Mounting and positioning structure of gas guide ring and coating equipment

Abstract

The utility model relates to a mounting and positioning structure of a gas guide ring and coating equipment. The mounting and positioning structure of the gas guide ring is used for positioning the gas guide ring in the process of mounting the gas guide ring to a top cover of a coating cavity, and comprises a plurality of positioning columns, first ends of the positioning columns are used for being connected with mounting grooves in the top cover of the coating cavity, and second ends of the positioning columns are used for being connected with the mounting grooves; a limiting structure for limiting the sliding direction and the sliding distance of the positioning column is arranged in the mounting groove; and the second end of the positioning column is used for positioning the gas guide ring when penetrating through the mounting hole of the gas guide ring. Therefore, in the process of mounting the gas guide ring on the top cover of the coating cavity, the gas guide ring is positioned through the plurality of positioning columns and then is fixed, so that the stress uniformity of the sealing ring after the gas guide ring is mounted can be improved, the condition that the sealing ring is damaged is avoided, the stability of reaction pressure in the coating cavity is improved, and the service life of the coating cavity is prolonged. The wafer surface particle accumulation condition is reduced, and the wafer coating yield is improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer coating technology, and in particular to the mounting and positioning structure of a gas guide ring and coating equipment. Background Technology

[0002] The gas ring, installed in the top cover of the coating chamber, serves as a channel and platform for the flow of process gases used on the wafer within the coating chamber of the coating equipment. The connection between the gas ring and the top cover of the coating chamber is sealed with a sealing ring.

[0003] As the number of coating cycles increases, the sealing ring will gradually corrode, so it is necessary to remove the gas guide ring periodically and replace it. However, the gas guide ring often causes uneven stress on the sealing ring during installation, leading to the sealing ring being compressed or even damaged, affecting the reaction pressure inside the coating chamber and causing particle accumulation on the wafer surface. Utility Model Content

[0004] Therefore, it is necessary to provide a gas guide ring installation and positioning structure and coating equipment that can improve the uniformity of the sealing ring force when installing the gas guide ring.

[0005] In a first aspect, a mounting and positioning structure for a gas guide ring is provided, wherein the mounting and positioning structure is used to position the gas guide ring during the process of installing the gas guide ring onto the top cover of the coating chamber, and the mounting and positioning structure includes:

[0006] Multiple positioning posts are provided. The first end of each positioning post is used to connect to the mounting groove of the coating chamber top cover. The mounting groove includes a limiting structure for defining the sliding direction and sliding distance of the positioning post. The second end of each positioning post is used to position the gas guide ring when it passes through the mounting hole of the gas guide ring.

[0007] In one embodiment, the first axial length is greater than the second axial length, wherein the first axial length is the axial length of the positioning post, and the second axial length is the sum of the axial length of the mounting groove and the axial length of the mounting hole.

[0008] In one embodiment, the positioning post is cylindrical.

[0009] In one embodiment, the body diameter of the positioning post is smaller than the inner diameter of the mounting hole of the gas guide ring.

[0010] In one embodiment, the limiting structure is an internal thread structure, and the first end is provided with a thread structure adapted to the internal thread structure.

[0011] In one embodiment, the second end of the positioning post is provided with an operating part.

[0012] In one embodiment, the operating part includes an internal hexagonal slot.

[0013] In one embodiment, the number of positioning posts included in the mounting and positioning structure is even, wherein a plurality of mounting grooves for mounting the positioning posts are evenly distributed along the circumference of the top cover of the coating cavity.

[0014] In one embodiment, the mounting and positioning structure includes two positioning posts; wherein the two positioning posts are respectively used to connect to two mounting slots symmetrically arranged along the center of the top cover of the coating cavity.

[0015] In a second aspect, a coating apparatus is provided, comprising a coating chamber top cover, a gas guide ring, and an installation and positioning structure for the gas guide ring provided in the first aspect.

