Substrate table adjusting device for MPCVD equipment
By designing a substrate stage adjustment device in the MPCVD equipment, the height of the substrate stage can be automatically and stably adjusted using components such as a motor, threaded rod, and infrared rangefinder. This solves the problem of unstable substrate stage adjustment and improves the yield of diamond growth.
Patent Information
- Application Number
- CN202520319648.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-26
- Publication Date
- 2026-02-17
- Estimated Expiration
- 2035-02-26
AI Technical Summary
The adjustment mechanism of the substrate stage in existing MPCVD equipment is unstable and contains errors, which affects the yield of diamond growth.
A substrate stage adjustment device was designed, comprising a chassis, adjustment components, guide components, sensing components, and measuring components. The device utilizes components such as a motor, threaded rod, ball bearing guide, and infrared rangefinder to achieve automated and stable adjustment of the substrate stage height.
This enabled precise adjustment of the substrate stage height, avoiding errors and improving the yield and deposition quality of diamond growth.
Smart Images
Figure CN223921546U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of adjustment device technology, specifically a substrate stage adjustment device for MPCVD equipment. Background Technology
[0002] Microwave plasma chemical vapor deposition (MPCVD) for single-crystal diamond growth stands out among numerous single-crystal diamond preparation methods due to its advantages such as pollution-free microwave energy and pure gas feedstock, making it one of the most promising technologies for preparing large-size, high-quality single-crystal diamonds. Currently, MPCVD is considered an ideal method for diamond deposition. Its principle is as follows: under the action of microwave energy, the deposition gas is excited into a plasma state. Under the influence of the electromagnetic field generated by the microwaves, electrons within the cavity collide and generate violent oscillations, promoting collisions between other atoms, groups, and molecules within the resonant cavity. This effectively increases the ionization degree of the reaction gas, generating a higher density plasma. During the reaction process, the ionization degree of the feedstock gas reaches over 10%, filling the cavity with supersaturated atomic hydrogen and carbon-containing groups, thereby effectively increasing the deposition rate and improving the quality of the deposited diamond.
[0003] During the reaction process, the growth temperature of diamond is controlled by adjusting the distance between the substrate stage and the plasma, thereby improving the product yield. However, in the existing technology, the mechanism for adjusting the substrate stage is unstable and prone to error. Therefore, we propose a substrate stage adjustment device for MPCVD equipment. Utility Model Content
[0004] The technical problem to be solved by this utility model is to overcome the existing defects and provide a substrate stage adjustment device for MPCVD equipment, which can automatically adjust the height of the substrate stage, ensure the stability of the substrate stage during the adjustment process, and avoid errors, thus effectively solving the problems in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution: a substrate stage adjustment device for MPCVD equipment, comprising a chassis and adjustment components;
[0006] Chassis: Guide components are installed on the upper part;
[0007] Adjustment component: includes a fixed column, a slotted opening, a movable block, a threaded rod, a fixed frame, a mounting plate, and a first motor. The fixed column is fixed to the upper end of the chassis. A slotted opening is formed on the circumference of the fixed column. A movable block is slidably connected inside the slotted opening. A fixed frame is fixed to the side of the movable block. A mounting plate is fixed to the upper side of the fixed frame. A threaded hole is formed in the middle of the movable block. A threaded rod is threadedly connected inside the threaded hole and rotatably connected to the inside of the slotted opening. A groove is formed at the lower end of the fixed column. The first motor is installed inside the groove. The output shaft of the first motor is fixed to the lower end of the threaded rod. A guide component is connected to the fixed frame. A sensing component and a measuring component are installed inside the slotted opening. The sensing component and the measuring component cooperate with each other. The input end of the first motor is electrically connected to the output end of an external PLC controller. The height of the substrate stage is adjusted by setting the adjustment component.
[0008] Furthermore, the guide assembly includes guide rods, limiting rings, a first fixing ring, and ball bearings. The edge of the fixing frame has evenly distributed guide holes. The limiting ring is fixed inside the guide holes. The limiting ring has evenly distributed connecting grooves inside. The ball bearings are disposed inside the connecting grooves. The guide rod is disposed inside the limiting ring. All guide rods are respectively engaged with all ball bearings. All guide rods are fixed to the upper end of the chassis. The upper end of all guide rods is fixed with the first fixing ring. By setting the guide assembly, the stability of the fixing frame can be effectively guaranteed.
