Safe sampling module and safe chemical equipment
The safety sampling module utilizes air pressure and pneumatic components to achieve safe sampling of chemical liquids, solving the safety and convenience issues in the chemical liquid sampling process in semiconductor factories and improving production quality and safety.
Patent Information
- Application Number
- CN202520198944.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2025-01-03
- Filing Date
- 2025-02-08
- Publication Date
- 2026-02-17
- Estimated Expiration
- 2035-02-08
AI Technical Summary
In semiconductor factories, how to safely and conveniently sample chemical liquids to improve production quality and safety is a key concern, especially given the risks involved in sampling flammable chemicals.
The safety sampling module uses pneumatic pressure to fix the sampling bottle and opens or closes the cap using a screw capping device. Combined with components such as a rotating base, pneumatic rotary actuator, vertical movement device, belt pulley drive system and pneumatic motor, it can achieve safe sampling of chemical liquids.
This improves the safety and convenience of chemical liquid sampling, reduces the risk of spark generation, and ensures the safety and efficiency of semiconductor production.
Smart Images
Figure CN223926058U_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a safe chemical device. More particularly, it relates to a safe chemical liquid sampling device. Background Technology
[0002] With the booming development of the domestic and international semiconductor markets in recent years due to the demand for materials for computers and their peripheral products, the semiconductor industry has continued to expand, generating a large amount of foreign exchange income.
[0003] The manufacturing process of semiconductor components is extremely complex, involving technologies that encompass almost all the most important and crucial advancements in modern scientific development. Therefore, semiconductor component production is not only a cutting-edge technology industry but also one requiring substantial capital investment to sustain its growth.
[0004] However, as the design of semiconductor components becomes increasingly complex, the manufacturing technology of semiconductor components becomes more precise and complex, and the potential occupational hazards and property losses become more and more complex, such as the chemical liquids commonly used in semiconductor process units such as epitaxy, diffusion, ion implantation, chemical vapor deposition, etching and lithography.
[0005] In semiconductor factories, chemical liquids are stored in chemical storage containers and connected to the factory's supply lines when needed. In current semiconductor manufacturing systems, more than 30 different chemical liquids may be supplied to the production line at the same time. To ensure the quality and yield of component production, it is necessary to regularly test various chemical liquids.
[0006] However, since some chemical liquids are flammable, how to safely and conveniently sample during the sampling process for testing items will help improve the quality and safety of semiconductor production, which is a direction that relevant personnel in this field are actively striving for. Utility Model Content
[0007] This novel content is intended to provide a simplified summary of the disclosure to enable the reader to have a basic understanding of it. This novel content is not a complete overview of the disclosure and is not intended to identify key / critical components of the embodiments of the invention or to define the scope of the invention.
[0008] One objective of this invention is to provide a safe chemical apparatus that can safely sample chemical liquids to improve the quality and safety of semiconductor manufacturing.
[0009] To achieve the above objectives, the present invention relates to a safety sampling module comprising a sampling bottle holder and a capping device. The sampling bottle holder is used to fix the body of the sampling bottle, while the capping device is disposed above the sampling bottle holder for opening or closing the bottle cap. The sampling bottle holder uses air pressure to fix the sampling bottle, and the capping device uses air pressure to generate torque to rotate the bottle cap, thereby opening or closing the bottle cap.
[0010] In some embodiments, the safety sampling module further includes a rotating base connected to the sampling bottle holder for rotating the sampling bottle.
[0011] In some embodiments, the safety sampling module further includes a pneumatic rotary actuator connected to a rotating base to rotate the rotating base, thereby rotating the sampling bottle.
[0012] In some embodiments, the safety sampling module further includes a vertical movement device connected to the capping device for moving the capping device up and down. Additionally, the vertical movement device includes a vertical movement pneumatic cylinder for using pneumatic force to move the capping device up and down.
[0013] In some embodiments, the safety sampling module further includes a pulley drive system connected to the capping device to open or close the cap of the sampling bottle.
[0014] In some embodiments, the safety sampling module further includes a pneumatic motor connected to a pulley drive system, so as to use the pneumatic motor to rotate the pulley drive system, thereby rotating the capping device to open or close the cap of the sampling bottle.
[0015] In some embodiments, the safety sampling module further includes a sealed housing and a double-glazed isolation door. The double-glazed isolation door is installed in the sealed housing, and the sampling bottle holder and capping device are sealed within the sealed housing and the double-glazed isolation door.