[0016] The aforementioned gas guide ring mounting and positioning structure and coating equipment, wherein the gas guide ring mounting and positioning structure is used to position the gas guide ring during the installation of the gas guide ring onto the top cover of the coating chamber. The mounting and positioning structure includes multiple positioning posts, the first end of which connects to a mounting groove on the top cover of the coating chamber. The mounting groove includes a limiting structure for defining the sliding direction and sliding distance of the positioning post. The second end of the positioning post is used to position the gas guide ring when it passes through the mounting hole of the gas guide ring. Thus, during the installation of the gas guide ring onto the top cover of the coating chamber, the gas guide ring is first positioned by multiple positioning posts and then fixed, avoiding the problem of uneven force on the elastic sealing ring of the gas guide ring when positioned by applying external force. Using the above-mentioned gas guide ring mounting and positioning structure can improve the uniformity of force on the sealing ring after the gas guide ring is installed, prevent sealing ring damage, improve the stability of the reaction pressure in the coating chamber, reduce particle accumulation on the wafer surface, and improve the yield of wafer coating. Meanwhile, the uniform stress on the sealing ring extends its service life, reduces the manpower and testing time wasted when replacing the gas guide ring sealing ring in the coating equipment, and improves the working efficiency of the wafer coating production line. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the gas guide ring mounting and positioning structure in the installation state in one embodiment;

[0019] Figure 2This is a schematic diagram of the installation and positioning structure of the gas guide ring in one embodiment;

[0020] Figure 3 This is a schematic diagram showing the relative positions of the gas guide ring, sealing ring, and coating chamber top cover in one embodiment;

[0021] Figure 4 This is another schematic diagram of the gas guide ring installation and positioning structure in the installation state in one embodiment;

[0022] Figure 5 This is a schematic diagram of the structure after the gas guide ring has been installed on the top cover of the coating chamber in one embodiment;

[0023] Figure 6 This is a schematic diagram of the installation and positioning structure of the gas guide ring in another embodiment.

[0024] Explanation of reference numerals in the attached drawings: 100, gas guide ring; 110, mounting hole; 200, top cover of coating chamber; 210, mounting groove; 300, positioning post; 310, first end; 320, second end; 400, sealing ring; 410, O-ring sealing layer; 420, polytetrafluoroethylene sealing layer. Detailed Implementation

[0025] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0026] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0027] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0028] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0029] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0030] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0031] In one exemplary embodiment, please refer to Figure 1 The provided gas guide ring 100 mounting and positioning structure is used to position the gas guide ring 100 during the installation of it onto the coating chamber top cover 200; the mounting and positioning structure includes multiple positioning posts 300. Please refer to... Figure 1 and Figure 2The first end 310 of the positioning post 300 is used to connect with the mounting groove 210 on the top cover 200 of the coating chamber. The mounting groove includes a limiting structure for limiting the sliding direction and sliding distance of the positioning post. The second end 320 of the positioning post 300 is used to position the gas guide ring 100 when it passes through the mounting hole 110 of the gas guide ring 100.

[0032] The coating chamber top cover 200 is provided with multiple mounting grooves 210 for fixing the gas guide ring 100, and the gas guide ring 100 is provided with multiple mounting holes 110 accordingly. For example, the number of mounting grooves 210 on the coating chamber top cover 200 and the number of mounting holes 110 on the gas guide ring 100 are both 16. The gas guide ring 100 includes 2 air inlets and 36 air outlets. Please refer to... Figure 3 The sealing ring 400 is located between the top cover 200 of the coating chamber and the gas guide ring 100. Exemplarily, the sealing ring 400 is fixedly connected to the gas guide ring 100; exemplaryly, the sealing ring 400 includes an O-ring layer 410. Figure 3 (The red part in the image) and the PTFE sealing ring layer 420 ( Figure 3 The gray portion (in the image) is used to fill the gap between the gas guide ring 100 and the coating chamber top cover 200 through the elastic deformation of the O-ring sealing layer 410, achieving a sealing effect. In one possible embodiment, the sealing ring 400 is pre-positioned on the side of the gas guide ring 100 facing the coating chamber top cover 200. Figure 3 (a) shows the state before the gas guide ring 100 is installed to the top cover 200 of the coating chamber. Figure 3 (b) shows the state after the gas guide ring 100 is installed on the top cover 200 of the coating chamber. The sealing ring 400 ensures the sealing performance of the gas guide ring 100 after installation.

