Gas distribution mechanism and vacuumizing system

Abstract

The utility model provides an air distribution mechanism and a vacuumizing system, and relates to the technical field of vacuum, the air distribution mechanism comprises a valve body and an adjusting assembly. The valve body is provided with a first cavity, an air inlet and at least two adjusting openings with different diameters. The adjusting assembly comprises a rotating shaft rotationally connected with the valve body and a rotating disc connected with the rotating shaft. The rotating disc is provided with a through hole used for being communicated with a vacuum pump. Moreover, the rotating disc is used for rotating under the driving of the rotating shaft, so that the through hole is communicated with one of the adjusting openings, and the other adjusting openings are blocked. Based on the arrangement, different adjusting openings can be selectively opened or closed through rotation of the rotating disc in the adjusting assembly. Due to the fact that the different adjusting openings have different diameters, the gas distribution mechanism achieves flow control over nitrogen, the flow of the nitrogen input into the vacuum pump can meet the actual working condition requirement, and the purging effect of different intensities is achieved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum technology, and more specifically, to a gas distribution mechanism and a vacuum pumping system. Background Technology

[0002] In existing technologies, nitrogen purging typically involves continuously introducing a suitable amount of nitrogen into the pump during operation. This is done to maintain a specific vacuum level within the pump and to allow the flow of nitrogen to remove heat generated inside the pump, as well as residual gases and impurities.

[0003] However, in the existing technology, the flow rate of nitrogen supplied to the vacuum pump is difficult to adjust. In some cases, if the nitrogen flow rate is too high, the vacuum level inside the pump is difficult to stabilize, the friction and compression inside the pump body are intensified, and the temperature rises. In other cases, if the nitrogen flow rate is too low, it cannot effectively remove residual gas and impurities inside the pump, affecting the pump's working efficiency and reliability. Utility Model Content

[0004] The purpose of this utility model is to provide a gas distribution mechanism and a vacuum system that can adjust the nitrogen flow rate according to the actual working conditions, thereby achieving the beneficial effects of avoiding nitrogen resource waste and improving the safety and efficiency of the vacuum system operation.

[0005] The gas distribution mechanism according to this utility model includes a valve body and an adjusting assembly. The valve body has a first chamber, an air inlet, and at least two adjusting ports of different diameters. The adjusting assembly includes a rotating shaft rotatably connected to the valve body and a rotating disk connected to the rotating shaft. The rotating disk has a through hole for communicating with a vacuum pump. Furthermore, the rotating disk rotates under the drive of the rotating shaft, such that the through hole communicates with one of the adjusting ports while blocking the other adjusting ports.

[0006] Based on the above settings, different adjustment ports can be selectively opened or closed by adjusting the rotation of the rotating disk in the adjustment assembly. Since the different adjustment ports have different diameters, the flow rate of nitrogen gas is controlled accordingly, allowing the flow rate of nitrogen gas input to the vacuum pump to adapt to actual working conditions and achieve purging effects of varying intensities. Attached Figure Description

[0007] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0008] Figure 1This is a schematic diagram of the gas distribution mechanism provided in this embodiment;

[0009] Figure 2 This is an exploded structural diagram of the gas distribution mechanism provided in this embodiment;

[0010] Figure 3 This is a cross-sectional structural schematic diagram of the gas distribution mechanism provided in this embodiment;

[0011] Figure 4 This is a schematic diagram of the valve body of the gas distribution mechanism provided in this embodiment;

[0012] Figure 5 This is a schematic diagram of the structure of the upper cover of the gas distribution mechanism provided in this embodiment.

[0013] Icons: 10-Gas distribution mechanism; 100-Valve body; 110-First chamber; 111-Air inlet; 113-Adjusting port; 130-Second chamber; 131-Positioning hole; 133-Limiting plate; 300-Adjusting component; 310-Rotating shaft; 330-Rotating disk; 331-Through hole; 350-Positioning structure; 353-Elastic element; 355-Positioning ball; 370-Knob; 500-Top cover; 510-Allowing groove; 530-Guide groove; 550-Air outlet; 570-Through hole; 700-Drive component; 710-Servo motor; 730-First transmission gear; 750-Second transmission gear; 900-Control module. Detailed Implementation

[0014] In the vacuum system of related technologies, the flow rate of nitrogen supplied to the vacuum pump is difficult to adjust. When the flow rate of nitrogen is too high, the vacuum level of the vacuum pump is difficult to stabilize and the temperature inside the pump rises. When the flow rate of nitrogen is too low, the residual gas and impurities inside the pump cannot be effectively removed, which affects the working efficiency and reliability of the pump.

