Water-cooled electrode structure
By designing a water-cooled electrode structure and combining it with the metal sealing flange and rubber ring, the problems of poor sealing and increased contact resistance in existing electrode structures have been solved, resulting in a higher sealing effect and a longer service life. This simplifies the installation process and improves safety and reliability.
Patent Information
- Application Number
- CN202520192886.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-07
- Publication Date
- 2026-02-17
- Estimated Expiration
- 2035-02-07
AI Technical Summary
Existing electrode structures in crystal growth furnaces suffer from problems such as poor sealing, high back-end leakage rate, difficulty in leak detection, and increased contact resistance. Furthermore, the heaters are complex to install and have a short service life.
The water-cooled electrode structure includes components such as a water-cooled flange, an insulating ceramic ring, a graphite electrode, a copper electrode, and a rotating copper head pressure plate. By cooperating with the metal sealing flange and the rubber ring, the hoisting tooling is eliminated, simplifying the installation process. The rubber ring is placed on the low-temperature side away from the crystal growth chamber to reduce temperature requirements and improve the sealing effect.
It improves the sealing effect of the electrode structure, reduces the back leakage rate and contact resistance, simplifies the installation process, extends service life, and enhances safety and reliability.
Smart Images
Figure CN223928480U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a structure, especially to a water-cooled electrode structure, which is used in a crystal growth furnace and belongs to the field of semiconductors. BACKGROUND
[0002] The electrode structure is used in a crystal growth furnace, and the temperature near the crystal growth chamber is higher (high-temperature side), and the temperature far from the crystal growth chamber is lower (low-temperature side). In the prior art, the outer side of the copper electrode of the electrode structure needs to be sealed by multiple rubber rings and a water-cooled flange. The multiple rubber rings are arranged along the length direction of the copper electrode, that is, the rubber rings seal the copper electrode in the radial direction. A sandwich structure is formed between the adjacent two rubber rings, which increases the background leakage rate of the equipment and the difficulty of leakage detection.
[0003] In order to avoid the situation that the heater electrode is lowered, all the gravity of the heater is pressed on the softer insulating material, the heater is slightly inclined, the contact at the connection is not good, the contact resistance is increased, and the electrode is discharged and ablated.
[0004] Therefore, it is particularly necessary to provide an electrode structure which has a reasonable structure design, is safe and reliable, and can solve the above-mentioned defects. SUMMARY
[0005] The utility model discloses a water-cooled electrode structure which has a reasonable structure design, is safe and reliable, is convenient to assemble and disassemble, has a long service life, and has a good sealing effect.
[0006] The utility model discloses a technical scheme for solving the above-mentioned problems: the water-cooled electrode structure comprises a water-cooled flange, an insulating ceramic ring, a graphite electrode, a copper electrode, a rotating copper head pressing plate, a rotating copper head, an electrode connecting head, a pagoda joint, a cold elbow, a cooling water pipe and an insulating rubber ring support frame, the insulating ceramic ring is arranged in the water-cooled flange, the graphite electrode is installed at one end of the copper electrode, the insulating ceramic ring is sleeved outside the graphite electrode and the copper electrode, the other end of the copper electrode is installed on the rotating copper head through the rotating copper head pressing plate, the cooling water pipe is installed on the rotating copper head, one end of the cooling water pipe is located in the copper electrode, the other end of the cooling water pipe is connected with one end of the cold elbow, the other end of the cold elbow is connected with the pagoda joint, one end of the electrode connecting head is installed on the rotating copper head, and the utility model is characterized in that: the water-cooled electrode structure further comprises a metal sealing flange three and a rubber ring one, the metal sealing flange three is arranged outside the copper electrode and cooperates with the rubber ring one, the metal sealing flange three is arranged between the insulating ceramic ring and the insulating rubber ring support frame, and the water-cooled flange and the metal sealing flange three are provided with the rubber ring one.
