Turnover mechanism for photoetching processing of glass substrate

Abstract

The utility model discloses a turn-over mechanism for photoetching processing of a glass substrate, which comprises a main body mechanism and a turn-over mechanism, and the turn-over mechanism is used for turning over the glass substrate on a placing table. Comprising a structural frame fixed to the opposite U-shaped supports, a rotating seat rotationally arranged on the inner side of the structural frame, a worm wheel fixedly connected to the rotating seat in a sleeving mode, a second driving piece installed on one side of the structural frame and engaged with the worm wheel, and two sliding rods symmetrically arranged, wherein one ends of the sliding rods are slidably embedded into an inner cavity of the rotating seat, and the other ends of the sliding rods extend out of the rotating seat. The adsorption piece is fixed to the end of the sliding rod, the movable piece is movably arranged in the rotating base in an embedded mode, the end of the movable piece is fixedly connected with the end of the sliding rod, the third driving piece is arranged in an inner cavity of the rotating base and penetrates through the movable piece, and the turn-over mechanism for glass substrate photoetching machining has the advantages of being high in turn-over efficiency and high in practicability.

Description

Technical Field

[0001] This utility model relates to the technical field of glass substrate production equipment, specifically a flipping mechanism for photolithography processing of glass substrates. Background Technology

[0002] Conductive glass is a type of glass with low electrical resistance that can conduct electricity. There are two types of conductive glass: volumetric conductive glass and surface conductive glass. Volumetric conductive glass contains alkaline oxides, silicon dioxide, and titanium oxides. Surface conductive glass is made by depositing a thin metal film (such as gold or platinum, with a thickness of less than 10 nanometers) onto a transparent glass surface, or by spraying a conductive metal oxide film (such as tin or indium) onto a heated glass surface. Conductive glass has high mechanical strength and corrosion resistance, and can be used as windshields in aircraft. It can also serve as glass electrodes in devices such as plasma displays, silicon solar cells, and tuning indicators. It has wide applications in metal electrolytic cells and electrothermal equipment. Photolithography equipment is required in the processing of conductive glass substrates to facilitate coating on both sides of the glass substrate.

[0003] When coating a glass substrate, it is necessary to flip the glass substrate. However, under the existing technology, the flipping is generally done by workers, which is time-consuming, labor-intensive and inefficient. Currently, there are devices for flipping glass substrates on the market, but in actual use, they have problems such as large size interfering with the operation of the coating mechanism and low flipping efficiency. Therefore, this application proposes a novel flipping mechanism for photolithography processing of glass substrates. Utility Model Content

[0004] This utility model aims to solve one of the technical problems existing in the prior art or related technologies.

[0005] Therefore, the technical solution adopted by this utility model is: a flipping mechanism for photolithography processing of glass substrate, comprising: a main body mechanism and a flipping mechanism, wherein the main body mechanism comprises two symmetrically arranged U-shaped supports, a movable platform installed on one side of the U-shaped supports and extending into the U-shaped supports, and a first driving member installed inside the U-shaped supports.

[0006] The flipping mechanism includes a structural frame fixed on a U-shaped bracket, a rotating seat rotatably disposed inside the structural frame, a worm gear fixedly sleeved on the rotating seat, a second driving member installed on one side of the structural frame and meshing with the worm gear, two symmetrically arranged sliding rods with one end slidably fitted into the inner cavity of the rotating seat and the other end extending out of the rotating seat, an adsorption member fixed to the end of the sliding rod, a movable member movably disposed inside the rotating seat and whose end is fixedly connected to the end of the sliding rod, and a third driving member disposed in the inner cavity of the rotating seat and passing through the movable member.

[0007] In a preferred embodiment, the present invention can be further configured as follows: a groove is provided on one side of the U-shaped bracket, the movable platform includes a placement platform disposed on one side of the U-shaped bracket and a first threaded sleeve symmetrically fixed at the end of the placement platform and fitted into the groove, the first driving member includes a first threaded rod rotatably mounted on the inner wall of the groove and a first motor fixed at the top of the U-shaped bracket and whose shaft is fixedly connected to the first threaded rod, the first threaded rod passing through the first threaded sleeve and the two meshing with each other.

