51 located at the in-feed end of the rack 1. The driving device 2 is started, and the warehouse 4 is lifted to the position corresponding to the in-warehouse conveying line 51 by the lifting device. When the buffer assembly 6 on the in-warehouse conveying line 51 is moved to the warehouse 4, the buffer assembly 6 is lifted by the jacking cylinder, and at this time, the buffer assembly 6 is aligned with the warehouse 4. At the same time, the in-warehouse mechanism 7 pushes the silicon wafer on the in-warehouse conveying line 51 into the warehouse 4.

[0054] When the silicon wafer needs to be taken out from the warehouse 4, the buffer assembly 6 is also transferred on the out-warehouse conveying line 52 located at the out-feed end of the rack 1. The driving device 2 is started, and the warehouse 4 is lifted to the position corresponding to the out-warehouse conveying line 52 by the lifting device. The out-warehouse mechanism 8 pushes the silicon wafer in the warehouse 4 onto the buffer assembly 6 on the out-warehouse conveying line 52.

[0055] The silicon wafer buffer device of the present application can replace manual work, realize full-automatic production of the silicon wafer in the selection, classification and buffer processes, facilitate the work of the subsequent processes, effectively improve the degree of automation, greatly improve the production efficiency, reduce the production cost and ensure the product quality.

[0056] In some embodiments, referring to Figure 1 and Figure 2 The rack 1 includes a base frame 11, left and right frames 12 and 13 arranged on both sides of the base frame 11, and an upper cross beam 14 transversely connected to the top of the left and right frames 12 and 13. The entire rack 1 is constructed as a cuboid support frame, which ensures that each frame body can be connected with the other two frame bodies to improve the overall strength of the rack 1.

[0057] Further, a panel (not shown in the figure) is arranged between the base frame 11, the left and right frames 12 and 13 and the upper cross beam 14. The panel surrounds to form a containing space, and the warehouse 4 is located in the containing space. The panel can further improve the structural strength of the rack 1 and can also close the rack 1 to protect the devices in the rack 1 and the silicon wafer.

[0058] It can be understood that the lifting plate 31 is provided with lifting power by the power assembly and moves through the lifting chain 3 as a transmission medium. In order to improve the stability and direction accuracy of the warehouse 4 during lifting, referring toFigure 2 and Figure 3 The rack 1 is provided with a linear guide rail 15 extending along the lifting direction of the hopper 4, and the lifting plate 31 is in sliding fit with the linear guide rail 15.

[0059] When the hopper 4 is lifted under the traction of the lifting chain 3, the linear guide rail 15 can provide directional guidance for the hopper 4, so as to prevent the hopper 4 from tilting during lifting, improve the stability of the hopper 4, and reduce the risk of the silicon wafers falling in the hopper 4 during lifting.

[0060] Further, the lifting plate 31 is provided with a sliding groove in sliding fit with the linear guide rail 15. The extension direction of the linear guide rail 15 is the same as the lifting direction of the hopper 4, and in the embodiment, the lifting direction of the hopper 4 is the vertical direction.

[0061] In some embodiments, referring to Figure 1 and Figure 4 The bottom of the lifting plate 31 is provided with a supporting plate 32 protruding from the side surface of the lifting plate 31, and the side surface of the lifting plate 31 is used to abut against the end surface of the hopper 4, and the supporting plate 32 is used to support the bottom surface of the hopper 4.

[0062] The lifting plate 31 is fixedly positioned with the end surface of the hopper 4 by clamping, and the power assembly and the lifting assembly are a set of lifting devices, and one set of lifting devices is arranged on each of the left frame 12 and the right frame 13. The hopper 4 is arranged between the left frame 12 and the right frame 13, that is, the left and right end surfaces of the hopper 4 are connected with the lifting plate 31, so as to more stably lift the hopper 4.

[0063] Further, the two groups of lifting plates 31 correspond to the left end surface and the right end surface of the hopper 4, respectively, and the bottom surfaces of the left and right ends of the hopper 4 are supported by the supporting plates 32 on the two groups of lifting plates 31. When the lifting plate 31 rises, the hopper 4 can be lifted and driven to rise synchronously by the lifting plate 31 and the supporting plate 32.

[0064] In some embodiments, referring to Figure 1 and Figure 3 The driving device 2 comprises a servo motor, a first sprocket 22 is shaft-connected to the output shaft of the servo motor, a second sprocket 23 is arranged on the driving shaft 21, and a synchronous chain 24 is arranged between the first sprocket 22 and the second sprocket 23.

