Semiconductor silicon single crystal rod cleaning equipment

Abstract

The utility model relates to the technical field of cleaning equipment, in particular to semiconductor silicon single crystal rod cleaning equipment which comprises a cleaning machine body, a discharging structure is installed on the cleaning machine body, two guide rails are fixedly connected to the side wall of the cleaning machine body, and the interiors of the two guide rails are both connected with a driving frame in a sliding mode. A tray is fixedly connected between the two driving frames, a storage disc is clamped on the tray, and the tray and the storage disc are obliquely arranged, so that the cleaned single crystal silicon rods automatically slide into the storage disc from the discharge port of the cleaning machine body; the driving frame drives the storage disc to slide downwards along the inner wall of the guide rail until the upper surface of the bottommost layer of single crystal silicon rods is flush with the discharging port of the cleaning machine body and the storage disc is full of the single crystal silicon rods, at the moment, automatic discharging of the single crystal silicon rods is rapidly achieved, and the operation efficiency is high.

Description

Technical Field

[0001] This utility model relates to a single-crystal silicon rod cleaning device, specifically a semiconductor single-crystal silicon rod cleaning device, and belongs to the technical field of cleaning equipment. Background Technology

[0002] A single crystal silicon rod is a silicon single crystal rod made through a specific process. The production of single crystal silicon rods requires steps such as feeding, melting, cooling, and cutting. During the processing of single crystal silicon rods, in order to remove impurities, improve surface properties, and improve the accuracy of subsequent processing and product quality, a cleaning device is often used to remove impurities, oil stains, metal ions and other contaminants from the surface of the single crystal silicon rod.

[0003] However, traditional cleaning equipment often involves transporting monocrystalline silicon rods into the cleaning machine and spraying cleaning fluid onto the surface of the rods at a certain pressure and angle through multiple nozzles. The chemical action of the cleaning fluid and the mechanical impact of the spray remove impurities, oil, metal ions, and other contaminants from the surface of the monocrystalline silicon rods. After the monocrystalline silicon rods are cleaned and dried, they are transported to the end of the cleaning machine and then manually carried one by one to a storage basket. However, because the operating platform of the cleaning machine is quite high off the ground, it is inconvenient for operators to pick them up, resulting in low operating efficiency and poor flexibility. Utility Model Content

[0004] The purpose of this invention is to provide a semiconductor single crystal silicon rod cleaning device to solve the above problems. The device uses a motor to drive the storage disk to rise and fall, ensuring that the storage disk is always flush with the discharge port of the cleaning machine body. At the same time, the storage disk is tilted, which facilitates the sliding of the cleaned single crystal silicon rod into the storage disk, thereby improving the feeding speed of the single crystal silicon rod and making it highly practical.

[0005] This utility model achieves the above-mentioned objective through the following technical solution: a semiconductor single crystal silicon rod cleaning device, including a cleaning machine body, a feeding structure installed on the cleaning machine body, the feeding structure including guide rails, two guide rails fixedly connected to the side wall of the cleaning machine body, a drive frame slidably connected inside each of the two guide rails, a tray fixedly connected between the two drive frames, a storage disk engaged on the tray, and a drive structure cooperating between the two drive frames.

[0006] Preferably, a guide rod is fixedly connected inside the guide rail, and the drive frame is slidably connected to the guide rod.

[0007] Preferably, a handle is fixedly connected to both sides of the storage disk, and the storage disk is tilted.

[0008] Preferably, the two guide rails are arranged symmetrically, and the drive frame has an "L" shaped structure.

[0009] Preferably, the drive structure includes a mounting plate, a mounting plate is fixedly connected to the side of the cleaning machine body near the guide rail, a motor is fixedly connected to the mounting plate, a lead screw is fixedly connected to the output shaft of the motor, a connecting plate is fixedly connected between the two drive frames, and the lead screw and the connecting plate are threaded together.

[0010] Preferably, the mounting plate has an "L" shaped structure, and a guide structure is provided above the connecting plate.

[0011] Preferably, the storage disk is equipped with an opening and closing structure, the opening and closing structure includes a side plate, the end of the storage disk is slidably connected to the side plate, both ends of the side plate are fixedly connected to a first connecting block, both sides of the storage disk are fixedly connected to a second connecting block, the bottom surface of the first connecting block is fixedly connected to a connecting rod, the connecting rod is slidably connected to the second connecting block, and a spring is fixedly connected between the first connecting block and the second connecting block.

[0012] Preferably, the guide structure includes a mounting base, and two mounting bases are provided above the drive frame. The mounting bases are fixedly connected to the cleaning machine body, and a guide roller is rotatably connected between the two mounting bases.

