Normal-pressure leak hunting device for normal-pressure diffusion furnace

Abstract

The utility model relates to a normal-pressure leak hunting device for a normal-pressure diffusion furnace. A helium detection passage comprises a three-way valve, a switching valve and a flow controller which are arranged in sequence and are communicated through a pipeline, the helium detection passage is connected into the main gas passage through a three-way valve, and helium is injected into the main gas passage through the three-way valve; the switch valve is used for controlling the on and off of the helium detection passage, and the flow controller is used for controlling the flow of injected helium; after normal-pressure helium is injected into the main gas channel, the helium detection device carries out helium leakage detection on a plurality of leakage detection sites in the main gas channel through the helium detection terminal and is used for detecting whether the helium amount near the leakage detection sites is larger than a helium leakage set value or not, and the leakage detection sites are the positions where rigid butt joint is adopted in the main gas channel; an auxiliary positioning assembly is sleeved outside the leak detection site, at least four auxiliary positioning holes are uniformly formed in the circumferential surface of the auxiliary positioning assembly at intervals, and each auxiliary positioning hole is matched with the helium detection terminal.

Description

Technical Field

[0001] This utility model belongs to the field of atmospheric pressure diffusion furnace leak detection technology, specifically relating to an atmospheric pressure leak detection device for atmospheric pressure diffusion furnaces. Background Technology

[0002] As a critical piece of equipment in semiconductor manufacturing processes, the stability of atmospheric pressure diffusion furnaces directly impacts wafer doping quality and device performance. In a high-temperature, atmospheric-pressure environment, precise control and reliable sealing of the internal gas atmosphere are essential for ensuring process repeatability, while the equipment structure and leak detection and maintenance mechanisms directly affect production efficiency and operating costs. As semiconductor manufacturing moves towards higher precision and lower energy consumption, optimizing equipment reliability and minimizing unplanned downtime has become a key focus for the industry.

[0003] Currently, mainstream atmospheric diffusion furnaces use a rigid butt joint structure between quartz tubes and quartz flanges for their main pipeline connections to achieve a seal. This rigid connection method relies on high-precision installation matching to maintain airtightness, thus making it prone to leakage risks and requiring leak detection and maintenance. Existing leak detection processes for atmospheric diffusion furnaces involve cleaning the main pipeline with DCE (C2H4Cl2, 1,2-dichloroethane) and checking the hydrochloric acid flow rate, then using color changes at the leak point to check for leaks. After leak detection, an oxygen-free environment must be achieved through nitrogen purging (N2 purge tube), and the thickness of the wafer membrane is used to further verify that the furnace is functioning normally and without leaks. This leak detection method requires multiple sets of pipelines to be isolated and tested for several hours while the furnace is shut down, has a low success rate, requires repeated disassembly and reassembly of the quartz components, and has a long recovery time.

[0004] Some existing solutions utilize inert gases (such as nitrogen or helium) for leak detection, but this requires evacuation to establish a pressure differential environment. Reducing the system pressure makes it difficult for external gases to penetrate, while simultaneously forcing the detection gas to escape preferentially from the leak point, thus amplifying the leak signal. A vacuum environment reduces background gas interference and improves detection sensitivity. However, evacuation requires a dedicated vacuum sealing system, increasing equipment complexity, and maintaining the vacuum environment necessitates repeated evacuation, extending the detection cycle. Therefore, an atmospheric pressure leak detection device for atmospheric pressure diffusion furnaces is needed. Utility Model Content

[0005] To address the aforementioned problems in the existing technology, this utility model provides an atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace. The technical problem to be solved by this utility model is achieved through the following technical solution:

[0006] This invention provides an atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace, comprising: a helium detection passage and a helium detection device. The helium detection passage includes: a three-way valve, a switching valve, and a flow controller arranged sequentially and connected by a pipeline. The helium detection passage is connected to a main gas passage via the three-way valve, and helium is injected into the main gas passage through the three-way valve. The switching valve controls the opening and closing of the helium detection passage, and the flow controller controls the flow rate of the injected helium. After atmospheric pressure helium is injected into the main gas passage, the helium detection device performs helium leak detection at multiple leak detection points in the main gas passage using a helium detection terminal. The device detects whether the amount of helium near the leak detection point exceeds a set helium leak value. The leak detection point is a rigidly connected position in the main gas passage. An auxiliary positioning component is fitted around each leak detection point. At least four auxiliary positioning holes are evenly spaced on the circumferential surface of the auxiliary positioning component, and each auxiliary positioning hole cooperates with the helium detection terminal.