[0008] In a preferred embodiment, the present invention can be further configured such that: guide rods are fixed on both sides of the U-shaped bracket, and a sleeve is provided at the end of the placement platform, the sleeve being slidably fitted onto the guide rods.

[0009] In a preferred embodiment, the present invention can be further configured such that the rotating seat includes a ring rotatably fitted inside the structural frame and a base fixed inside the ring.

[0010] In a preferred embodiment, the present invention can be further configured such that: a groove is provided at the end of the base, the sliding rod is fitted into the groove, and a cavity is provided inside the base, the cavity being connected to the groove.

[0011] In a preferred embodiment, the present invention can be further configured as follows: the movable component includes a second threaded sleeve fitted in the cavity and a support rod fixed on both sides of the second threaded sleeve and whose ends are fixedly connected to the ends of the sliding rod; the third driving component includes a second threaded rod rotatably mounted on the opposite inner wall of the cavity and a third motor fixed to the end of the base and whose shaft is fixedly connected to the second threaded rod; the second threaded rod passes through the second threaded sleeve and meshes with it.

[0012] In a preferred embodiment, the present invention can be further configured such that the second driving component includes a second motor fixed on the inner side of the structural frame and a worm gear fixed on the shaft of the second motor, wherein the worm gear meshes with a worm wheel.

[0013] In a preferred embodiment, the present invention can be further configured such that the adsorption element includes an electric push rod fixed to the end of the sliding rod and a rubber pad layer fixed to the end of the electric push rod.

[0014] By adopting the above technical solution, the beneficial effects achieved by this utility model are as follows:

[0015] 1. In this utility model, a movable platform is installed on one side of a U-shaped bracket to hold the glass substrate to be processed, and a first driving component is installed to drive the movable platform to move up and down. A structural frame is installed on the other side of the U-shaped bracket, and a rotating seat is rotatably mounted on the structural frame. A sliding rod is provided inside the rotating seat and extends out of the rotating seat. An adsorption component is fixed at the end of the sliding rod. A worm gear is provided on the outer surface of the rotating seat, and a second driving component is installed on the structural frame to mesh with the worm gear. With the above configuration, when the glass substrate needs to be flipped, the adsorption components on both sides approach the glass substrate and clamp and fix it. At the same time, the first driving component drives the movable platform to move down, releasing space for the glass substrate to be flipped. The second driving component is activated, driving the worm gear to rotate. The rotation of the worm gear drives the rotating seat to rotate, and the rotation of the rotating seat drives the glass substrate to rotate, thus completing the flipping of the glass substrate. The entire mechanism is simple and can automatically and quickly flip the glass substrate, effectively increasing the processing efficiency of the glass substrate.

[0016] 2. In this utility model, the sliding rod is slidably fitted into the inner cavity of the rotating seat. A cavity is provided inside the rotating seat, and a movable part is provided in the cavity. The end of the movable part is fixedly connected to the end of the sliding rod. At the same time, a third driving part is provided to pass through the movable part. With the above arrangement, when the glass substrate is flipped, the third driving part is activated, driving the movable part to move. The movement of the movable part causes the sliding rod to retract into the inner cavity of the rotating seat, thereby avoiding the flipping mechanism from affecting the operation of the coating mechanism and further increasing the practical performance. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this utility model;

[0018] Figure 2 This is an exploded view of the structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the flipping mechanism of this utility model;

[0020] Figure 4 This is a cross-sectional view of part of the flipping structure of this utility model;

[0021] Figure 5 This is an exploded view of the flipping mechanism of this utility model.