[0015] To address the aforementioned problems, this utility model provides a gas distribution mechanism 10 and a vacuum system. The gas distribution mechanism 10 can adjust the nitrogen flow rate according to the actual working conditions, thereby achieving the beneficial effects of avoiding nitrogen resource waste and improving the safety and efficiency of the vacuum system operation.

[0016] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0017] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0018] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0019] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0020] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0021] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0022] The following detailed description, through embodiments and in conjunction with the accompanying drawings, outlines the overall structure, working principle, and technical effects of the gas distribution mechanism 10 and the vacuum system provided by this utility model. Please refer to... Figures 1 to 3 This utility model provides a gas distribution mechanism 10, which is applied to a vacuum system. It can adjust the nitrogen flow rate according to the actual working conditions, so as to achieve the beneficial effects of avoiding nitrogen waste and improving the safety and efficiency of the vacuum system.

[0023] The gas distribution mechanism 10 includes a valve body 100 and an adjustment assembly 300. The valve body 100 has a first chamber 110, an air inlet 111, and at least two adjustment ports 113 of different diameters. Both the air inlet 111 and the adjustment ports 113 communicate with the inner cavity of the first chamber 110, forming a gas flow channel. When the air inlet 111 is connected to a nitrogen source, nitrogen gas is discharged through the aforementioned gas flow channel from the adjustment ports 113 of different diameters.

[0024] Based on the above, the adjusting assembly 300 includes a rotating shaft 310 rotatably connected to the valve body 100 and a rotating disk 330 connected to the rotating shaft 310. The rotating disk 330 has a through hole 331 for communicating with a vacuum pump. Furthermore, the rotating disk 330 is rotated under the drive of the rotating shaft 310, such that the through hole 331 communicates with one of the adjusting ports 113, while blocking the other adjusting ports 113.

[0025] Based on the above configuration, the rotating shaft 310 in the adjusting assembly 300 drives the rotating disk 330 to rotate, causing the through hole 331 to selectively connect to adjusting ports 113 of different diameters and block other adjusting ports 113. This allows for the selective opening or closing of different adjusting ports 113, changing the flow path of nitrogen. Nitrogen is discharged from the opened adjusting port 113 and then input to the vacuum pump through the through hole 331. Since the different adjusting ports 113 have different diameters, the flow rate of nitrogen is controlled during the path adjustment process, allowing the nitrogen flow rate input to the vacuum pump to adapt to actual operating conditions and achieve purging effects of varying intensities.

[0026] In some embodiments, such as Figure 3 As shown, the valve body 100 also includes a second chamber 130 separated from the first chamber 110. Correspondingly, the regulating assembly 300 also includes a positioning structure 350 located within the second chamber 130, and the positioning structure 350 is connected to the rotating shaft 310. That is to say, the valve body 100 includes two chambers, one of which is the first chamber 110, used for introducing and regulating the nitrogen flow rate; the other is the second chamber 130, separated from the first chamber 110, used to accommodate the positioning structure 350.

[0027] It should also be noted that the inner wall of the second chamber 130 also cooperates with the positioning structure 350 in actual application to ensure that the rotating shaft 310 is locked when a certain adjustment port 113 is connected to the through hole 331, preventing accidental rotation. Specifically, the inner wall of the second chamber 130 is provided with positioning holes 131 corresponding one-to-one with the number of adjustment ports 113. The positioning structure 350 is used to cooperate with the corresponding positioning hole 131 when one of the adjustment ports 113 is connected to the through hole 331.

[0028] like Figure 3 and Figure 4 As shown, in the embodiments provided in this application, the positioning structure 350 includes an elastic element 353 and a positioning ball 355. The two ends of the elastic element 353 are respectively connected to the rotating shaft 310 and the positioning ball 355, and the positioning ball 355 is always in contact with the inner wall of the second chamber 130. The positioning ball 355 is used to cooperate with the positioning hole 131.

