Conveying system for vacuum evaporation coating device and vacuum evaporation coating device

Abstract

The utility model provides a conveying system for a vacuum evaporation coating device and the vacuum evaporation coating device, and the conveying system for the vacuum evaporation coating device comprises a roller group which comprises a plurality of pivotal rollers which are arranged at intervals along a first direction V1, each roller comprises a roller shaft body and a plurality of supporting convex rings arranged in the axial direction of the roller shaft body at intervals, first ring grooves are formed in the side walls of the supporting convex rings, the first ring grooves in all the rollers at the same position in the second direction V2 form linear mounting areas, and the number of the linear mounting areas is multiple; the multiple conveying belts are arranged in one-to-one correspondence with the multiple linear mounting areas, the conveying belts are limited in the first annular grooves in the corresponding linear mounting areas, and the surfaces of the conveying belts protrude out of the surfaces of the supporting convex rings. By the adoption of the technical scheme, the problems that in the prior art, a conveying system of a vacuum evaporation coating device is high in maintenance frequency and poor in operation stability can be effectively solved.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment, and more specifically, to a conveying system for a vacuum evaporation coating equipment and a vacuum evaporation coating equipment. Background Technology

[0002] With the development of modern industry, vacuum equipment has been widely used in many fields, especially in coating technology. Coating technology is a process of depositing thin films on the surface of a substrate and is widely used in semiconductors, optics, new energy, and other fields. In order to improve production efficiency and product quality, vacuum coating equipment needs to operate for a long time under efficient and stable conditions.

[0003] The transmission system is one of the key components affecting the operating efficiency and maintenance frequency of vacuum coating equipment. Traditional vacuum coating equipment typically uses ceramic roller conveyors for substrate transmission. However, ceramic roller conveyors are prone to wear and breakage under long-term high temperature and high pressure conditions. Furthermore, during the coating process, the deposited coating material adheres to the roller shafts, and the roller shaft circumference and flatness vary, affecting transmission accuracy. This leads to frequent equipment downtime for maintenance and replacement, impacting production efficiency and cost control.

[0004] To overcome the shortcomings of ceramic roller conveyors, increasing research and practice are focusing on metal mesh belt conveyor systems. Metal mesh belt conveyor systems possess high strength, high wear resistance, and good thermal conductivity, maintaining stable performance and a long service life under high temperature and high pressure conditions. Furthermore, the structure of metal mesh belt conveyor systems is relatively simple, reducing the density of support rollers and preventing the coating material from accumulating on the rollers. The mesh structure of the belt also prevents the coating material from thickening, significantly reducing equipment downtime and maintenance costs.

[0005] The basic structure of existing metal mesh belt transmission systems is as follows:

[0006] Metal mesh belt: A mesh belt made of stainless steel or other high-strength heat-resistant metal materials. Its mesh structure can be designed as needed to adapt to different types and sizes of substrates.

[0007] Drive unit: including motor and transmission mechanism, used to drive the metal mesh belt.

[0008] Support device: Used to support the metal mesh belt and ensure its stable operation.

[0009] Tensioning device: Used to adjust the tension of the conveyor belt to prevent the conveyor belt from becoming loose or deviating during operation.

[0010] Control device: Used to control the transmission speed and operating status to ensure the stability and accuracy of the transmission process.

[0011] The working principle and effects of existing metal mesh belt conveyor systems are as follows:

[0012] The substrate is placed on a metal mesh belt, which is driven by a drive unit to transport the substrate into the vacuum coating chamber. The mesh design of the metal mesh belt ensures that the substrate passes smoothly during transport, while preventing slippage and displacement. The entire transport process is monitored and regulated by a control device to ensure the stability of the transport speed and operating status.

[0013] However, when the metal mesh belt conveyor system with the above structure is actually used in coating equipment, the mesh belt is prone to deviation, which affects the transmission speed and operational stability. Utility Model Content

[0014] The main objective of this invention is to provide a conveying system for a vacuum evaporation coating apparatus and a vacuum evaporation coating apparatus, so as to solve the problems of high maintenance frequency and poor operational stability of the conveying system in the prior art.

