Buffer tank for silane gas reaction

Abstract

The utility model relates to the technical field of gas buffer tanks, in particular to a buffer tank for silane gas reaction, which comprises a tank body, the upper end of the tank body is communicated with a first gas inlet and a plurality of second gas inlets, and each second gas inlet is obliquely arranged on the tank body relative to the first gas inlet; the buffering and stirring mechanism comprises a first support and a second support, a rotating shaft is rotationally connected to the first support and the second support, fan blades, a first inclined sheet and a second inclined sheet are connected to the rotating shaft, the inclined face of the first inclined sheet corresponds to the second air inlet, the fan blades conduct pre-buffering and flow guiding on silane gas entering from the first air inlet, and the second inclined sheet corresponds to the second air inlet. The fan blades drive the rotating shaft to rotate under the action of airflow, so that the rotating shaft rotates under the driving of the fan blades and the plurality of first inclined sheets, and the rotating shaft drives the second inclined sheets to uniformly stir silane gas and other gases in the tank body, so that various gases entering the tank body are pre-buffered and mixed and uniformly stirred by the buffering and uniformly stirring mechanism.

Description

Technical Field

[0001] This utility model relates to the field of gas buffer tank technology, and in particular to a buffer tank for silane gas reaction. Background Technology

[0002] In silane gas reactions, gas buffer tanks primarily function to regulate gas flow, stabilize reaction conditions, and protect the reaction system. In some applications, silane gas may be mixed with other gases (such as hydrogen, fluorine, or oxygen) for the reaction. Gas buffer tanks can provide a brief storage and mixing space before these gases are mixed, allowing the gases to be premixed as they enter the reaction zone.

[0003] Chinese patent document CN222668351U discloses a gas buffer tank, comprising: a buffer tank, an inlet pipe fixedly connected to the upper side of one side of the buffer tank, a second buffer plate disposed inside the rear side of the inlet pipe, connecting rods fixedly connected to both ends of the rear side of the second buffer plate, a sleeve sleeved at one end of the connecting rod, the sleeve being fixedly connected to the inner wall of the buffer tank, a buffer spring fixedly connected inside the sleeve, and the buffer spring being fixedly connected to the connecting rod. This invention features a first buffer plate, a second spring, and a sliding rod. After the gas enters the buffer tank and is initially buffered, the second buffer plate guides the flow downwards, with the gas positioned on the upper surface of the first buffer plate. Subsequently, the gas impacts and presses down on the first buffer plate, the second spring elastically presses down, and the sliding rod increases the stabilizing effect of the downward pressure. A first guide groove guides the gas to the outlet pipe, completing the gas discharge and reducing the impact force. Although this technical solution achieves the effect of gas buffering, it does not effectively mix the various gases entering the tank.

[0004] Therefore, we provide a buffer tank for silane gas reactions to solve the above problems. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] The problem to be solved by this invention is to provide a buffer tank for silane gas reaction, so as to overcome the defects in the prior art.

[0007] (II) Technical Solution

[0008] To solve the aforementioned technical problem, this utility model provides a buffer tank for silane gas reaction, comprising a tank body, wherein the upper end of the tank body is connected to a first gas inlet and the lower end of the tank body is connected to a gas outlet;

[0009] The second air inlet has multiple second air inlets on the tank body, arranged in a circumferential array around the first air inlet. Each second air inlet is inclined relative to the first air inlet on the tank body. This arrangement is to allow other gases to flow through the inclined second air inlet guide path to the first inclined plate. The first inclined plate pre-buffers the gas entering the tank body from the second air inlet, so that the gas entering the second air inlet drives the first inclined plate to rotate the auxiliary shaft.

[0010] A buffering and mixing mechanism includes a first support and a second support disposed within the tank. A rotating shaft is rotatably connected to the first and second supports. A fan blade corresponding to the first air inlet is connected to the upper end of the rotating shaft. Multiple first and second inclined plates are connected to the rotating shaft. The inclined surface of the first inclined plate corresponds to the second air inlet, and the second inclined plate is located between the first and second supports. Silane gas entering the tank through the first air inlet passes through the fan blade, which pre-buffers and guides the silane gas entering through the first air inlet. Under the action of the airflow, the fan blade drives the rotating shaft to rotate, causing the rotating shaft to rotate through the fan blade and the multiple first inclined plates. The rotating shaft then drives the second inclined plates to mix the silane gas and other gases in the tank, so that the multiple gases entering the tank are pre-buffered and mixed by the buffering and mixing mechanism.