[0029] In practical applications, when the through hole 331 and the corresponding adjustment port 113 are aligned and connected, the positioning ball 355 rotates to the positioning hole 131 corresponding to the adjustment port 113, and automatically inserts into the positioning hole 131 under the push of the elastic element 353, emitting a positioning indication such as a "click" sound, allowing the user to intuitively feel that the adjustment is in place. When it is necessary to switch the connected adjustment port 113, as the rotating shaft 310 rotates, the positioning ball 355 compresses the elastic element 353, rolls out of the positioning hole 131, and continues to abut against the inner wall of the second chamber 130 until it is inserted into the appropriate positioning hole 131.

[0030] Furthermore, the inner wall of the second chamber 130 is also provided with a limiting plate 133. The limiting plate 133 is located on the side of the positioning hole 131 located at the edge, away from the adjacent positioning hole 131, making it easier for the user to clearly understand the operating boundary. Specifically, when the user rotates the adjustment component 300, when the positioning structure 350 touches the limiting plate 133, the user will know that the maximum adjustment position has been reached, thereby effectively preventing the rotating shaft 310 from continuing to rotate beyond the preset adjustment range. Figure 4 In the example shown, there are two limiting plates 133, and multiple positioning holes 131 are located between the two limiting plates 133 in the rotation direction of the rotating shaft 310.

[0031] Please see Figure 2 and Figure 5 To further prevent gas leakage during operation, the gas distribution mechanism 10 also includes an upper cover 500 that mates with the valve body 100. The upper cover 500 has a clearance groove 510 that mates with the rotating disk 330, ensuring that the rotating disk 330 can rotate freely without obstruction. The bottom wall of the clearance groove 510 has a guide groove 530 that communicates with the through hole 331, ensuring that the through hole 331 can communicate with the guide groove 530 at any position, allowing nitrogen gas to exit from the valve body 100 to the upper cover 500. The bottom wall of the guide groove 530 has an outlet 550 for communication with a vacuum pump, facilitating gas discharge from the gas distribution mechanism 10 to the vacuum pump.

[0032] In other words, based on the tight fit between the upper cover 500 and the valve body 100, the nitrogen gas discharged from the valve body 100 can only be discharged to the upper cover 500 through the through hole 331, and then pass through the clearance groove 510, the guide groove 530, and the outlet 550 in the upper cover 500 before being discharged and entering the vacuum pump. Furthermore, it should be noted that in the above structure, the bottom walls of the clearance groove 510 and the guide groove 530 are both used as sealing surfaces to achieve multi-layered sealing and prevent gas leakage.

[0033] Alternatively, the valve body 100 can be configured as a detachable structure, including a housing and a lower cover. The housing has a partition plate that divides its interior into a first chamber 110 and a second chamber 130. The lower cover is similar in configuration to the upper cover 500 and seals against the housing. Furthermore, the lower cover has the aforementioned air inlet 111 for connecting the first chamber 110 to a nitrogen source.

[0034] In some embodiments, users can manually rotate the adjustment component 300 to adjust the nitrogen flow rate. Specifically, the adjustment component 300 also includes a knob 370 connected to the rotating shaft 310, and the upper cover 500 is provided with a through hole 570 that mates with the rotating shaft 310. Based on this, the end of the rotating shaft 310 away from the knob 370 passes through the through hole 570 and is rotatably connected to the valve body 100. In practical applications, users can manually rotate the knob 370 of the external device to adjust the angle of the rotating shaft 310.

[0035] In other embodiments, the valve train 10 may also integrate automated control elements to achieve remote or programmed control, reducing manual intervention. Based on this, the valve train 10 may also include a drive assembly 700 that is pulsatorically connected to the rotating shaft 310. In practical applications, the drive assembly 700 drives the rotating shaft 310 and the rotating disk 330 to rotate, so that the through hole 331 communicates with one of the adjustment ports 113, while blocking the other adjustment ports 113.

[0036] Optionally, the drive assembly 700 includes a servo motor 710, a first transmission gear 730, and a second transmission gear 750. The output shaft of the servo motor 710 is connected to the first transmission gear 730 to drive the first transmission gear 730 to rotate. The first transmission gear 730 meshes with the second transmission gear 750 to transmit driving force to the second transmission gear 750. The second transmission gear 750 is connected to the rotating shaft 310 to drive the rotating shaft 310 to rotate, thereby causing the rotating disk 330 to rotate, aligning the through hole 331 with one of the adjustment ports 113, while blocking the other adjustment ports 113. In other embodiments, the drive assembly 700 can also replace the gear transmission described above with belt drive, chain drive, worm gear drive, etc., which will not be elaborated further in this application.

