High-heat-preservation-performance flow guide cylinder of single crystal furnace

Abstract

The utility model relates to a single crystal furnace high thermal insulation performance guide cylinder, which comprises an outer cylinder, an inner cylinder is arranged in the outer cylinder, the inner cylinder comprises an inner cylinder lower part and an inner cylinder upper part, the inner cylinder upper part is arranged at the top end of the inner cylinder lower part, a thermal insulation cover plate is arranged at the top end of the outer cylinder, and two connecting assemblies are arranged between the thermal insulation cover plate and the outer cylinder. The connecting assemblies are symmetrically distributed on the heat preservation cover plate. The outer cylinder and the heat preservation cover plate can be rapidly connected through the connecting assembly, and rapid fixing is achieved.

Description

Technical Field

[0001] This invention belongs to the field of flow guide tubes, specifically a flow guide tube with high heat preservation performance for a single crystal furnace. Background Technology

[0002] Currently, the Czochralski method is widely used in the photovoltaic industry for the preparation of monocrystalline silicon. An inner cylinder inside a flow guide cools the crystal rods to improve their heat dissipation capacity. The flow guide isolates heat from the thermal field, ensuring that heat exchange within the inner cylinder occurs primarily between the crystal rods. Since the flow guide is directly within the thermal field, poor thermal insulation will reduce the effective heat exchange within the inner cylinder. Better thermal insulation not only increases the crystal cooling rate and accelerates crystal formation efficiency but also reduces heat loss from the thermal field.

[0003] Current common methods for heat-insulating structures of flow guide tubes involve adding an inner flow guide tube between the flow guide tube and the inner cylinder and then filling it with heat-insulating material, or using a partitioned flow guide tube. However, the filling material cannot be recycled and is prone to introducing impurities that affect crystal pulling. Furthermore, the heat insulation performance is generally poor, and heat from the thermal field can easily enter the inner cylinder, thereby affecting the heat exchange rate between the inner cylinder and the crystal rod and wasting heat. Therefore, a high-insulation-performance flow guide tube for single crystal furnaces is proposed. Summary of the Invention

[0004] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the invention.

[0005] Given the following technical problems in the existing technology: the current flow guide tube and its insulation structure generally adopt the method of adding an inner flow guide tube between the flow guide tube and the inner tube and then filling it with heat insulation material, or using a partition flow guide tube. The filling material cannot be recycled and is easy to introduce impurities that affect crystal pulling. In addition, the heat insulation performance is generally poor, and the heat from the thermal field can easily enter the inner tube, thereby affecting the heat exchange rate between the inner tube and the crystal rod and wasting heat.

[0006] To solve the above technical problems, the present invention provides the following technical solution: a high heat insulation performance guide tube for a single crystal furnace, comprising an outer cylinder, an inner cylinder disposed inside the outer cylinder, the inner cylinder comprising a lower part and an upper part, the upper part of the inner cylinder being disposed at the top of the lower part of the inner cylinder, a heat insulation cover plate being installed at the top of the outer cylinder, and two connecting components being installed between the heat insulation cover plate and the outer cylinder, the connecting components being symmetrically distributed on the heat insulation cover plate;

[0007] The connecting assembly includes a threaded sleeve, a spacer, and a connecting screw. The connecting screw passes through the edge of the outer cylinder, and the top end of the connecting screw passes through the insulation cover plate and is threadedly connected to the threaded sleeve. The threaded sleeve is positioned above the insulation cover plate, and the bottom end of the threaded sleeve abuts against the upper side of the insulation cover plate. Two spacers are fitted into the middle of the connecting screw. The spacers are located inside the insulation cover plate. The spacer at the bottom of the connecting screw and the bottom end of the connecting screw clamp the edge of the insulation cover plate, and the spacer at the top of the connecting screw and the threaded sleeve clamp the insulation cover plate.

[0008] As a preferred technical solution for a high-insulation-performance guide tube for a single crystal furnace, the outer cylinder shell is provided with a heat insulation cavity, which is evenly distributed inside the outer cylinder shell.

[0009] The insulation cavity is a vacuum cavity, which reduces heat loss and thus achieves the effect of heat preservation.