[0015] To achieve the above objectives, according to one aspect of the present invention, a conveying system for a vacuum evaporation coating apparatus is provided, comprising: a roller assembly including multiple pivotable rollers spaced apart along a first direction V1, the multiple rollers being parallel to each other, the rollers extending along a second direction V2 perpendicular to the first direction V1, each roller including a roller shaft body and multiple supporting protrusions spaced apart along the axial direction of the roller shaft body, the sidewalls of the supporting protrusions being provided with first annular grooves, the first annular grooves on all rollers at the same position in the second direction V2 forming a linear mounting area Z, the linear mounting area Z being multiple; and a conveyor belt consisting of multiple belts corresponding one-to-one with the multiple linear mounting areas Z, the conveyor belt being confined within the first annular groove within the corresponding linear mounting area Z, and the surface of the conveyor belt protruding beyond the surface of the supporting protrusions, the roller assembly driving the conveyor belt to move.

[0016] In one embodiment, the depth of the first annular groove is between 0.2 mm and 0.8 mm; and / or, the width of the first annular groove is between 3 mm and 50 mm; and / or, the distance between two adjacent rollers is between 300 mm and 1200 mm.

[0017] In one embodiment, the height h of the support ring is between 3 and 20 mm; and / or, the distance d between two adjacent support rings is between 100 mm and 300 mm.

[0018] In one embodiment, the supporting convex ring and the roller body are an integral structure.

[0019] In one embodiment, the conveyor belt includes an upper conveyor section above the roller and a lower conveyor section below the roller. The conveying system for the vacuum evaporation coating apparatus further includes a guide shaft extending along a second direction V2 and pivotally disposed thereon. The guide shaft is provided with a plurality of second annular grooves corresponding one-to-one with a plurality of first annular grooves in its axial direction. The depth of the second annular grooves is greater than the thickness of the conveyor belt, so as to limit the lower conveyor section of the conveyor belt in the second direction V2.

[0020] In one embodiment, the distance between the bottom of the second annular groove of the guide shaft and the axis of the guide shaft is L1, and the distance between the bottom of the first annular groove of the roller and the axis of the roller is L2, where L1 = L2.

[0021] In one embodiment, the guide shaft includes a guide shaft body and a guide ring sleeved on the guide shaft body, with a second annular groove disposed on the side of the guide ring.

[0022] In one embodiment, the second annular groove has a narrowing section and a limiting section in the direction from its opening to the bottom of the groove, the width of the opening is greater than the width of the conveyor belt, and the conveyor belt is locked within the limiting section.

[0023] In one embodiment, the guide shaft body is made of ceramic material, and the guide ring is made of alloy steel, molybdenum metal, or ceramic material. The guide ring is fixedly mounted on the guide shaft body by a mounting component.

[0024] In one embodiment, the conveying system for the vacuum evaporation coating apparatus further includes: a tensioning shaft extending along a second direction V2, the tensioning shaft applying tension to the entire conveyor belt; and / or, a first drive unit drivenly connected to the rollers; and / or, a second drive unit drivenly connected to the guide shaft.

[0025] According to another aspect of the present invention, a vacuum evaporation coating apparatus is provided, comprising: a vacuum chamber; a conveying system, wherein the conveying system is the aforementioned conveying system, and the roller group and conveyor belt of the conveying system are disposed within the vacuum chamber.

[0026] By applying the technical solution of this utility model, during conveying, multiple rollers in the roller group rotate simultaneously. The rotation of these rollers drives all the conveyor belts on them to move, and the conveyor belts then move the workpieces on them, thus realizing the conveying function of the conveying system. Furthermore, the simple structure of the conveyor belts reduces the density of the rollers and minimizes the accumulation of coating material on the rollers. The certain distance between the conveyor belts prevents the coating material from accumulating and thickening, significantly reducing equipment downtime and maintenance costs. More importantly, each conveyor belt in each straight installation area Z has multiple support points supported by multiple rollers. Each support point is confined within the first annular groove in the second direction V2, thus ensuring the straightness of each conveyor belt during transport and preventing deviation of the conveying plane formed by all conveyor belts, thereby guaranteeing transmission speed and operational stability.

[0027] In addition to the objectives, features, and advantages described above, this utility model has other objectives, features, and advantages. The present utility model will now be described in further detail with reference to the figures. Attached Figure Description

[0028] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments and descriptions of this utility model are used to explain this utility model and do not constitute an undue limitation thereof. In the drawings:

[0029] Figure 1 A top view schematic diagram of an embodiment of a conveying system for a vacuum evaporation coating apparatus according to the present invention is shown;

[0030] Figure 2 It shows Figure 1 A front view schematic diagram of part of the structure of the transmission system;

[0031] Figure 3 It shows Figure 1 A side view of the rollers in the conveyor system;

[0032] Figure 4 It shows Figure 3 An enlarged structural diagram of point A on the roller;

[0033] Figure 5 It shows Figure 1 A side view of the guide shaft of the transmission system and the second drive device in cooperation;

[0034] Figure 6 It shows Figure 5 An enlarged structural diagram of point B on the guide shaft; and

[0035] Figure 7 A schematic diagram of the vacuum evaporation coating apparatus according to the present invention is shown.