[0013] Preferably, a protective structure is installed on the cleaning machine body, the protective structure includes protective doors, multiple protective doors are fixedly connected to the side wall of the cleaning machine body, a glass plate is fixedly connected to the center of the protective door, a support frame is fixedly connected to the bottom of the cleaning machine body, and a water tank is fixedly connected to the support frame.

[0014] The beneficial effects of this utility model are as follows: A feeding structure is installed on the main body of the cleaning machine. Two guide rails are fixedly connected to the side wall of the main body of the cleaning machine. A drive frame is slidably connected inside each of the two guide rails. A tray is fixedly connected between the two drive frames. A storage tray is engaged on the tray. Since the bottom surface of the internal space of the storage tray is flush with the discharge port of the main body of the cleaning machine, and the tray and storage tray are inclined, the cleaned monocrystalline silicon rods automatically slide from the discharge port of the main body of the cleaning machine into the inside of the storage tray. When the bottom layer of the storage tray is full of monocrystalline silicon rods, the drive frame drives the storage tray to slide down along the inner wall of the guide rail until the upper surface of the bottom layer of monocrystalline silicon rods is flush with the discharge port of the main body of the cleaning machine. This facilitates the subsequent accumulation of cleaned monocrystalline silicon rods inside the storage tray until the storage tray is full of monocrystalline silicon rods. At this point, the automatic feeding of monocrystalline silicon rods is quickly achieved, resulting in high operating efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 for Figure 1 The diagram shown is an enlarged view of the structure of part A.

[0017] Figure 3 This is a schematic diagram of the connection structure between the feeding structure and the driving structure of this utility model;

[0018] Figure 4 This is a schematic diagram of the connection structure between the drive frame and the tray of this utility model.

[0019] In the diagram: 1. Cleaning machine body; 2. Protective structure; 201. Protective door; 202. Glass plate; 203. Support frame; 3. Feeding structure; 301. Guide rail; 302. Guide rod; 303. Drive frame; 304. Tray; 305. Storage tray; 306. Handle; 4. Opening and closing structure; 401. Side plate; 402. First connecting block; 403. Connecting rod; 404. Second connecting block; 405. Spring; 5. Drive structure; 501. Mounting plate; 502. Motor; 503. Lead screw; 504. Connecting plate; 6. Guide structure; 601. Mounting base; 602. Guide roller; 7. Water tank. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figure 1-4As shown, a semiconductor single crystal silicon rod cleaning equipment includes a cleaning machine body 1. A feeding structure 3 is installed on the cleaning machine body 1. The feeding structure 3 includes guide rails 301. Two guide rails 301 are fixedly connected to the side wall of the cleaning machine body 1. A drive frame 303 is slidably connected inside each of the two guide rails 301. A tray 304 is fixedly connected between the two drive frames 303. A storage disk 305 is engaged on the tray 304. A drive structure 5 is engaged between the two drive frames 303. A guide rod 302 is fixedly connected inside the guide rails 301. The drive frame 303 and the guide rod 302 are slidably connected. A handle 306 is fixedly connected to both sides of the storage disk 305. The storage disk 305 is inclined. The two guide rails 301 are symmetrically arranged. The drive frame 303 has an "L" shaped structure. Since the bottom surface of the internal space of the storage tray 305 is flush with the discharge port of the cleaning machine body 1, and the tray 304 and the storage tray 305 are inclined, the cleaned monocrystalline silicon rods automatically slide from the discharge port of the cleaning machine body 1 into the storage tray 305. When the bottom layer of the storage tray 305 is full of monocrystalline silicon rods, the drive frame 303 drives the storage tray 305 to slide down along the inner wall of the guide rail 301 and the guide rod 302 until the upper surface of the bottom layer of monocrystalline silicon rods is flush with the discharge port of the cleaning machine body 1. This facilitates the subsequent accumulation of cleaned monocrystalline silicon rods inside the storage tray 305 until the storage tray 305 is full of monocrystalline silicon rods. At this point, the automatic unloading of monocrystalline silicon rods is quickly achieved, with high operating efficiency. Finally, the storage tray 305 is removed from the tray 304 by the handle 306 and replaced with an empty storage tray 305. The operation is simple.

[0022] As a technical optimization of this utility model, the drive structure 5 includes a mounting plate 501. The mounting plate 501 is fixedly connected to the side of the cleaning machine body 1 near the guide rail 301. A motor 502 is fixedly connected to the mounting plate 501. A lead screw 503 is fixedly connected to the output shaft of the motor 502. A connecting plate 504 is fixedly connected between the two drive frames 303. The lead screw 503 is threadedly connected to the connecting plate 504. The mounting plate 501 has an "L" shaped structure. A guide structure 6 is provided above the connecting plate 504. The motor 502 mounted on the mounting plate 501 starts to drive the lead screw 503 to rotate. Since the lead screw 503 is threadedly connected to the connecting plate 504, the lead screw 503 drives the drive frame 303 to move downward, which facilitates the subsequent feeding of the single crystal silicon rod.

