Top anti-sticking device of vacuum evaporator

Abstract

The utility model provides a vacuum evaporator top anti-sticking device, the evaporator comprises a cavity, the cavity is enclosed by a top plate, a coaming and a bottom plate, the top of the cavity is provided with the anti-sticking device, the anti-sticking device comprises a side wall anti-sticking plate, a first anti-sticking plate and a second anti-sticking plate, the side wall anti-sticking plate surrounds the upper part of the cavity by a circle and is arranged on the inner side of the coaming, and the first anti-sticking plate and the second anti-sticking plate are arranged on the top of the cavity. A first anti-adhesion plate and a second anti-adhesion plate are arranged below the top plate, the outer edge of the first anti-adhesion plate is connected with the top of the side wall anti-adhesion plate, the second anti-adhesion plate is arranged above the first anti-adhesion plate and used for preventing reverse sedimentation of a film material in the evaporation process and facilitating maintenance, and heating devices are arranged on the first anti-adhesion plate and the side wall anti-adhesion plate and used for heating the film material in the evaporation process. A plurality of cushion columns are symmetrically arranged between the first anti-adhesion plate and the second anti-adhesion plate, so that a gap is formed between the first anti-adhesion plate and the second anti-adhesion plate, the thickness of the gap is equal to that of the cushion columns, and the gap is used for forming a heat preservation layer between the first anti-adhesion plate and the second anti-adhesion plate so that heat preservation can be conducted on the heating device, and meanwhile the influence of external water cooling is isolated.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation coating machine technology, and more specifically, to a top anti-collision device for a vacuum evaporation coating machine. Background Technology

[0002] Vacuum evaporation equipment is a device that uses heating to evaporate materials in a high vacuum environment, and then uses the evaporated materials to coat the surface of a wafer substrate. During coating, the substrate needs to reach a certain temperature to achieve a good coating effect.

[0003] Currently, there are still some problems with vacuum coating machines on the market. For example, the existing technology CN118374774A discloses a vacuum coating machine with uniform material dispersion. The inner wall of the coating chamber is equipped with an anti-sticking plate, and heating lamps are installed on the anti-sticking plates on the inner walls of the left and right sides of the coating chamber. However, in this solution, the heating range of the heating lamps is prone to unevenness, and the top of the chamber will also be coated with material during high-temperature evaporation. The side anti-sticking plates alone cannot prevent the top of the chamber from sticking.

[0004] Therefore, a replacement device for the heating lamp is needed that can provide uniform heating without causing light pollution. Utility Model Content

[0005] In view of this, in order to solve the problems in the prior art where the heating range of the heating lamp is easily uneven and the top of the cavity is also coated with material during high-temperature evaporation, and the side anti-coating plate alone cannot prevent the top of the cavity from being coated, this utility model proposes a top anti-coating device for a vacuum evaporation machine. It avoids light pollution by generating heat radiation through heating wires, and the uniform and dense distribution of heating wires makes the heating more uniform. At the same time, two layers of anti-coating plates are set. The lower layer is used for heating and anti-coating, and the upper layer is used to prevent the film material from settling backward during the evaporation process.

[0006] A top anti-sticking device for a vacuum evaporation coating machine, the evaporation coating machine including a cavity, the cavity being surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13, characterized in that: an anti-sticking device is provided on the top of the cavity, including a side wall anti-sticking plate 2, a first anti-sticking plate 3, and a second anti-sticking plate 4, the side wall anti-sticking plate 2 surrounding the upper part of the cavity and located inside the surrounding plate 12, the first anti-sticking plate 3 and the second anti-sticking plate 4 being located below the top plate 11, the outer edge of the first anti-sticking plate 3 being connected to the top of the side wall anti-sticking plate 2, the first anti-sticking plate 3... A second anti-settling plate 4 is provided above to prevent the film material from settling backward during the vapor deposition process, facilitating maintenance. Heating devices are provided on the first anti-settling plate 3 and the side wall anti-settling plate 2. Multiple pads 51 are symmetrically arranged between the first anti-settling plate 3 and the second anti-settling plate 4, so that there is a gap between the first anti-settling plate 3 and the second anti-settling plate 4. The gap is equal to the thickness of the pads 51, which is used to form a heat insulation layer between the first anti-settling plate 3 and the second anti-settling plate 4 to keep the heating device warm and isolate the influence of external water cooling.