[0037] It should be noted that the aforementioned drive assembly 700 and knob 370 can also be simultaneously housed in the valve train 10, allowing the valve train 10 to perform both manual and automatic adjustments. Optionally, a button for switching between manual and automatic modes can be provided on the upper cover 500.

[0038] Additionally, it should be noted that the gas distribution mechanism 10 also includes a control module 900, which can select the optimal flow rate configuration based on the actual operating conditions of the vacuum pump. For example... Figure 2 As shown, the control module 900 is electrically connected to the drive assembly 700 and is also electrically connected to the vacuum pump so that the drive assembly 700 adjusts the direction of rotation of the rotating shaft 310 according to the vacuum pump's operating mode. In other words, the control module 900 provided in this application can detect the vacuum pump's operating mode in real time and, based on the vacuum pump's operating mode, send commands to the drive assembly 700 to adjust the direction of rotation of the rotating shaft 310, thereby changing the connection state between the through hole 331 and the regulating port 113 and optimizing the gas flow path.

[0039] Optionally, the valve body 100 may be provided with a power interface for connecting the power supply and drive assembly 700 / control module 900, and a signal interface for connecting the vacuum pump and control module 900. A wiring harness may be provided inside the valve body 100 to facilitate electrical connections between the aforementioned components and interfaces.

[0040] Taking the valve body 100 as an example, which has three regulating ports 113, numbered A, B, and C from largest to smallest, the working principle and workflow of the gas distribution mechanism 10 provided in this application are as follows:

[0041] When the valve train 10 is in manual mode, the user can manually adjust the angle of the rotating shaft 310 by rotating the knob 370 on the external device. During this process, the rotating disk 330 will rotate along with the rotating shaft 310 until the through hole 331 connects with the required adjustment port 113 and blocks the other adjustment ports 113, at which point the rotating shaft 310 stops rotating. At this time, the positioning ball 355 also rotates to the positioning hole 131 corresponding to the adjustment port 113, and automatically inserts into the positioning hole 131 under the push of the elastic member 353, emitting a positioning indication such as a "click" sound.

[0042] When the gas distribution mechanism 10 is in automatic mode, and the control module 900 detects that the vacuum pump is in energy-saving mode, the control module 900 controls the servo motor 710 to drive the first transmission gear 730 and the second transmission gear 750, causing the rotating disk 330 to rotate until the through hole 331 and hole A are connected, while simultaneously blocking holes B and C. When the control module 900 detects that the vacuum pump is in standard mode, similarly, the control module 900 controls the servo motor 710 to drive the gear transmission, causing the rotating disk 330 to rotate until the through hole 331 and hole B are connected, while simultaneously blocking holes A and C. When the control module 900 detects that the vacuum pump is in high-power mode, similarly, the control module 900 controls the servo motor 710 to drive the gear transmission, causing the rotating disk 330 to rotate until the through hole 331 and hole C are connected, while simultaneously blocking holes A and B.

[0043] In summary, this utility model provides a gas distribution mechanism 10, including a valve body 100 and an adjustment assembly 300. The valve body 100 has a first chamber 110, an air inlet 111, and at least two adjustment ports 113 with different diameters. The adjustment assembly 300 includes a rotating shaft 310 rotatably connected to the valve body 100 and a rotating disk 330 connected to the rotating shaft 310. The rotating disk 330 has a through hole 331 for communicating with a vacuum pump. The rotating disk 330 rotates under the drive of the rotating shaft 310, allowing the through hole 331 to communicate with one of the adjustment ports 113 and blocking the other adjustment ports 113. Based on the above configuration, by rotating the rotating disk 330 in the adjustment assembly 300, different adjustment ports 113 can be selectively opened or closed. Since the different adjustment ports 113 have different diameters, this gas distribution mechanism 10 achieves nitrogen flow control, allowing the nitrogen flow rate input to the vacuum pump to adapt to actual operating conditions and achieve purging effects of varying intensities.

