Aging test equipment

Abstract

The utility model relates to the technical field of aging test, in particular to aging test equipment, which comprises a rack, a control cabinet door and a sealing mechanism, and is characterized in that the rack is provided with an aging cavity used for carrying out aging test on a workpiece and an opening communicated with the aging cavity; the control cabinet door is arranged on the machine frame and located beside the opening in the first direction. The closing mechanism comprises a door plate, the door plate is arranged on the rack and can reciprocate in the first direction relative to the rack, the opening can be shielded or opened in the moving process of the door plate, and when the opening is opened, the door plate is overlapped with the control cabinet door. When the opening of the door plate of the aging test equipment is opened, the door plate is overlapped with the control cabinet door, so that the occupation of the front space of the equipment is reduced, workpieces are taken and placed without bypassing the door plate, and the test efficiency of the workpieces is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of aging test, especially relates to a kind of aging test equipment. BACKGROUND

[0002] Under the background of rapid development of semiconductor industry, a large number of new semiconductor chips emerge, which also gives rise to a large number of semiconductor testing needs. Semiconductor testing generally needs to test its function and service life. When testing the service life of a semiconductor, an aging test equipment is needed. The existing aging test equipment generally has an aging chamber for testing and a door plate. The door plate is rotatably arranged on a rack to open or close the opening of the aging chamber, so as to facilitate the taking and placing of semiconductors when the opening is opened, and the aging test of semiconductors when the opening is closed. However, when the door plate is opened, at least part of the door plate is usually moved to the outside of the rack. Especially for the door plate installed on the frame in a hinged manner, the door plate occupies a large space in front of the equipment after being opened. When the semiconductor is taken and placed by an AGV, the door plate needs to be bypassed, which causes inconvenience in operation and reduces the efficiency of taking and placing semiconductors.

[0003] Therefore, there is an urgent need to research an aging test equipment to solve the above problems. CONTENT OF THE UTILITY MODEL

[0004] The utility model aims to provide an aging test equipment to solve the problem of large space occupation and reduced efficiency of taking and placing semiconductors when the door plate is opened in the prior art.

[0005] To achieve the above purpose, the utility model adopts the following technical scheme:

[0006] The aging test equipment comprises:

[0007] A rack having an aging chamber for aging test of a workpiece and an opening communicating with the aging chamber;

[0008] A control cabinet door arranged on the rack and located beside the opening along a first direction;

[0009] A closing mechanism comprising a door plate arranged on the rack and capable of reciprocating along the first direction relative to the rack. During the movement of the door plate, the opening can be blocked or opened. When the opening is opened, the door plate overlaps with the control cabinet door.

[0010] As an optional technical scheme of the aging test equipment, the aging test equipment further comprises an air exchange channel, at least part of which is arranged on the rack and located at the top of the aging chamber.

[0011] The closing mechanism further comprises a first driving assembly, an output end of the first driving assembly is in transmission connection with the door plate, the first driving assembly is located at the top of the aging cavity and in the installation space.

[0012] As an optional technical solution of the aging test equipment, the first driving assembly comprises a driving base, a driving support and a moving piece, the driving base is arranged on the rack, the driving support is movably arranged on the driving base in a second direction, and the moving piece is movably arranged on the driving support in a first direction, and the door plate is connected with the moving piece.

[0013] As an optional technical solution of the aging test equipment, the first driving assembly further comprises a first sliding rail, the first sliding rail is arranged on the driving base, and the driving support is in sliding cooperation with the first sliding rail through a first sliding block; and / or,

[0014] The first driving assembly further comprises a second sliding rail, the second sliding rail is arranged on the top of the driving support, the moving piece comprises a first plate and a second plate connected perpendicularly, the first plate is connected with the door plate, the bottom of the second plate is provided with a second sliding block, and the second sliding block is in sliding cooperation with the second sliding rail.

[0015] As an optional technical solution of the aging test equipment, the first driving assembly further comprises a first driving piece, the first driving piece is arranged on the rack, and an output end thereof is in transmission connection with the driving support; and / or,

[0016] The first driving assembly further comprises a second driving piece, the second driving piece is arranged on the driving support, and an output end thereof is in transmission connection with the moving piece.

[0017] As an optional technical solution of the aging test equipment, the second driving piece is a linear module, the linear module is arranged on the driving support, and the moving piece further comprises a connecting plate connected between the second plate and an output end of the linear module; or,

[0018] The second driving piece is a servo motor, a screw rod is rotatably arranged on the driving support and in transmission connection with an output end of the servo motor, and the moving piece further comprises a connecting plate connected with the second plate, and the connecting plate has a screw hole in thread cooperation with the screw rod.