[0033] During wafer deposition, process gases flow into the deposition chamber through gas pipelines and a gas guide ring 100, reacting on the wafer surface. The gas guide ring 100, through its special internal structure, ensures that the process reaction gases flow evenly from 36 gas outlets. During deposition, different gas ions accumulate on the wafer surface; only a uniform distribution of these ions allows the entire deposition process to be completed smoothly, forming a uniform film. In addition to the required temperature and gas conditions for the process reaction, a certain vacuum pressure is also required when the wafer is deposited within the chamber. The connection between the gas guide ring 100 and the chamber is sealed by a sealing ring 400. While the sealing effect of the specific sealing ring 400 can meet the reaction requirements, it will gradually corrode with each coating cycle. Therefore, the sealing ring 400 of the gas guide ring 100 needs to be replaced periodically. However, when installing the gas guide ring 100 onto the top cover 200 of the coating chamber, the relevant technology uses external force to position it. Applying external force cannot guarantee uniform stress on the gas guide ring 100, leading to uneven stress on the sealing ring 400 between it and the top cover 200. This can cause the sealing ring 400 to be compressed or even damaged, significantly shortening its lifespan and affecting the reaction pressure within the chamber, resulting in particle accumulation on the wafer surface. Incorrect installation of the gas guide ring 100 can also affect the reaction of the process gas on the wafer surface, altering the film thickness.

[0034] For the installation and positioning structure of the gas guide ring 100 provided in this embodiment, please refer to... Figure 1 Before installing the gas guide ring 100 onto the top cover 200 of the coating chamber, multiple positioning posts 300 are first installed into the mounting grooves 210 on the top cover 200 of the coating chamber. The mounting grooves include limiting structures for defining the sliding direction and sliding distance of the positioning posts. Please refer to... Figure 4 Then, multiple mounting holes 110 on the gas guide ring 100 are controlled to pass through the positioning post 300, thus achieving relative positioning between the gas guide ring 100 and the coating chamber top cover 200 without applying external force. This avoids the uneven force on the sealing ring 400 caused by external force applied by a person or a robotic arm in related technologies. Screws or other fixing connectors are used to lock the remaining mounting holes 110 (excluding the mounting positioning post 300) to their corresponding mounting grooves 210. Please refer to... Figure 5 Remove the positioning post 300 and use screws or other fixing connectors to lock the corresponding mounting hole 110 to the corresponding mounting groove 210. For example, the limiting structure included in the mounting groove is used to limit the sliding direction and sliding distance of the fixing connector between the gas guide ring 1 and the coating chamber top cover 200.

[0035] The above embodiment provides an installation and positioning structure for the gas guide ring 100, used to position the gas guide ring 100 during installation onto the coating chamber top cover 200. The installation and positioning structure includes multiple positioning posts 300. The first end 310 of each positioning post 300 connects to a mounting groove 210 on the coating chamber top cover 200. The mounting groove includes a limiting structure for defining the sliding direction and distance of the positioning post. The second end of each positioning post 300 positions the gas guide ring 100 when it passes through the mounting hole 110. Thus, during installation onto the coating chamber top cover 200, the gas guide ring 100 is first positioned by multiple positioning posts 300 before being fixed, avoiding the problem of uneven force on the elastic sealing ring 400 when positioning the gas guide ring 100 by applying external force. The installation and positioning structure of the gas guide ring 100 provided in the above embodiment can improve the uniformity of force on the sealing ring 400 after the gas guide ring 100 is installed, avoid damage to the sealing ring 400, improve the stability of the reaction pressure in the coating chamber, reduce particle accumulation on the wafer surface, and improve the yield of wafer coating. At the same time, the uniform force on the sealing ring 400 extends its service life, reduces the manpower and testing time wasted on opening the coating equipment to replace the gas guide ring 100 and sealing ring 400, and improves the working efficiency of the wafer coating production line.