[0016] In some embodiments, the safety sampling module further includes a chemical liquid outlet pipeline moving device disposed between the sampling bottle holder and the capping device, for injecting chemical liquid into the sampling bottle.
[0017] In some embodiments, the chemical liquid outlet line moving device includes an outlet line holder and a pneumatic horizontal mover. The outlet line holder is used to fix multiple chemical liquid outlet lines, while the pneumatic horizontal mover is connected to the outlet line holder to move the chemical liquid outlet lines to align with the sampling bottle.
[0018] In some embodiments, the safety chemical device includes a controller and the aforementioned safety sampling module, the safety sampling module being connected to the controller to control the safety sampling module via the controller.
[0019] In some embodiments, the safety chemical device further includes a chemical liquid storage device disposed on one side of the safety sampling module for sampling chemical liquids by the chemical liquid storage device.
[0020] In some embodiments, the chemical liquid storage device is used to store flammable organic solvents and chemical agents.
[0021] In some embodiments, a safety-type chemical device is a Chemical Transfer Unit (CTU), a Clear Coupler Booth (CCB), or a chemical storage device.
[0022] Therefore, this novel safe sampling module and the safe chemical equipment with the safe sampling module can safely and conveniently obtain samples of chemical liquids used in semiconductor production lines, especially flammable organic solvents or chemical solutions, improving the safety and convenience of sampling, thereby increasing the revenue and profit of semiconductor production. Attached Figure Description
[0023] To make the above and other objects, features, advantages and embodiments of this utility model more apparent and understandable, the accompanying drawings are described below:
[0024] Figure 1 This is a perspective view of a safety sampling module according to an embodiment of the present invention;
[0025] Figure 2 yes Figure 1 A three-dimensional schematic diagram of the safety sampling module from another angle;
[0026] Figure 3 This is a perspective view of a safety sampling module according to another embodiment of the present invention;
[0027] Figure 4 This is a perspective view of a safety chemical device according to yet another embodiment of the present invention.
[0028] Figure label:
[0029] 100: Safety Sampling Module
[0030] 110: Sampling bottle holder
[0031] 120: Rotating base
[0032] 122: Pneumatic rotary actuator
[0033] 130: Moving device for chemical liquid outlet pipeline
[0034] 132: Pneumatic horizontal mover
[0035] 134: Outlet pipe fastener
[0036] 140: Chemical liquid outlet pipeline
[0037] 150: Capping device
[0038] 160: Vertical moving device
[0039] 162: Vertical moving pneumatic cylinder
[0040] 170: Belt and pulley drive system
[0041] 180: Pneumatic motor
[0042] 300: Security Sampling Module
[0043] 310: Sealed housing
[0044] 320: Double-glazed partition door
[0045] 400: Safety-type chemical equipment
[0046] 410: Chemical liquid storage device
[0047] 420: Controller
[0048] 600: Sampling bottle
[0049] 610: Bottle body
[0050] 620: Bottle Cap Detailed Implementation
[0051] The following is a detailed description of embodiments in conjunction with the accompanying drawings. However, the provided embodiments are not intended to limit the scope of this utility model, and the description of the structural operation is not intended to limit the order of execution. Any structure resulting from the recombination of components and producing a device with equivalent functionality is within the scope of this utility model. Furthermore, the drawings are for illustrative purposes only and are not drawn to their original dimensions. For ease of understanding, the same or similar components will be designated with the same symbols in the following description.
[0052] Furthermore, unless otherwise specified, the terms used throughout this specification and the claims generally have their ordinary meaning in the context of the art, the invention, and the specific application. Certain terms used to describe this invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.
[0053] In the embodiments and claims, unless otherwise specified in the text, the words "a" and "the" may refer to one or more. The numbers used in the steps are only used to indicate the steps for ease of explanation, and are not used to limit the order or implementation method.
[0054] Secondly, the terms "contains," "includes," "has," "contains," etc., used in this article are all open-ended terms, meaning that they include but are not limited to.
[0055] Figure 1 This is a perspective view of a safety sampling module according to an embodiment of the present invention. Figure 2 This is a three-dimensional diagram from another angle.
[0056] Figure 3 This is a perspective view of a safety sampling module according to another embodiment of the present invention. Furthermore, Figure 4 This is a perspective view of a safety chemical device according to yet another embodiment of the present invention.