[0010] As a preferred technical solution for a high-insulation-performance guide tube for a single crystal furnace, the bottom end of the outer cylinder is recessed with a circular groove, and the bottom end of the lower part of the inner cylinder is provided with a variable diameter gasket. The variable diameter gasket corresponds to the circular groove, and a gasket is provided between the variable diameter gasket and the circular groove.

[0011] The reducing gasket extends through a circular groove, allowing the bottom of the inner cylinder to communicate with the outside of the outer cylinder.

[0012] As a preferred technical solution for a high-insulation-performance guide tube for a single crystal furnace, the bottom of the front side of the outer cylinder is recessed with a second air hole, the top of the front side of the outer cylinder is recessed with a first air hole, the top of the outer cylinder is recessed with a third air hole and a fourth air hole, and the third air hole and the fourth air hole are both located at the top of the back side of the outer cylinder.

[0013] The insulation cover is made of carbon fiber and has an internal hollow structure with partitions. The ratio of the thickness of the outer cylinder, the thickness of the inner cylinder, and the width of the gap between the outer cylinder and the inner cylinder is 1:1:1.

[0014] The beneficial effects of the high heat insulation performance guide tube for a single crystal furnace of the present invention are: the outer cylinder and the heat insulation cover plate can be quickly connected by the connecting component, so as to achieve rapid fixation;

[0015] Because the insulation cavity is a vacuum cavity, heat loss can be reduced, thus achieving the effect of heat preservation. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0017] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0018] Figure 2 This is a cross-sectional view of the front of the present invention;

[0019] Figure 3 This is a schematic diagram of the front structure of the outer cylinder of the present invention;

[0020] Figure 4 This is a schematic diagram of the back structure of the outer cylinder of the present invention;

[0021] Figure 5 For the present invention Figure 2 A magnified schematic diagram of part A in the middle.

[0022] Reference numerals in the attached drawings: 1. Outer cylinder; 2. Insulation cover plate; 3. Lower part of inner cylinder; 4. Upper part of inner cylinder; 5. Variable diameter washer; 6. Circular groove; 7. Air hole one; 8. Air hole two; 9. Air hole three; 10. Air hole four; 11. Threaded sleeve; 12. Spacer; 13. Insulation cavity; 14. Connecting screw; 15. Washer ring. Detailed Implementation

[0023] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0024] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0025] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0026] Secondly, the present invention is described in detail with reference to the schematic diagrams. When detailing the embodiments of the present invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of the present invention. In addition, actual fabrication should include three-dimensional spatial dimensions of length, width, and depth.

[0027] like Figures 1-5As shown, the present invention proposes a high-insulation-performance guide tube for a single crystal furnace, comprising an outer cylinder 1, an inner cylinder being provided inside the outer cylinder 1, the inner cylinder comprising a lower inner cylinder 3 and an upper inner cylinder 4, the upper inner cylinder 4 being provided at the top of the lower inner cylinder 3, an insulation cover plate 2 being installed at the top of the outer cylinder 1, and two connecting components being installed between the insulation cover plate 2 and the outer cylinder 1, the connecting components being symmetrically distributed on the insulation cover plate 2;

[0028] The connecting assembly includes a threaded sleeve 11, a spacer 12, and a connecting screw 14. The connecting screw 14 passes through the edge of the outer cylinder 1, and the top end of the connecting screw 14 passes through the insulation cover plate 2 and is threadedly connected to the threaded sleeve 11. The threaded sleeve 11 is above the insulation cover plate 2, and the bottom end of the threaded sleeve 11 abuts against the upper side of the insulation cover plate 2. Two spacers 12 are sleeved in the middle of the connecting screw 14. The spacers 12 are located inside the insulation cover plate 2. The spacer 12 at the bottom of the connecting screw 14 and the bottom end of the connecting screw 14 clamp the edge of the insulation cover plate 2, and the spacer 12 at the top of the connecting screw 14 and the threaded sleeve 11 clamp the insulation cover plate 2.

[0029] The outer cylinder 1 has a heat insulation cavity 13 inside its shell, and the heat insulation cavity 13 is evenly arranged inside the outer cylinder 1.

[0030] The heat insulation cavity 13 is a vacuum cavity, which can reduce heat loss and thus achieve the effect of heat preservation.