[0065] After the servo motor is started, the output shaft rotates and drives the first sprocket 22 to rotate synchronously, the first sprocket 22 drives the second sprocket 23 to rotate synchronously through the synchronous chain 24, the second sprocket 23 drives the lifting chain 3 to rotate synchronously, and the lifting chain 3 drives the lifting plate 31 to rise or fall when rotating.

[0066] In some embodiments, referring to Figure 1And Figure 5 The in-warehouse conveying line 51 and the out-warehouse conveying line 52 each comprise a conveying frame 53 and a conveying belt 54 arranged on the conveying frame 53, and the buffer assembly 6 is connected to the conveying belt 54.

[0067] Further, referring to Figure 1 And Figure 6 The jacking mechanism 61 comprises a jacking plate 62, a jacking drive 63, a photoelectric sensor 64 connected to the jacking plate 62, a blocking plate 65 and a blocking drive 66, the jacking drive 63 and the blocking drive 66 are arranged on the conveying frame 53 and located below the conveying belt 54, the jacking drive 63 is used to drive the jacking plate 62 to rise and fall relative to the conveying belt 54, and the blocking drive 66 is used to drive the blocking plate 65 to rise and fall relative to the conveying belt 54.

[0068] Further, referring to Figure 1 And Figure 8 The buffer assembly 8 further comprises a carrier 9 arranged on the conveying belt 54, the carrier 9 is used to buffer the silicon wafer, the jacking plate 62 abuts against the bottom of the carrier 9 when it is raised, the blocking plate 65 abuts against the sidewall of the carrier 9 when it is raised, and the carrier 9 comprises a carrier plate 91 and a blocking plate 92 arranged circumferentially on the carrier plate 91, the top surface of the carrier plate 91 has an inclination angle α with the horizontal plane, 1°≤α≤10°, and the top surface of the carrier plate 91 is inclined towards the blocking plate 92.

[0069] The carrier 9 is placed on the in-warehouse conveying line 51 and flows, and since the top surface of the carrier 9 has the inclination angle α with the horizontal plane, the silicon wafer placed on the carrier 9 presents an inclined angle on the conveying line, and under the action of gravity, the silicon wafer can run stably on the conveying line during transfer and will not be dislocated or dropped.

[0070] In some embodiments, referring to Figure 1 And Figure 7 The in-warehouse mechanism 7 comprises an in-warehouse mounting frame 71 and an in-warehouse cylinder 72 connected to the in-warehouse mounting frame 71, the in-warehouse mounting frame 71 is connected to the in-warehouse conveying line, and the in-warehouse cylinder 72 is provided with an in-warehouse push rod 73; and the out-warehouse mechanism 8 comprises an out-warehouse mounting frame 81 and an out-warehouse cylinder 82 connected to the out-warehouse mounting frame 81, the out-warehouse mounting frame 81 is connected to the rack 1, and the out-warehouse cylinder 82 is provided with an out-warehouse push rod 83.

[0071] Further, referring to Figure 1 And Figure 9 The hopper 4 comprises a plurality of warehouse bins 45 formed by a hopper bottom plate 41, a hopper top plate 42, a hopper upright plate 43 and a hopper partition plate 44, the warehouse bin 45 has an in-warehouse opening and an out-warehouse opening, the in-warehouse opening faces the in-warehouse conveying line 51, and the out-warehouse opening faces the out-warehouse conveying line 52.

[0072] Exemplarily, the silicon wafer caching device of the present application can realize automatic caching of stacked silicon wafers with thickness of 18-26 mm and length and width size of 180-230 mm, and automatic delivery after selection and classification, meeting the requirements of subsequent processes. The silicon wafers of certain rules are loaded in the same storage bin 45, and the device can realize full automation of this part of the process.

[0073] When the silicon wafer is stored, after the carrier 9 is sensed by the photoelectric sensor 64, exemplarily, the effective sensing distance of the photoelectric switch connected with the photoelectric sensor 64 is 20-200 mm, the blocking drive 66 is extended by 25 mm and blocks the carrier 9 through the blocking plate 65, and then the jacking drive 63 is extended by 30 mm to jack up the carrier 9, at this time the carrier 9 is aligned with the storage bin 4 inlet position.

[0074] Then the inlet cylinder 72 is extended by 300 mm, the carrier 9 is pushed into the storage bin 4 through the inlet push rod 73, the driving device 2 drives the lifting chain 3 to rotate and ascend by a distance of 77 mm, i.e. a storage position, and waits for the next feeding;

[0075] This cycle is repeated several times until the storage bin 45 is fully stored.

[0076] Among them, according to the silicon wafer information of the front-end device, the silicon wafers of the same type and the same batch are delivered, and the device action is the same as the storage when the silicon wafers are delivered, until all the carriers 9 in the storage are delivered.