[0036] The above figures include the following reference numerals:

[0037] 10. Vacuum chamber; 21. Roller assembly; 211. Roller; 2111. Roller shaft body; 2112. Supporting convex ring; 2113. First annular groove; 22. Conveyor belt; 30. Heating device; 50. Guide shaft; 51. Guide shaft body; 52. Guide ring; 521. Second annular groove; 5211. Narrowing section; 5212. Limiting section; 522. Mounting component; 60. First driving device; 70. Second driving device; 80. Evaporation device; 90. Tensioning shaft; 130. Conveying system. Detailed Implementation

[0038] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.

[0039] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0040] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such terms can be used interchangeably where appropriate for the embodiments of the utility model described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0041] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0042] like Figures 1 to 4As shown, in this embodiment, the conveying system for the vacuum evaporation coating apparatus includes a roller assembly 21 and a conveyor belt 22. The roller assembly 21 includes multiple pivotable rollers 211 spaced apart along a first direction V1, with the rollers 211 parallel to each other. The rollers 211 extend along a second direction V2 perpendicular to the first direction V1. Each roller 211 includes a roller shaft body 2111 and multiple supporting protrusions 2112 spaced apart along the axial direction of the roller shaft body 2111. The sidewalls of the supporting protrusions 2112 are provided with first annular grooves 2113. The first annular grooves 2113 on all rollers 211 at the same position in the second direction V2 form multiple linear mounting areas Z. The conveyor belt 22 consists of multiple belts corresponding to the multiple linear mounting areas. The conveyor belt 22 is confined within the first annular grooves 2113 in the corresponding linear mounting area, and the surface of the conveyor belt 22 protrudes beyond the surface of the supporting protrusions 2112. The roller assembly 21 drives the conveyor belt 22 to move.

[0043] Applying the technical solution of this embodiment, during conveying, multiple rollers 211 in the roller group 21 rotate simultaneously. The rotation of multiple rollers 211 drives all conveyor belts 22 on them to move, and the conveyor belts 22 then drive the workpieces on them to move, thereby realizing the conveying function of the conveying system. In addition, the structure of the conveyor belts 22 is simple, which can reduce the density of rollers 211 and reduce the accumulation of coating material on the rollers 211. The conveyor belts 22 have a certain distance between them, which makes it difficult for the coating material to accumulate and thicken, thus significantly reducing the downtime and maintenance costs of the equipment. More importantly, each conveyor belt 22 in each straight installation area Z has multiple support points supported by multiple rollers 211. Each support point is limited within the first annular groove 2113 in the second direction V2, thus ensuring the straightness of each conveyor belt 22 during transportation and preventing the conveying plane formed by all conveyor belts 22 from deviating, thereby ensuring the transmission speed and operational stability.

[0044] Preferably, in this embodiment, the conveyor belt 22 is made of metal material. Metal conveyor belts have high strength, high wear resistance and good thermal conductivity, and can maintain stable performance and long service life under high temperature and high pressure conditions.

[0045] More preferably, the conveyor belt 22 is an alloy steel belt made of high-temperature alloy steel material, specifically using high-temperature alloy steel belts such as Inconel 718, Haynes 230, or GH4145 as the transmission support, which can withstand high temperatures up to 700 degrees Celsius.

[0046] Preferably, in this embodiment, the roller 211 is made of high-temperature resistant ceramic or SiC material, and the surface of the roller is provided with a first annular groove 2113 that cooperates with the conveyor belt 22 to ensure the fixed position of the conveyor belt 22 during the transmission process.

[0047] Preferably, the first annular groove 2113 is a U-shaped groove, which maintains the straightness of the conveyor belt 22 through the groove transmission mechanism and prevents the conveyor belt 22 from deviating during transmission.

[0048] It should be noted that the conveyor belts 22 form a loop, and each conveyor belt 22 has a consistent circumference after the loop is closed, ensuring the synchronicity of the conveying and the consistency of the tension.

