Ultrasonic vibration device for rotating bed type PEALD

Abstract

The utility model provides an ultrasonic vibration device for revolving bed type PEALD, including: conductive slip ring, vibration module, reaction chamber and signal generator, the reaction chamber is provided in the casing of revolving bed type PEALD device, vibration module is provided in the bottom of reaction chamber and with signal generator electrical connection, and the signal generator is provided with the conductive slip ring. The conductive slip ring comprises a conductive slip ring rotor and a conductive slip ring stator, the conductive slip ring stator is fixedly connected with a shell of the rotating bed type PEALD device and electrically connected with the signal generator, and the conductive slip ring rotor is fixedly arranged on the periphery of the reaction cavity and rotates along with the reaction cavity. According to the rotating bed PEALD equipment, the problem of particle aggregation of powder materials in the PEALD reaction process is solved, powder bonding of the rotating bed PEALD equipment is reduced, and the powder particle treatment efficiency and the coating generation quality are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of plasma, especially relates to an ultrasonic vibration device for rotary bed type PEALD. BACKGROUND

[0002] Powder materials have high specific surface area, easy to be formed and processed, and are widely used in many frontier industries. The common atomic layer deposition (ALD) and other technologies on the market can process powder materials, greatly improve the performance of powder materials, but also have problems of long deposition period, high production cost and difficulty in ensuring uniform coating coverage. As an extension of ALD technology, plasma enhanced atomic layer deposition (PEALD) introduces high activity radicals and ions generated by plasma, which not only enables the precursor reaction to be carried out efficiently at low temperature, but also allows atomic layer deposition to realize atomic-level precision film growth on the surface of powder particles due to the self-limiting reaction mechanism of atomic layer deposition, and accurately controls the thickness, composition and structure of the coating.

[0003] The existing plasma enhanced atomic layer deposition equipment mainly uses fluidized bed, vibrating bed and rotary bed structures for the reaction chamber, among which the horizontal axis rotary bed structure is widely used in gas-liquid, liquid-liquid, gas-liquid-solid, gas-solid and other reaction processes, which can mix the powder particles to a certain extent. However, the current research shows that this structure still cannot make the powder particles fully participate in the PEALD reaction. On the one hand, the van der Waals force between the powder particles and the liquid bridge force caused by the water on the particle surface will cause serious agglomeration, leading to poor powder dispersibility, and the gas cannot be fully diffused and mass transferred, resulting in low powder particle processing efficiency. On the other hand, there is a "dead zone" in the reaction chamber of the horizontal axis rotary bed, and the precursor cannot fully contact the surface of each particle, which is not conducive to the uniform growth of the coating on the surface of all powder particles, affecting the quality of the coating. SUMMARY

[0004] The main purpose of the utility model is to provide an ultrasonic vibration device for rotary bed type PEALD, which aims to improve the problem of powder particle agglomeration in the PEALD reaction process, reduce the powder adhesion of the rotary bed PEALD equipment, improve the powder particle processing efficiency and the quality of the coating.

[0005] In order to achieve the above object, the utility model provides a kind of ultrasonic vibration device for rotary bed type PEALD, comprising: conductive slip ring, vibration module, reaction cavity and signal generator, the reaction cavity is arranged in the shell of rotary bed type PEALD device, the vibration module is arranged at the bottom of the reaction cavity, with the signal generator electrically connected, the conductive slip ring includes conductive slip ring rotor and conductive slip ring stator, the conductive slip ring stator is fixedly connected with the shell of the rotary bed type PEALD device, and is electrically connected with the signal generator, the conductive slip ring rotor is fixedly arranged on the outer periphery of the reaction cavity, and rotates with the reaction cavity.

[0006] The utility model further technical scheme is, the vibration module includes ultrasonic transducer and vibration head, the vibration head is arranged at the bottom of the reaction cavity, and the ultrasonic transducer is electrically connected with the conductive slip ring rotor.

[0007] The utility model further technical scheme is, further include the fixed ring for being fixed with the ultrasonic transducer and the vibration head on the reaction cavity.

[0008] The utility model further technical scheme is, the fixed ring includes first semicircular fixed ring and second semicircular fixed ring, and the first semicircular fixed ring and the second semicircular fixed ring are detachably connected by bolt.