[0019] As an optional technical solution of the aging test equipment, the control cabinet door comprises a door frame and a door body, the door frame is arranged on the rack and supports the first driving assembly at the top, and the door body is rotatably arranged on the door frame.

[0020] As an optional technical solution of the aging test equipment, a display screen and an operation table are arranged on the door body.

[0021] As an optional technical scheme of the aging test equipment, the closing mechanism further comprises a second driving assembly, the second driving assembly is arranged at the bottom of the rack, an output end of the second driving assembly is connected with the door plate, when the door plate blocks the opening, the second driving assembly is used for driving the door plate to move in a second direction, so that the door plate extrudes the outer periphery of the opening or moves away from the opening.

[0022] As an optional technical scheme of the aging test equipment, the second driving assembly comprises a guide and a third driving member, the third driving member is arranged on the rack, and an output end of the third driving member is in transmission connection with the guide to drive the guide to reciprocate in a second direction; the guide has a guide groove, and when the door plate blocks the opening, the lower end of the door plate is located in the guide groove.

[0023] The utility model discloses the beneficial effects are:

[0024] The utility model provides a kind of aging test equipment, which comprises rack, closing mechanism and control cabinet door, wherein, rack has aging cavity, control cabinet door is located in the side of opening, the door plate of closing mechanism can reciprocate in first direction, and can open or close opening, when the door plate opens opening, overlap with control cabinet door, reduce the occupation of space, and when taking and placing workpiece, it is not necessary to bypass door plate, improve the test efficiency of workpiece. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is the structure schematic diagram of one view angle of the aging test equipment in the utility model embodiment;

[0026] Figure 2 It is the structure schematic diagram of another view angle of the aging test equipment in the utility model embodiment;

[0027] Figure 3 It is the structure schematic diagram of closing mechanism and control cabinet door in the utility model embodiment;

[0028] Figure 4 It is Figure 3 The enlarged view of A in the utility model embodiment;

[0029] Figure 5 It is the structure schematic diagram of closing mechanism in the utility model embodiment.

[0030] In the figure:

[0031] 100, rack;110, aging cavity;

[0032] 200, control cabinet door;210, door frame;220, door body;221, display screen;222, operation table;

[0033] 300, closing mechanism; 310, door panel; 320, first driving assembly; 321, driving base; 3211, first sliding rail; 322, driving support; 3221, second sliding rail; 323, moving piece; 3231, first plate; 3232, second plate; 3233, connecting plate; 324, first driving piece; 325, second driving piece;

[0034] 330, second driving assembly; 331, guide piece; 3311, guide groove; 332, third driving piece. DETAILED DESCRIPTION

[0035] The technical solutions of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0036] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", etc. are only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and moreover, the "above", "above" and "above" of the first feature relative to the second feature include the "directly above" and "obliquely above" of the first feature relative to the second feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature relative to the second feature include the "directly below" and "obliquely below" of the first feature relative to the second feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0037] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0038] The embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary only, and are used only for explaining the present application, and cannot be understood as a limitation of the present application.

[0039] As shown in Figures 1 to 5 The present embodiment provides an aging test equipment, which comprises a rack 100, a control cabinet door 200 and a closing mechanism 300, wherein the rack 100 has an aging cavity 110 for aging test of a workpiece and an opening communicating with the aging cavity 110; the control cabinet door 200 is arranged on the rack 100 and is located beside the opening along a first direction; the closing mechanism 300 comprises a door plate 310, which is arranged on the rack 100 and can reciprocate along the first direction relative to the rack 100, and during the movement of the door plate 310, the opening can be blocked or opened, and when the opening is opened by the door plate 310, the door plate 310 overlaps the control cabinet door 200 in a second direction. The overlapping of the door plate 310 and the control cabinet door 200 when the opening is opened by the door plate 310 reduces the occupation of the space in front of the equipment, and when the workpiece is taken or placed, it is not necessary to bypass the door plate 310, thereby improving the test efficiency of the workpiece.

[0040] The first direction is a left-right direction, and the second direction is a front-rear direction.

[0041] As shown in Figure 3 The aging test equipment further comprises an air exchange channel for air exchange of the aging cavity 110, at least a part of the air exchange channel is arranged on the rack 100 and located at the top of the aging cavity 110; the closing mechanism 300 further comprises a first driving assembly 320, the output end of the first driving assembly 320 is in transmission connection with the door plate 310, and the first driving assembly 320 is located at the top of the aging cavity 110 and in an installation space. The installation space is located in front of the air exchange channel. The layout of such a position rationally utilizes the top space of the aging test equipment, so that the installation of the first driving assembly 320 does not increase the height of the aging test equipment; at the same time, the position is close to the door plate 310, so as to facilitate power transmission.