[0009] Furthermore, the sensing component includes a fixed frame, a toothed plate, a sliding frame, a second motor, gears, and a pressure sensor. An opening is provided on the upper side of the moving block, and the fixed frame is disposed inside the opening. The fixed frame is fixed inside the strip-shaped opening, and the toothed plate is fixed inside the fixed frame. Two corresponding sliding frames are slidably connected to the side of the fixed frame. A second motor is mounted on the right side of the sliding frame, and gears are fixed on the output shaft of the second motor. Both gears mesh with the toothed plate. A pressure sensor is mounted on the side of the sliding frame, and the moving block is located between the two pressure sensors. The pressure sensors are bidirectionally electrically connected to an external PLC controller, and the input terminal of the second motor is electrically connected to the output terminal of the external PLC controller. The position of the moving block is sensed by setting the sensing component.
[0010] Furthermore, the measuring component includes an infrared rangefinder and a reflector. Two corresponding reflectors are fixed on the upper and lower sides inside the strip-shaped opening. An infrared rangefinder is mounted on the side of the sliding frame. The infrared rangefinder corresponds to the reflector. The input terminal of the infrared rangefinder is electrically connected to the output terminal of an external PLC controller. The moving distance of the sliding frame is measured by setting the measuring component.
[0011] Furthermore, a second fixing ring is fixed on the circumferential surface of the chassis, and the edge of the second fixing ring is provided with evenly distributed fixing holes. The chassis is fixed by setting the second fixing ring and fixing holes.
[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: This substrate stage adjustment device for MPCVD equipment has the following advantages:
[0013] 1. By setting the adjustment component, the substrate stage can be installed on the upper end of the mounting plate during use. After installation, the first motor can be started to rotate the threaded rod. The rotation of the threaded rod drives the moving block to move, which in turn drives the fixed frame to move, which in turn drives the mounting plate to move. The movement of the mounting plate can adjust the height of the substrate stage.
[0014] 2. By setting up a guide assembly, all the internal balls of the fixture will move along all the guide rods during the movement of the fixture. In this case, the guide rods can limit the movement direction of the fixture, and all the balls can effectively ensure the stability of the movement of the fixture, thereby ensuring the stability of the substrate stage installed on the upper end of the mounting plate.
[0015] 3. By setting up sensing and measuring components, two second motors can be activated before adjusting the substrate stage height, causing two gears to rotate. Under the action of the gear plate, the two sliding frames will move and fit against the upper and lower sides of the moving block. After fitting, when adjusting, the corresponding second motor can be activated as needed to move the sliding frame connected to it. During its movement, the infrared rangefinder installed on its side will measure the distance it moves. When it moves to the distance that needs to be adjusted, the second motor will be turned off. In this way, when the moving block contacts the pressure sensor installed on the side of the sliding frame during its movement, the external PLC controller can automatically turn off the first motor. In this way, the substrate stage adjustment can be completed and errors can be avoided. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of the front structure of this utility model;
[0017] Figure 2 This is a front sectional view of the present invention;
[0018] Figure 3 This is an enlarged view of section A of this utility model;
[0019] Figure 4 This is a schematic diagram of the structure of the first motor in this utility model.
[0020] In the diagram: 1. Chassis; 2. Adjustment assembly; 21. Fixed column; 22. Strip opening; 23. Moving block; 24. Threaded rod; 25. Fixed frame; 26. Mounting plate; 27. First motor; 3. Guide assembly; 31. Guide rod; 32. Limiting ring; 33. First fixed ring; 34. Ball bearing; 4. Sensing assembly; 41. Fixed frame; 42. Toothed plate; 43. Sliding frame; 44. Second motor; 45. Gear; 46. Pressure sensor; 5. Measuring assembly; 51. Infrared rangefinder; 52. Reflector; 6. Second fixed ring; 7. Fixing hole. Detailed Implementation
[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0022] Please see Figure 1-4 This embodiment provides a technical solution: a substrate stage adjustment device for MPCVD equipment, including a chassis 1 and an adjustment assembly 2;
[0023] Chassis 1: A guide assembly 3 is installed on the upper end. The guide assembly 3 includes a guide rod 31, a limiting ring 32, a first fixing ring 33, and a ball bearing 34. The side of the fixed frame 25 is provided with evenly distributed guide holes. The limiting ring 32 is fixed inside the guide holes. The limiting ring 32 is provided with evenly distributed connecting grooves. The ball bearing 34 is provided inside the connecting grooves. The guide rod 31 is provided inside the limiting ring 32. All the guide rods 31 are in contact with all the ball bearings 34. All the guide rods 31 are fixed to the upper end of the chassis 1. The upper end of all the guide rods 31 is fixed with the first fixing ring 33. By setting the guide assembly 3, the stability of the fixed frame 25 can be effectively guaranteed.