[0011] In some embodiments, an installation block is provided inside the bottom of the tank, and multiple connecting columns are connected in a circumferential array on the installation block. Each connecting column is fitted with a spring, and the multiple springs are connected to a buffer plate. An annular boss is provided on the inner wall of the tank near the buffer plate, and a step is provided on the annular boss that abuts against the outer edge of the buffer plate.

[0012] In some embodiments, the buffer disk has an umbrella-shaped cross-section, and a plurality of flow guide grooves are arranged in a circumferential array on the buffer disk, with a notch provided between one end of each flow guide groove and the outer edge of the buffer disk.

[0013] In some embodiments, a void is formed between the outer edge of the buffer disk and the boss; when the gas pressure entering the tank is low, the buffer disk is lifted by the spring force, and the gas in the tank flows through the gap and void of the guide groove on the buffer disk and then through the gas outlet to the subsequent reaction area.

[0014] When the gas pressure entering the tank is high, the gas inside the tank presses down on the buffer plate and spring. The outer edge of the buffer plate abuts against the step, blocking the empty area. The gas above the buffer plate flows through the gap and out through the gas outlet to the subsequent reaction area, so that the buffer tank can play a good buffering role for the gas.

[0015] In some embodiments, the first bracket is close to the first air inlet, the second bracket is close to the air outlet, the second inclined plate is arranged at an angle relative to the first inclined plate, and the second inclined plate is located between the first bracket and the second bracket.

[0016] In some embodiments, the first air inlet is located at the upper middle part of the tank body, a plurality of second air inlets are located at the upper side of the tank body, and the first inclined plate is located between the first bracket and the fan blade.

[0017] In some embodiments, the upper end face of the connecting post is flush with the step surface of the step.

[0018] In some embodiments, the air outlet is located on the lower side of the tank.

[0019] (III) Beneficial Effects

[0020] Compared with the prior art, the buffer tank for silane gas reaction provided by this utility model has the following advantages:

[0021] 1. This utility model, through the buffering and mixing mechanism, allows silane gas entering the tank through the first air inlet to pass through the fan blades. The fan blades pre-buffer and guide the silane gas entering through the first air inlet. Under the action of the airflow, the fan blades drive the rotating shaft to rotate, causing the rotating shaft to rotate through the fan blades and multiple first inclined plates. The rotating shaft then drives the second inclined plates to mix the silane gas and other gases in the tank. This allows the multiple gases entering the tank to be pre-buffered and mixed by the buffering and mixing mechanism.

[0022] 2. This utility model uses multiple inclined second air inlets to guide other gases through the inclined second air inlet flow path to the first inclined plate. The first inclined plate pre-buffers the gas entering the tank from the second air inlet, so that the gas entering from the second air inlet drives the first inclined plate auxiliary shaft to rotate. The gas can be stirred and pre-buffered without the need for additional power equipment, which is energy-saving and environmentally friendly.

[0023] 3. This utility model features a buffer disc with an umbrella-shaped cross-section. Multiple guide grooves are arranged in a circumferential array on the buffer disc, with a notch between one end of each guide groove and the outer edge of the buffer disc. A void is formed between the outer edge of the buffer disc and the protrusion. When the gas pressure entering the tank is low, the buffer disc is lifted by the spring force, and the gas in the tank flows through the notch and void of the guide groove on the buffer disc to the subsequent reaction area via the outlet. When the gas pressure entering the tank is high, the gas in the tank presses down on the buffer disc and the spring, causing the outer edge of the buffer disc to abut against the step, sealing the void. The gas above the buffer disc flows through the notch and void to the subsequent reaction area via the outlet, thus providing a good buffering effect for the gas. The overall structure of this utility model is simple and uncomplicated, facilitating equipment inspection and maintenance. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a perspective view of a buffer tank for silane gas reaction according to the present invention;

[0026] Figure 2 This is a top view of a buffer tank for silane gas reaction according to the present invention;

[0027] Figure 3 This is a cross-sectional perspective view of a buffer tank for silane gas reaction according to the present invention;

[0028] Figure 4 This is a schematic diagram of a buffer stirring mechanism for a buffer tank used in silane gas reaction according to the present invention;

[0029] Figure 5 This is a schematic diagram of the buffer plate structure of a buffer tank for silane gas reaction according to the present invention;

[0030] Figure 6 This is a cross-sectional view of a buffer tank for silane gas reaction according to the present invention;

[0031] Figure 7 for Figure 6 Enlarged view of point A in the middle;

[0032] The component names corresponding to the various labels in the figure are as follows: 1. Tank body; 101. Boss; 102. Step; 103. Mounting block; 104. Connecting column; 105. Spring; 2. First air inlet; 3. Second air inlet; 4. Air outlet; 5. First bracket; 6. Second bracket; 7. Rotating shaft; 8. Fan blade; 9. First inclined plate; 10. Second inclined plate; 11. Buffer plate; 1101. Guide groove; 1102. Notch. Detailed Implementation

[0033] The present application will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0034] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0035] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0036] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0037] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0038] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0039] See Figures 1 to 7 This utility model provides a buffer tank for silane gas reaction.