[0042] As shown in Figure 4As shown, the first driving assembly 320 comprises a driving base 321, a driving support 322 and a moving piece 323, the driving base 321 is arranged on the rack 100, the driving support 322 is movably arranged on the driving base 321 along the second direction, the moving piece 323 is movably arranged on the driving support 322 along the first direction, and the door plate 310 is connected with the moving piece 323. This kind of arrangement realizes the driving of the door plate 310 in the first direction and the second direction, thereby facilitating the plugging of the opening, and during the movement along the first direction, a certain gap can be left between the door plate 310 and the rack 100, thereby avoiding scratching.

[0043] In order to improve the fluency of the movement of the door plate 310, in some embodiments, the first driving assembly 320 further comprises a first sliding rail 3211 arranged on the driving base 321, and the driving support 322 is in sliding cooperation with the first sliding rail 3211 through a first sliding block. The first driving assembly 320 further comprises a second sliding rail 3221 arranged on the top of the driving support 322, and the moving piece 323 comprises a first plate 3231 and a second plate 3232 connected vertically, the first plate 3231 is connected with the door plate 310, and the bottom of the second plate 3232 is provided with a second sliding block in sliding cooperation with the second sliding rail 3221. In some embodiments, the first plate 3231 and the second plate 3232 are integrally arranged.

[0044] The first driving assembly 320 further comprises a first driving piece 324 arranged on the rack 100, and the output end of the first driving piece 324 is in transmission connection with the driving support 322. The first driving assembly 320 further comprises a second driving piece 325 arranged on the driving support 322, and the output end of the second driving piece 325 is in transmission connection with the moving piece 323. The arrangement of the first driving piece 324 and the second driving piece 325 realizes the automatic opening and closing of the door plate 310, improves the efficiency of the door plate 310 in shielding the opening or opening the opening, and thereby improves the test efficiency of the aging test equipment.

[0045] In combination Figure 5 As shown, the second driving piece 325 is a linear module arranged on the driving support 322, and the moving piece 323 further comprises a connecting plate 3233 connected between the second plate 3232 and the output end of the linear module, so as to realize the connection between the second driving piece 325 and the moving piece 323. In other embodiments, the second driving piece 325 is a servo motor, a screw rod is rotatably arranged on the driving support 322 and in transmission connection with the output end of the servo motor, and the moving piece 323 further comprises a connecting plate 3233 connected with the second plate 3232, and the connecting plate 3233 has a screw hole in thread cooperation with the screw rod. The arrangement of the connecting plate 3233 enables the moving piece 323 to adapt to different driving modes, so as to adapt to different application scenarios, and does not affect the structure of the first plate 3231 and the second plate 3232.

[0046] To improve the safety of the first driving assembly 320, in some embodiments, the control cabinet door 200 comprises a door frame 210 and a door body 220, the door frame 210 is arranged on the rack 100 and supports the first driving assembly 320 at the top, and the door body 220 is rotatably arranged on the door frame 210. The supported first driving assembly 320 is more stable and less likely to fall, which is safer; at the same time, the first driving assembly 320 does not interfere with the door body 220 in the door frame 210, ensuring the smoothness of the rotation of the door body 220. Wherein the door body 220 and the door frame 210 are connected by a hinge. Further, the door body 220 and the door frame 210 are connected by two hinges, and the two hinges are arranged along a third direction. Wherein the third direction is the up-down direction.

[0047] In some embodiments, the door body 220 is provided with a display screen 221 for displaying test parameters and an operation table 222 for controlling test parameters. Wherein the display screen 221 can be a touch screen for users to modify various parameters. The operation table 222 includes input devices such as keyboard and mouse.

[0048] In some embodiments, the sealing mechanism 300 further comprises a second driving assembly 330, the second driving assembly 330 is arranged at the bottom of the rack 100, and the output end of the second driving assembly 330 is connected with the door plate 310. When the door plate 310 blocks the opening, the second driving assembly 330 is used to drive the door plate 310 to move along the second direction, so as to press the outer periphery of the opening or move away from the opening. Since the first driving member 324 is arranged at the top of the rack 100, the second driving assembly 330 cooperates with the first driving member 324 to make the door plate 310 move stably along the second direction, so as to facilitate the movement of the door plate 310 during the process of pressing the opening or moving away from the opening.

[0049] Specifically, the second driving assembly 330 comprises a guide member 331 and a third driving member 332, the third driving member 332 is arranged on the rack 100, and the output end thereof is in transmission connection with the guide member 331 to drive the guide member 331 to reciprocate along the second direction; the guide member 331 has a guide groove 3311, and when the door plate 310 blocks the opening, the lower end of the door plate 310 is located in the guide groove 3311. Wherein, when the door plate 310 is located in the guide groove 3311 and blocks the opening, the third driving member 332 and the first driving member 324 act simultaneously to drive the door plate 310 to move along the second direction, so as to press the outer periphery of the opening to complete the sealing of the opening, or move away from the opening to facilitate the subsequent smooth movement of the door plate 310 along the first direction. Wherein, the third driving member 332 can be a telescopic air cylinder or a push rod motor, the guide member 331 is slidably arranged on the rack 100 along the second direction and in transmission connection with the output end of the third driving member 332.

