Photomask box

Abstract

The utility model discloses a photomask box which comprises a cover body, a box body, a connecting piece and a buckling piece, and inner cavities of the cover body and the box body are used for storing photomasks; a first groove and a second groove are formed in the joint of the cover body and the box body; the connecting piece is mounted in the first groove and is used for rotationally connecting the cover body with the box body; the buckling piece is arranged in the second groove and used for achieving buckling and opening of the cover body and the box body. When the photomask box is in the buckled state, the outer surface, in the first groove, of the connecting piece and the outer surface, in the second groove, of the buckling piece are lower than or equal to the side faces of the cover body and the box body, so that the side faces of the photomask box in the buckled state are smooth, sealing strips can be conveniently attached to the connecting positions of the photomask box, the sealing performance of the photomask box is further improved, and stacking of a plurality of photomask boxes is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to a container, especially a mask box. BACKGROUND

[0002] The mask is a key part of the photoetching process in microelectronic manufacturing, is the "negative" in the chip manufacturing process, and bears high-precision circuit design. The mask needs to be kept in a sealed state to prevent dust from adhering when being stored, and therefore needs to be placed in a mask box during storage and transportation. Since the mask is a fine photographic plate, any contamination such as dust adhering to it will dirty the mask and cause damage. In order to further prevent contaminants from entering the mask box, a special sealing strip is currently mainly used to be attached to the joint of the mask box to improve the sealing property of the mask box.

[0003] However, the cover and the box of most current mask boxes are connected through a connecting piece and a lock catch, which are arranged on the surface of the cover and the box, i.e., the connecting piece and the lock catch protrude from the surface of the cover and the box, resulting in that the joint of the mask box is not smooth, which causes inconvenience in attaching the sealing strip and the problem of not being tightly sealed. At the same time, the protruding connecting piece and lock catch from the surface of the cover and the box are not convenient for stacking or transporting the mask box, and the sealing strip is easy to deviate due to unevenness, which causes contaminants to enter the mask box. SUMMARY

[0004] In order to further improve the sealing property of the mask box, the utility model provides a mask box.

[0005] In order to achieve the above purpose, the utility model provides a mask box, which comprises a cover, a box, a connecting piece and a catch piece; the inner cavities of the cover and the box are used for storing masks; the connecting part of the cover and the box is provided with a first groove and a second groove; the connecting piece is installed in the first groove and is used for rotationally connecting the cover and the box; the catch piece is arranged in the second groove and is used for realizing the buckling and opening of the cover and the box; in the buckled state of the mask box, the outer surface of the connecting piece in the first groove and the catch piece in the second groove is lower than or equal to the side surface of the cover and the box.

[0006] Optionally, in the buckled state of the mask box, the outer surface of the connecting piece and the catch piece forms the same plane or the same curved surface with the side surface of the cover and the box.

[0007] Optionally, the connecting piece comprises a connecting sheet and a first rotating shaft; the connecting sheet is installed on the cover and the box through the first rotating shaft.

[0008] Optionally, the buckling member comprises a buckling sheet, a second rotating shaft and a fixing strip; the buckling sheet is installed on the cover body through the second rotating shaft; the fixing strip is arranged at the second groove of the box body; the cover body and the box body are buckled and connected through the buckling sheet and the fixing strip.

[0009] Optionally, the mask box further comprises a locking structure arranged on the upper surface of the cover body and the lower surface of the box body.

[0010] Optionally, the locking structure comprises a locking block with a plurality of arc corners and a locking strip with a plurality of arc protrusions.

[0011] Optionally, the locking block is an eight-edge protruding structure, and the number of the arc protrusions of the locking strip is four.

[0012] Optionally, the upper surface of the cover body and the side surface thereof form the same curved surface, and the bottom surface of the box body and the side surface thereof form the same curved surface.

[0013] The mask box has the following beneficial effects:

[0014] The mask box has the following beneficial effects:

[0015] The mask box has the following beneficial effects:

[0016] The connecting member is composed of a connecting sheet and a first rotating shaft, so that the box body and the cover body are rotationally connected, the structure is simple, no hinge or other parts are needed, and the manufacturing cost of the mask box is reduced.

[0017] The buckling member is composed of a buckling sheet and a second rotating shaft, so that the box body and the cover body are buckled and opened, the structure is simple, no guide rail or other parts are needed, and the manufacturing cost of the mask box is further reduced.

