Piezoelectric bionic seal beard eddy current sensor

By placing the sensing element on a cantilever plate in a biomimetic seal whisker eddy current sensor and using a piezoelectric thin film as the sensing element, the problems of high sensor manufacturing cost and low monitoring accuracy are solved, and high-sensitivity hydrodynamic monitoring without external power supply is realized.

CN223925899UActive Publication Date: 2026-02-17HUANGHUAI UNIV
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Patent Information

Application Number
CN202520721394.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-04-16
Publication Date
2026-02-17
Estimated Expiration
2035-04-16

AI Technical Summary

Technical Problem

Existing flow field sensors are expensive to manufacture and lack suitable structures for mounting piezoelectric films to ensure monitoring sensitivity and accuracy.

Method used

Design a piezoelectric biomimetic seal whisker eddy current sensor. The sensing element is set on a cantilever plate. A piezoelectric thin film is used as the sensing element. The sensor transmits the deflection generated by the seal whisker under the action of hydrodynamics to a mass block on the cantilever plate, causing bending and generating a change in electrical signal.

Benefits of technology

This reduces the cost of sensor manufacturing, eliminates the need for an external power source, improves monitoring sensitivity and accuracy, and enhances the ability to perceive changes in hydrodynamics.

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Abstract

The utility model relates to the technical field of underwater flow field monitoring devices, in particular to a piezoelectric bionic seal beard eddy current sensor, which comprises bionic seal beard, a base and a sensing element, a connecting part is arranged at the bottom of the bionic seal beard, the base comprises a bottom plate and at least two cantilever vertical plates, the bottoms of the cantilever vertical plates are connected with the bottom plate, and the sensing element is arranged on the base. The upper half parts of the cantilever vertical plates are provided with mass blocks, the plurality of cantilever vertical plates are arranged around the connecting part, the sensing elements are arranged on the sides, far away from the connecting part, of the cantilever vertical plates, and the sensing elements comprise piezoelectric films. The sensing element is easy to install, the overall preparation cost of the sensor is reduced, meanwhile, the piezoelectric film is adopted as the sensing element, an appropriate sensor structure is provided for use of the piezoelectric film in the field of flow field monitoring, high-sensitivity and high-precision sensing of hydrodynamic force changes can be achieved, and the monitoring sensitivity and precision of an existing sensor are improved.
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Description

Technical Field

[0001] This utility model relates to the technical field of underwater flow field monitoring devices, specifically to a piezoelectric biomimetic seal whisker eddy current sensor. Background Technology

[0002] Sensitive perception of the surrounding hydrodynamic environment is crucial for underwater operations by unmanned underwater vehicles (UUVs). Currently, commonly used sonar detection suffers from significant interference in complex shallow waters due to underwater reverberation, while visual detection is ineffective in turbid waters. Furthermore, both sonar and visual detection are "active" technologies, where sound waves and light can reveal the UUV's location. Compared to these "active" technologies, the "passive" hydrodynamic sensing capability of seal whiskers requires no light source or emitted sound waves, making it highly promising for UUV hydrodynamic environment detection, where intelligence and stealth are paramount.

[0003] The flexible seal whisker-inspired underwater flow field sensor is an important type of sensor in existing tactile passive sensing technology for underwater target wake field perception. This type of tactile sensor can directly acquire hydrodynamic characteristic information in the wake field. In related technology, Chinese invention patent CN114061630B discloses a flexible seal whisker-inspired underwater flow field sensor, which includes: a biomimetic whisker column, a flexible column, a flexible substrate, and a piezoresistive unit; the flexible column is disposed on the flexible substrate; the biomimetic whisker column is disposed on the flexible column; the biomimetic whisker column has a wavy shape resembling a spotted seal whisker; piezoresistive units are arranged on the side surface of the flexible column; the piezoresistive unit is used to convert the strain generated on the flexible column into an electrical signal to detect the underwater flow field. The piezoresistive unit is made of a mixture of carbon nanotubes and silver nanoparticles, formed by dripping the mixture into a microfluidic unit and utilizing the principle of directional continuous liquid transport to cover the surface of the microfluidic unit, resulting in a high manufacturing cost.

