Monosilane buffer filling device

Abstract

The utility model provides a monosilane buffer filling device which comprises a condenser (7) used for converting gaseous monosilane into liquid monosilane, the input end of the condenser (7) is the input end of the device, and the outlet of the condenser (7) is in fluid connection with a hollow monosilane buffer tank (3) used for storing monosilane. The monosilane buffer tank (3) is in fluid connection with the vaporizer (4) and used for converting liquid monosilane in the monosilane buffer tank (3) into a gas state, and the monosilane buffer tank (3) is provided with a gas state outlet, namely the output end of the device.

Description

Technical Field

[0001] This utility model relates to a buffer filling device, and more particularly to a silane buffer filling device. Background Technology

[0002] This section provides only background information relevant to this disclosure and is not necessarily prior art.

[0003] Silane has a boiling point of -112℃, is highly vaporized, extremely flammable, and toxic, and has strict requirements regarding temperature and environment. Therefore, the production and storage of silane are subject to stringent requirements, and single silane production enterprises face significant storage risks.

[0004] For the granular silicon production industry, silane is the raw material for silicon production, and the technology for silane preparation and purification is mature. However, existing production facilities lack a device capable of safely buffering and filling the silane.

[0005] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0006] Purpose of the invention: The technical problem to be solved by this utility model is to provide a silane buffer filling device to address the shortcomings of the existing technology.

[0007] To solve the above-mentioned technical problems, this utility model discloses a silane buffer filling device, comprising:

[0008] A condenser is used to convert gaseous silane into liquid. The input end of the condenser is the input end of the device. The outlet of the condenser is fluidly connected to a hollow silane buffer tank for storing silane. The silane buffer tank is fluidly connected to a vaporizer for converting the liquid silane in the silane buffer tank into gas. The silane buffer tank is provided with a gas outlet, which is the output end of the device.

[0009] Furthermore, the silane buffer filling device further includes:

[0010] A first valve and a second valve are connected in parallel on the main output pipe of the silane purification tower used to prepare gaseous silane; the first valve is fluidly connected to the input end of the silane buffer filling device, and a third valve and a fourth valve are connected in parallel on the output end of the silane buffer filling device; the third valve and the second valve are connected in parallel to the input end of the reaction fluidized bed; the fourth valve is fluidly connected to the compression unit, and the compression unit and the filling unit are fluidly connected.

[0011] Furthermore, the condenser is located on top of the silane buffer tank.

[0012] Furthermore, the inlet of the vaporizer is connected to the liquid outlet of the silane buffer tank for receiving liquid silane; the outlet of the vaporizer is connected to the gaseous inlet of the silane buffer tank.

[0013] Furthermore, the gaseous outlet of the silane buffer tank is located at the top of the silane buffer tank.

[0014] Furthermore, the liquid outlet of the silane buffer tank is located at the bottom of the silane buffer tank.

[0015] Furthermore, the gaseous inlet of the silane buffer tank is located at the top of the silane buffer tank.

[0016] Furthermore, the inlet of the vaporizer is located at the bottom of the vaporizer.

[0017] Furthermore, the outlet of the vaporizer is located at the top of the vaporizer.

[0018] Furthermore, the cold source for the condenser is Freon.

[0019] Beneficial effects:

[0020] 1. This utility model achieves the function of buffering during production and filling by using a silane buffer tank.

[0021] 2. The silane buffer tank of this utility model has the ability to liquefy at low temperature and vaporize by heating.

[0022] 3. The silane buffer tank of this utility model maintains a low-temperature liquid storage state through a condenser on the top of the tank. Attached Figure Description

[0023] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments, and the advantages of the present invention in the above and / or other aspects will become clearer.

[0024] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0025] In the diagram, 1 is the silane purification tower, 2 is the reaction fluidized bed, 3 is the silane buffer tank, 4 is the vaporizer, 5 is the compression unit, 6 is the filling unit, 7 is the condenser, 8 is the first valve, 9 is the second valve, 10 is the third valve, and 11 is the fourth valve. Detailed Implementation

[0026] The overall concept of this utility model is as follows:

[0027] Silane is a colorless, flammable compound with highly reactive chemical properties. It is sensitive to storage conditions and is usually not stored in tanks to ensure production safety. Instead, a buffer device is installed to achieve the dual purpose of producing granular silicon and filling silane. This buffer device has liquefaction and vaporization capabilities to meet the buffering requirements of silane.

[0028] The specific technical solution of this utility model is as follows:

[0029] like Figure 1 As shown, the silane produced by the upstream system reaction is purified by silane purification tower 1. The purified silane is divided into at least two streams: one stream goes through the second valve 9 to the reaction fluidized bed 2 to produce particulate silicon, and the other stream goes through the first valve 8 to the silane buffer tank 3.

[0030] The top of the silane buffer tank 3 is equipped with a condenser 7, which is used to condense the silane gas output from the first valve 8 into liquid and store it in the silane buffer tank 3.