[0022] Figure label:

[0023] 100. Main body; 110. U-shaped bracket; 111. Groove; 112. Guide rod; 120. Movable platform; 121. Placement platform; 1211. Sleeve; 122. First threaded sleeve; 130. First driving component; 131. First threaded rod; 132. First motor;

[0024] 200. Flipping mechanism; 210. Structural frame; 220. Rotating seat; 221. Ring; 222. Base; 2221. Slide groove; 2222. Cavity; 230. Worm gear; 240. Second driving component; 241. Second motor; 242. Worm; 250. Sliding rod; 260. Adsorption component; 261. Electric push rod; 262. Rubber pad; 270. Moving part; 271. Second threaded sleeve; 272. Support rod; 280. Third driving component; 281. Second threaded rod; 282. Third motor. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be noted that, unless otherwise specified, the embodiments and features of the present utility model can be combined with each other.

[0026] Some embodiments of this utility model are described below with reference to the accompanying drawings.

[0027] Example 1:

[0028] Combination Figure 1-5 As shown, this embodiment provides a flipping mechanism 200 for photolithography of glass substrates, including a main body mechanism 100 and a flipping mechanism 200.

[0029] The main structure 100 includes two symmetrically arranged U-shaped brackets 110, an active platform 120 installed on one side of the U-shaped brackets 110 and extending into the U-shaped brackets 110, and a first driving member 130 installed inside the U-shaped brackets 110.

[0030] The U-shaped bracket 110 is used to install other components and ensure the stability of each component. A groove 111 is opened on one side of the U-shaped bracket 110. The movable platform 120 includes a placement platform 121 set on one side of the U-shaped bracket 110 and a first threaded sleeve 122 symmetrically fixed at the end of the placement platform 121 and fitted into the groove 111. The placement platform 121 is used to place the glass substrate to be processed. The first driving member 130 includes a first threaded rod 131 rotatably installed on the inner wall of the groove 111 and a first motor 132 fixed at the top of the U-shaped bracket 110 and whose shaft is fixedly connected to the first threaded rod 131. The first threaded rod 131 passes through the first threaded sleeve 122 and the two mesh with each other. When the first motor 132 is started, it drives the first threaded rod 131 to rotate. The rotation of the first threaded sleeve 122 drives the first threaded sleeve 122 to move down. The movement of the first threaded sleeve 122 drives the placement platform 121 to move down, releasing space for the glass substrate to be flipped.

[0031] In addition, guide rods 112 are fixed on both sides of the U-shaped bracket 110, and a sleeve 1211 is provided at the end of the placement platform 121. The sleeve 1211 is slidably sleeved on the guide rods 112 to ensure the stability of the placement platform 121 when it moves up and down.

[0032] The flipping mechanism 200 is used to flip the glass substrate on the placement stage 121. It includes a structural frame 210 fixed on the opposite U-shaped bracket 110, a rotating seat 220 rotatably disposed inside the structural frame 210, a worm gear 230 fixedly sleeved on the rotating seat 220, a second driving member 240 installed on one side of the structural frame 210 and meshing with the worm gear 230, two symmetrically arranged sliding rods 250 with one end slidably fitted into the inner cavity of the rotating seat 220 and the other end extending out of the rotating seat 220, an adsorption member 260 fixed to the end of the sliding rod 250, a movable member 270 movably disposed inside the rotating seat 220 and fixedly connected to the end of the sliding rod 250, and a third driving member 280 disposed in the inner cavity of the rotating seat 220 and passing through the movable member 270.

[0033] The structural frame 210 is fixed to the U-shaped bracket 110 by bolts and is used to install the rotating seat 220 and ensure the stability of the rotating seat 220 when it rotates. The rotating seat 220 includes a ring 221 that is rotatably fitted inside the structural frame 210 and a base 222 fixed inside the ring 221. An annular groove is opened on the inner side of the structural frame 210, and an annular protrusion is provided on the outer side of the ring 221. The annular protrusion is fitted into the annular groove to ensure the stability of the rotation of the ring 221, that is, to ensure the stability of the rotation of the base 222. The base 222 is used to install the sliding rod 250. A sliding groove 2221 is opened at the end of the base 222, and the sliding rod 250 is fitted into the sliding groove 2221 to ensure the stability of the sliding rod 250 when it extends or retracts.