[0004] Piezoelectric sensors have advantages such as fast dynamic response and high precision, making them a popular research direction. Piezoelectric films have advantages such as high fatigue resistance, shock resistance, and good dynamic response, exhibiting excellent dynamic performance and high precision. Applying piezoelectric films to flow field information monitoring has promising prospects. However, there is currently no suitable sensor structure that can achieve stable installation of piezoelectric films on sensors and ensure monitoring sensitivity and accuracy. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of existing flow field sensors, such as high manufacturing cost and lack of flow field sensors that can be used in conjunction with piezoelectric thin films, and to provide a piezoelectric biomimetic seal whisker eddy current sensor.

[0006] A piezoelectric biomimetic seal whisker eddy current sensor includes:

[0007] Imitation seal whiskers, wherein the bottom of the imitation seal whiskers is provided with a connecting part;

[0008] The base includes a base plate and at least two cantilevered uprights. The bottom of the cantilevered uprights is connected to the base plate. The upper half of the cantilevered uprights is provided with a mass block. Several cantilevered uprights are arranged around the connecting part to form a cylindrical space. The connecting part is embedded in the cylindrical space.

[0009] A sensing element is disposed on the side of the cantilever plate away from the connecting portion, and the sensing element includes a piezoelectric thin film.

[0010] This invention relates to a piezoelectric biomimetic seal whisker eddy current sensor. When the seal whisker-like material deflects under hydrodynamic forces, the hydrodynamic response is transmitted to a mass block on a cantilever plate, causing the cantilever plate to bend. This, in turn, induces a change in electrical signal in the sensing element on the cantilever plate, enabling the sensing of hydrodynamic changes. The sensing element is mounted on the cantilever plate, making installation easier and reducing the overall manufacturing cost of the sensor. Furthermore, the use of a piezoelectric thin film as the sensing element allows for self-powered operation, eliminating the need for an external power source. This reduces the limitations imposed by power supply conditions on the sensor's use and provides a suitable sensor structure for the application of piezoelectric thin films in flow field monitoring, improving the monitoring sensitivity and accuracy of existing sensors.

[0011] Preferably, the sensing element comprises a PVDF piezoelectric thin film element, which is nested and fitted with the cantilever plate. The excellent dynamic performance and high precision of the PVDF piezoelectric thin film enable the measurement of the transient response of dynamic strain, exhibiting sensitivity superior to conventional strain gauge sensors. The biomimetic seal whisker eddy current sensor applied to this design can further enhance its monitoring sensitivity.

[0012] Preferably, at least four cantilevered plates are evenly distributed around the connecting portion, and the connecting portion is in contact with the mass block. This allows the seal whiskers-like design to transmit deflection in any direction to the corresponding cantilevered plate, achieving high-sensitivity and high-precision sensing and monitoring.

[0013] Preferably, the seal whiskers-like structure includes 3D-printed simulated structural components, and the cantilevered upright and / or the connecting portion includes 3D-printed structural components. This ensures the manufacturing quality of each component and guarantees the quality of weak points in the structure.

[0014] Preferably, all the cantilever panels are integrated on a base plate, the base plate has pins, and the base plate has holes, with the pins engaging with the holes. Integrating multiple cantilever panels improves the overall structural stability of the base, reduces the number of installation connection points, avoids the impact of installation errors on monitoring results, and further improves monitoring sensitivity and accuracy.

[0015] Preferably, the base plate and / or the substrate are provided with slots, and a plurality of wires are arranged along the slots, the wires being connected to the sensing element. This achieves stable installation of the wires.

[0016] Preferably, the system further includes a housing, which is detachably connected to the base plate, and the cantilevered upright is disposed within the housing. The housing resists the influence of external fluids on the cantilevered upright, ensuring that the structural response of the cantilevered upright is derived entirely from the imitation seal whiskers.

[0017] Preferably, the substrate and the housing are nested together. This makes the relative position of the housing and the cantilever plate more stable due to the constraint of the substrate.

[0018] Preferably, the connecting portion includes a cylindrical member, on which a first limiting member is provided, and on the base plate or the substrate, a second limiting member is provided, the first limiting member and the second limiting member being connected in cooperation. The connecting portion of the cylindrical member can form a relatively uniform response transmission with the cantilever plate in any direction.