[0031] The bottom of the silane buffer tank 3 is fluidly connected to the vaporizer 4, which is used to input liquid silane into the vaporizer 4 to generate gaseous silane.

[0032] The top of the vaporizer 4 is fluidly connected to the top of the silane buffer tank 3, and is used to store gaseous silane into the silane buffer tank 3.

[0033] The top of the silane buffer tank 3 is equipped with a third valve 10, through which gaseous silane is fed into the reaction fluidized bed 2.

[0034] The top of the silane buffer tank 3 is also equipped with a fourth valve 11, through which gaseous silane is sent into the compression unit 5 for compression;

[0035] The output of the compression unit 5 is fluidly connected to the input of the filling unit 6, and the filling unit 6 fills the gaseous silane and outputs it as a product.

[0036] During use, adhering to the principle of immediate production and use of silane to avoid storage, when filling is required, the first valve 8 of the silane extraction buffer tank 3 is opened. At this time, the silane gas is cooled using a cold source (usually Freon) in the condenser 7, and the resulting silane condensate enters the silane buffer tank 3. The vaporizer 4 has an electric heating function. When filling silane, the fourth valve 11 is opened, and the silane condensate is vaporized by the electric heating of the vaporizer 4. It is then compressed and pressurized through the compression unit 5 via the top pipe of the tank, and finally enters the filling unit 6 for pressurization.

[0037] The purpose of setting up the silane buffer tank 3 is to avoid unstable inlet pressure of the compression unit 5 caused by changes in the amount of silane used in the reaction fluidized bed 2. After filling is completed, the silane buffer tank 3 is heated and vaporized. The vaporized silane is then sent to the reaction fluidized bed 2 to avoid silane residue in the buffer tank.

[0038] Meanwhile, the silane buffer tank 3 acts as a buffer for the silane supply system. When the feed rate of the fluidized bed 2 is reduced, it can temporarily buffer the flow, preventing the silane production system from rapidly and drastically adjusting its output and ensuring stable production operation. When the silane buffer tank 3 condenser 7 is activated, valve 1 8 is opened, allowing silane condensate to enter the silane buffer tank 3. When feeding the fluidized bed, valve 10 is opened to activate the vaporizer 4 heating function until the silane buffer tank 3 is empty.

[0039] This utility model provides a concept and method for a silane buffer filling device. Many methods and approaches exist for implementing this technical solution; the above description is merely a preferred embodiment of this utility model. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model. All components not explicitly stated in this embodiment can be implemented using existing technology.

Claims

1. A silane buffer filling device, characterized in that, include: A condenser (7) for converting gaseous silane into liquid silane, the input end of the condenser (7) being the input end of the device, the outlet of the condenser (7) being fluidly connected to a hollow silane buffer tank (3) for storing silane, the silane buffer tank (3) being fluidly connected to a vaporizer (4) for converting liquid silane in the silane buffer tank (3) into gaseous silane, the silane buffer tank (3) being provided with a gaseous outlet, which is the output end of the device.

2. The silane buffer filling device according to claim 1, characterized in that, The silane buffer filling device further includes: A first valve (8) and a second valve (9) are connected in parallel on the main pipeline of the silane purification tower (1) used to prepare gaseous silane; the first valve (8) is fluidly connected to the input end of the silane buffer filling device, and a third valve (10) and a fourth valve (11) are connected in parallel on the output end of the silane buffer filling device; the third valve (10) and the second valve (9) are connected in parallel to the input end of the reaction fluidized bed (2); the fourth valve (11) is fluidly connected to the compression unit (5), and the compression unit (5) and the filling unit (6) are fluidly connected.

3. The silane buffer filling device according to claim 2, characterized in that, The condenser (7) is located on top of the silane buffer tank (3).

4. The silane buffer filling device according to claim 3, characterized in that, The inlet of the vaporizer (4) is connected to the liquid outlet of the silane buffer tank (3) for receiving liquid silane; the outlet of the vaporizer (4) is connected to the gaseous inlet of the silane buffer tank (3).

5. A silane buffer filling device according to claim 4, characterized in that, The gaseous outlet of the silane buffer tank (3) is located at the top of the silane buffer tank (3).

6. A silane buffer filling device according to claim 5, characterized in that, The liquid outlet of the silane buffer tank (3) is located at the bottom of the silane buffer tank (3).

7. A silane buffer filling device according to claim 6, characterized in that, The gas inlet of the silane buffer tank (3) is located at the top of the silane buffer tank (3).

8. A silane buffer filling device according to claim 7, characterized in that, The inlet of the vaporizer (4) is located at the bottom of the vaporizer (4).

9. A silane buffer filling device according to claim 8, characterized in that, The outlet of the vaporizer (4) is located at the top of the vaporizer (4).

10. A silane buffer filling device according to claim 1, characterized in that, The condenser (7) uses Freon as its cold source.

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