[0040] It includes a tank body 1, with a first air inlet 2 connected to the upper end of the tank body 1 and an air outlet 4 connected to the lower end of the tank body 1.

[0041] The second air inlet 3 is provided on the tank body 1 in multiple ways. The multiple second air inlets 3 are arranged in a circumferential array around the first air inlet 2 on the tank body 1. Each second air inlet 3 is inclined relative to the first air inlet 2 on the tank body 1. This arrangement is to allow other gases to flow through the inclined second air inlet 3 to the first inclined plate 9. The first inclined plate 9 pre-buffers the gas entering the tank body 1 from the second air inlet 3, so that the gas entering the second air inlet 3 drives the first inclined plate 9 to assist the rotating shaft 7 to rotate.

[0042] See Figures 3 to 7 The buffer stirring mechanism includes a first support 5 and a second support 6 disposed within the tank 1. In some embodiments, the first support 5 is close to the first air inlet 2, and the second support 6 is close to the air outlet 4. The second inclined plate 10 is positioned relative to the first inclined plate 9 at an angle of inclination, and is located between the first support 5 and the second support 6. A rotating shaft 7 is rotatably connected to the first support 5 and the second support 6. The upper end of the rotating shaft 7 is connected to a fan blade 8 corresponding to the first air inlet 2. Multiple first inclined plates 9 and second inclined plates 10 are connected to the rotating shaft 7. The inclination angle of the first inclined plate 9 is... The inclined surface corresponds to the second air inlet 3, and the second inclined plate 10 is located between the first support 5 and the second support 6. The silane gas entering the tank 1 through the first air inlet 2 passes through the fan blade 8. The fan blade 8 pre-buffers and guides the silane gas entering through the first air inlet 2. Under the action of the airflow, the fan blade 8 drives the rotating shaft 7 to rotate, so that the rotating shaft 7 rotates through the fan blade 8 and multiple first inclined plates 9. The rotating shaft 7 then drives the second inclined plate 10 to stir the silane gas and other gases in the tank 1, so that the multiple gases entering the tank 1 are pre-buffered and mixed by the buffering and stirring mechanism.

[0043] See Figure 3 and Figures 6 to 7The tank body 1 has an installation block 103 inside its bottom. Multiple connecting posts 104 are arranged in a circumferential array on the installation block 103. Each connecting post 104 is fitted with a spring 105. Multiple springs 105 are connected to a buffer disc 11. An annular boss 101 is provided on the inner wall of the tank body 1 near the buffer disc 11. A step 102 is provided on the annular boss 101 that abuts against the outer edge of the buffer disc 11. The buffer disc 11 has an umbrella-shaped cross-section. Multiple guide grooves 1101 are arranged in a circumferential array on the buffer disc 11. A notch 1102 is provided between one end of each guide groove 1101 and the outer edge of the buffer disc 11. In some embodiments, the first air inlet 2 is located in the upper middle part of the tank body 1, and multiple second air inlets 3 are located on the upper side of the tank body 1. The first inclined plate 9 is located between the first support 5 and the fan blade. Between 8, the upper end face of the connecting column 104 is flush with the step surface of the step 102, and the gas outlet 4 is located on the lower side of the tank body 1; in some embodiments, a void is formed between the outer edge of the buffer plate 11 and the boss 101; when the gas pressure entering the tank body 1 is small, the buffer plate 11 is lifted by the force of the spring 105, and the gas in the tank body 1 flows to the subsequent reaction area through the notch 1102 of the guide groove 1101 on the buffer plate 11 and the void through the gas outlet 4; when the gas pressure entering the tank body 1 is large, the gas in the tank body 1 presses down on the buffer plate 11 and the spring 105, and the outer edge of the buffer plate 11 abuts against the step 102, so that the void is blocked, and the gas above the buffer plate 11 flows to the subsequent reaction area through the notch 1102 and the gas outlet 4, so that the buffer tank plays a good buffering role for the gas.