[0018] The locking structure of the mask box is composed of a locking block with a plurality of arc corners and a locking strip with a plurality of arc protrusions, so that when a plurality of mask boxes are stacked, the locking strips on the upper and lower surfaces of the mask boxes are matched with the locking blocks, the plurality of mask boxes are conveniently positioned and fixed.

[0019] The outer surfaces of the connecting piece and the buckling piece form the same curved surface with the side surface of the cover body and the box body, the upper surface of the cover body forms the same curved surface with the side surface thereof, and the bottom surface of the box body forms the same curved surface with the side surface thereof, thereby improving the comfort of the user holding the photomask box. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a photomask box structure schematic diagram of the embodiment of the utility model;

[0021] Figure 2 is a photomask box local explosion amplification structure schematic diagram of the embodiment of the utility model;

[0022] Figure 3 is a photomask box open state structure schematic diagram of the embodiment of the utility model;

[0023] Figure 4 is a photomask box local A explosion amplification structure schematic diagram of the embodiment of the utility model;

[0024] Figure 5 is another view structure schematic diagram of the photomask box of the embodiment of the utility model.

[0025] BRIEF DESCRIPTION OF DRAWINGS

[0026] 1, cover body; 2, box body; 3, connecting piece; 31, connecting piece; 311, first hollow shaft; 32, rotating shaft; 4, buckling piece; 41, buckling piece; 411, second hollow shaft; 412, buckling strip; 42, second rotating shaft; 43, fixed strip; 5, photomask; 6, first recess; 7, second recess; 8, locking structure; 81, locking block; 82, locking strip. DETAILED DESCRIPTION

[0027] In order to make the above-mentioned purpose, features and advantages of the utility model more apparent, obvious and easy to understand, the specific embodiments of the utility model are described in detail below. In the following description, a lot of specific details are set forth in order to fully understand the utility model. However, the utility model can be implemented in many other ways different from the description herein, and those skilled in the art can make similar improvements without departing from the connotation of the utility model, so the utility model is not limited by the following disclosed specific embodiments.

[0028] REFERENCE Figures 1-5 A photomask box, comprising: a cover body 1, a box body 2, a connecting piece 3 and a buckling piece 4, the inner cavity of the cover body 1 and the box body 2 is used for storing a photomask 5; the connecting place of the cover body 1 and the box body 2 is provided with a first recess 6 and a second recess 7; the connecting piece 3 is installed in the first recess 6 and is used for rotatingly connecting the cover body 1 and the box body 2; the buckling piece 4 is arranged in the second recess 7 and is used for realizing the buckling and opening of the cover body 1 and the box body 2.

[0029] When the photomask is in the latched state, the outer surface of the connector 3 in the first groove 6 and the outer surface of the fastener 4 in the second groove 7 are lower than or equal to the sides of the cover 1 and the box 2, making the sides of the photomask flat when latched. This facilitates the application of sealing strips at the joints on the sides of the photomask, further improving its sealing performance. There are at least one first groove 6 and two second grooves 7; in this embodiment, there is one first groove 6 and two second grooves 7.

[0030] Furthermore, when the photomask is in the latched state, the outer surfaces of the connector 3 and the latching member 4 form the same plane or the same curved surface with the side of the cover 1 and the box 2, making the side of the photomask smooth, which makes it easy to attach a sealing strip at the connection of the photomask, further improving the sealing performance of the photomask, and also making it easier to stack multiple photomask boxes.

[0031] The connector 3 includes a connecting piece 31 and a first rotating shaft 32. The connecting piece 31 has a first hollow shaft 311 on each side, and the first rotating shaft 32 is disposed inside the first hollow shaft 311 and extends out of its end. The first groove 6 has multiple rotating shaft slots, and the first rotating shaft 32 is mounted on these slots. The connecting piece 31 is mounted on the cover 1 and the box 2 via the first rotating shaft 32, achieving a rotatable connection between the cover 1 and the box 2. When the photomask is in the closed state, the outer surface of the connecting piece 31 forms the same plane or the same curved surface as the sides of the cover 1 and the box 2.