[0031] The bottom end of the outer cylinder 1 is recessed with a circular groove 6, and the bottom end of the lower part 3 of the inner cylinder is provided with a variable diameter washer 5. The variable diameter washer 5 corresponds to the circular groove 6, and a washer 15 is provided between the variable diameter washer 5 and the circular groove 6.

[0032] The reducing gasket 5 extends through the circular groove 6, allowing the bottom of the inner cylinder to communicate with the outside of the outer cylinder 1.

[0033] The bottom of the front side of the outer cylinder 1 is recessed with a second air hole 8, and the top of the front side of the outer cylinder 1 is recessed with a first air hole 7; the top of the outer cylinder 1 is recessed with a third air hole 9 and a fourth air hole 10, and the third air hole 9 and the fourth air hole 10 are both located on the top of the back side of the outer cylinder 1.

[0034] The specific implementation method is as follows: 1) An airflow channel is provided at the upper part of the outer cylinder 1, an air inlet channel is provided at the lower part of the outer cylinder 1, and an exhaust channel is provided at the lower part of the inner cylinder 3.

[0035] 2) Before loading the furnace, use the same inert gas as the single crystal growth environment to flush it to ensure that the inside is a high-purity gas. The inert gas enters through pore 39 and exits through pore 28.

[0036] 3) After rinsing, use carbon fiber screw pads and carbon cloth to seal the gap between the outer cylinder 1 and the insulation cover plate 2;

[0037] 4) Install the upper washer ring 15 at the lower end of the outer cylinder 1;

[0038] 5) The inner cylinder is installed inside the outer cylinder 1, with the inner cylinder placed on top of the gasket 15;

[0039] 6) By changing the size of the lower reducing ring 5, it is easy to place inner cylinders with different outer diameters;

[0040] 7) The inner side of the outer cylinder 1 is filled with thermal insulation felt;

[0041] 8) The top of the outer cylinder 1 is fixed with the insulation cover plate 2 by the connecting component.

[0042] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0043] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the present invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications or substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A high-insulation-performance guide tube for a single crystal furnace, characterized in that: The outer cylinder (1) includes an inner cylinder inside the outer cylinder (1). The inner cylinder includes a lower part (3) and an upper part (4). The upper part (4) is provided at the top of the lower part (3). An insulation cover plate (2) is installed at the top of the outer cylinder (1). Two connecting components are installed between the insulation cover plate (2) and the outer cylinder (1). The connecting components are symmetrically distributed on the insulation cover plate (2). The connecting assembly includes a threaded sleeve (11), a spacer (12), and a connecting screw (14). The connecting screw (14) passes through the edge of the outer cylinder (1). The top end of the connecting screw (14) passes through the insulation cover plate (2) and is threadedly connected to the threaded sleeve (11). The threaded sleeve (11) is above the insulation cover plate (2). The bottom end of the threaded sleeve (11) abuts against the upper side of the insulation cover plate (2). Two spacers (12) are sleeved in the middle of the connecting screw (14). The spacers (12) are located inside the insulation cover plate (2).

2. The high-insulation-performance guide tube for a single crystal furnace according to claim 1, characterized in that: The outer cylinder (1) has a heat insulation cavity (13) inside its shell, and the heat insulation cavity (13) is evenly arranged inside the shell of the outer cylinder (1).

3. The high-insulation-performance guide tube for a single crystal furnace according to claim 1, characterized in that: The bottom end of the outer cylinder (1) is recessed with a circular groove (6), and the bottom end of the lower part (3) of the inner cylinder is provided with a variable diameter washer (5). The variable diameter washer (5) corresponds to the circular groove (6), and a washer (15) is provided between the variable diameter washer (5) and the circular groove (6).

4. The high-insulation-performance guide tube for a single crystal furnace according to claim 1, characterized in that: The bottom of the front side of the outer cylinder (1) is recessed with a second air hole (8), and the top of the front side of the outer cylinder (1) is recessed with a first air hole (7).

5. A high-insulation-performance guide tube for a single crystal furnace according to claim 1, characterized in that: The top of the outer cylinder (1) is recessed with air hole three (9) and air hole four (10), and the air hole three (9) and air hole four (10) are both located on the top of the back of the outer cylinder (1).

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