[0009] The utility model for rotary bed type PEALD's ultrasonic vibration device has the beneficial effects that:

[0010] The utility model through above-mentioned technical scheme, including: conductive slip ring, vibration module, reaction cavity and signal generator, the reaction cavity is arranged in the shell of rotary bed type PEALD device, the vibration module is arranged at the bottom of the reaction cavity, with the signal generator electrically connected, the conductive slip ring includes conductive slip ring rotor and conductive slip ring stator, the conductive slip ring stator is fixedly connected with the shell of the rotary bed type PEALD device, and is electrically connected with the signal generator, the conductive slip ring rotor is fixedly arranged on the outer periphery of the reaction cavity, and rotates with the reaction cavity, improve the problem of particle agglomeration of powder material in the PEALD reaction process, reduce the powder bonding of rotary bed PEALD equipment, improve powder particle processing efficiency and coating generation quality. ACCURACY OF DRAWINGS

[0011] Figure 1 It is the front view of the rotary bed type PEALD device related to the ultrasonic vibration device for rotary bed type PEALD of the utility model;

[0012] Figure 2 It is the side view of the rotary bed type PEALD device related to the ultrasonic vibration device for rotary bed type PEALD of the utility model;

[0013] Figure 3 is Figure 2 a sectional view in A-A direction;

[0014] Figure 4 is a structural schematic view of the ultrasonic vibration device for the rotating bed type PEALD of the utility model;

[0015] Figure 5 is a sectional view of the ultrasonic vibration device for the rotating bed type PEALD of the utility model;

[0016] Figure 6 is an exploded structural schematic view of the ultrasonic vibration device for the rotating bed type PEALD of the utility model.

[0017] Explanation of the attached drawing:

[0018] Conductive slip ring stator 1, conductive slip ring rotor 2, first semicircular fixed ring 3, second semicircular fixed ring 4, vibration head 5, ultrasonic transducer 6, PEALD device shell 7, reaction cavity 8, signal generator 9.

[0019] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the following will be further detailed with the attached drawings and examples. Specific implementation

[0020] It should be understood that the specific embodiments described herein are only used to explain the utility model, and are not used to limit the utility model.

[0021] The utility model discloses an ultrasonic vibration device for rotating bed type PEALD, the technical scheme mainly introduced an ultrasonic vibration module is used in the utility model, realizes the dynamic mixing and dispersion of particle in reaction through ultrasonic vibration and rotation, reduces the adverse effect of particle agglomeration and " dead zone " to the growth of coating, promotes the diffusion and mass transfer of precursor in reaction cavity, improves atomic layer deposition quality.

[0022] Specifically, please refer to Figures 1 to 6 The utility model discloses an ultrasonic vibration device for rotating bed type PEALD preferable embodiment including conductive slip ring, vibration module, reaction cavity 8 and signal generator 9, the reaction cavity 8 is arranged in the shell 7 of rotating bed type PEALD device, the vibration module is arranged at the bottom of reaction cavity 8, and is electrically connected with signal generator 9, the conductive slip ring includes conductive slip ring rotor 2 and conductive slip ring stator 1, the conductive slip ring stator 1 is fixedly connected with the shell 7 of rotating bed type PEALD device, and is electrically connected with signal generator 9, the conductive slip ring rotor 2 is fixedly arranged at the outer periphery of reaction cavity 8, and rotates with reaction cavity 8.

[0023] In the embodiment, the vibration module comprises an ultrasonic transducer 6 and a vibrating head 5, the vibrating head 5 is arranged at the bottom of the reaction cavity 8, and the ultrasonic transducer 6 is electrically connected with the conductive slip ring rotor 2.

[0024] In the embodiment, the ultrasonic vibration device for the rotating bed type PEALD further comprises a fixing ring for fixing the ultrasonic transducer 6 and the vibrating head 5 on the reaction cavity 8.

[0025] In the embodiment, the fixing ring comprises a first semicircular fixing ring 3 and a second semicircular fixing ring 4, and the first semicircular fixing ring 3 and the second semicircular fixing ring 4 are detachably connected through bolts.

[0026] The structure and working principle of the ultrasonic vibration device for the rotating bed type PEALD of the utility model will be further described below. Figures 1 to 6 The structure and working principle of the ultrasonic vibration device for the rotating bed type PEALD of the utility model will be further described below.