[0049] In this embodiment, the depth of the first annular groove 2113 is between 0.2 mm and 0.8 mm. If the depth of the first annular groove 2113 is too shallow, the limiting effect on the conveyor belt 22 will be poor; if the depth of the first annular groove 2113 is too deep, when a low-height coating material is deposited on the roller 211, its height may exceed the height of the upper surface of the conveyor belt 22, causing the workpiece to detach from the conveyor belt 22, ultimately resulting in a short time interval between two shutdowns for maintenance of the conveying system.

[0050] In this embodiment, the width of the first annular groove 2113 is between 3mm and 50mm. This means the conveyor belt 22 has a shorter bandwidth, making it less prone to material buildup and thickening, thus significantly reducing equipment downtime and maintenance costs. Preferably, the bandwidth of the conveyor belt 22 is 10mm.

[0051] In this embodiment, the distance between two adjacent rollers 211 is between 300mm and 1200mm. This structure, on the one hand, makes it difficult for the coating material to accumulate and thicken, which can significantly reduce the downtime and maintenance costs of the equipment; on the other hand, it can ensure the support force on the conveyor belt 22 and ensure that the conveying surfaces of each conveyor belt 22 are in the same plane.

[0052] like Figure 3 and Figure 4 As shown, in this embodiment, the height h of the supporting convex ring 2112 is between 3 and 20 mm. This structure, on the one hand, prevents the coating material from accumulating and thickening, significantly reducing equipment downtime and maintenance costs; on the other hand, it facilitates processing and production, resulting in low production costs.

[0053] like Figure 3 As shown, in this embodiment, the distance d between two adjacent supporting protrusions 2112 is between 100mm and 300mm. This results in a moderately spaced distribution of the conveyor belt 22, which on the one hand prevents the coating material from accumulating and thickening, significantly reducing equipment downtime and maintenance costs; on the other hand, it ensures support force at all points on the workpiece.

[0054] In this embodiment, the supporting protruding ring 2112 and the roller body 2111 are an integral structure. This structure is simple and reduces assembly steps. Of course, in other embodiments not shown in the figures, the supporting protruding ring 2112 and the roller body 2111 can also be separate structures.

[0055] like Figure 2 , Figure 5 and Figure 6 As shown, in this embodiment, the conveyor belt 22 includes an upper conveying section above the roller 211 and a lower conveying section below the roller 211. The conveying system for the vacuum evaporation coating apparatus further includes a guide shaft 50, which extends along a second direction V2 and is pivotally disposed. The guide shaft 50 has a plurality of second annular grooves 521 corresponding one-to-one with a plurality of first annular grooves 2113 in its axial direction. The depth of the second annular grooves 521 is greater than the thickness of the conveyor belt 22, so as to limit the lower conveying section of the conveyor belt 22 in the second direction V2. The above structure can limit the conveyor belt 22 and further prevent the conveyor belt 22 from moving along the axial direction of the guide shaft 50.

[0056] After long-term research, the inventors discovered that the conveyor belt 22 in this embodiment may experience wear after prolonged use. This is because friction may occur at the contact points between the conveyor belt 22 and the guide shaft 50 and roller 211. This friction arises because the linear velocities at these contact points are inconsistent, leading to relative sliding between the conveyor belt 22 and the guide shaft 50 or roller 211, causing wear on the conveyor belt 22. To address this problem, in this embodiment, the distance between the bottom of the second annular groove 521 of the guide shaft 50 and the axis of the guide shaft 50 is L1, and the distance between the bottom of the first annular groove 2113 of the roller 211 and the axis of the roller 211 is L2, where L1 = L2. Specifically, V = ω × r, where V is the linear velocity, ω is the angular velocity, and r is the radius. For the linear velocity at the contact point between the guide shaft 50 and the conveyor belt 22, V... 导 =ω 导 ×L1, for the linear velocity at the point where roller 211 contacts conveyor belt 22, V 辊 =ω 辊 ×L2, since L1=L2, therefore, we only need to control ω afterwards. 导 and ω 辊 Equal speeds ensure that the linear velocities at the contact points between the conveyor belt 22 and the guide shaft 50 and roller 211 are consistent, avoiding speed differences between the conveyor belt 22 and the roller 211 and guide shaft 50, thereby reducing friction and ensuring the service life of the conveyor belt 22.