[0034] The second driving component 240 includes a second motor 241 fixed on the inner side of the structural frame 210 and a worm gear 242 fixed on the shaft of the second motor 241. The worm gear 242 meshes with the worm wheel 230, so that when the second motor 241 starts, it drives the worm gear 242 to rotate. The rotation of the worm gear 242 drives the worm wheel 230 to rotate. The rotation of the worm wheel 230 drives the rotating seat 220 to rotate. The rotation of the rotating seat 220 drives the sliding rod 250 to rotate, that is, it drives the glass substrate to rotate, thus completing the flipping of the glass substrate.

[0035] The sliding rod 250 is used to install the adsorption component 260 and drive the adsorption component 260 to move. The adsorption component 260 is used to clamp and fix the glass substrate to ensure the stability of the glass substrate when flipping. The adsorption component 260 includes an electric push rod 261 fixed to the end of the sliding rod 250 and a rubber pad 262 fixed to the end of the electric push rod 261. The electric push rods 261 on both sides of the sliding rod 250 are activated at the same time to clamp and fix the glass substrate from both sides. The rubber pad 262 is used to buffer between the end of the electric push rod 261 and the glass substrate to avoid damage to the glass substrate.

[0036] A cavity 2222 is formed inside the base 222, which communicates with the slide groove 2221. The movable component 270 includes a second threaded sleeve 271 fitted into the cavity 2222 and a support rod 272 fixed to both sides of the second threaded sleeve 271 and whose ends are fixedly connected to the ends of the sliding rod 250. Meanwhile, the third driving component 280 includes a second threaded rod 281 rotatably mounted on the inner wall of the cavity 2222 and a third motor 28 fixed to the end of the base 222 and whose shaft is fixedly connected to the second threaded rod 281. 2. The second threaded rod 281 passes through the second threaded sleeve 271 and meshes with it. When the third motor 282 starts, it drives the second threaded rod 281 to rotate. The rotation of the second threaded rod 281 drives the second threaded sleeve 271 to move. The movement of the second threaded sleeve 271 drives the sliding rod 250 to extend and retract through the support rod 272, so that the sliding rod 250 extends out of or retracts into the inner cavity of the rotating seat 220. Through this setting, the operation of the flipping mechanism 200 can be effectively avoided from affecting the operation of the film covering mechanism.

[0037] The working principle and usage process of this utility model are as follows: When it is necessary to flip the glass substrate, the third motor 282 starts, driving the second threaded rod 281 to rotate. The rotation of the second threaded rod 281 drives the second threaded sleeve 271 to move. The movement of the second threaded sleeve 271 drives the sliding rod 250 to move through the support rod 272, so that the sliding rod 250 extends out of the inner cavity of the rotating seat 220. The movement of the sliding rod 250 drives the adsorption member 260 to move to the center position of the glass substrate. The electric push rods 261 on both sides start, so that the rubber pad layer 262 adheres to the surface of the glass substrate, thus completing the fixation of the glass substrate. At this time, the first motor 132 starts, driving the first threaded rod 131 to rotate. The rotation of the first threaded sleeve 122 drives the first threaded sleeve 122 to move downward. The downward movement causes the placement platform 121 to move downward, releasing space for the glass substrate to flip. Then, the second motor 241 starts, driving the worm gear 242 to rotate. The rotation of the worm gear 242 drives the worm wheel 230 to rotate, which in turn drives the rotating seat 220 to rotate. The rotation of the rotating seat 220 drives the sliding rod 250 to rotate, thus rotating the glass substrate and completing the flipping of the glass substrate. After completion, the first drive component 130 drives the movable platform 120 to reset, and at the same time, the electric push rod 261 retracts, releasing the fixation of the glass substrate. The third drive component 280 starts again, driving the movable component 270 to move. The movement of the movable component 270 causes the sliding rod 250 to retract into the inner cavity of the rotating seat 220, preventing the sliding rod 250 and the adsorption component 260 from affecting the operation of the coating mechanism.