[0019] Preferably, the thickness of the cantilever plate is greater than or equal to 0.5 mm, and the thickness of the piezoelectric film is greater than or equal to 52 μm. The components have relatively small dimensions, making them adaptable to installation and use in various environments.

[0020] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0021] 1. This utility model provides a piezoelectric biomimetic seal whisker eddy current sensor. By setting the sensing element on the cantilever plate, the installation is easier and the overall manufacturing cost of the sensor can be reduced.

[0022] 2. This utility model provides a piezoelectric biomimetic seal whisker eddy current sensor. By using a piezoelectric thin film as the sensing element, the piezoelectric thin film can be self-powered and does not require an external power supply, which can reduce the limitations of power supply conditions on the use of the sensor.

[0023] 3. This utility model provides a piezoelectric biomimetic seal whisker eddy current sensor. By using a piezoelectric thin film as the sensing element, it provides a suitable sensor structure for the use of piezoelectric thin films in the field of flow field monitoring and improves the monitoring sensitivity of existing sensors.

[0024] 4. This utility model provides a piezoelectric biomimetic seal whisker eddy current sensor, which transmits the hydrodynamic response generated by the deflection of the seal whisker under hydrodynamic action to the mass block on the cantilever plate, causing the cantilever plate to bend, thereby causing the sensing element on the cantilever plate to generate a change in electrical signal, which can realize the accurate perception of hydrodynamic changes. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a piezoelectric biomimetic seal whisker eddy current sensor according to the present invention.

[0026] Figure 2 This is a top view of a piezoelectric biomimetic seal whisker eddy current sensor according to the present invention.

[0027] Figure 3 This is a schematic diagram of the structure of the seal whiskers described in Example 1.

[0028] Figure 4 This is a schematic diagram of the structure of a piezoelectric biomimetic seal whisker eddy current sensor after removing the housing, as described in Example 1.

[0029] Figure 5 for Figure 4 A magnified structural diagram of part A in the middle.

[0030] Figure 6 This is a schematic diagram of the structure of a piezoelectric biomimetic seal whisker eddy current sensor after removing the shell and the seal whisker-like material, as shown in Example 1.

[0031] Figure 7 for Figure 6 Top view.

[0032] Figure 8 This is a bottom view of the base plate described in Example 1.

[0033] Marked in the image:

[0034] 1-Imitation seal whiskers, 2-Connecting part, 21-First limiting member, 3-Base plate, 31-Insertion hole, 4-Cantilever upright plate, 41-Mass block, 5-Sensing element, 6-Base plate, 61-Pin, 62-Second limiting member, 7-Wire, 8-Housing. Detailed Implementation

[0035] The present invention will be further described in detail below with reference to specific embodiments. However, it should not be construed as limiting the scope of the present invention to the following embodiments; all technologies implemented based on the content of the present invention fall within the scope of the present invention.

[0036] Unless otherwise specified, the use of terms such as "upper," "lower," "left," "right," "center," "inner," and "outer" to indicate orientation or positional relationships in the description of specific embodiments of this utility model is based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product / equipment / device is typically placed during use. These terms are merely for the purpose of facilitating the description of the utility model solution or simplifying the description in specific embodiments, enabling those skilled in the art to quickly understand the solution, and do not indicate or imply that a specific device / component / element must have a specific orientation, or be constructed and operated in a specific positional relationship. Therefore, they should not be construed as limitations on this utility model.

[0037] Furthermore, the use of terms such as "horizontal," "vertical," "suspended," and "parallel" does not imply that the corresponding device / component / element must be absolutely horizontal, vertical, suspended, or parallel, but rather that it can be slightly tilted or have a deviation. For example, "horizontal" merely means that its direction is more horizontal relative to "vertical," not that the structure must be completely horizontal, but can be slightly tilted. Alternatively, it can be simplified to mean that the corresponding device / component / element, when set in a "horizontal," "vertical," "suspended," or "parallel" direction, can have an error / deviation of ±10% relative to the corresponding direction, more preferably within ±8%, more preferably within ±6%, more preferably within ±5%, and more preferably within ±4%. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its function in the present invention.