[0007] Preferably, the utility model further comprises a pressing plate screw one, and the metal sealing flange three and the water-cooled flange are connected through the pressing plate screw one.
[0008] As preferred, the utility model still include the fastening nut and water cable current feed -in end, the other end of electrode connector head is connected with water cable current feed -in end through fastening nut.
[0009] As preferred, the utility model still include the limiting top silk, electrode limiting ring, metal sealing flange one and metal sealing flane two, the insulating rubber ring support frame, metal sealing flange two, metal sealing flange one and electrode limiting ring are all fitted in copper electrode, and insulating rubber ring support frame, metal sealing flange two, metal sealing flange one are fixed with copper electrode through electrode limiting ring, limiting top silk is installed on electrode limiting ring, and limiting top silk is abutted with copper electrode.
[0010] As preferred, the utility model still include the second pressure plate screw, insulating pressure plate and insulating sleeve, the insulating pressure plate is installed in insulating rubber ring support frame, and insulating sleeve is installed on metal sealing flange one and metal sealing flange two, the second pressure plate screw is fitted in insulating sleeve, and the second pressure plate screw is penetrated with insulating pressure plate, and the second pressure plate screw is connected with metal sealing flange three.
[0011] As preferred, the utility model still include the third pressure plate screw, the third pressure plate screw is installed on rotating copper head, and the third pressure plate screw is connected with rotating copper head pressure plate.
[0012] As preferred, the utility model still include the second rubber ring and rubber ring two, the second rubber ring is installed between insulating rubber ring support frame and insulating pressure plate.
[0013] As preferred, the utility model still include rubber ring three, rubber ring four and rubber ring five, the rubber ring five is installed between the other end of copper electrode and rotating copper head, the rubber ring four is installed between one end of electrode connector head and rotating copper head, and the rubber ring three is installed between the other end of electrode connector head and water cable current feed -in end.
[0014] As preferred, the utility model still include rubber ring six, the rubber ring six is installed between metal sealing flange two and copper electrode.
[0015] Compared with the prior art, the utility model has the following advantages and effects: the overall structure is reasonable in design, safe and reliable, by setting up metal sealing flange three, rubber ring one and pressure plate screw one, the hoisting tooling in the installation process of the heater can be cancelled, the installation process and steps are simplified, and the use demand is met. ACCURATE DRAWINGS
[0016] Figure 1 It is the cross section structure schematic diagram of the utility model embodiment electrode structure.
[0017] Figure 2 It is Figure 1 The local amplification structure schematic diagram of upper portion.
[0018] Figure 3 is Figure 1 is a partial enlarged structural schematic view of A in the figure.
[0019] In the figure: water-cooled flange 1, insulating ceramic ring 2, graphite electrode 3, copper electrode 4, metal sealing flange three 5, rubber ring one 6, pressing plate screw one 7, insulating pressing plate 8, rubber ring two 9, pressing plate screw two 10, insulating sleeve 11, electrode limiting ring 13, water cable current feeding end 14, rubber ring three 15, locking nut 16, electrode connecting head 17, rubber ring four 18, pagoda joint 19, cold elbow 20, cooling water pipe 21, rotating copper head 22, pressing plate screw three 23, rubber ring five 24, rotating copper head pressing plate 25, rubber ring six 26, metal sealing flange one 27, metal sealing flange two 28, insulating rubber ring support frame 29. DETAILED DESCRIPTION
[0020] The utility model will be further explained in detail below by combining with the drawings and through examples, the following examples are the explanation of the utility model and the utility model is not limited to the following examples.