[0050] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, it is not necessary and also impossible to exhaust all the implementation modes. Any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application claims.

Claims

1. An aging test apparatus characterized by, The utility model relates to an aging test equipment, including: A rack (100) has an aging cavity (110) for aging test of workpiece and an opening communicating with the aging cavity (110); A control cabinet door (200) is arranged on the rack (100), and the control cabinet door (200) is located on the side of the opening along a first direction; A closing mechanism (300) includes a door plate (310), the door plate (310) is arranged on the rack (100), and the door plate (310) can reciprocate along the first direction relative to the rack (100), and the door plate (310) can shield the opening or open the opening during movement, and the door plate (310) overlaps the control cabinet door (200) when opening the opening.

2. The aging test apparatus of claim 1, wherein The aging test equipment further includes an air exchange channel, and at least part of the air exchange channel is arranged on the rack (100) and located at the top of the aging cavity (110); The closing mechanism (300) further includes a first drive assembly (320), an output end of the first drive assembly (320) is in transmission connection with the door plate (310), the first drive assembly (320) is located at the top of the aging cavity (110) and in a mounting space.

3. The aging test apparatus of claim 2, wherein The first drive assembly (320) includes a drive base (321), a drive support (322) and a moving piece (323), the drive base (321) is arranged on the rack (100), the drive support (322) is movably arranged on the drive base (321) along a second direction, the moving piece (323) is movably arranged on the drive support (322) along the first direction, and the door plate (310) is connected with the moving piece (323).

4. The aging test apparatus of claim 3, wherein The first drive assembly (320) further includes a first sliding rail (3211), the first sliding rail (3211) is arranged on the drive base (321), and the drive support (322) is in sliding fit with the first sliding rail (3211) through a first sliding block;And / or, The first drive assembly (320) further includes a second sliding rail (3221), the second sliding rail (3221) is arranged on the top of the drive support (322), the moving piece (323) includes a first plate (3231) and a second plate (3232) connected vertically, the first plate (3231) is connected with the door plate (310), and the bottom of the second plate (3232) is provided with a second sliding block, and the second sliding block is in sliding fit with the second sliding rail (3221).

5. The aging test apparatus of claim 4, wherein The first drive assembly (320) further includes a first drive piece (324), the first drive piece (324) is arranged on the rack (100), and an output end thereof is in transmission connection with the drive support (322);And / or, The first drive assembly (320) further includes a second drive piece (325), the second drive piece (325) is arranged on the drive support (322), and an output end thereof is in transmission connection with the moving piece (323).

6. The aging test apparatus of claim 5, wherein The second driving member (325) is a linear module, the linear module is arranged on the driving support (322), the moving member (323) further comprises a connecting plate (3233), the connecting plate (3233) is connected between the second plate (3232) and the output end of the linear module, or, The second driving member (325) is a servo motor, a screw rod is arranged on the driving support (322) and is in transmission connection with the output end of the servo motor, the moving member (323) further comprises a connecting plate (3233) connected with the second plate (3232), the connecting plate (3233) has a screw hole in thread cooperation with the screw rod.

7. The aging test apparatus according to any one of claims 2 to 6, characterized by The control cabinet door (200) comprises a door frame (210) and a door body (220), the door frame (210) is arranged on the rack (100) and supports the first driving assembly (320) at the top, and the door body (220) is rotatably arranged on the door frame (210).

8. The aging test apparatus of claim 7, wherein The door body (220) is provided with a display screen (221) and an operation table (222).

9. The aging test apparatus according to any one of claims 1 to 6, characterized by The closing mechanism (300) further comprises a second driving assembly (330), the second driving assembly (330) is arranged at the bottom of the rack (100), the output end of the second driving assembly (330) is connected with the door plate (310), when the door plate (310) blocks the opening, the second driving assembly (330) is used for driving the door plate (310) to move in the second direction, so that the door plate (310) extrudes the outer periphery of the opening or moves away from the opening.

10. The aging test apparatus of claim 9, wherein, The second driving assembly (330) comprises a guide member (331) and a third driving member (332), the third driving member (332) is arranged on the rack (100) and is in transmission connection with the guide member (331) at the output end, so as to drive the guide member (331) to reciprocate in the second direction; the guide member (331) has a guide groove (3311), when the door plate (310) blocks the opening, the lower end of the door plate (310) is located in the guide groove (3311).

Images