[0023] As a technical optimization of this utility model, the storage disk 305 is equipped with an opening and closing structure 4, which includes a side plate 401. The side plate 401 is slidably connected to the end of the storage disk 305. First connecting blocks 402 are fixedly connected to both ends of the side plate 401, and second connecting blocks 404 are fixedly connected to both sides of the storage disk 305. A connecting rod 403 is fixedly connected to the bottom surface of the first connecting block 402, and the connecting rod 403 is slidably connected to the second connecting block 404. A spring 405 is fixedly connected between the first connecting block 402 and the second connecting block 404. Because the storage disk... The side plate 401 at the end of 305 slides upward to the top under the reset action of the spring 405, thus not obstructing the delivery of the monocrystalline silicon rod to the interior of the storage disk 305. The side plate 401 is pressed down, which causes the first connecting blocks 402 on both sides to slide downward and compress the spring 405 between the first connecting block 404 and the second connecting block 404. The connecting rod 403 enhances the stability of the side plate 401. Finally, a pin is used to pass through the hole reserved on the storage disk 305 and engage with the hole reserved on the side plate 401, thereby completing the fixation of the side plate 401. During transportation, the monocrystalline silicon rod will slip off from the side plate 401, resulting in strong stability.

[0024] As a technical optimization of this utility model, the guide structure 6 includes a mounting base 601. Two mounting bases 601 are provided above the drive frame 303. The mounting bases 601 are fixedly connected to the cleaning machine body 1. A guide roller 602 is rotatably connected between the two mounting bases 601. The cleaned monocrystalline silicon rod is conveyed to the guide roller 602, and the guide roller 602 rotates through the mounting base 601. The setting of the guide roller 602 provides support for the monocrystalline silicon rod, which helps to align the monocrystalline silicon rod and convey it into the storage disk 305. At the same time, it avoids the monocrystalline silicon rod from falling into the gap between the storage disk 305 and the cleaning machine body 1, and has high flexibility.

[0025] As a technical optimization of this utility model, a protective structure 2 is installed on the cleaning machine body 1. The protective structure 2 includes a protective door 201. Multiple protective doors 201 are fixedly connected to the side wall of the cleaning machine body 1. A glass plate 202 is fixedly connected to the center position of the protective door 201. A support frame 203 is fixedly connected to the bottom of the cleaning machine body 1, and a water tank 7 is fixedly connected to the support frame 203. During the processing of single crystal silicon rods, the cleaning machine body 1 is placed in a designated position via the support frame 203 on the bottom plate. Multiple monocrystalline silicon rods are fed into the cleaning machine body 1. The water tank 7 stores cleaning fluid. Then, the cleaning fluid is sprayed onto the surface of the monocrystalline silicon rods at a certain pressure and angle through multiple nozzles inside the cleaning machine body 1. The chemical action of the cleaning fluid and the mechanical impact of the spray are used to remove impurities, oil, metal ions and other contaminants from the surface of the monocrystalline silicon rods. After cleaning, the monocrystalline silicon rods are dried by the air drying device inside the cleaning machine body 1 to remove the cleaning fluid adhering to the surface of the monocrystalline silicon rods. The cleaning status of the monocrystalline silicon rods can be observed through the glass plate 202 on the protective door 201.