[0036] In one exemplary embodiment, the first axial length is greater than the second axial length, wherein the first axial length is the axial length of the positioning post 300, and the second axial length is the sum of the axial length of the mounting groove 210 and the axial length of the mounting hole 110. Thus, after the gas guide ring 100 passes through the plurality of positioning posts 300, the second ends of the plurality of positioning posts 300 extend beyond the side of the gas guide ring 100 away from the top cover 200 of the coating chamber, facilitating subsequent disassembly of the positioning posts 300. For an example, please refer to... Figure 6 The first axial length L1 of the positioning post 300 is 110mm.

[0037] In one exemplary embodiment, the positioning post 300 is cylindrical in shape.

[0038] In one exemplary embodiment, the main structure of the positioning post 300 is a polygonal prism, and the first end 310 of the positioning post 300 is adapted to the shape of the mounting groove 210. Exemplarily, the main structure of the positioning post 300 is a hexagonal prism, so that a wrench or hexagonal socket can be used to lock the positioning post 300 when it is installed onto the coating chamber top cover 200. In this embodiment, the first axial length of the positioning post 300 is greater than the sum of the second axial length of the mounting groove 210 and the third axial length of the mounting hole 110, so that after the gas guide ring 100 is installed onto the coating chamber top cover 200, the mounting post can be removed using a wrench or hexagonal socket. In this embodiment, the length of the long diagonal of the polygonal prism is less than or equal to the inner diameter of the mounting hole 110 of the gas guide ring 100.

[0039] In one exemplary embodiment, the body diameter of the positioning post 300 is smaller than the inner diameter of the mounting hole 110 of the gas guide ring 100; thus, the positioning post 300 and the mounting hole 110 are in clearance fit, so that the positioning post 300 can be removed after the gas guide ring 100 is installed. In one possible implementation, please refer to... Figure 6 The main body diameter of the positioning post 300 refers to the diameter excluding the main body portion of the first end 310. In this embodiment, the diameter of the first end 310 of the positioning post 300 is less than or equal to the inner diameter of the mounting hole 110, so that the positioning post 300 can be removed after the gas guide ring 100 is installed.

[0040] For example, the difference between the main body diameter of the positioning post 300 and the inner diameter of the mounting hole 110 of the gas guide ring 100 is less than a preset threshold. The preset threshold is 0.05 mm to prevent a large positioning gap.

[0041] In one exemplary embodiment, the mounting groove includes a limiting structure with an internal thread; for details, please refer to [reference needed]. Figure 2 and Figure 6 The first end 310 of the positioning post 300 is provided with a threaded structure adapted to the internal thread structure. It is fixedly connected to the mounting groove 210 with the internal thread structure through the threaded structure.

[0042] Please refer to Figure 6 For example, the axial length L2 of the threaded structure at the first end 310 of the positioning post 300 is 11 mm. Also for example, the diameter D1 of the threaded structure at the first end 310 of the positioning post 300 is 7.85 mm, and the diameter D2 of the main body of the positioning post 300 is 5.65 mm.

[0043] In one exemplary embodiment, the second end of the positioning post 300 is provided with an operating part.