[0077] The above only describes the preferred embodiments of the present application and does not limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A silicon wafer caching device, comprising: The utility model relates to a kind of automatic silicon wafer warehouse, including: Rack; Power assembly, including drive device arranged on the rack and driving shaft connected on the drive device, the drive device provides power for the rotation of the driving shaft; Lifting assembly, including lifting chain and lifting plate, the lifting chain is drivingly connected between the driving shaft and the lifting plate, the lifting chain drives the lifting plate to ascend or descend when the driving shaft rotates; Bin, arranged in the rack, for caching silicon wafer, the bin is connected on the lifting plate and moves synchronously with the lifting plate; Conveying line assembly, including warehouse-in conveying line and warehouse-out conveying line, the warehouse-in conveying line is arranged on the material inlet side of the rack, the warehouse-out conveying line is arranged on the material outlet side of the rack, the warehouse-in conveying line and the warehouse-out conveying line are equipped with caching assembly for placing silicon wafer, the caching assembly includes jacking mechanism for jacking the silicon wafer; In-out warehouse assembly, including warehouse-in mechanism and warehouse-out mechanism, the warehouse-in mechanism is connected on the warehouse-in conveying line, for pushing the silicon wafer on the warehouse-in conveying line into the bin, the warehouse-out mechanism is connected on the rack, for pushing the silicon wafer in the bin to the warehouse-out conveying line.

2. The silicon wafer cache device of claim 1, wherein, The rack includes a chassis, left and right frames disposed on both sides of the chassis, and an upper crossbeam transversely connected to the top of the left and right frames. A panel is disposed between the chassis, the left frame, the right frame, and the upper crossbeam. The panel encloses a receiving bin, and the bin is located in the receiving bin.

3. The silicon wafer cache device of claim 1, wherein, The rack is provided with a linear guide rail extending along the lifting direction of the bin. The lifting plate is in sliding cooperation with the linear guide rail.

4. The silicon wafer cache device of claim 1, wherein, The bottom of the lifting plate is provided with a supporting plate protruding from the side surface of the lifting plate. The side surface of the lifting plate is used to abut against the end surface of the bin, and the supporting plate is used to support the bottom surface of the bin.

5. The silicon wafer cache device of claim 1, wherein, The drive device includes a servo motor. A first sprocket is connected to the output shaft of the servo motor. A second sprocket is provided on the driving shaft. A synchronous chain is provided between the first sprocket and the second sprocket.

6. The silicon wafer cache device of claim 1, wherein, The warehouse-in conveying line and the warehouse-out conveying line each include a conveying frame body and a conveying belt provided on the conveying frame body. The caching assembly is connected to the conveying belt.

7. The silicon wafer cache device of claim 6, wherein, The jacking mechanism includes a jacking plate, a jacking drive, a photoelectric sensor connected to the jacking plate, a blocking plate, and a blocking drive. The jacking drive and the blocking drive are provided on the conveying frame body and located below the conveying belt. The jacking drive is used to drive the jacking plate to ascend and descend relative to the conveying belt. The blocking drive is used to drive the blocking plate to ascend and descend relative to the conveying belt.

8. The silicon wafer cache device of claim 7, wherein, The caching assembly further includes a carrier provided on the conveying belt. The carrier is used to cache silicon wafers. The jacking plate abuts against the bottom of the carrier when it is raised. The blocking plate abuts against the sidewall of the carrier when it is raised. The carrier includes a carrier plate and a blocking plate provided circumferentially on the carrier plate. The top surface of the carrier plate has an inclination angle α of 1° to 10° with respect to the horizontal plane. The top surface of the carrier plate is inclined towards the blocking plate.

9. The silicon wafer cache device of claim 1, wherein, The warehouse-in mechanism comprises a warehouse-in mounting frame and a warehouse-in cylinder connected to the warehouse-in mounting frame, the warehouse-in mounting frame is connected to the warehouse-in conveying line, and the warehouse-in cylinder is provided with a warehouse-in push rod. The warehouse-out mechanism comprises a warehouse-out mounting frame and a warehouse-out cylinder connected to the warehouse-out mounting frame, the warehouse-out mounting frame is connected to the rack, and the warehouse-out cylinder is provided with a warehouse-out push rod.

10. The silicon wafer cache device of claim 1, wherein, The stock bin comprises a plurality of stock bins formed by a stock bin bottom plate, a stock bin top plate, a stock bin vertical plate and a stock bin partition plate, the stock bin has a warehouse-in port and a warehouse-out port, the warehouse-in port faces the warehouse-in conveying line, and the warehouse-out port faces the warehouse-out conveying line.

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