[0026] In use, during the processing of monocrystalline silicon rods, the cleaning machine body 1 is placed in a designated position via the support frame 203 on the base plate. First, multiple monocrystalline silicon rods are fed into the cleaning machine body 1. The water tank 7 stores cleaning fluid. Then, the cleaning fluid is sprayed onto the surface of the monocrystalline silicon rods at a certain pressure and angle through multiple nozzles inside the cleaning machine body 1. Utilizing the chemical action of the cleaning fluid and the mechanical impact of the spray, impurities, oil, metal ions, and other contaminants on the surface of the monocrystalline silicon rods are removed. Next, the cleaned monocrystalline silicon rods pass through a drying device inside the cleaning machine body 1 to remove the cleaning fluid adhering to their surface. The cleaning status of the monocrystalline silicon rods can be observed through the glass plate 202 on the protective door 201. Finally, the rods are transported... At the discharge port of the cleaning machine body 1, the bottom surface of the storage tray 305 is flush with the discharge port of the cleaning machine body 1. Furthermore, the side plate 401 at the end of the storage tray 305 slides upwards to its highest point under the reset action of the spring 405, thus not obstructing the transport of the monocrystalline silicon rod into the storage tray 305. The cleaned monocrystalline silicon rod is then transported to the guide roller 602, which rotates via the mounting base 601. The guide roller 602 provides support for the monocrystalline silicon rod, facilitating alignment and transport of the rod into the storage tray 305. It also prevents the rod from falling into the gap between the storage tray 305 and the cleaning machine body 1, offering high flexibility. Because the tray 304... The storage tray 305 is tilted, allowing the cleaned monocrystalline silicon rods to automatically slide from the outlet of the cleaning machine body 1 into the storage tray 305. Once the bottom layer of the storage tray 305 is full of monocrystalline silicon rods, the motor 502 mounted on the mounting plate 501 drives the lead screw 503 to rotate. Because the lead screw 503 is threadedly connected to the connecting plate 504, the lead screw 503 drives the drive frame 303 downwards. The drive frame 303 then causes the storage tray 305 to slide downwards along the inner wall of the guide rail 301 and the guide rod 302 until the upper surface of the bottom layer of monocrystalline silicon rods is flush with the outlet of the cleaning machine body 1. This facilitates the subsequent accumulation of cleaned monocrystalline silicon rods inside the storage tray 305 until the storage tray... The storage tray 305 is filled with monocrystalline silicon rods, which quickly and automatically unloads the rods, resulting in high operational efficiency. Next, the side plate 401 is pressed down, causing the first connecting blocks 402 on both sides to slide downwards and compress the spring 405 between the side plate and the second connecting block 404. The connecting rod 403 enhances the stability of the side plate 401. Finally, a pin is inserted through a pre-drilled hole in the storage tray 305 and engages with the pre-drilled hole in the side plate 401, thus fixing the side plate 401. During transport, the monocrystalline silicon rods slide off the side plate 401, ensuring high stability. Finally, the storage tray 305 is removed from the tray 304 using the handle 306 and replaced with an empty storage tray 305, making the operation simple.

[0027] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0028] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A semiconductor single-crystal silicon rod cleaning device, comprising a cleaning machine body (1), characterized in that: The cleaning machine body (1) is equipped with a feeding structure (3), which includes a guide rail (301). Two guide rails (301) are fixedly connected to the side wall of the cleaning machine body (1). A drive frame (303) is slidably connected inside each of the two guide rails (301). A tray (304) is fixedly connected between the two drive frames (303). A storage disk (305) is engaged on the tray (304). A drive structure (5) is engaged between the two drive frames (303).

2. The semiconductor single crystal silicon rod cleaning equipment according to claim 1, characterized in that: The guide rail (301) is internally fixedly connected to a guide rod (302), and the drive frame (303) is slidably connected to the guide rod (302).

3. The semiconductor single crystal silicon rod cleaning equipment according to claim 1, characterized in that: A handle (306) is fixedly connected to both sides of the storage disk (305), and the storage disk (305) is tilted.

4. The semiconductor single crystal silicon rod cleaning equipment according to claim 1, characterized in that: The two guide rails (301) are arranged symmetrically, and the drive frame (303) has an "L" shaped structure.

5. The semiconductor single crystal silicon rod cleaning equipment according to claim 1, characterized in that: The drive structure (5) includes a mounting plate (501). The mounting plate (501) is fixedly connected to the side of the cleaning machine body (1) near the guide rail (301). A motor (502) is fixedly connected to the mounting plate (501). A lead screw (503) is fixedly connected to the output shaft of the motor (502). A connecting plate (504) is fixedly connected between the two drive frames (303). The lead screw (503) and the connecting plate (504) are threaded together.

6. The semiconductor single crystal silicon rod cleaning equipment according to claim 5, characterized in that: The mounting plate (501) has an "L" shaped structure, and a guide structure (6) is provided above the connecting plate (504).

7. The semiconductor single crystal silicon rod cleaning equipment according to claim 3, characterized in that: The storage disk (305) is equipped with an opening and closing structure (4), which includes a side plate (401). The end of the storage disk (305) is slidably connected to the side plate (401). Both ends of the side plate (401) are fixedly connected to a first connecting block (402). Both sides of the storage disk (305) are fixedly connected to a second connecting block (404). The bottom surface of the first connecting block (402) is fixedly connected to a connecting rod (403). The connecting rod (403) is slidably connected to the second connecting block (404). A spring (405) is fixedly connected between the first connecting block (402) and the second connecting block (404).

8. The semiconductor single crystal silicon rod cleaning equipment according to claim 6, characterized in that: The guide structure (6) includes a mounting base (601). Two mounting bases (601) are provided above the drive frame (303). The mounting bases (601) are fixedly connected to the cleaning machine body (1). A guide roller (602) is rotatably connected between the two mounting bases (601).

9. The semiconductor single crystal silicon rod cleaning equipment according to claim 8, characterized in that: The cleaning machine body (1) is equipped with a protective structure (2), which includes a protective door (201). Multiple protective doors (201) are fixedly connected to the side wall of the cleaning machine body (1). A glass plate (202) is fixedly connected to the center of the protective door (201). A support frame (203) is fixedly connected to the bottom of the cleaning machine body (1). A water tank (7) is fixedly connected to the support frame (203).

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