[0044] In one possible implementation, the operating part includes an internal hexagonal slot for locking the positioning post 300 when it is installed onto the coating chamber top cover 200 using a tool adapted to the internal hexagonal slot, and for removing the mounting post after the gas guide ring 100 is installed onto the coating chamber top cover 200. In another possible implementation, the operating part includes a cross-shaped slot or a slotted slot for locking the positioning post 300 when it is installed onto the coating chamber top cover 200 using a tool adapted to the cross-shaped slot or slot, and for removing the mounting post after the gas guide ring 100 is installed onto the coating chamber top cover 200.

[0045] In embodiments where the operating part includes an internal hexagonal slot, a cross slot, or a slotted slot, the first axial length may be less than or equal to the second axial length.

[0046] In one exemplary embodiment, the positioning post 300 includes a magnetic material, which locks the positioning post 300 when it is installed onto the coating chamber top cover 200 by magnetic force, and removes the mounting post by magnetic force after the gas guide ring 100 is installed onto the coating chamber top cover 200.

[0047] In one exemplary embodiment, the number of positioning posts 300 included in the mounting and positioning structure is even, wherein a plurality of mounting grooves 210 for mounting the positioning posts 300 are evenly distributed along the circumference of the coating cavity top cover 200.

[0048] In one possible implementation, please refer to Figure 1 , Figure 4 and Figure 5 The mounting and positioning structure includes two positioning posts 300. The two positioning posts 300 are respectively used to connect to two mounting grooves 210 symmetrically arranged along the center of the coating cavity top cover 200.

[0049] In one possible implementation, the mounting and positioning structure includes four positioning posts 300. When using this mounting and positioning structure, four mounting slots 210 evenly distributed circumferentially from a plurality of mounting slots 210 in the coating chamber top cover 200 are selected to install the four positioning posts 300 respectively; for example, the coating chamber top cover 200 has 16 mounting slots 210 evenly distributed circumferentially, and correspondingly, the gas guide ring 100 has 16 mounting holes 110 evenly distributed circumferentially. There is a gap of 3 mounting slots 210 between each adjacent mounting slot 210 of the positioning post 300. For example, the four positioning posts 300 are connected to the 1st, 5th, 9th and 13th mounting slots 210 respectively.

[0050] In one possible implementation, the mounting positioning structure includes an even number of positioning posts 300, such as six or eight positioning posts 300.

[0051] In the above embodiment, the number of positioning posts 300 included in the installation positioning structure is an even number, and the multiple mounting grooves 210 for installing the positioning ring are evenly distributed along the circumference of the coating cavity top cover 200; when positioning the gas guide ring 100, the even number of positioning posts 300 are respectively fixed in the even number of mounting grooves 210 evenly distributed along the circumference of the coating cavity top cover 200, so that the sealing ring 400 is subjected to uniform force when the gas guide ring 100 is installed.

[0052] In one exemplary embodiment, the mounting and positioning structure includes at least three positioning posts 300, two of which are used to connect to two mounting slots 210 symmetrically arranged along the center of the coating cavity top cover 200, and the mounting positions of the remaining positioning posts 300 are not limited.

[0053] In an exemplary embodiment, the mounting positioning structure includes at least three positioning posts 300, and during installation, the spacing between the mounting slots 210 for mounting the at least three positioning posts 300 is not uniformly distributed, but the spacing between the mounting slots 210 for mounting the at least three positioning posts 300 is as large as possible.

[0054] In one exemplary embodiment, a mounting and positioning structure for a gas guide ring 100 is provided for positioning the gas guide ring 100 during the process of installing it onto the top cover 200 of the coating chamber. Please refer to [reference needed]. Figures 1 to 5 The mounting and positioning structure includes: an even number of positioning posts 300; the first end 310 of the positioning post 300 is used to connect with the mounting groove 210 of the coating chamber top cover 200; the positioning groove includes a limiting structure for limiting the sliding direction and sliding distance of the positioning post; the second end of the positioning post 300 is used to position the gas guide ring 100 when passing through the mounting hole 110 of the gas guide ring 100; wherein, the first axial length is greater than the second axial length, the first axial length is the axial length of the positioning post 300, and the second axial length is the sum of the axial length of the mounting groove 210 and the axial length of the mounting hole 110; the positioning post 300 is cylindrical in shape, the main body diameter of the positioning post 300 is smaller than the inner diameter of the mounting hole 110 of the gas guide ring 100, the first end 310 of the positioning post 300 has a threaded structure adapted to the internal thread structure of the mounting groove 210, and the second end of the positioning post 300 is provided with an operating part including an internal hexagonal groove.