[0057] See also Figure 1 as well as Figure 2 As shown in the figure, the safety sampling module 100 includes a sampling bottle holder 110 and a capping device 150. The sampling bottle holder 110 is used to fix the bottle body 610 of the sampling bottle 600, while the capping device 150 is disposed above the sampling bottle holder 110 and is used to open or close the cap 620 of the sampling bottle 600. The sampling bottle holder 110 uses air pressure to clamp and fix the sampling bottle 600 by means of air pressure rings, etc., and the capping device 150 also uses air pressure to expand air pressure rings, etc., to fix the cap 620 of the sampling bottle 600, and uses air pressure to generate torque to rotate the cap 620, thereby opening or closing the cap 620 of the sampling bottle 600.
[0058] The safety sampling module 100 uses aerodynamics to push and fix the sampling bottle 600 and its components, effectively preventing sparks from being generated during the sampling process, thereby reducing the risk of the sampling process and improving the safety and convenience of the sampling process.
[0059] Therefore, the safety sampling module 100 can safely and quickly sample chemical liquids. In particular, semiconductor plants often use a variety of chemicals due to process requirements, including highly hazardous chemicals such as flammable, organic, or strong acid / alkali chemicals like acetone and isopropyl alcohol. Improper design, operation, or management during sampling could lead to serious accidents such as poisoning, fire, or explosion. Such accidents can cause significant losses to the company, including increased insurance premiums and lost orders. This new safety sampling module 100 can safely and quickly sample chemical liquids, avoiding the risk of sparks during sampling, reducing the overall risk, and improving the safety and convenience of the sampling process.
[0060] In some embodiments, the chemical liquid used for sampling may comprise chemical solvents and chemical solutions, or other liquids. Examples include silica methane (SiH4), phosphine (PH3), hydrofluoric acid (HF), acetone, isopropyl alcohol, tetramethylammonium hydroxide (TMAH), hydrofluoric acid (HF), nitric acid, phosphoric acid, acetic acid, hydrogen peroxide, sulfuric acid, or deionized water (DI water).
[0061] In some embodiments, the safety sampling module 100 further includes a rotating base 120 and a pneumatic rotary actuator 122. The rotating base 120 is connected to the sampling bottle holder 110 for rotating the sampling bottle 600, for example, by rotating it clockwise or counterclockwise by a predetermined angle, such as 10 degrees, 20 degrees, 30 degrees, 45 degrees, 90 degrees, 120 degrees, 150 degrees, 180 degrees, and / or 360 degrees, all of which do not depart from the spirit and protection scope of this invention. The pneumatic rotary actuator 122 is connected to the rotating base 120 to generate rotation using gas pressure, thereby rotating the rotating base 120 and the sampling bottle 600.
[0062] In some embodiments, the safety sampling module 100 further includes a vertical moving device 160. The vertical moving device 160 is connected to the capping device 150 and is used to move the capping device 150 up and down. In some embodiments, the vertical moving device 160 includes a vertical moving pneumatic cylinder 162 to move the capping device 150 up and down using pneumatic force.
[0063] In some embodiments, the safety sampling module 100 further includes a pulley drive system 170 and a pneumatic motor 180. The pulley drive system 170 is connected to the capping device 150 for opening or closing the cap 620 of the sampling bottle 600. Furthermore, the pneumatic motor 180 is connected to the pulley drive system 170 for rotating the pulley drive system 170, thereby rotating the capping device 150 to open or close the cap 620 of the sampling bottle 600.
[0064] In some embodiments, the safety sampling module 100 further includes a chemical liquid outlet pipeline moving device 130, which is disposed between the sampling bottle fixing seat 110 and the capping device 150, for injecting chemical liquid into the sampling bottle 600.
[0065] In some embodiments, the chemical liquid outlet line moving device 130 includes an outlet line retainer 134 and a pneumatic horizontal mover 132. The outlet line retainer 134 is used to fix a plurality of chemical liquid outlet lines 140, while the pneumatic horizontal mover 132 is connected to the outlet line retainer 134 to move the chemical liquid outlet lines 140 to align with the sampling bottle 600.
[0066] Further reading Figure 3 In some embodiments, the secure sampling module 300 includes, in addition to, Figure 1 and Figure 2 The safety sampling module 100 illustrated herein further includes a sealed housing 310 and a double-glazed isolation door 320. The sealed housing 310 effectively seals the various components of the safety sampling module 100, while the double-glazed isolation door 320 further enhances the safety and convenience of sampling. In some embodiments, the double-glazed isolation door 320 is mounted on the sealed housing 310, and the sampling bottle holder 110 and the capping device 150 are both sealed within the sealed housing 310 and the double-glazed isolation door 320. Furthermore, the double-glazed isolation door 320 may include two separate glass partitions to enhance the safety and convenience of sampling, all without departing from the spirit and scope of this invention.