[0024] Adjustment component 2 includes a fixed post 21, a slotted opening 22, a movable block 23, a threaded rod 24, a fixing frame 25, a mounting plate 26, and a first motor 27. The fixed post 21 is fixed to the upper end of the chassis 1. A slotted opening 22 is formed on the circumference of the fixed post 21. The movable block 23 is slidably connected inside the slotted opening. A fixing frame 25 is fixed to the side of the movable block 23. The mounting plate 26 is fixed to the upper side of the fixing frame 25. A threaded hole is formed in the middle of the movable block 23. A threaded rod 24 is threadedly connected inside the threaded hole. The threaded rod 24 is rotatably connected inside the slotted opening 22. The fixed post 21... A groove is provided at the lower end, and a first motor 27 is installed inside the groove. The output shaft of the first motor 27 is fixed to the lower end of the threaded rod 24. The guide assembly 3 is connected to the fixing frame 25. A sensing assembly 4 and a measuring assembly 5 are installed inside the strip-shaped opening 22. The sensing assembly 4 and the measuring assembly 5 cooperate with each other. The input end of the first motor 27 is electrically connected to the output end of an external PLC controller. The sensing assembly 4 includes a fixing frame 41, a toothed plate 42, a sliding frame 43, a second motor 44, a gear 45, and a pressure sensor 46. An opening is provided on the upper side of the moving block 23, and the fixing frame 4 is installed inside the opening. 1. A fixed frame 41 is fixed inside the strip-shaped opening 22. A toothed plate 42 is fixed inside the fixed frame 41. Two corresponding sliding frames 43 are slidably connected to the side of the fixed frame 41. A second motor 44 is installed on the right side of the sliding frame 43. A gear 45 is fixed on the output shaft of the second motor 44. Both gears 45 mesh with the toothed plate 42. A pressure sensor 46 is installed on the side of the sliding frame 43. The moving block 23 is located between the two pressure sensors 46. The pressure sensors 46 are bidirectionally electrically connected to an external PLC controller. The input terminal of the second motor 44 is electrically connected to an external PLC controller. The output of the LC controller includes a measuring component 5 containing an infrared rangefinder 51 and a reflector 52. Two corresponding reflectors 52 are fixed inside the upper and lower sides of the slot 22. An infrared rangefinder 51 is mounted on the side of the sliding frame 43. The infrared rangefinder 51 corresponds to the reflector 52. The input of the infrared rangefinder 51 is electrically connected to the output of the external PLC controller. The moving distance of the sliding frame 43 is measured by setting the measuring component 5. The position of the moving block 23 is sensed by setting the sensing component 4. The height of the substrate stage is adjusted by setting the adjustment component 2.
[0025] Furthermore, a second fixing ring 6 is fixed on the circumferential surface of the chassis 1, and the edge of the second fixing ring 6 is provided with evenly distributed fixing holes 7. The chassis 1 is fixed by setting the second fixing ring 6 and the fixing holes 7.
