Plating material steam uniform distribution baffle plate of evaporator

Abstract

The plating material steam uniform distribution baffle comprises a supporting shaft and a baffle body, a driving unit is arranged on the surface, close to the lower end, of one end of the supporting shaft, a rotating unit is fixedly installed on the upper surface of the driving unit, and the rotating portion of the rotating unit is fixedly connected with a polygonal connector. A connecting structure is arranged at the lower end of the polygonal connector and the upper end of the baffle and comprises a butt joint block, a butt joint groove and a rectangular block. According to the plating material steam uniform distribution baffle plate of the evaporator, when the baffle plate needs to be cleaned, a fixed block is pulled towards one end, so that a circular sliding block drives a circular clamping rod to move towards one end to be separated from a circular clamping groove formed in the surface of one end of a rectangular inserting block, and then the circular clamping rod is clamped in the circular clamping groove under the action of gravity; and the baffle drives the butt joint block to be separated from the butt joint groove and meanwhile drives the rectangular insertion block to be separated from the rectangular insertion groove, so that the baffle can be detached and cleaned.

Description

Technical Field

[0001] This utility model relates to the technical field of baffles for uniform distribution of plating vapor, and in particular to a baffle for uniform distribution of plating vapor in a vapor deposition machine. Background Technology

[0002] Evaporation equipment uses a specific heating and evaporation method to evaporate the coating material (coating source) and vaporize it, forming a gaseous vapor cloud. This vapor cloud moves upwards within a cavity and eventually deposits onto a substrate, condensing into a film. The substrate is typically placed on a coating pan above the cavity and rotates with the pan to achieve a uniform film thickness. For example, a baffle device for an evaporation machine, disclosed in CN221371259U, is located on one side of the vertical evaporation path and includes a first baffle, a support shaft, a drive unit, and a rotating unit. The rotating unit is mounted on the support shaft, the first baffle is connected to the rotating unit, and the drive unit drives the rotating unit to move the first baffle to both horizontal and vertical positions. The first baffle has a concave arc-shaped edge. In the horizontal position, the arc-shaped edge faces the evaporation path to adjust the vapor cloud, improve the morphology and density distribution of the vapor cloud, and thus improve the uniformity of the vapor-deposited film. The vapor deposition machine using the above-mentioned baffle device has a first baffle that can be flipped, and the state of use can be selected according to the needs. It is suitable for continuous vapor deposition processes of different materials. After long-term use, the lower surface of the first baffle will be deposited with film material, which will affect the function of the first baffle. Therefore, the first baffle needs to be cleaned. Since the side of the first baffle opposite to the arc-shaped edge is connected to one side of the polygonal joint, it is inconvenient to clean it. Utility Model Content

[0003] The main purpose of this invention is to provide a baffle for uniformly distributing coating steam in a vapor deposition machine, which can effectively solve the problems in the background art.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] A vapor distribution baffle for a vapor deposition machine includes a support shaft and a baffle. A drive unit is provided on one end surface of the support shaft near the lower end. A rotating unit is fixedly installed on the upper surface of the drive unit. A polygonal joint is fixedly connected to the rotating part of the rotating unit. A connection structure is provided between the lower end of the polygonal joint and the upper end of the baffle. The connection structure includes a mating block, a mating groove, a rectangular block, a rectangular insert block, a circular slot, a wedge block, a rectangular slot, a first block, a fixing block, a circular slide, a circular slider, a circular locking rod, a return spring, and a circular guide rod.

[0006] Preferably, a docking block is fixedly installed on the upper surface of the baffle near the rear end, and a docking groove is formed on the lower surface of the polygonal joint, into which the docking block is inserted.

[0007] Preferably, a rectangular block is fixedly installed on the upper surface of one end of the baffle, a rectangular insert is fixedly installed on the upper surface of the rectangular block near the other end, and a wedge block is fixedly installed on the upper surface of the rectangular insert.

[0008] Preferably, a circular slot is formed on one end surface of the rectangular insert, a circular rod is inserted into the circular slot, and a No. 1 block is fixedly installed on the lower end of one end surface of the polygonal connector.

[0009] Preferably, a rectangular slot is provided on the lower surface of the first block near the other end, a rectangular insert is inserted into the rectangular slot, and a circular groove is provided at one end of the rectangular slot inside the first block.