[0021] Embodiment
[0022] Referring to Figures 1 to 3 , the water-cooled electrode structure of the embodiment comprises a water-cooled flange 1, an insulating ceramic ring 2, a graphite electrode 3, a copper electrode 4, a metal sealing flange three 5, a rubber ring one 6, a rotating copper head pressing plate 25, a rotating copper head 22, a water cable current feeding end 14, an electrode connecting head 17, a pagoda joint 19, a cold elbow 20, a cooling water pipe 21 and an insulating rubber ring support frame 29, the metal sealing flange three 5 is arranged outside the copper electrode 4 and cooperates with the copper electrode 4, the metal sealing flange three 5 is arranged between the insulating ceramic ring 2 and the insulating rubber ring support frame 29, and the water-cooled flange 1 is provided with the rubber ring one 6 between the metal sealing flange three 5.
[0023] In the embodiment, the insulating ceramic ring 2 is arranged in the water-cooled flange 1, the graphite electrode 3 is installed at one end of the copper electrode 4, the insulating ceramic ring 2 is sleeved outside the graphite electrode 3 and the copper electrode 4, and the other end of the copper electrode 4 is installed on the rotating copper head 22 through the rotating copper head pressing plate 25.
[0024] In the embodiment, the cooling water pipe 21 is installed on the rotating copper head 22, one end of the cooling water pipe 21 is located in the copper electrode 4, the other end of the cooling water pipe 21 is connected with one end of the cold elbow 20, the other end of the cold elbow 20 is connected with the pagoda joint 19, and one end of the electrode connecting head 17 is installed on the rotating copper head 22.
[0025] In the embodiment, the metal sealing flange three 5 and the water-cooled flange 1 are connected through the pressing plate screw one 7.
[0026] The other end of the electrode connecting head 17 is connected with the water cable current feeding end 14 through the locking nut 16 in this embodiment.
[0027] The insulating rubber ring support frame 29, the metal sealing flange two 28, the metal sealing flange one 27 and the electrode limiting ring 13 are all sleeved outside the copper electrode 4 in this embodiment, and the insulating rubber ring support frame 29, the metal sealing flange two 28 and the metal sealing flange one 27 are fixed with the copper electrode 4 through the electrode limiting ring 13, the limiting top screw 12 is installed on the electrode limiting ring 13, and the limiting top screw 12 abuts against the copper electrode 4.
[0028] The insulating pressing plate 8 is installed outside the insulating rubber ring support frame 29, and the insulating screw sleeve 11 is installed on the metal sealing flange one 27 and the metal sealing flange two 28 in this embodiment; the pressing plate screw two 10 is sleeved in the insulating screw sleeve 11, and the pressing plate screw two 10 penetrates through the insulating pressing plate 8 and is connected with the metal sealing flange three 5.
[0029] The pressing plate screw three 23 is installed on the rotating copper head 22, and the pressing plate screw three 23 is connected with the rotating copper head pressing plate 25 in this embodiment.
[0030] The rubber ring two 9 is installed between the insulating rubber ring support frame 29 and the insulating pressing plate 8 in this embodiment.
[0031] The rubber ring five 24 is installed between the other end of the copper electrode 4 and the rotating copper head 22, the rubber ring four 18 is installed between one end of the electrode connecting head 17 and the rotating copper head 22, and the rubber ring three 15 is installed between the other end of the electrode connecting head 17 and the water cable current feeding end 14 in this embodiment.
[0032] The rubber ring six 26 is installed between the metal sealing flange two 28 and the copper electrode 4 in this embodiment.
[0033] The insulating ceramic ring 2, the insulating rubber ring support frame 29, the metal sealing flange two 28, the metal sealing flange one 27 and the electrode limiting ring 13 are sequentially arranged in this embodiment.
[0034] The rubber ring four 18 is used for end face sealing between the rotating copper head 22 and the electrode connecting head 17, the rubber ring six 26 is installed between the metal sealing flange two 28 and the copper electrode 4, and the rubber ring six 26 is used for end face sealing between the metal sealing flange one 27 and the metal sealing flange two 28 in this embodiment.
