Short-circuit multistage accelerating tube

Abstract

The utility model discloses a short-circuit multistage accelerating tube, which comprises a plurality of electrodes and a short-circuit mechanism, insulators are arranged among the electrodes, and the short-circuit mechanism is used for short-circuit of the electrodes. According to the short-circuit multistage accelerating tube, part of the electrodes are short-circuited through the short-circuit mechanism, under the condition of the same parameters, the beam divergence is improved, the beam transmission effect is improved, the structure is simple, and the working efficiency is high. In addition, according to the short-circuit multi-stage accelerating tube, the short-circuit number and the short-circuit positions of the electrodes are adjustable, so that the short-circuit multi-stage accelerating tube is suitable for short-circuit of accelerating tubes of different stages, and the adaptability is high.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor process technology, specifically to a short-circuited multi-stage accelerating transistor. Background Technology

[0002] In the ion implantation stage of semiconductor processes, low-energy implantation is often required to prepare ultra-shallow junctions or ultra-thin active layers to meet the requirements of high density and high speed of devices. However, when the implantation energy of the current domestic medium-current implanter is in the low energy range of 50keV to 100keV, the beam loss through the accelerating tube is relatively large, resulting in low working efficiency of this process stage under the same dosage. Utility Model Content

[0003] The technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a short-circuited multi-stage accelerating tube with a simple structure, improved beam divergence, and enhanced beam transmission effect.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A short-circuit multi-stage accelerator tube includes multiple electrodes and a short-circuit mechanism, with an insulator between each electrode, and the short-circuit mechanism is used to short-circuit the electrodes.

[0006] As a further improvement to the above technical solution:

[0007] The shorting mechanism includes a mounting base and multiple shorting rods. The multiple shorting rods are arranged at intervals along the length of the mounting base and are used to contact different electrodes to form a short circuit between the electrodes.

[0008] The short-circuit mechanism also includes a motion drive for driving the mounting base to reciprocate.

[0009] The movement drive is an electric cylinder, and the mounting base is connected to the moving part of the electric cylinder.

[0010] The motion drive is installed on the beam inlet side.

[0011] The number of shorting rods is less than the number of electrodes.

[0012] The shorting rod is retractably mounted on the mounting base.

[0013] The short-circuit electrodes account for 1 / 4 to 3 / 4 of the total number of electrodes.

[0014] The electrode has 8 electrodes, and 6 electrodes are shorted.

[0015] Compared with the prior art, the advantages of this utility model are:

[0016] The short-circuit multi-stage accelerating tube disclosed in this utility model improves beam divergence and beam transmission effect by short-circuiting part of the electrodes through a short-circuit mechanism, under the same parameters. It has a simple structure and high working efficiency.

[0017] Furthermore, the short-circuited multi-stage accelerator tube disclosed in this utility model has adjustable number and position of short-circuited electrodes, thus adapting to the short-circuiting of accelerator tubes with different stages, and has strong adaptability. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the short-circuited multi-stage accelerator tube of this utility model.

[0019] The labels in the diagram represent: 1. Electrode; 2. Shorting mechanism; 21. Mounting base; 22. Shorting rod; 23. Movement drive; 3. Insulator. Detailed Implementation

[0020] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0022] In this utility model, unless otherwise explicitly specified and limited, the terms "assembly," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0023] Example 1

[0024] Figure 1 An embodiment of the short-circuited multi-stage accelerator tube of the present invention is shown. The short-circuited multi-stage accelerator tube of this embodiment includes multiple electrodes 1 and a short-circuiting mechanism 2. An insulator 3 is provided between each electrode 1. The short-circuiting mechanism 2 is used to short-circuit the electrodes 1.

[0025] This short-circuit multi-stage accelerating tube improves beam divergence and beam transmission efficiency by short-circuiting part of electrode 1 through short-circuiting mechanism 2, under the same parameters. It has a simple structure and high working efficiency.

[0026] Furthermore, in this embodiment, the short-circuiting mechanism 2 includes a mounting base 21 and multiple short-circuiting rods 22. The multiple short-circuiting rods 22 are arranged at intervals along the length direction of the mounting base 21. The number of short-circuiting rods 22 is less than the number of electrodes 1. The multiple short-circuiting rods 22 are used to contact different electrodes 1 to form a short circuit between the electrodes 1. In fact, the short-circuiting rods 22 are connected by the mounting base 21. When two short-circuiting rods 22 contact different electrodes 1 respectively, the two contacted electrodes 1 can be short-circuited. The structure is simple and the operation is convenient.