[0007] Furthermore, the two ends of the pad post 51 pass through the first anti-collision plate 3 and the second anti-collision plate 4 to connect the first anti-collision plate 3 and the second anti-collision plate 4. A support block 52 is provided below the top plate 11. The support block 52 is L-shaped, and one end of the L-shape is provided with a connecting hole 53. The support block 52 and the pad post 51 are locked together through the connecting hole 53, thereby connecting the second anti-collision plate 4 and the top plate 11.

[0008] Furthermore, the end of the support block 52 with the connecting hole 53 faces the middle of the second anti-fall plate 4, which is used to reduce the weight of the first anti-fall plate 3 and the second anti-fall plate 4 to prevent them from falling.

[0009] Furthermore, the heating device includes multiple first heating wires 31 and multiple second heating wires 21. The first heating wires 31 are evenly distributed on the bottom surface of the first anti-stick plate 3, and the second heating wires 21 are evenly distributed on the inner wall of the side wall anti-stick plate 2. Each first heating wire 31 and second heating wire 21 is a continuous S-shaped wire with one end being positive and the other end being negative.

[0010] Furthermore, the positive and negative poles of the same heating wire are connected to the positive and negative poles of a set of terminals 6. The top of the first anti-stick plate 3 is provided with multiple sets of terminals 6, which heat the first heating wire 31 and the second heating wire 21 to a certain temperature to generate thermal radiation and thus heat the substrate.

[0011] Furthermore, the top plate 11 and the second anti-collision plate 4 are provided with at least two sets of corresponding through holes 61 for the wiring terminal 6 to pass through.

[0012] Furthermore, a flange 62 is connected to each through hole 61 on the top plate 11. A ring of pressure blocks 63 is provided above the flange 62. Each pressure block 63 is connected to the positive or negative electrode of a heating wire. An annular water channel is provided in the middle of the flange 62. A first cooling pipe 64 is provided above the middle of the flange 62. Cooling water is supplied to the terminal 6 through the first cooling pipe 64 to cool it down.

[0013] Furthermore, the edges of the first anti-collision plate 3 and the second anti-collision plate 4 are provided with upward folded edges 55 to increase the rigidity of the first anti-collision plate 3 and the second anti-collision plate 4.

[0014] Furthermore, the first anti-collision plate 3 and the second anti-collision plate 4 are provided with mounting holes in the middle for mounting the upper optical detection structure.

[0015] The beneficial effects of this utility model are as follows: This utility model proposes a top anti-sticking device for a vacuum evaporation coating machine. The evaporation coating machine includes a cavity, which is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13. An anti-sticking device is provided on the top of the cavity, including a side wall anti-sticking plate 2, a first anti-sticking plate 3, and a second anti-sticking plate 4. The side wall anti-sticking plate 2 surrounds the upper part of the cavity and is located inside the surrounding plate 12. The first anti-sticking plate 3 and the second anti-sticking plate 4 are located below the top plate 11. The outer edge of the first anti-sticking plate 3 is connected to the top of the side wall anti-sticking plate 2. A second anti-sinking plate 4 is provided above the first anti-sinking plate 3 to prevent the film material from settling backward during the vapor deposition process and to facilitate maintenance. Heating devices are provided on the first anti-sinking plate 3 and the side wall anti-sinking plate 2. Multiple pads 51 are symmetrically arranged between the first anti-sinking plate 3 and the second anti-sinking plate 4, so that there is a gap between the first anti-sinking plate 3 and the second anti-sinking plate 4. The gap is equal to the thickness of the pads 51, which is used to form a heat insulation layer between the first anti-sinking plate 3 and the second anti-sinking plate 4 to keep the heating device warm and isolate the influence of external water cooling. Attached Figure Description

[0016] Figure 1 This is a cross-sectional structural diagram of the vacuum evaporation coating machine of this utility model.

[0017] Figure 2 This is a disassembled structural diagram of the top anti-sticking device of the vacuum evaporation machine of this utility model.

[0018] Figure 3 This is an exploded view of the top anti-collision device of the vacuum evaporation machine of this utility model.

[0019] Explanation of main component symbols

[0020] Top plate 11, surrounding plate 12, bottom plate 13, side wall anti-stick plate 2, second heating wire 21, first anti-stick plate 3, first heating wire 31, second anti-stick plate 4, pad column 51, support block 52, connecting hole 53, folded edge 55, wiring terminal 6, through hole 61, flange 62, pressure block 63, first cooling pipe 64.