[0032] The fastening component 4 includes a fastening piece 41, a second rotating shaft 42, and a fixing strip 43. The fastening piece 41 is configured as a second hollow shaft 411 on the side closest to the cover 1. The second rotating shaft 42 is disposed inside the hollow shaft and extends through both ends of the second hollow shaft 411. A second groove 7 has multiple rotating shaft slots, and the second rotating shaft 42 is mounted on these slots. The fastening piece 41 is mounted on the cover 1 via the second rotating shaft 42. The fixing strip 43 is disposed in the second groove 7 of the box body 2. The cover 1 and the box body 2 are fastened together by the fastening piece 41 and the fixing strip 43. The fastening piece 41 has a fastening strip 412 with an arc-shaped cross-section at the end opposite to the second hollow shaft 411. The fixing strip 43 has an arc-shaped fastening surface corresponding to the fastening strip 412. When the box body 1 and the cover 2 are fastened together, the fastening strip 412 and the fixing strip 43 are press-fitted together. When the photomask is in the latched state, the outer surface of the latching piece 41 forms the same plane or the same curved surface as the side surface of the cover 1 and the box 2. In this embodiment, the outer surfaces of the connector 3 and the latching piece 4 form the same curved surface as the side surface of the cover 1 and the box 2, the upper surface of the cover 1 forms the same curved surface as its side surface, and the bottom surface of the box 2 forms the same curved surface as its side surface, improving the user's comfort in holding the photomask.

[0033] Furthermore, the photomask box also includes a locking structure 8, which is disposed on the upper surface of the cover 1 and the bottom surface of the box 2. The locking structure 8 includes a locking block 81 and a locking strip 82. The locking block 81 is a polygonal protrusion with multiple rounded corners, and the locking strip 82 is a plurality of rounded protrusions; the rounded protrusions match the rounded corners of the polygonal protrusion. In one embodiment, the locking block 81 is disposed on the upper surface of the cover 1, and the locking strip 82 is disposed on the bottom surface of the box 2. In another embodiment, the locking block 81 is disposed on the bottom surface of the box 2, and the locking strip 82 is disposed on the upper surface of the cover 1. When multiple photomask boxes are stacked, the locking blocks 81 and locking strips 82 on the surfaces of adjacent photomask boxes match, facilitating the stacking, positioning, and fixing of multiple photomask boxes. Furthermore, the locking block 81 is an octagonal protrusion, and the locking strip 82 has four rounded protrusions.

[0034] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0035] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A photomask box, characterized in that, include: The cover (1), box (2), connector (3), and fastener (4) are provided. The inner cavities of the cover (1) and the box (2) are used to store the photomask (5). A first groove (6) and a second groove (7) are provided at the connection between the cover (1) and the box (2). The connector (3) is installed in the first groove (6) to rotatably connect the cover (1) and the box (2). The fastener (4) is provided in the second groove (7) to enable the cover (1) and the box (2) to be fastened and opened. When the photomask is fastened, the outer surface of the connector (3) in the first groove (6) and the outer surface of the fastener (4) in the second groove (7) are lower than or equal to the sides of the cover (1) and the box (2).

2. The photomask box according to claim 1, characterized in that, When the photomask is in the locked state, the outer surfaces of the connector (3) and the fastener (4) form the same plane or the same curved surface with the side surfaces of the cover (1) and the box (2).

3. The photomask box according to claim 1, characterized in that, The connector (3) includes a connecting piece (31) and a first rotating shaft (32); the connecting piece (31) is mounted on the cover (1) and the box (2) via the first rotating shaft (32).

4. The photomask box according to claim 1, characterized in that, The fastening component (4) includes: a fastening piece (41), a second rotating shaft (42), and a fixing strip (43); the fastening piece (41) is mounted on the cover (1) via the second rotating shaft (42); the fixing strip (43) is disposed at the second groove (7) of the box body (2); the cover (1) and the box body (2) are fastened together by the fastening piece (41) and the fixing strip (43).

5. The photomask box according to claim 1, characterized in that, The photomask box further includes a locking structure (8), which is disposed on the upper surface of the cover (1) and the lower surface of the box body (2).

6. The photomask box according to claim 5, characterized in that, The locking structure (8) includes a locking block (81) and a locking strip (82). The locking block (81) is a polygonal protrusion with multiple rounded corners, and the locking strip (82) is a plurality of rounded protrusions.

7. The photomask box according to claim 6, characterized in that, The locking block (81) has an octagonal protrusion structure, and the locking strip (82) has four arc-shaped protrusions.

8. The photomask box according to any one of claims 1-7, characterized in that, The upper surface of the cover (1) and its side surface form the same curved surface, and the bottom surface of the box (2) and its side surface form the same curved surface.

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