[0027] Furthermore, in this embodiment, the shorting mechanism 2 also includes a motion drive 23 for driving the mounting base 21 to reciprocate. By driving the mounting base 21 to move through the motion drive 23, the number and position of shorting between the shorting rod 22 and the electrode 1 can be controlled, thereby adjusting the number and position of shorting between the electrode 1 according to the actual situation, thus adapting to the shorting of accelerator tubes of different stages.

[0028] Furthermore, in this embodiment, the moving drive 23 is an electric cylinder, and the mounting base 21 is connected to the moving part of the electric cylinder. The structure is simple.

[0029] Furthermore, in this embodiment, the motion drive 23 is installed on the beam inlet side. In a real installation environment, it is more convenient to arrange the motion drive 23 on the beam inlet side, as there is no installation space on the beam outlet side.

[0030] Furthermore, in this embodiment, the number of shorting rods 22 is less than the number of electrodes 1. This shortens the overall length of the mounting base 21 and the driving stroke of the moving drive 23, resulting in a compact structure and reducing the space occupied by the shorting mechanism 2.

[0031] Furthermore, in this embodiment, the number of short-circuited electrodes 1 accounts for 1 / 4 to 3 / 4 of the total number of electrodes 1. This further improves the beam transmission effect. Specifically, in this embodiment, there are 8 electrodes 1, and 6 of them are short-circuited. The 8-stage tube is the standard tube for medium-current beam amplifiers, and short-circuiting 6 electrodes 1 yields better results and has good versatility. Of course, in other embodiments, if space permits, there can also be 7 short-circuited electrodes 1, as long as the beam transmission effect is improved.

[0032] The following experiment uses a standard tube from a medium-current beam generator as an example, employing two sets of beams of different sizes. The basic data (extraction load, setup cup, focusing cup, and moving Faraday cup) for each beam set are kept identical. By shorting different numbers of electrodes 1, different transmission effects are obtained (the transmission effect is reflected by the pass rate from the focusing cup to the target and the pass rate from the setup cup to the target):

[0033]

[0034] The experimental data from sets A and B show that shorting electrode 1 (stages 2-6) improves both the focusing cup-to-target throughput and the setup-to-target throughput compared to not shorting electrode 1, thus enhancing the transmission performance of the accelerating tube.

[0035] Example 2

[0036] The short-circuit multi-stage accelerator tube in this embodiment is largely the same as in Embodiment 1, except that the adjustment structure for the number and position of short-circuit electrodes 1 is different. In this embodiment, the short-circuit rod 22 is retractably mounted on the mounting base 21. The contact between the short-circuit rod 22 and the electrode 1 is adjusted by extending or retracting the short-circuit rod 22, thus achieving the purpose of adjusting the number and position of short-circuit electrodes 1. This eliminates the need to consider whether the number of short-circuit rods 22 is less than the number of electrodes 1 or the driving stroke of the moving drive 23, making it highly adaptable. Preferably, the short-circuit rod 22 can be manually or automatically extended or retracted depending on the actual situation.

[0037] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make many possible variations and modifications to the present invention, or modify it into equivalent embodiments, without departing from the scope of the present invention. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention, without departing from the content of the present invention, should fall within the protection scope of the present invention.

Claims

1. A short-circuited multi-stage accelerating tube, characterized in that: It includes multiple electrodes (1) and a shorting mechanism (2). Each electrode (1) is provided with an insulator (3). The shorting mechanism (2) is used to short-circuit the electrode (1). The shorting mechanism (2) includes a mounting base (21) and multiple shorting rods (22). The multiple shorting rods (22) are arranged at intervals along the length direction of the mounting base (21). The multiple shorting rods (22) are used to contact different electrodes (1) to form a short circuit between the electrodes (1).

2. The short-circuited multi-stage accelerating tube according to claim 1, characterized in that: The short-circuit mechanism (2) also includes a motion drive (23) for driving the mounting base (21) to reciprocate.

3. The short-circuited multi-stage accelerating tube according to claim 2, characterized in that: The moving drive (23) is an electric cylinder, and the mounting base (21) is connected to the moving part of the electric cylinder.

4. The short-circuited multi-stage accelerating tube according to claim 2, characterized in that: The mobile drive (23) is installed on the beam inlet side.

5. The short-circuited multi-stage accelerating tube according to claim 4, characterized in that: The number of shorting rods (22) is less than the number of electrodes (1).

6. The short-circuited multi-stage accelerating tube according to claim 1, characterized in that: The shorting rod (22) is telescopically mounted on the mounting base (21).

7. The short-circuited multi-stage accelerating tube according to any one of claims 1 to 6, characterized in that: The short-circuit electrode (1) accounts for 1 / 4 to 3 / 4 of the total number of electrodes (1).

8. The short-circuited multi-stage accelerating tube according to claim 7, characterized in that: The electrode (1) has 8 electrodes, and the short-circuited electrode (1) has 6 electrodes.

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