Lens coating vacuum cavity activation system

Abstract

The utility model relates to the technical field of lens coating equipment, in particular to a lens coating vacuum cavity activation system, which comprises a sealable cavity and an outer power supply mounted on the cavity. A carrying table unit and two electrode plates are mounted on the inner side of the cavity, and the two electrode plates are located on the two sides of the carrying table unit; wherein the electrode plate is arranged in the cavity, a fixing plate is further arranged in the cavity, the fixing plate is detachably connected with the electrode plate, and a conductive component is arranged between the fixing plate and the electrode plate. The fixing plate is arranged in the cavity, so that the electrode plate is detachably connected with the fixing plate, and the conductive component is arranged between the fixing plate and the electrode plate; and when the electrode plate needs to be disassembled and maintained, the electrode plate can be separated by separating the connection between the electrode plate and the fixed plate and pulling the electrode plate outwards, so that the operation is simple, and the convenience of assembly and subsequent maintenance of the electrode plate is greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of lens coating equipment technology, and in particular to a lens coating vacuum chamber activation system. Background Technology

[0002] In vacuum coating technology, to improve the adhesion between the thin film and substrates such as lenses, it is usually necessary to perform plasma activation treatment on the substrate surface before coating. This process typically takes place within the chamber of a vacuum coating equipment. The activation treatment components generally include a first electrode plate, a second electrode plate, a plasma treatment gas introduction unit, and a power supply. The power supply is electrically connected to the electrode plates, and a rotating support is located between the two electrode plates. The plasma treatment gas introduction unit is connected to the vacuum chamber, as specifically illustrated in Chinese Patent Publication No. CN218880030U, which discloses a vacuum coating equipment.

[0003] However, the electrode plates of the plasma activation components in existing vacuum coating equipment are usually fixed inside the chamber. Although this design can achieve plasma activation treatment, it is not convenient to disassemble and replace the electrode plates, resulting in cumbersome and inefficient equipment maintenance. In particular, when the electrode plates need to be repaired or replaced, this fixed design will greatly increase the maintenance difficulty and time cost.

[0004] Based on this, in order to optimize the applicability of existing activation processing components, we propose a lens coating vacuum chamber activation system. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies, such as the inconvenience of disassembling and replacing electrode plates, which leads to cumbersome and inefficient equipment maintenance. This invention proposes a vacuum chamber activation system for lens coating.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] Design a vacuum chamber activation system for lens coating, including:

[0008] A sealable chamber and a power supply installed on the outside of the chamber;

[0009] A stage unit and two electrode plates are installed inside the chamber, with the two electrode plates located on both sides of the stage unit.

[0010] The chamber is further equipped with a fixing plate, which is detachably connected to the electrode plate. A conductive component is provided between the fixing plate and the electrode plate, with one end of the conductive component penetrating through and extending to the outside of the chamber and electrically connected to the power source.

[0011] Furthermore, two sleeves are fixedly installed on the end face of the fixing plate, and two connecting posts are fixedly installed on the back end of the electrode plate.

[0012] The connecting post is inserted into the inside of the sleeve.

[0013] Furthermore, a positioning hole is formed on the outer periphery of the sleeve, and a positioning glass bead is embedded on the outer side of the connecting post, with the telescopic end of the positioning glass bead engaging in the positioning hole.

[0014] Furthermore, the conductive component includes an insulating plate and two electrodes fixed on the insulating plate. The two electrodes are connected to the power source via wires. The electrodes protrude from the outer surface of the insulating plate. The insulating plate and the fixing plate are detachably connected.

[0015] Furthermore, two claws are formed on the end face of the insulating plate;

[0016] The fixing plate has a through hole in the middle, and a snap-fit ​​groove is provided on the inner side of the through hole. The claw enters along the snap-fit ​​groove and snaps into the front end of the fixing plate.

[0017] Furthermore, the conductive component also includes two guide tubes fixed to the back end of the electrode plate and a contact inserted into the guide tube by a spring. The contact is electrically connected to the electrode plate through a connecting wire, and the contact and the electrode plate are in contact and conductive.

[0018] The present invention proposes a vacuum chamber activation system for lens coating, which has the following advantages: In this invention, by installing a fixing plate inside the chamber, the electrode plate and the fixing plate are detachably connected. When it is necessary to disassemble and maintain the electrode plate, the connection between the electrode plate and the fixing plate can be separated, and the electrode plate can be pulled outward to achieve separation. The operation is simple and greatly improves the convenience of assembling and subsequent maintenance of the electrode plate. Attached Figure Description

[0019] Figure 1 This is a perspective view of the present utility model;

[0020] Figure 2 This is the front view of the present invention;

[0021] Figure 3 This is a cross-sectional view of the present invention;

[0022] Figure 4 This is a schematic diagram of the fixing plate structure of this utility model;

[0023] Figure 5 This is a schematic diagram of the insulating board structure of this utility model.