[0057] like Figure 5 and Figure 6As shown, in this embodiment, the guide shaft 50 includes a guide shaft body 51 and a guide ring 52 sleeved on the guide shaft body 51, and a second annular groove 521 is disposed on the side of the guide ring 52. That is, the guide shaft 50 is a split structure, and the above structure allows the groove depth of the second annular groove 521 to be relatively deep, thereby ensuring the limiting effect.

[0058] like Figure 6 As shown, in this embodiment, the second annular groove 521 has a constriction section 5211 and a limiting section 5212 in the direction from its opening to the bottom of the groove. The width of the opening is greater than the width of the conveyor belt 22, and the conveyor belt 22 is engaged within the limiting section 5212. This structure allows the conveyor belt 22 to slide smoothly from the constriction section 5211 into the limiting section 5212 during installation, thereby reducing the difficulty of installation.

[0059] like Figure 5 and Figure 6 As shown, in this embodiment, the guide shaft body 51 is made of ceramic material, and the guide ring 52 is made of alloy steel, molybdenum metal, or ceramic material. The guide ring 52 is fixedly mounted on the guide shaft body 51 by a mounting member 522. Specifically, in this embodiment, the second annular groove 521 is made of high-temperature resistant stainless steel and fitted into the guide shaft body 51 made of ceramic material. After precise adjustment of its position, it is fixed on the guide shaft body 51 to limit the lateral displacement of the conveyor belt 22 and prevent the conveyor belt 22 from running off-track. It should be noted that in this embodiment, the mounting member 522 is a mounting screw.

[0060] After long-term research, the inventors also discovered that the reason why the existing metal mesh belt conveyor system experiences slack and deviation when applied to vacuum coating equipment is that the vacuum coating chamber is a high-temperature environment. Once the temperature rises, the mesh belt expands. This expansion leads to slack and deviation. To solve these technical problems, such as... Figure 2 As shown, in this embodiment, the conveying system for the vacuum evaporation coating apparatus further includes a tensioning shaft 90. The tensioning shaft 90 extends along the second direction V2 and applies tension to the entire conveyor belt 22.

[0061] Preferably, in this embodiment, the tensioning shaft 90 is movably disposed on the vacuum chamber 10 in the vertical direction, and the tensioning shaft 90 presses against the upper surface of the lower conveyor section under the action of gravity. When vacuum coating is not performed, the conveyor belt 22 is in a taut state because the tensioning shaft 90 is pressed against the upper surface of the lower conveyor section under the action of gravity. When vacuum coating is performed, the temperature of the conveyor belt 22 in the vacuum chamber 10 rises, and the conveyor belt 22 expands. The supporting force on the tensioning shaft 90 from the conveyor belt 22 decreases. This supporting force is less than the weight of the tensioning shaft 90, so the tensioning shaft 90 will move downward under the action of the resultant force until the supporting force is equal to the weight. This allows the conveyor belt 22 to remain taut even if its length is extended. When the temperature inside the vacuum chamber 10 decreases and the conveyor belt 22 contracts, the supporting force on the tension shaft 90 increases. Since the tension shaft 90 has the freedom to move up and down, it can move upward until the force on the tension shaft 90 is balanced. Therefore, it can prevent the tension of the conveyor belt 22 from being too large and ensure the service life of the conveyor belt 22.

[0062] like Figure 1 As shown, in this embodiment, the conveying system for the vacuum evaporation coating apparatus further includes a first driving device 60, which is drivenly connected to the roller 211. The above structure is simple and achieves automation of the conveying system.

[0063] like Figure 5 As shown, in this embodiment, the conveying system for the vacuum evaporation coating apparatus further includes a second driving device 70, which is drivenly connected to the guide shaft 50. The above structure is simple and achieves automation of the conveying system.

[0064] Preferably, such as Figure 2 As shown, in this embodiment, the conveying system for the vacuum evaporation coating apparatus further includes a heating device 30, which can heat the conveyor belt 22 of the lower section, thereby reducing the amount of coating material deposited on the conveyor belt 22 and significantly reducing the downtime and maintenance costs of the equipment.

[0065] This application also provides a vacuum evaporation coating apparatus, such as... Figure 7 As shown, an embodiment of the vacuum evaporation coating apparatus according to this application includes a vacuum chamber 10 and a conveying system 130. The conveying system 130 is the aforementioned conveying system, with rollers 21 and a conveyor belt 22 disposed within the vacuum chamber 10. Since the aforementioned conveying system has the advantages of high transmission speed and good operational stability, the vacuum evaporation coating apparatus having it also possesses these advantages.