[0038] Furthermore, the use of terms such as "first," "second," and "third" in terminology is merely for distinguishing descriptions of identical or similar components and should not be interpreted as emphasizing or implying the relative importance of a particular component.

[0039] Furthermore, in the description of the embodiments of this utility model, "several", "multiple", and "several" represent at least two. The number can be any number, such as two, three, four, five, six, seven, eight, or nine, and can even exceed nine.

[0040] Furthermore, in the description of the technical solution of this utility model, unless otherwise explicitly specified / limited / restricted, the terms "set up," "install," "connect," "link," "equipped with," "laid out," and "arranged" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to common connection methods in the art, such as welding, riveting, bolting, and threaded connections. Such connections can be mechanical, electrical, or communication connections; they can be direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components.

[0041] Example 1

[0042] like Figures 1-8 As shown, a piezoelectric biomimetic seal whisker eddy current sensor includes a seal whisker-like structure 1, a base, and a sensing element 5. The seal whisker-like structure 1 has a connecting part 2 at its bottom. The base includes a bottom plate 3 and a cantilever plate 4. Several cantilever plates 4 are arranged around the connecting part 2 to form a cylindrical space. The connecting part 2 is embedded in the cylindrical space. The sensing element 5 is arranged on the side of the cantilever plate 4 away from the connecting part 2. The sensing element 5 includes a piezoelectric thin film.

[0043] The seal whisker-like component 1, which mimics the structure and surface features of a seal whisker, is the sensing component in this sensor used to achieve high-precision monitoring of fluid dynamics (such as flow rate, flow direction, and pressure changes).

[0044] In one or more embodiments, the seal whisker 1 can be a strip-shaped structure that biomimetically simulates the microgroove structure covering the surface of a seal whisker.

[0045] In one or more embodiments, the seal whiskers 1 can be a proportionally simulated structural component that mimics the gradient shape, size, and surface microgroove structure of a seal whiskers.

[0046] In an alternative implementation, the seal whiskers 1 can be a 3D-printed simulated structural component.

[0047] In one or more embodiments, the seal whiskers 1 may have a connecting part 2 at the bottom position, which cooperates with the base.

[0048] In optional implementations, such as Figure 3 As shown, the connecting part 2 can be a cylindrical component, and the seal whiskers 1 is arranged along the central axis of the connecting part 2.

[0049] In an optional embodiment, the seal whiskers 1 can be embedded in the connecting part 2.

[0050] In an optional embodiment, the imitation seal whiskers 1 can be connected to the connecting part 2 by means of bonding, integral molding, etc., so that the structural deflection response of the imitation seal whiskers 1 under hydrodynamic action can be directly transmitted to the connecting part 2, and further transmitted through the connecting part 2.

[0051] In an optional embodiment, the connecting part 2 may be an integral structural component 3D printed with the imitation seal whiskers 1.

[0052] The base is the main structure in the sensor used to limit the seal whiskers 1 and transmit the dynamic response of structural deflection.

[0053] like Figure 1 , Figures 4-8As shown, the base may include a base plate 3 and four cantilevered uprights 4. The four cantilevered uprights 4 are evenly distributed around the connecting part 2, and the bottom of each cantilevered upright is connected to the base plate 3.

[0054] In optional implementations, such as Figure 8 As shown, the base plate 3 can be a square plate-shaped structural component, and the cantilever plate 4 can be a rectangular plate-shaped structural component. The height of the cantilever plate 4 is greater than its width, and the width of the cantilever plate 4 is the base.

[0055] In one or more implementations, such as Figure 6 As shown, the upper half of the cantilever plate 4 can be provided with a mass block 41. The mass block 41 can make the upper half of the cantilever plate 4 heavier. The connecting part 2 is in contact with the mass block 41. When the imitation seal whiskers 1 deflects in any direction, the cantilever plate 4 can be deformed more sensitively, and then the sensing element 5 generates a changing electrical signal to achieve high sensitivity and high precision sensing and monitoring.

[0056] In an optional implementation, the cantilever plate 4 can be a 3D-printed structural component. This ensures the fabrication quality of each component and guarantees the quality of weak points in the structure.