[0024] In the diagram: 1. Chamber; 2. Power supply; 3. Stage unit; 4. Electrode plate; 41. Connecting post; 42. Positioning bead; 5. Fixing plate; 51. Sleeve; 52. Positioning hole; 53. Snap-fit ​​groove; 6. Conductive component; 61. Insulating plate; 62. Electrode; 63. Wire; 64. Claw; 65. Guide tube; 66. Spring; 67. Contact. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0026] Reference Figure 1-5 As one embodiment of this utility model, it discloses a lens coating vacuum chamber activation system. Specifically, the system includes a sealable chamber 1 and a power supply 2 installed on the outside of the chamber 1. Of course, the chamber 1 is also used to connect an external vacuum and a heating unit. For details, please refer to the prior art, which will not be repeated here.

[0027] A stage unit 3 and two electrode plates 4 are installed inside the chamber 1. The two electrode plates 4 are located on both sides of the stage unit 3. The stage unit 3 is used to support the coated lens. The two electrode plates 4 are used to generate plasma under the conditions of plasma treatment gas and low pressure after being energized, so as to activate the surface of the lens.

[0028] The chamber 1 is also equipped with a fixing plate 5. In this embodiment, the fixing plate 5 is fixed inside the chamber 1 by bolts. The fixing plate 5 and the electrode plate 4 are detachably connected. A conductive component 6 is provided between the fixing plate 5 and the electrode plate 4. One end of the conductive component 6 passes through and extends to the outside of the chamber 1 and is electrically connected to the power supply 2.

[0029] In some embodiments, two sleeves 51 are fixedly installed on the end face of the fixing plate 5 in this utility model, and two connecting posts 41 are fixedly installed on the back end of the electrode plate 4. The connecting posts 41 and the electrode plate 4 can be bonded together or connected by bolts.

[0030] The connecting post 41 is inserted into the inside of the sleeve 51.

[0031] Of course, in order to achieve the connection and fixation of the connecting post 41 and the sleeve 51, a positioning hole 52 is opened on the outer periphery of the sleeve 51 in this embodiment. A positioning glass bead 42 is embedded on the outer side of the connecting post 41. The telescopic end of the positioning glass bead 42 is engaged in the positioning hole 52. The positioning glass bead 42 is existing technology. By using at least one positioning glass bead 42 to engage with the positioning hole 52, in actual installation, the fixing plate 5 is first installed inside the chamber 1. Then, the electrode plate 4 is taken out and its two connecting posts 41 at the back end are aligned with the two sleeves 51 on the fixing plate 5 and inserted. After the positioning glass bead 42 engages with the positioning hole 52, the electrode plate 4 can be installed and fixed. When the electrode plate 4 needs to be disassembled and maintained, the telescopic end of the positioning glass bead 42 is pressed to pull the electrode plate 4 outward. The operation is simple and greatly improves the convenience of assembling and subsequent maintenance of the electrode plate 4.

[0032] Based on the above embodiments, the conductive component 6 in this embodiment includes an insulating plate 61 and two electrode plates 62 fixed on the insulating plate 61. The two electrode plates 62 are connected to the power supply 2 through a wire 63. It should be noted that the wire 63 in this embodiment passes through the cavity 1. The insertion point of the wire 63 and the cavity 1 should be sealed with glue to ensure the airtightness of the entire cavity 1. Of course, it is not necessary to remove the wire 63 when disassembling the electrode plate 4. The electrode plate 62 protrudes from the outer surface of the insulating plate 61. The insulating plate 61 and the fixing plate 5 are detachably connected. Specifically, in this embodiment, the design of the insulating plate 61 is used to avoid short circuit between the two electrode plates 62. Preferably, the insulating plate 61 in this embodiment can be made of plastic.

[0033] In order to fix and disassemble the insulating plate 61, two claws 64 are formed on the end face of the insulating plate 61 in this embodiment.

[0034] The fixing plate 5 has a through hole in the middle, and a snap-fit ​​groove 53 is provided on the inner side of the through hole. The snap-fit ​​claw 64 enters along the snap-fit ​​groove 53 and is snapped at the front end of the fixing plate 5. It should be noted that the diameter of the insulating plate 61 is larger than the diameter of the through hole, and it stops at the rear end of the fixing plate 5.