[0066] like Figure 7As shown, in this embodiment, the vacuum evaporation coating apparatus further includes an evaporation device 80, which is used to perform evaporation coating on the workpiece on the conveyor belt 22.

[0067] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0068] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0069] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0070] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A conveying system for a vacuum evaporation coating apparatus, characterized in that, include: The roller assembly (21) includes a plurality of pivotable rollers (211) spaced apart along a first direction V1. The plurality of rollers (211) are parallel to each other and extend along a second direction V2 perpendicular to the first direction V1. Each roller (211) includes a roller shaft body (2111) and a plurality of support protrusions (2112) spaced apart along the axial direction of the roller shaft body (2111). The sidewall of the support protrusions (2112) is provided with a first annular groove (2113). The first annular grooves (2113) on all rollers (211) at the same position in the second direction V2 form a straight mounting area Z. There are multiple straight mounting areas Z. The conveyor belt (22) is a plurality of belts that are arranged one-to-one with the plurality of linear mounting areas Z. The conveyor belt (22) is located within the first annular groove (2113) within the corresponding linear mounting area Z, and the surface of the conveyor belt (22) protrudes from the surface of the supporting convex ring (2112). The roller group (21) drives the conveyor belt (22) to move.

2. The conveying system for a vacuum evaporation coating apparatus according to claim 1, characterized in that, The groove depth of the first annular groove (2113) is between 0.2 mm and 0.8 mm; and / or, the groove width of the first annular groove (2113) is between 3 mm and 50 mm; and / or, the distance between two adjacent rollers (211) is between 300 mm and 1200 mm.

3. The conveying system for a vacuum evaporation coating apparatus according to claim 1, characterized in that, The height h of the support ring (2112) is between 3 mm and 20 mm; and / or the distance d between two adjacent support rings (2112) is between 100 mm and 300 mm.

4. The conveying system for a vacuum evaporation coating apparatus according to claim 1, characterized in that, The supporting convex ring (2112) and the roller body (2111) are an integral structure.

5. The conveying system for a vacuum evaporation coating apparatus according to claim 1, characterized in that, The conveyor belt (22) includes an upper conveying section above the roller (211) and a lower conveying section below the roller (211). The conveying system for the vacuum evaporation coating apparatus further includes: A guide shaft (50) extends along the second direction V2 and is pivotally disposed. The guide shaft (50) is provided with a plurality of second annular grooves (521) corresponding one-to-one with a plurality of first annular grooves (2113) in its axial direction. The depth of the second annular grooves (521) is greater than the thickness of the conveyor belt (22) so as to limit the lower section of the conveyor belt (22) in the second direction V2.

6. The conveying system for a vacuum evaporation coating apparatus according to claim 5, characterized in that, The distance between the bottom of the second annular groove (521) of the guide shaft (50) and the axis of the guide shaft (50) is L1, and the distance between the bottom of the first annular groove (2113) of the roller (211) and the axis of the roller (211) is L2, where L1 = L2.

7. The conveying system for a vacuum evaporation coating apparatus according to claim 5 or 6, characterized in that, The guide shaft (50) includes a guide shaft body (51) and a guide ring (52) sleeved on the guide shaft body (51), and the second ring groove (521) is disposed on the side of the guide ring (52).

8. The conveying system for a vacuum evaporation coating apparatus according to claim 7, characterized in that, The guide shaft body (51) is made of ceramic material, and the guide ring (52) is made of alloy steel, molybdenum metal or ceramic material. The guide ring (52) is fixedly mounted on the guide shaft body (51) by a mounting part (522).

9. The conveying system for a vacuum evaporation coating apparatus according to claim 5, characterized in that, The conveying system for the vacuum evaporation coating apparatus further includes: A tensioning shaft (90) extending along the second direction V2 applies tension to the entire conveyor belt (22); and / or, A first driving device (60) is drivingly connected to the roller (211); and / or, The second drive unit (70) is driven to connect with the guide shaft (50).

10. A vacuum evaporation coating apparatus, comprising: Vacuum chamber (10); The conveying system (130) is characterized in that the conveying system (130) is the conveying system according to any one of claims 1 to 9, and the roller group (21) and the conveyor belt (22) of the conveying system (130) are disposed in the vacuum chamber (10).

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