[0035] Specifically, the rubber ring two 9 and the rubber ring six 26 are arranged at the end of the water cooling flange 1, the metal sealing flange one 27 and the metal sealing flange two 28, the rubber ring is arranged at a position away from the crystal growth chamber, that is, the rubber ring is led from the high temperature side to the low temperature side, the requirement on the use temperature of the rubber ring is reduced, and the service life of the rubber ring is improved.
[0036] The rubber ring two 9 and the rubber ring six 26 are arranged away from the crystal growth chamber, so that the radial gap of the copper electrode 4 is increased, the copper electrode 4 can slightly swing, the copper electrode 4 and the graphite electrode 3 can be more fully contacted, the contact resistance is reduced, and the requirements for the shape and position tolerances of the graphite heater, the graphite electrode 3 and the water-cooled flange 1 are reduced.
[0037] In the embodiment, the rubber ring two 9 and the rubber ring six 26 are arranged as end face seals, and no radial seal is needed, so that the sandwich structure on the vacuum side is avoided, and the background leakage rate of the equipment and the leakage detection difficulty are reduced.
[0038] In the embodiment, the copper electrode 4 and the electrode limiting ring 13 are combined into a limiting mechanism, so that the copper electrode 4 is prevented from moving to the vacuum side due to the action of the atmospheric pressure during vacuumizing.
[0039] In the cavity vacuum state, the atmospheric pressure pushes the copper electrode 4 to drive the electrode limiting ring 13 to apply axial pressure to the metal sealing flange one 27 and the metal sealing flange two 28, increases the deformation of the rubber ring two 9 and the rubber ring six 26, and makes the sealing more sufficient, so that self-sealing is realized.
[0040] In the embodiment, the copper electrode 4, the rotating copper head 22, the rotating copper head pressing plate 25, the pressing plate screw three 23 and the rubber ring five 24 are combined into a structure, which realizes the installation of the water cable in any direction under the condition of ensuring sufficient conductive area, that is, after the gap between the copper electrode 4 and the rotating copper head 22 is formed by rotating the pressing plate screw three 23, the rotating copper head 22 is fixed by the pressing plate screw three 23.
[0041] In the embodiment, the rotating copper head 22, the rubber ring four 18 and the electrode connecting head 17 are combined into a feeding structure, which can ensure sufficient conductive area, reduce the processing requirements and reduce unnecessary welding.
[0042] In the embodiment, the electrode connecting head 17, the rubber ring three 15, the locking nut 16 and the water cable current feeding end 14 are combined into a conical structure, which realizes double-layer sealing of the water path under the condition of ensuring sufficient conductive area, avoids the problem of loose sealing of the conical metal seal.
[0043] In use, cooling water can be introduced into the pagoda joint 19, the cooling water flows through the cold elbow 20, the cooling water pipe 21 and enters the copper electrode 4, cools the copper electrode 4, flows from the cavity between the outer wall of the cooling water pipe 21 and the copper electrode 4, and flows out from the rubber ring four 18 and the water cable current feeding end 14.
[0044] Through the above description, those skilled in the art can implement it.
[0045] Furthermore, it needs to explain, the specific embodiment described in this specification, the shape of zero, component, the name taken etc. can be different, the above contents described in this specification are only the example of the structure of the utility model. The equivalent change or simple change made according to the structure, features and principles described in the utility model patent concept are included in the protection scope of the utility model patent. The skilled in the art to which the utility model belongs can make various modifications or supplements or adopt similar ways to replace the specific embodiments described, as long as not deviating from the structure of the utility model or beyond the range defined in the claims, should belong to the protection scope of the utility model.