[0044] In addition, this utility model also provides a vacuum system, which includes a nitrogen source, a vacuum pump, and the gas distribution mechanism 10 described in the aforementioned embodiments. The nitrogen source is connected to the inlet 111 to provide a stable supply of nitrogen to the gas distribution mechanism 10; the vacuum pump is connected to the through-hole 331 to receive nitrogen gas adjusted to a certain flow rate by the gas distribution mechanism 10. That is to say, the vacuum system provided in this application can also achieve nitrogen flow rate control, so that the nitrogen flow rate input to the vacuum pump can adapt to actual working conditions and achieve purging effects of different intensities.

[0045] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A gas distribution mechanism, comprising: The utility model relates to a valve body (100) is provided with first chamber (110), air inlet (111) and at least two diameter different regulation port (113), air inlet (111) and regulation port (113) all communicate with first chamber (110), regulation assembly (300) includes rotation axis (310) of rotation connection with valve body (100) and rotation disc (330) of rotation axis (310) connection, and rotation disc (330) is provided with the through hole (331) for communicating with vacuum pump, rotation disc (330) is used for rotating under the driving of rotation axis (310), so that the through hole (331) communicates with one of regulation port (113), and blocks the rest regulation port (113). The valve body (100) is further provided with a second chamber (130) separated from the first chamber (110), and an inner wall of the second chamber (130) is provided with positioning holes (131) corresponding to the number of the regulation ports (113); The regulation assembly (300) further includes a positioning structure (350) located in the second chamber (130), the positioning structure (350) is connected with the rotation axis (310) and is used for cooperating with the corresponding positioning hole (131) when one of the regulation ports (113) communicates with the through hole (331).

2. The valve train according to claim 1, characterized in that The positioning structure (350) includes an elastic member (353) and a positioning ball (355); wherein two ends of the elastic member (353) are respectively connected with the rotation axis (310) and the positioning ball (355), and the positioning ball (355) is used for cooperating with the positioning hole (131). An inner wall of the second chamber (130) is further provided with a limiting plate (133), the limiting plate (133) is located on a side of the positioning hole (131) away from the adjacent positioning hole (131) at the edge.

3. The valve train according to claim 2, characterized in that The gas distribution mechanism (10) further includes an upper cover (500) cooperating with the valve body (100); the upper cover (500) is provided with an avoiding groove (510) cooperating with the rotation disc (330), a bottom wall of the avoiding groove (510) is provided with a flow guide groove (530) communicating with the through hole (331), and a bottom wall of the flow guide groove (530) is provided with an air outlet (550) for communicating with the vacuum pump.

4. The valve train according to claim 2, characterized in that The upper cover (500) is further provided with a through hole (570) cooperating with the rotation axis (310); the regulation assembly (300) further includes a knob (370) connected with the rotation axis (310); an end of the rotation axis (310) away from the knob (370) penetrates the through hole (570) and is rotationally connected with the valve body (100).

5. The valve train according to claim 1, characterized in that ​ 6. The valve train according to claim 5, characterized in that ​ 7. The valve train according to any one of claims 1 to 6, characterized in that The gas distribution mechanism (10) further comprises a driving assembly (700) in transmission connection with the rotating shaft (310), the driving assembly (700) being used to drive the rotating shaft (310) and the rotating disc (330) to rotate, so that the through hole (331) is in communication with one of the adjusting ports (113) and blocks the rest of the adjusting ports (113).

8. The valve train according to claim 7, characterized in that The driving assembly (700) comprises a servo motor (710), a first transmission gear (730) and a second transmission gear (750); wherein the output shaft of the servo motor (710) is connected with the first transmission gear (730), the first transmission gear (730) is in mesh with the second transmission gear (750), and the second transmission gear (750) is connected with the rotating shaft (310).

9. The valve train according to claim 7, characterized in that The gas distribution mechanism (10) further comprises a control module (900), the control module (900) being electrically connected with the driving assembly (700) and the vacuum pump, so that the driving assembly (700) adjusts the rotating direction of the rotating shaft (310) according to the mode of the vacuum pump.

10. A vacuum system, characterized by The gas distribution mechanism (10) further comprises a control module (900), the control module (900) being electrically connected with the driving assembly (700) and the vacuum pump, so that the driving assembly (700) adjusts the rotating direction of the rotating shaft (310) according to the mode of the vacuum pump. The gas distribution mechanism (10) further comprises a control module (900), the control module (900) being electrically connected with the driving assembly (700) and the vacuum pump, so that the driving assembly (700) adjusts the rotating direction of the rotating shaft (310) according to the mode of the vacuum pump.

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