[0067] In some embodiments, each power component within the sealed housing 310 is pneumatically powered to enhance safety during sampling.
[0068] In addition, see Figure 4 A safety chemical device 400 includes a controller 420, a chemical liquid storage device 410, and the aforementioned safety sampling module 100. The safety sampling module 100 is connected to the controller 420 for control via the controller 420. The chemical liquid storage device 410 may be disposed on one side of the safety sampling module 100, and the safety sampling module 100 can directly sample the chemical liquid from the chemical liquid storage device 410.
[0069] In some embodiments, the chemical liquid storage device 410 is used to store flammable organic solvents, chemical agents, or any other liquids, without departing from the spirit and protection scope of this invention.
[0070] In some embodiments, the safety chemical equipment 400 may be a chemical transfer unit (CTU), a clear coupler booth (CCB), and / or a chemical storage device, but the present invention is not limited thereto.
[0071] In summary, this novel safe sampling module and the safe chemical equipment incorporating the safe sampling module can safely and conveniently obtain samples of chemical liquids used in semiconductor production lines, especially flammable organic solvents or chemical solutions, thereby improving the safety and convenience of sampling and increasing the revenue and profits of semiconductor production.
[0072] Although the present invention has been described above with reference to embodiments, it is not intended to limit the present invention. Any person skilled in the art can make various modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended claims.
Claims
1. A secure sampling module, characterized in that, Include: A sampling bottle holder is used to secure the body of the sampling bottle; and A capping device is disposed above the sampling bottle holder for opening or closing the cap of the sampling bottle. The sampling bottle holder uses air pressure to fix the sampling bottle, and the capping device uses air pressure to generate torque to rotate the cap of the sampling bottle to open or close the cap of the sampling bottle.
2. The secure sampling module as described in claim 1, characterized in that, It also includes a rotating base connected to the sampling bottle holder for rotating the sampling bottle.
3. The secure sampling module as described in claim 2, characterized in that, It also includes: A pneumatic rotary actuator is connected to the rotating base to rotate the rotating base, thereby rotating the sampling bottle.
4. The secure sampling module as described in claim 3, characterized in that, It also includes: A vertical moving device is connected to the capping device to move the capping device up and down.
5. The secure sampling module as described in claim 4, characterized in that, The vertical moving device includes: A vertically moving pneumatic cylinder is used to move the capping device up and down using pneumatic force.
6. The secure sampling module as described in claim 1, characterized in that, It also includes: A pulley drive system is connected to the capping device to open or close the cap of the sampling bottle.
7. The secure sampling module as described in claim 6, characterized in that, It also includes: A pneumatic motor is connected to the belt drive system to rotate the belt drive system, thereby rotating the capping device to open or close the cap of the sampling bottle.
8. The secure sampling module as described in claim 1, characterized in that, It also includes: Sealed housing; and A double-glazed isolation door is installed in the sealed housing, and the sampling bottle holder and the capping device are sealed within the sealed housing and the double-glazed isolation door.
9. The secure sampling module as described in claim 1, characterized in that, It also includes: A chemical liquid outlet pipeline moving device is disposed between the sampling bottle fixing base and the capping device to inject chemical liquid into the sampling bottle.
10. The secure sampling module as described in claim 9, characterized in that, The moving device for the chemical liquid outlet pipeline includes: Outlet pipe fasteners, used to secure multiple chemical liquid outlet pipes; and A pneumatic horizontal mover, connected to the outlet pipe holder, is used to move the chemical liquid outlet pipes to align them with the sampling bottle.
11. A safe chemical device, characterized in that, Include: Controller; and The secure sampling module as described in any one of claims 1 to 10 is connected to the controller to control the secure sampling module via the controller.
12. The safe chemical equipment as described in claim 11, characterized in that, It also includes: A chemical liquid storage device is installed on one side of the safety sampling module to sample chemical liquids.
13. The safe chemical equipment as described in claim 12, characterized in that, This chemical liquid storage device is used to store flammable organic solvents and chemical agents.
14. The safe chemical equipment as described in claim 11, characterized in that, This type of safe chemical equipment is for chemical transfer systems (CTU), tank truck filling systems (CCB), or chemical storage equipment.