[0021] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation Example 1:

[0022] A top anti-sticking device for a vacuum evaporation coating machine, the evaporation coating machine including a cavity, the cavity being surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13, characterized in that: an anti-sticking device is provided on the top of the cavity, including a side wall anti-sticking plate 2, a first anti-sticking plate 3, and a second anti-sticking plate 4, the side wall anti-sticking plate 2 surrounding the upper part of the cavity and located inside the surrounding plate 12, the first anti-sticking plate 3 and the second anti-sticking plate 4 being located below the top plate 11, the outer edge of the first anti-sticking plate 3 being connected to the top of the side wall anti-sticking plate 2, the first anti-sticking plate 3... A second anti-settling plate 4 is provided above to prevent the film material from settling backward during the vapor deposition process, facilitating maintenance. Heating devices are provided on the first anti-settling plate 3 and the side wall anti-settling plate 2. Multiple pads 51 are symmetrically arranged between the first anti-settling plate 3 and the second anti-settling plate 4, so that there is a gap between the first anti-settling plate 3 and the second anti-settling plate 4. The gap is equal to the thickness of the pads 51, which is used to form a heat insulation layer between the first anti-settling plate 3 and the second anti-settling plate 4 to keep the heating device warm and isolate the influence of external water cooling.

[0023] The two ends of the pad post 51 pass through the first anti-collision plate 3 and the second anti-collision plate 4, connecting the first anti-collision plate 3 and the second anti-collision plate 4. A support block 52 is provided below the top plate 11. The support block 52 is L-shaped, and one end of the L-shape is provided with a connecting hole 53. The support block 52 and the pad post 51 are locked together through the connecting hole 53, thereby connecting the second anti-collision plate 4 and the top plate 11.

[0024] The end of the support block 52 with the connecting hole 53 faces the middle of the second anti-fall plate 4, which is used to reduce the weight of the first anti-fall plate 3 and the second anti-fall plate 4 to prevent them from falling.

[0025] The heating device includes multiple first heating wires 31 and multiple second heating wires 21. The first heating wires 31 are evenly distributed on the bottom surface of the first anti-stick plate 3, and the second heating wires 21 are evenly distributed on the inner wall of the side wall anti-stick plate 2. Each first heating wire 31 and second heating wire 21 is a continuous S-shaped wire with one end as the positive electrode and the other end as the negative electrode.

[0026] The positive and negative poles of the same heating wire are connected to the positive and negative poles of a set of terminals 6. The top of the first anti-stick plate 3 is provided with multiple sets of terminals 6. The first heating wire 31 and the second heating wire 21 are heated to a certain temperature to generate thermal radiation, thereby heating the substrate.

[0027] The top plate 11 and the second anti-collision plate 4 are provided with at least two sets of corresponding through holes 61 for the wiring terminal 6 to pass through.

[0028] A flange 62 is connected to each through hole 61 on the top plate 11. A ring of pressure blocks 63 is provided above the flange 62. Each pressure block 63 is connected to the positive or negative electrode of a heating wire. An annular water channel is provided in the middle of the flange 62. A first cooling pipe 64 is provided above the middle of the flange 62. Cooling water is supplied to the terminal 6 through the first cooling pipe 64 to cool it down.

[0029] The edges of the first anti-collision plate 3 and the second anti-collision plate 4 are provided with upward folded edges 55 to increase the rigidity of the first anti-collision plate 3 and the second anti-collision plate 4.

[0030] The first anti-collision plate 3 and the second anti-collision plate 4 are provided with mounting holes in the middle for mounting the upper optical detection structure.

[0031] The beneficial effects of this utility model are as follows: This utility model proposes a top anti-sticking device for a vacuum evaporation coating machine. The evaporation coating machine includes a cavity, which is surrounded by a top plate 11, a surrounding plate 12, and a bottom plate 13. An anti-sticking device is provided on the top of the cavity, including a side wall anti-sticking plate 2, a first anti-sticking plate 3, and a second anti-sticking plate 4. The side wall anti-sticking plate 2 surrounds the upper part of the cavity and is located inside the surrounding plate 12. The first anti-sticking plate 3 and the second anti-sticking plate 4 are located below the top plate 11. The outer edge of the first anti-sticking plate 3 is connected to the top of the side wall anti-sticking plate 2. A second anti-sinking plate 4 is provided above the first anti-sinking plate 3 to prevent the film material from settling backward during the vapor deposition process and to facilitate maintenance. Heating devices are provided on the first anti-sinking plate 3 and the side wall anti-sinking plate 2. Multiple pads 51 are symmetrically arranged between the first anti-sinking plate 3 and the second anti-sinking plate 4, so that there is a gap between the first anti-sinking plate 3 and the second anti-sinking plate 4. The gap is equal to the thickness of the pads 51, which is used to form a heat insulation layer between the first anti-sinking plate 3 and the second anti-sinking plate 4 to keep the heating device warm and isolate the influence of external water cooling.