[0057] In an optional embodiment, the bottom of the cantilever plate 4 may be provided with a pin 61, and the base plate 3 may be provided with a hole 31. The pin 61 and the hole 31 are connected to each other, so that the cantilever plate 4 can be directly connected to the base plate 3.

[0058] In an optional implementation, the thickness of the cantilever plate 4 can be greater than or equal to 0.5 mm. The components are relatively small in size, making them suitable for installation in various environments.

[0059] In an optional embodiment, the number of cantilever plates 4 can also be three, five, six, etc., which can be evenly distributed around the connection part 2 of the cylindrical component.

[0060] In one or more implementations, such as Figures 4-5 As shown, all cantilever panels 4 can be integrated and mounted on the base plate 6. The base plate 6 has pins 61 at its bottom, and the base plate 3 has holes 31. The pins 61 and holes 31 mate and connect, allowing multiple cantilever panels 4 to be integrated and mounted on the base plate 3 via the connection between the base plate 6 and the base plate 3. Integrating multiple cantilever panels 4 improves the overall structural stability of the base, reduces the number of installation connection points, avoids the impact of installation errors on monitoring results, and further improves monitoring sensitivity and accuracy.

[0061] In an optional embodiment, a second limiting member 62 with a cylindrical limiting post can be provided at the center of the top surface of the substrate 6, and a first limiting member 21 with a circular hole can be provided on the connecting part 2, so that the connecting part 2 and the substrate 6 can be connected by the cooperation of the first limiting member 21 and the second limiting member 62, and the connecting part 2 of the cylindrical member can form a relatively uniform response transmission with the cantilever plate 4 in any direction.

[0062] In an optional embodiment, when the cantilever uprights 4 are directly connected to the base plate 3, the second limiting member 62 can also be set at the center of the top surface of the base plate 3.

[0063] In one or more implementations, such as Figures 5-6 As shown, the substrate 6 may have holes and slots, and several wires 7 are arranged along the holes and slots. The wires 7 are connected to the sensing element 5, and the piezoelectric film and the two-stage amplifier are connected through the wires 7.

[0064] In an optional embodiment, the slot can be provided to extend vertically along the pin 61, so that the wire 7 can extend downward from the bottom of the cantilever plate 4 to the space below the base plate 3.

[0065] In one or more embodiments, a housing 8 may also be included, which is detachably connected to the base plate 3, and a cantilevered upright plate 4 is disposed inside the housing 8.

[0066] In an optional embodiment, when all the cantilever plates 4 are integrated on the base plate 6, the base plate 6 can be nested with the housing 8, so that the relative position of the housing 8 and the cantilever plates 4 is more stable due to the restriction of the base plate 6.

[0067] In an optional embodiment, the base plate 3, the substrate 6 and the housing 8 can be uniformly square to form a sensor that is cubic in shape as a whole. Alternatively, the shapes of the base plate 3, the substrate 6 and the housing 8 can be adjusted according to the actual situation to change the external structure of the sensor.

[0068] Sensing element 5 is the core component of this sensor used to convert structural strain into electrical signals.

[0069] In one or more embodiments, the sensing element 5 may be a piezoelectric thin film, which is self-powered and does not require an external power supply, thereby reducing the limitations of power supply conditions on the use of the sensor.

[0070] In an optional embodiment, the sensing element 5 may be a PVDF piezoelectric thin film element.

[0071] In an optional embodiment, the thickness of the piezoelectric film can be greater than or equal to 52 μm, preferably 52 μm.

[0072] In one or more implementations, such as Figure 5As shown, the PVDF piezoelectric thin film element can be nested with the cantilever plate 4. The excellent dynamic performance and high precision of the PVDF piezoelectric thin film enable the measurement of the transient response of dynamic strain, exhibiting sensitivity superior to conventional strain gauge sensors. The biomimetic seal whisker eddy current sensor applied to this scheme can further enhance its monitoring sensitivity.