[0027] In the ultrasonic vibration device for the rotating bed type PEALD, the signal generator 9 is installed outside the rotating bed type PEALD device, connected with a power supply, and connected to the conductive slip ring stator 1 through wires.

[0028] The conductive slip ring is composed of the conductive slip ring stator 1 and the conductive slip ring rotor 2, wherein the conductive slip ring stator 1 is fixed on the shell 7 of the rotating bed type PEALD device and does not rotate, and is connected with the signal generator 9 through wires.

[0029] The conductive slip ring rotor 2 is fixed on the outer surface of the reaction cavity 8 and rotates with the reaction cavity 8, and is connected with the ultrasonic transducer 6 through wires. The conductive slip ring can transmit signals and energy from the signal generator 9 to the ultrasonic transducer 6, and avoid the wires from being wound when the reaction cavity 8 rotates.

[0030] The vibration module is composed of the metal vibrating head 5 and the ultrasonic transducer 6, and is fixed on the outer surface of the reaction cavity 8 by the first semicircular fixing ring 3 and the second semicircular fixing ring 4. Among them, the metal vibrating head 5 is directly welded to the outer surface of the reaction cavity 8 and closely contacts, the first semicircular fixing ring 3 and the second semicircular fixing ring 4 are connected by bolts to form a fixing ring, and are fixed on the reaction cavity 8 by bolts, so as to constrain the ultrasonic transducer 6 outside the metal vibrating head 5 and rotate with the reaction cavity 8.

[0031] In operation, the signal generator 9 sends high frequency signals to the ultrasonic transducer 6 through the wire and the conductive slip ring, the ultrasonic transducer 6 converts the electric energy into mechanical energy (i.e. ultrasonic waves) through piezoelectric effect, the ultrasonic waves are transmitted to the reaction cavity 8 through the metal vibrating head 5, and then the vibration of the powder particles is caused, the powder particles are prevented from caking, the powder particles are fully dispersed and mixed in the reaction cavity 8, and the coating quality is improved.

[0032] In conclusion, the ultrasonic vibration device for the rotating bed type PEALD has the following advantages:

[0033] The conductive slip ring includes a conductive slip ring rotor and a conductive slip ring stator, the conductive slip ring stator is fixedly connected with the shell of the rotating bed type PEALD device and electrically connected with the signal generator, and the conductive slip ring rotor is fixedly arranged on the outer periphery of the reaction cavity and rotates with the reaction cavity, the problem of particle agglomeration of the powder material in the PEALD reaction process is solved, the powder caking of the rotating bed PEALD equipment is reduced, and the powder particle processing efficiency and the coating generation quality are improved.

[0034] The above only describes the preferred embodiments of the utility model, and does not limit the patent range of the utility model, and any equivalent structure or process conversion or direct or indirect application in other related technical fields by using the contents of the utility model specification and drawings are also included in the patent protection range of the utility model.

Claims

1. An ultrasonic vibration device for a rotary bed PEALD, characterized in that, The application relates to a rotating-bed PEALD device, which comprises a conductive slip ring, a vibration module, a reaction cavity and a signal generator. The reaction cavity is arranged in the shell of the rotating-bed PEALD device, the vibration module is arranged at the bottom of the reaction cavity and is electrically connected with the signal generator, the conductive slip ring comprises a conductive slip ring rotor and a conductive slip ring stator, the conductive slip ring stator is fixedly connected with the shell of the rotating-bed PEALD device and is electrically connected with the signal generator, and the conductive slip ring rotor is fixedly arranged on the outer periphery of the reaction cavity and rotates with the reaction cavity.

2. The ultrasonic vibration device for a rotary bed PEALD according to claim 1, characterized by, The vibration module comprises an ultrasonic transducer and a vibration head, the vibration head is arranged at the bottom of the reaction cavity, and the ultrasonic transducer is electrically connected with the conductive slip ring rotor.

3. The ultrasonic vibration device for a rotary bed PEALD according to claim 2, characterized in that, The application further relates to a fixing ring used for fixing the ultrasonic transducer and the vibration head on the reaction cavity.

4. The ultrasonic vibration device for a rotary bed PEALD according to claim 3, characterized by, The fixing ring comprises a first semicircular fixing ring and a second semicircular fixing ring, and the first semicircular fixing ring and the second semicircular fixing ring are detachably connected through bolts.

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