[0038] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A flipping mechanism for photolithography of glass substrates, comprising: The main body (100) and the flipping mechanism (200) are characterized in that the main body (100) includes two symmetrically arranged U-shaped supports (110), an active platform (120) installed on one side of the U-shaped supports (110) and extending into the U-shaped supports (110), and a first driving member (130) installed inside the U-shaped supports (110); The flipping mechanism (200) includes a structural frame (210) fixed on a U-shaped bracket (110), a rotating seat (220) rotatably disposed inside the structural frame (210), a worm gear (230) fixedly sleeved on the rotating seat (220), a second driving member (240) installed on one side of the structural frame (210) and meshing with the worm gear (230), two symmetrically arranged sliding rods (250) with one end slidably fitted into the inner cavity of the rotating seat (220) and the other end extending out of the rotating seat (220), an adsorption member (260) fixed to the end of the sliding rod (250), a movable member (270) movably disposed inside the rotating seat (220) and fixedly connected at the end to the end of the sliding rod (250), and a third driving member (280) disposed in the inner cavity of the rotating seat (220) and passing through the movable member (270).

2. The flipping mechanism for photolithography of a glass substrate according to claim 1, characterized in that, The U-shaped bracket (110) has a groove (111) on one side. The movable platform (120) includes a placement platform (121) on one side of the U-shaped bracket (110) and a first threaded sleeve (122) symmetrically fixed at the end of the placement platform (121) and fitted into the groove (111). The first driving member (130) includes a first threaded rod (131) rotatably mounted on the inner wall of the groove (111) and a first motor (132) fixed at the top of the U-shaped bracket (110) and whose shaft is fixedly connected to the first threaded rod (131). The first threaded rod (131) passes through the first threaded sleeve (122) and the two mesh with each other.

3. The flipping mechanism for photolithography of a glass substrate according to claim 2, characterized in that, Guide rods (112) are fixed on both sides of the U-shaped bracket (110), and a sleeve (1211) is provided at the end of the placement platform (121). The sleeve (1211) is slidably sleeved on the guide rod (112).

4. The flipping mechanism for photolithography of a glass substrate according to claim 1, characterized in that, The rotating seat (220) includes a ring (221) that is rotatably fitted inside the structural frame (210) and a base (222) that is fixed inside the ring (221).

5. The flipping mechanism for photolithography of a glass substrate according to claim 4, characterized in that, The base (222) has a groove (2221) at its end, and the sliding rod (250) is fitted into the groove (2221). A cavity (2222) is formed inside the base (222), and the cavity (2222) communicates with the groove (2221).

6. The flipping mechanism for photolithography of a glass substrate according to claim 5, characterized in that, The movable component (270) includes a second threaded sleeve (271) fitted into the cavity (2222) and a support rod (272) fixed on both sides of the second threaded sleeve (271) and whose ends are fixedly connected to the ends of the sliding rod (250). The third driving component (280) includes a second threaded rod (281) rotatably mounted on the opposite inner wall of the cavity (2222) and a third motor (282) fixed to the end of the base (222) and whose shaft is fixedly connected to the second threaded rod (281). The second threaded rod (281) passes through the second threaded sleeve (271) and meshes with it.

7. The flipping mechanism for photolithography of a glass substrate according to claim 1, characterized in that, The second drive unit (240) includes a second motor (241) fixed on the inner side of the structural frame (210) and a worm (242) fixed on the shaft of the second motor (241), wherein the worm (242) meshes with the worm wheel (230).

8. The flipping mechanism for photolithography of a glass substrate according to claim 1, characterized in that, The adsorption component (260) includes an electric push rod (261) fixed to the end of the sliding rod (250) and a rubber pad (262) fixed to the end of the electric push rod (261).

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