[0044] This embodiment provides a buffer tank for silane gas reactions:

[0045] Through the buffering and mixing mechanism, the silane gas entering the tank 1 through the first air inlet 2 passes through the fan blade 8. The fan blade 8 pre-buffers and guides the silane gas entering through the first air inlet 2. Under the action of the airflow, the fan blade 8 drives the rotating shaft 7 to rotate. The rotating shaft 7 rotates through the fan blade 8 and multiple first inclined blades 9. The rotating shaft 7 then drives the second inclined blade 10 to mix the silane gas and other gases in the tank 1. Thus, the various gases entering the tank 1 are pre-buffered and mixed by the buffering and mixing mechanism.

[0046] This invention uses multiple inclined second air inlets 3 to guide other gases through the inclined second air inlets 3 to the first inclined plate 9. The first inclined plate 9 pre-buffers the gas entering the tank 1 from the second air inlets 3, so that the gas entering from the second air inlets 3 drives the first inclined plate 9 to rotate the auxiliary shaft 7. The gas can be stirred and pre-buffered without the need for additional power equipment, which is energy-saving and environmentally friendly.

[0047] When the gas pressure entering the tank 1 is low, the buffer plate 11 is lifted by the force of the spring 105. The gas in the tank 1 flows through the notch 1102 of the guide groove 1101 on the buffer plate 11 and the empty area, and then flows to the subsequent reaction area through the gas outlet 4. When the gas pressure entering the tank 1 is high, the gas in the tank 1 presses down on the buffer plate 11 and the spring 105. The outer edge of the buffer plate 11 abuts against the step 102, blocking the empty area. The gas in the upper part of the buffer plate 11 flows through the notch 1102 and then through the gas outlet 4 to the subsequent reaction area, so that the buffer tank can play a good buffering role for the gas. The overall structure of this utility model is simple and uncomplicated, which is convenient for operators to inspect and maintain the equipment.

[0048] The same or similar parts between the various embodiments in this specification can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments.

[0049] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A buffer tank for silane gas reaction, characterized in that, include: The tank (1) has a first air inlet (2) connected to its upper end and an air outlet (4) connected to its lower end. The second air inlet (3) is provided on the tank body (1) in multiple ways. The multiple second air inlets (3) are arranged in a circular array around the first air inlet (2) on the tank body (1). Each second air inlet (3) is arranged at an angle relative to the first air inlet (2) on the tank body (1). The buffer stirring mechanism includes a first support (5) and a second support (6) disposed in the tank (1). A rotating shaft (7) is rotatably connected to the first support (5) and the second support (6). A fan blade (8) corresponding to the first air inlet (2) is connected to the upper end of the rotating shaft (7). A plurality of first inclined plates (9) and second inclined plates (10) are connected to the rotating shaft (7). The inclined surface of the first inclined plate (9) corresponds to the second air inlet (3). The second inclined plate (10) is located between the first support (5) and the second support (6).

2. The buffer tank for silane gas reaction as described in claim 1, characterized in that: The bottom of the tank (1) is provided with an installation block (103). Multiple connecting posts (104) are connected in a circular array on the installation block (103). Each connecting post (104) is fitted with a spring (105). Multiple springs (105) are connected to a buffer plate (11). An annular boss (101) is provided on the inner wall of the tank (1) near the buffer plate (11). A step (102) is provided on the annular boss (101) to abut against the outer edge of the buffer plate (11).

3. The buffer tank for silane gas reaction as described in claim 2, characterized in that: The buffer disk (11) has an umbrella-shaped cross section, and multiple guide grooves (1101) are arranged in a circular array on the buffer disk (11). A notch (1102) is provided between one end of each guide groove (1101) and the outer edge of the buffer disk (11).

4. The buffer tank for silane gas reaction as described in claim 3, characterized in that: An empty area is formed between the outer edge of the buffer disk (11) and the boss (101).

5. The buffer tank for silane gas reaction as described in claim 1, characterized in that: The first bracket (5) is close to the first air inlet (2), the second bracket (6) is close to the air outlet (4), the second inclined plate (10) is set at an angle relative to the first inclined plate (9), and the second inclined plate (10) is located between the first bracket (5) and the second bracket (6).

6. The buffer tank for silane gas reaction as described in claim 1, characterized in that: The first air inlet (2) is located at the upper middle part of the tank (1), and a plurality of second air inlets (3) are located at the upper side of the tank (1). The first inclined plate (9) is located between the first bracket (5) and the fan blade (8).

7. The buffer tank for silane gas reaction as described in claim 2, characterized in that: The upper surface of the connecting column (104) is flush with the step surface of the step (102).

8. The buffer tank for silane gas reaction as described in claim 1, characterized in that: The air outlet (4) is located on the lower side of the tank (1).

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