[0035] In the actual installation process, the two claws 64 of the insulating plate 61 are first inserted into the snap-fit ​​groove 53 in the fixing plate 5. Under the limit of the snap-fit ​​groove 53 and the claws 64, the insulating plate 61 can be prevented from rotating. After the claws 64 and the snap-fit ​​groove 53 are snapped together, the installation of the insulating plate 61 can be completed. At this time, the fixing plate 5 can be fixed inside the cavity 1 by bolts.

[0036] Based on the above embodiments, the conductive component 6 in this embodiment further includes two guide tubes 65 fixed to the back end of the electrode plate 4 and a contact 67 inserted into the guide tube 65 by a spring 66. In this embodiment, the guide tube 65 is also provided with an insulating component, such as a plastic tube. The contact 67 is electrically connected to the electrode plate 4 through a connecting wire, and the contact 67 and the electrode plate 62 are in contact and conductive.

[0037] When the electrode plate 4 is installed on the fixing plate 5, the contact 67 at the back end of the electrode plate 4 contacts the electrode plate 62 to ensure electrical continuity with the electrode plate 4. The spring 66 is provided to enhance the basic stability of the contact 67 and the electrode plate 62. Of course, when the electrode plate 4 is disassembled, the contact 67 and the electrode plate 62 separate, thus breaking the circuit. In order to protect the contact 67 and the electrode plate 62, a corrugated tube can be sleeved on the outside of the two guide tubes 65. The two ends of the corrugated tube abut against the electrode plate 4 and the fixing plate 5, thus protecting the internal electrical connection parts. The corrugated tube is existing technology and will not be described in detail here.

[0038] In summary, by installing a fixing plate 5 inside the chamber 1, the electrode plate 4 and the fixing plate 5 are detachably connected. When it is necessary to disassemble and maintain the electrode plate 4, the connection between the electrode plate 4 and the fixing plate 5 can be separated, and the electrode plate 4 can be pulled outward to achieve separation. The operation is simple and greatly improves the convenience of assembling and subsequent maintenance of the electrode plate 4.

[0039] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A vacuum chamber activation system for lens coating, characterized in that, include: A sealable chamber (1) and an external power supply (2) installed in the chamber (1); A stage unit (3) and two electrode plates (4) are installed inside the chamber (1), with the two electrode plates (4) located on both sides of the stage unit (3); A fixing plate (5) is also installed in the chamber (1). The fixing plate (5) and the electrode plate (4) are detachably connected. A conductive component (6) is provided between the fixing plate (5) and the electrode plate (4). One end of the conductive component (6) passes through and extends to the outside of the chamber (1) and is electrically connected to the power source (2).

2. The lens coating vacuum chamber activation system according to claim 1, characterized in that: Two sleeves (51) are fixedly installed on the end face of the fixing plate (5), and two connecting posts (41) are fixedly installed on the back end of the electrode plate (4). The connecting post (41) is inserted into the inside of the sleeve (51).

3. The lens coating vacuum chamber activation system according to claim 2, characterized in that: A positioning hole (52) is provided on the outer periphery of the sleeve (51), and a positioning glass bead (42) is embedded on the outer side of the connecting post (41). The telescopic end of the positioning glass bead (42) is engaged in the positioning hole (52).

4. The lens coating vacuum chamber activation system according to claim 1, characterized in that: The conductive component (6) includes an insulating plate (61) and two electrode plates (62) fixed on the insulating plate (61). The two electrode plates (62) are connected to the power source (2) through wires (63). The electrode plates (62) protrude from the outer surface of the insulating plate (61). The insulating plate (61) and the fixing plate (5) are detachably connected.

5. The lens coating vacuum chamber activation system according to claim 4, characterized in that: Two claws (64) are formed on the end face of the insulating plate (61); The fixing plate (5) has a through hole in the middle, and a snap-fit ​​groove (53) is provided on the inner side of the through hole. The claw (64) enters along the snap-fit ​​groove (53) and is snapped at the front end of the fixing plate (5).

6. The lens coating vacuum chamber activation system according to claim 4, characterized in that: The conductive component (6) further includes two guide tubes (65) fixed to the back end of the electrode plate (4) and a contact (67) inserted into the guide tube (65) by a spring (66). The contact (67) is electrically connected to the electrode plate (4) through a connecting wire, and the contact (67) and the electrode plate (62) are in contact and conductive.

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