Claims
1. A water-cooled electrode structure comprising a water-cooled flange (1), an insulating ceramic ring (2), a graphite electrode (3), a copper electrode (4), a rotating copper head pressing plate (25), a rotating copper head (22), an electrode connecting head (17), a cone joint (19), a cooling elbow (20), a cooling water pipe (21) and an insulating rubber ring support frame (29), the insulating ceramic ring (2) is arranged in the water-cooled flange (1), the graphite electrode (3) is installed at one end of the copper electrode (4), and the insulating ceramic ring (2) is sleeved outside the graphite electrode (3) and the copper electrode (4), the other end of the copper electrode (4) is installed on the rotating copper head (22) through the rotating copper head pressing plate (25), the cooling water pipe (21) is installed on the rotating copper head (22), one end of the cooling water pipe (21) is located in the copper electrode (4), and the other end of the cooling water pipe (21) is connected with one end of the cooling elbow (20), the other end of the cooling elbow (20) is connected with the cone joint (19), and one end of the electrode connecting head (17) is installed on the rotating copper head (22), characterized in that: It also includes metal sealing flange three (5) and rubber ring one (6), the metal sealing flange three (5) is arranged outside the copper electrode (4), and the two are matched with each other, the metal sealing flange three (5) is arranged between the insulating ceramic ring (2) and the insulating rubber ring support frame (29), and the rubber ring one (6) is arranged between the water cooling flange (1) and the metal sealing flange three (5).
2. The water-cooled electrode structure of claim 1, wherein: It also includes pressing plate screw one (7), the metal sealing flange three (5) and the water cooling flange (1) are connected through the pressing plate screw one (7).
3. The water-cooled electrode structure of claim 1, wherein: It also includes a locking nut (16) and a water cable current feeding end (14), the other end of the electrode connecting head (17) is connected with the water cable current feeding end (14) through the locking nut (16).
4. The water-cooled electrode structure of claim 1, wherein: It also includes a limiting top wire (12), an electrode limiting ring (13), a metal sealing flange one (27) and a metal sealing flange two (28), the insulating rubber ring support frame (29), the metal sealing flange two (28), the metal sealing flange one (27) and the electrode limiting ring (13) are all sleeved outside the copper electrode (4), and the insulating rubber ring support frame (29), the metal sealing flange two (28), the metal sealing flange one (27) are fixed with the copper electrode (4) through the electrode limiting ring (13), the limiting top wire (12) is installed on the electrode limiting ring (13), and the limiting top wire (12) abuts against the copper electrode (4).
5. The water-cooled electrode structure of claim 4, wherein: It also includes a pressing plate screw two (10), an insulating pressing plate (8) and an insulating screw sleeve (11), the insulating pressing plate (8) is installed outside the insulating rubber ring support frame (29), the insulating screw sleeve (11) is installed on the metal sealing flange one (27) and the metal sealing flange two (28); the pressing plate screw two (10) is sleeved in the insulating screw sleeve (11), the pressing plate screw two (10) penetrates the insulating pressing plate (8), and the pressing plate screw two (10) is connected with the metal sealing flange three (5).
6. The water-cooled electrode structure of claim 1, wherein: It also includes a pressing plate screw three (23), the pressing plate screw three (23) is installed on the rotating copper head (22), and the pressing plate screw three (23) is connected with the rotating copper head pressing plate (25).
7. The water-cooled electrode structure of claim 1, wherein: It also includes an insulating pressing plate (8) and a rubber ring two (9), the rubber ring two (9) is installed between the insulating rubber ring support frame (29) and the insulating pressing plate (8).
8. The water-cooled electrode structure of claim 3, wherein: It also includes a rubber ring three (15), a rubber ring four (18) and a rubber ring five (24), the rubber ring five (24) is installed between the other end of the copper electrode (4) and the rotating copper head (22), the rubber ring four (18) is installed between one end of the electrode connecting head (17) and the rotating copper head (22), and the rubber ring three (15) is installed between the other end of the electrode connecting head (17) and the water cable current feeding end (14).
9. The water-cooled electrode structure of claim 4, wherein: It also includes a rubber ring six (26), the rubber ring six (26) is installed between the metal sealing flange two (28) and the copper electrode (4).