[0055] Using the installation and positioning structure of the gas guide ring 100 provided in the above embodiment, before installing the gas guide ring 100 onto the top cover 200 of the coating chamber, an even number of positioning posts 300 are first installed into the mounting grooves 210 evenly distributed along the circumference of the top cover 200 of the coating chamber; then, multiple mounting holes 110 on the gas guide ring 100 are passed through the positioning posts 300, and screws or other fixing connectors are used to lock the remaining mounting grooves 210 (excluding the mounting positioning posts 300) with the corresponding mounting holes 110. After removing the positioning post 300, use screws or other fixing connectors to lock the corresponding mounting groove 210 and mounting hole 110 together. In this way, the gas guide ring 100 and the coating chamber top cover 200 are relatively positioned without applying external force, which improves the uniformity of force on the sealing ring 400 between the gas guide ring 100 and the coating chamber top cover 200, thereby improving the airtightness of the coating chamber during operation, ensuring the stability of the reaction pressure in the coating chamber, and improving the yield of wafer coating.

[0056] This application also provides a coating device; please refer to... Figure 1 The coating equipment includes a coating chamber top cover 200, a gas guide ring 100, and the mounting and positioning structure of the gas guide ring 100 provided in the aforementioned embodiments.

[0057] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0058] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A gas guide ring mounting and positioning structure, characterized in that, The mounting and positioning structure is used to position the gas guide ring during the process of installing the gas guide ring onto the top cover of the coating chamber. The mounting and positioning structure includes: Multiple positioning posts are provided. The first end of each positioning post is used to connect with the mounting groove of the coating chamber top cover. The mounting groove includes a limiting structure for defining the sliding direction and sliding distance of the positioning post. The second end of each positioning post is used to position the gas guide ring when it passes through the mounting hole of the gas guide ring.

2. The installation and positioning structure according to claim 1, characterized in that, The first axial length is greater than the second axial length, wherein the first axial length is the axial length of the positioning post, and the second axial length is the sum of the axial length of the mounting groove and the axial length of the mounting hole.

3. The installation and positioning structure according to claim 1, characterized in that, The positioning post is cylindrical in shape.

4. The installation and positioning structure according to claim 1, characterized in that, The main body diameter of the positioning post is smaller than the inner diameter of the mounting hole of the gas guide ring.

5. The installation and positioning structure according to claim 1, characterized in that, The limiting structure is an internal thread structure, and the first end is provided with a thread structure adapted to the internal thread structure.

6. The installation and positioning structure according to claim 1, characterized in that, The second end of the positioning column is provided with an operating part.

7. The installation and positioning structure according to claim 6, characterized in that, The operating part includes an internal hexagonal slot.

8. The installation and positioning structure according to claim 1, characterized in that, The mounting and positioning structure includes an even number of positioning posts, wherein multiple mounting grooves for mounting the positioning posts are evenly distributed along the circumference of the top cover of the coating cavity.

9. The installation and positioning structure according to claim 8, characterized in that, The mounting and positioning structure includes two positioning posts; wherein the two positioning posts are respectively used to connect to two mounting slots symmetrically arranged along the center of the top cover of the coating cavity.

10. A coating apparatus, characterized in that, The coating equipment includes a coating chamber top cover, a gas guide ring, and an installation and positioning structure as described in any one of claims 1-9.

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