[0073] In an optional embodiment, a groove can be provided on the cantilever plate 4. The thickness of the groove is the same as the thickness of the piezoelectric film. The length and width of the groove can cover as much of the surface of the cantilever plate 4 as possible to improve the monitoring range and enable more sensitive monitoring of the hydrodynamic response of the simulated seal whiskers 1. The bottom of the groove can penetrate through the bottom of the cantilever plate 4, so that the wire 7 of the piezoelectric film can be extended along the holes and grooves on the cantilever plate 4, which facilitates the laying of the wire 7, improves the stability of the wire 7 installation, and reduces the bending of the wire 7.

[0074] This embodiment presents a piezoelectric biomimetic seal whisker eddy current sensor. When the seal whisker 1 deflects under hydrodynamic force, the hydrodynamic response of the seal whisker 1 is transmitted to the mass block 41 on the cantilever plate 4, causing the cantilever plate 4 to bend. This, in turn, causes the sensing element 5 on the cantilever plate 4 to generate a change in electrical signal, thus realizing the sensing of hydrodynamic changes. The sensing element 5 is set on the cantilever plate 4, which makes installation easier and reduces the overall manufacturing cost of the sensor. At the same time, the use of a piezoelectric thin film as the sensing element 5 provides a suitable sensor structure for the use of piezoelectric thin films in the field of flow field monitoring, improving the monitoring sensitivity and accuracy of existing sensors.

[0075] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A piezoelectric bionic mustache eddy current sensor, characterized in that, The utility model relates to a kind of seagull whisker simulation devices, including: Seagull whisker simulation (1), the bottom of seagull whisker simulation (1) is equipped with connecting part (2); Base, the base includes bottom plate (3) and at least two cantilevered vertical plate (4), the bottom of cantilevered vertical plate (4) is connected with bottom plate (3), the upper half of cantilevered vertical plate (4) is equipped with mass block (41), several cantilevered vertical plate (4) are arranged around connecting part (2), form cylindrical space, connecting part (2) is embedded in the cylindrical space inside; Sensing element (5), sensing element (5) is arranged on the side of cantilevered vertical plate (4) away from connecting part (2), and sensing element (5) includes piezoelectric film.

2. A piezoelectric bionic mustache eddy current sensor according to claim 1, characterized in that, Sensing element (5) includes PVDF piezoelectric film element, and sensing element (5) is nested with cantilevered vertical plate (4).

3. A piezoelectric bionic mustache eddy current sensor according to claim 2, characterized in that, At least four cantilevered vertical plate (4) are uniformly distributed around connecting part (2), and connecting part (2) is attached to mass block (41).

4. A piezoelectric bionic mustache eddy current sensor according to claim 3, characterized in that, Seagull whisker simulation (1) includes 3D printing simulation structure, and cantilevered vertical plate (4) and / or connecting part (2) include 3D printing structure.

5. A piezoelectric bionic mustache eddy current sensor according to claim 3, characterized in that, All cantilevered vertical plate (4) is integrally arranged on substrate (6), substrate (6) is provided with pin (61), bottom plate (3) is provided with insertion hole (31), and pin (61) is connected with insertion hole (31).

6. A piezoelectric bionic mustache eddy current sensor according to claim 5, characterized in that, Bottom plate (3) and / or substrate (6) are provided with hole slot, and several wires (7) are arranged along the hole slot, and wire (7) is connected with sensing element (5).

7. A piezoelectric bionic mustache eddy current sensor according to claim 5, characterized in that, It also includes shell (8), shell (8) is detachably connected with bottom plate (3), and cantilevered vertical plate (4) is arranged in shell (8).

8. A piezoelectric bionic mustache eddy current sensor according to claim 7, characterized in that, Substrate (6) is nested with shell (8).

9. A piezoelectric bionic mustache eddy current sensor according to claim 5, characterized in that, Connecting part (2) includes cylindrical member, and first limiting part (21) is arranged on the cylindrical member, and second limiting part (62) is arranged on bottom plate (3) or substrate (6), and first limiting part (21) and second limiting part (62) are connected.

10. A piezoelectric bionic mustache eddy current sensor according to any one of claims 1-9, characterized in that, The thickness of cantilevered vertical plate (4) is greater than or equal to 0.5mm, and the thickness of piezoelectric film is greater than or equal to 52 μm.

Citation Information

Patent Citations

  • A flexible seal whisker-inspired underwater flow field sensor and its fabrication method

    CN114061630B