[0010] Preferably, a circular slider is slidably installed in the circular groove, a circular guide rod is fixedly installed on the middle of one end surface of the circular slider, and a fixing block is fixedly installed on one end surface of the circular guide rod.

[0011] Preferably, a return spring is sleeved on one end of the circular slider on the outer surface of the circular guide rod, and a circular locking rod is fixedly installed in the middle of the other end of the circular slider.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] In this utility model, through the set connection structure, when it is necessary to clean the baffle, the fixed block is pulled to one end, so that the circular slider drives the circular locking rod to one end, disengaging from the circular locking groove opened on one end surface of the rectangular insert. Then, under the action of gravity, the baffle drives the docking block to disengage from the docking groove, and at the same time drives the rectangular insert to disengage from the rectangular slot, so that the baffle can be disassembled and cleaned. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of a baffle for uniformly distributing coating vapor in a vapor deposition machine according to the present invention.

[0015] Figure 2 This is a partial cross-sectional view of a baffle for uniformly distributing coating vapor in a vapor deposition machine according to the present invention.

[0016] Figure 3 This utility model relates to a baffle for uniformly distributing coating vapor in a vapor deposition machine. Figure 1 Enlarged view of point A in the middle;

[0017] Figure 4 This utility model relates to a baffle for uniformly distributing coating vapor in a vapor deposition machine. Figure 2 Enlarged view of section B in the middle.

[0018] In the diagram: 1. Support shaft; 2. Drive unit; 3. Rotation unit; 301. Polygonal joint; 4. Baffle; 5. Connection structure; 501. Connecting block; 502. Connecting groove; 503. Rectangular block; 504. Rectangular insert block; 505. Circular slot; 506. Wedge block; 507. Rectangular slot; 508. Block No. 1; 509. Fixing block; 510. Circular slide groove; 511. Circular slider; 512. Circular locking rod; 513. Return spring; 514. Circular guide rod. Detailed Implementation

[0019] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0020] like Figure 1-4 As shown, a vapor distribution baffle for a vapor deposition machine includes a support shaft 1 and a baffle 4. A drive unit 2 is provided near the lower end of one end of the support shaft 1. A rotating unit 3 is fixedly installed on the upper surface of the drive unit 2. A polygonal connector 301 is fixedly connected to the rotating part of the rotating unit 3. A connecting structure 5 is provided between the lower end of the polygonal connector 301 and the upper end of the baffle 4. The connecting structure 5 includes a docking block 501, a docking groove 502, a rectangular block 503, a rectangular insert block 504, a circular slot 505, a wedge block 506, a rectangular slot 507, a first block 508, a fixing block 509, a circular slide 510, a circular slider 511, a circular locking rod 512, a return spring 513, and a circular guide rod 514.

[0021] A mating block 501 is fixedly installed on the upper surface of the baffle 4 near the rear end. A mating groove 502 is formed on the lower surface of the polygonal connector 301, and the mating block 501 is inserted into the mating groove 502. A rectangular block 503 is fixedly installed on the upper part of one end surface of the baffle 4. A rectangular insert block 504 is fixedly installed on the upper surface of the rectangular block 503 near the other end. A wedge block 506 is fixedly installed on the upper surface of the rectangular insert block 504. A circular slot 505 is formed on one end surface of the rectangular insert block 504, and a circular locking rod 512 is inserted into the circular slot 505. A block 508 is fixedly installed on the lower end of one end surface of the polygonal connector 301. A rectangular slot 507 is formed on the lower surface of the block 508 near the other end, and the rectangular insert block 504 is inserted into the rectangular slot 507. A circular sliding groove 510 is formed at one end of the rectangular slot 507 inside the block 508. A circular slider 511 is slidably installed in the groove 510. A circular guide rod 514 is fixedly installed on the middle of one end surface of the circular slider 511. A fixing block 509 is fixedly installed on the surface of one end of the circular guide rod 514. A return spring 513 is sleeved on one end of the circular slider 511 on the outer surface of the circular guide rod 514. A circular locking rod 512 is fixedly installed on the middle of the other end surface of the circular slider 511. When it is necessary to clean the baffle 4, the fixing block 509 is pulled to one end, so that the circular slider 511 drives the circular locking rod 512 to one end, disengaging from the circular slot 505 opened on one end surface of the rectangular insert 504. Then, under the action of gravity, the baffle 4 drives the docking block 501 to disengage from the docking groove 502, and at the same time drives the rectangular insert 504 to disengage from the rectangular slot 507, so that the baffle 4 can be removed for cleaning.