[0026] The working principle of the substrate stage adjustment device for MPCVD equipment provided by this utility model is as follows: First, the substrate stage can be installed on the upper end of the mounting plate 26. After installation, the first motor 27 can be started to rotate the threaded rod 24. The rotation of the threaded rod 24 drives the moving block 23 to move, which in turn drives the fixed frame 25 to move. The movement of the fixed frame 25 drives the mounting plate 26 to move, thus adjusting the height of the substrate stage. During the movement of the fixed frame 25, all the internal balls 34 will move along all the guide rods 31. In this case, the guide rods 31 can limit the movement direction of the fixed frame 25, and all the balls 34 can effectively ensure the stability of the movement of the fixed frame 25, thereby ensuring the stability of the substrate stage installed on the upper end of the mounting plate 26. The height of the substrate stage can then be adjusted. Two second motors 44 can be started to rotate two gears 45. At this time, under the action of the gear plate 42, the two sliding frames 43 will move and fit with the upper and lower sides of the moving block 23. After fitting, the distance that the substrate stage needs to move can be input into the external PLC controller. After input, the external PLC controller will start the corresponding second motor 44 according to the requirements, so that the sliding frame 43 connected to it will move. During its movement, the infrared rangefinder 51 installed on its side will measure the distance it moves. When it moves to the distance that needs to be adjusted, the second motor 44 will be turned off. In this case, when the moving block 23 contacts the pressure sensor 46 installed on the side of the sliding frame 43 during its movement, the external PLC controller can automatically turn off the first motor 27. In this way, the adjustment of the substrate stage can be completed and errors can be avoided.
[0027] It is worth noting that the external PLC controller disclosed in the above embodiments is specifically a Siemens S7-200. The first motor 27 and the second motor 44 can be selected as 1LE0003 three-phase asynchronous motors. The infrared rangefinder 51 and the pressure sensor 46 can be freely configured according to the actual application scenario. The external PLC controller controls the operation of the first motor 27, the second motor 44 and the infrared rangefinder 51 using methods commonly used in the prior art.
[0028] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.
Claims
1. A substrate table adjustment apparatus for an MPCVD apparatus, characterized by: The adjusting assembly (2) comprises a fixed column (21), a strip-shaped opening (22), a moving block (23), a threaded rod (24), a fixed frame (25), a mounting disc (26) and a first motor (27). The bottom plate (1) is provided with a guide assembly (3) at the upper end. The adjusting assembly (2) comprises a fixed column (21), a strip-shaped opening (22), a moving block (23), a threaded rod (24), a fixed frame (25), a mounting disc (26) and a first motor (27).
2. The substrate table adjustment device for an MPCVD apparatus according to claim 1, wherein: The guide assembly (3) comprises guide rods (31), limiting rings (32), first fixed rings (33) and balls (34). The guide assembly (3) comprises guide rods (31), limiting rings (32), first fixed rings (33) and balls (34).
3. The substrate table adjustment apparatus for an MPCVD apparatus according to claim 1, wherein: Said induction assembly (4) contains fixed frame (41), toothed plate (42), sliding frame (43), second motor (44), gear (45) and pressure sensor (46), the upper side of the moving block (23) is provided with an opening, the inside of the opening is provided with a fixed frame (41), the fixed frame (41) is fixed in the inside of the strip-shaped port (22), the inside of the fixed frame (41) is fixed with a toothed plate (42), the side surface of the fixed frame (41) is slidably connected with two corresponding sliding frames (43), the right side of the sliding frame (43) is provided with a second motor (44), the output shaft of the second motor (44) is fixed with a gear (45), two gears (45) are engaged with the toothed plate (42), the side surface of the sliding frame (43) is provided with a pressure sensor (46), the moving block (23) is located between the two pressure sensors (46), the pressure sensor (46) is bidirectionally electrically connected with the external PLC controller, and the input end of the second motor (44) is electrically connected with the output end of the external PLC controller.
4. A substrate table adjustment device for an MPCVD apparatus according to claim 3, wherein: Said measuring assembly (5) contains infrared range finder (51) and reflecting disc (52), the upper and lower sides of the inside of the strip-shaped port (22) are fixed with two corresponding reflecting discs (52), the side surface of the sliding frame (43) is provided with an infrared range finder (51), the infrared range finder (51) corresponds to the reflecting disc (52), and the input end of the infrared range finder (51) is electrically connected with the output end of the external PLC controller.
5. The substrate table adjustment apparatus for an MPCVD apparatus according to claim 1, wherein: The circumferential surface of the chassis (1) is fixed with a second fixed ring (6), and the edge of the second fixed ring (6) is provided with uniformly distributed fixed holes (7).