[0032] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A top anti-collision device for a vacuum evaporation coating machine, the evaporation coating machine comprising a cavity, the cavity being formed by a top plate (11), a surrounding plate (12), and a bottom plate (13), characterized in that: The cavity is equipped with an anti-sticking device at the top, including a side wall anti-sticking plate (2), a first anti-sticking plate (3), and a second anti-sticking plate (4). The side wall anti-sticking plate (2) surrounds the upper part of the cavity and is located inside the surrounding plate (12). The first anti-sticking plate (3) and the second anti-sticking plate (4) are located below the top plate (11). The outer edge of the first anti-sticking plate (3) is connected to the top of the side wall anti-sticking plate (2). The second anti-sticking plate (4) is located above the first anti-sticking plate (3) to prevent the film material from being deposited during the vapor deposition process. Reverse settlement facilitates maintenance. Heating devices are provided on the first anti-fall plate (3) and the side wall anti-fall plate (2). Multiple pads (51) are symmetrically arranged between the first anti-fall plate (3) and the second anti-fall plate (4), so that there is a gap between the first anti-fall plate (3) and the second anti-fall plate (4). The gap is equal to the thickness of the pad (51), which is used to form a heat insulation layer between the first anti-fall plate (3) and the second anti-fall plate (4) to keep the heating device warm and isolate the influence of external water cooling.

2. The top anti-sticking device of the vacuum evaporation machine as described in claim 1, characterized in that: The two ends of the pad (51) pass through the first anti-collision plate (3) and the second anti-collision plate (4) to connect the first anti-collision plate (3) and the second anti-collision plate (4). A support block (52) is provided below the top plate (11). The support block (52) is L-shaped, and one end of the L-shape is provided with a connecting hole (53). The support block (52) and the pad (51) are locked through the connecting hole (53) so that the second anti-collision plate (4) is connected to the top plate (11).

3. The top anti-sticking device of the vacuum evaporation machine as described in claim 2, characterized in that: The end of the support block (52) with the connection hole (53) faces the middle of the second anti-fall plate (4) to reduce the weight of the first anti-fall plate (3) and the second anti-fall plate (4) to prevent them from falling.

4. The top anti-sticking device of the vacuum evaporation machine as described in claim 1, characterized in that: The heating device includes multiple first heating wires (31) and multiple second heating wires (21). The first heating wires (31) are evenly distributed on the bottom surface of the first anti-stick plate (3), and the second heating wires (21) are evenly distributed on the inner wall of the side wall anti-stick plate (2). Each first heating wire (31) and second heating wire (21) is a continuous S-shaped wire with one end being the positive electrode and the other end being the negative electrode.

5. The top anti-sticking device of the vacuum evaporation machine as described in claim 1, characterized in that: The positive and negative poles of the same heating wire are connected to the positive and negative poles of a set of terminals (6). The top of the first anti-stick plate (3) is provided with multiple sets of terminals (6) to heat the first heating wire (31) and the second heating wire (21) to a certain temperature to generate thermal radiation and thus heat the substrate.

6. The top anti-sticking device of the vacuum evaporation machine as described in claim 1, characterized in that: The top plate (11) and the second anti-collision plate (4) are provided with at least two sets of corresponding through holes (61) for the wiring terminal (6) to pass through.

7. The top anti-sticking device of the vacuum evaporation machine as described in claim 1, characterized in that: A flange (62) is connected to each through hole (61) on the top plate (11). A ring of pressure blocks (63) is provided above the flange (62). Each pressure block (63) is connected to the positive or negative electrode of a heating wire. An annular water channel is provided in the middle of the flange (62). A first cooling pipe (64) is provided above the middle of the flange (62). Cooling water is supplied to the terminal (6) through the first cooling pipe (64) to cool it down.

8. The top anti-sticking device of the vacuum evaporation machine as described in claim 1, characterized in that: The edges of the first anti-collision plate (3) and the second anti-collision plate (4) are provided with upward folded edges (55) to increase the rigidity of the first anti-collision plate (3) and the second anti-collision plate (4).

9. The top anti-sticking device of the vacuum evaporation machine as described in claim 1, characterized in that: The first anti-collision plate (3) and the second anti-collision plate (4) are provided with mounting holes in the middle for mounting the upper optical detection structure.

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