[0022] It should be noted that this utility model is a baffle for uniformly distributing plating steam in a vapor deposition machine. When the baffle 4 needs to be cleaned, the fixing block 509 is pulled to one end, causing the fixing block 509 to drive the circular slider 511 fixedly installed on the other end surface of the circular guide rod 514 to slide to one end in the circular groove 510, and squeeze the return spring 513, thereby driving the circular locking rod 512 fixedly installed in the middle of the other end surface of the circular slider 511 to move to one end until the circular locking rod 512 disengages from the circular slot 505 opened on one end surface of the rectangular insert 504. Then, under the action of gravity, the baffle 4 drives the docking block 501 fixedly installed near the rear end on its upper surface to disengage from the docking groove 502 opened on the lower surface of the polygonal connector 301. At the same time, it drives the rectangular insert 504 fixedly installed near the other end on the upper surface of the rectangular block 503 to disengage from the rectangular slot 507 opened near the other end on the lower surface of the first block 508. The baffle 4 can then be removed for cleaning.

[0023] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A baffle for uniformly distributing coating vapor in a vapor deposition machine, characterized in that: The device includes a support shaft (1) and a baffle (4). One end of the support shaft (1) is provided with a drive unit (2) near the lower end. A rotating unit (3) is fixedly installed on the upper surface of the drive unit (2). A polygonal connector (301) is fixedly connected to the rotating part of the rotating unit (3). A connection structure (5) is provided at the lower end of the polygonal connector (301) and the upper end of the baffle (4). The connection structure (5) includes a docking block (501), a docking groove (502), a rectangular block (503), a rectangular insert block (504), a circular slot (505), a wedge block (506), a rectangular slot (507), a first block (508), a fixing block (509), a circular slide groove (510), a circular slider (511), a circular locking rod (512), a return spring (513), and a circular guide rod (514).

2. The uniform distribution baffle for coating steam in a vapor deposition machine according to claim 1, characterized in that: A docking block (501) is fixedly installed on the upper surface of the baffle (4) near the rear end. A docking groove (502) is provided on the lower surface of the polygonal connector (301), and a docking block (501) is inserted into the docking groove (502).

3. The uniform distribution baffle for coating steam in a vapor deposition machine according to claim 2, characterized in that: A rectangular block (503) is fixedly installed on the upper end of one end surface of the baffle (4), and a rectangular insert (504) is fixedly installed on the upper surface of the rectangular block (503) near the other end. A wedge block (506) is fixedly installed on the upper surface of the rectangular insert (504).

4. The uniform distribution baffle for coating vapor in a vapor deposition machine according to claim 3, characterized in that: The rectangular insert (504) has a circular slot (505) on one end surface, and a circular rod (512) is inserted into the circular slot (505). A block (508) is fixedly installed on the lower end of one end surface of the polygonal connector (301).

5. The uniform distribution baffle for coating vapor in a vapor deposition machine according to claim 4, characterized in that: A rectangular slot (507) is provided on the lower surface of the first block (508) near the other end. A rectangular insert (504) is inserted into the rectangular slot (507). A circular groove (510) is provided at one end of the rectangular slot (507) inside the first block (508).

6. The uniform distribution baffle for coating steam in a vapor deposition machine according to claim 5, characterized in that: A circular slider (511) is slidably installed in the circular groove (510). A circular guide rod (514) is fixedly installed on the middle of one end surface of the circular slider (511). A fixing block (509) is fixedly installed on one end surface of the circular guide rod (514).

7. The uniform distribution baffle for coating vapor in a vapor deposition machine according to claim 6, characterized in that: A return spring (513) is sleeved on one end of a circular slider (511) on the outer surface of the circular guide rod (514), and a circular locking rod (512) is fixedly installed in the middle of the other end of the circular slider (511).

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