[0007] In one embodiment of this utility model, the helium detection path is connected to the atmospheric diffusion furnace via the three-way valve, and is connected to the main gas path via the atmospheric diffusion furnace.

[0008] In one embodiment of this utility model, a quartz transition flange is provided between the three-way valve and the atmospheric diffusion furnace platform, and the inner wall of the quartz transition flange is coated with a silicon nitride coating.

[0009] In one embodiment of this utility model, the switching valve is a manually operated ball valve, and the valve body surface of the manually operated ball valve is provided with flow rate scale markings to assist in adjusting the injection flow rate of helium.

[0010] In one embodiment of this utility model, the flow controller is an MFC mass flow controller, which has a pressure feedback module at its output for real-time detection of the helium injection pressure and dynamic adjustment of the flow rate according to the injection pressure.

[0011] In one embodiment of this utility model, the leak detection points are, in sequence, the docking position between the helium detection path and the quartz reaction chamber, the docking position between the quartz reaction chamber and the first inlet pipe, the docking position between the first inlet pipe and the second inlet pipe, and the docking position between the second inlet pipe and the SiC reaction chamber.

[0012] In one embodiment of this utility model, the helium detection device is a portable helium detector, and the helium detection terminal is a helium detector suction pen.

[0013] In one embodiment of this utility model, the helium detector suction pen is equipped with a flexible tip probe, and the flexible tip probe is covered with a ceramic protective sleeve.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0015] This invention relates to an atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace. By integrating the helium detection path directly into the main gas path via a three-way valve, it achieves vacuum-free atmospheric pressure detection under atmospheric pressure by utilizing the diffusion characteristics of helium molecules, significantly reducing downtime for maintenance. The helium detection terminal, combined with an auxiliary positioning component, can perform multi-angle positioning detection at quartz rigid mating points, capturing even minute helium leakage signals. Simultaneously, the flow controller dynamically adjusts the helium injection rate, improving detection accuracy.

[0016] The above description is merely an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of an atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace provided in an embodiment of this utility model;

[0018] Figure 2 This is a schematic diagram of the structure of the auxiliary positioning component provided in an embodiment of the present invention.

[0019] Reference numerals: 1-Main gas passage; 2-Quartz reaction chamber; 3-First inlet pipe; 4-Second inlet pipe; 5-SiC reaction chamber; 100-Helium detection passage; 110-Three-way valve; 120-Switch valve; 130-Flow controller; 200-Helium detection device; 210-Helium detection terminal; 300-Auxiliary positioning component. Detailed Implementation

[0020] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the following detailed description, in conjunction with the accompanying drawings and specific embodiments, describes an atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace based on this utility model.

[0021] The foregoing and other technical contents, features, and effects of this utility model will be clearly presented in the following detailed description of the specific embodiments with reference to the accompanying drawings. Through the description of the specific embodiments, a more in-depth and specific understanding can be gained of the technical means and effects adopted by this utility model to achieve the intended purpose. However, the accompanying drawings are only provided for reference and illustration and are not intended to limit the technical solution of this utility model.

[0022] Example 1

[0023] Leak testing of atmospheric pressure diffusion furnaces relies on a vacuum environment, resulting in complex equipment structures and long testing cycles. Traditional chemical testing methods also require repeated disassembly and reassembly of quartz components, leading to long testing cycles and low maintenance efficiency. Therefore, this embodiment provides an atmospheric pressure leak testing device for atmospheric pressure diffusion furnaces to achieve rapid leak detection at easily leaking sites in atmospheric pressure diffusion furnaces under atmospheric pressure conditions.

[0024] like Figure 1 As shown, Figure 1 This is a schematic diagram of an atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace provided in an embodiment of this utility model.

[0025] In this embodiment, the atmospheric pressure leak detection device for the atmospheric pressure diffusion furnace includes: a helium detection passage 100 and a helium detection device 200. The helium detection passage 100 includes: a three-way valve 110, a switching valve 120, and a flow controller 130, which are sequentially arranged and connected by a pipeline. The helium detection passage 100 is connected to the main gas passage 1 through the three-way valve 110, and helium is injected into the main gas passage 1 through the three-way valve 110. The switching valve 120 is used to control the opening and closing of the helium detection passage 100, and the flow controller 130 is used to control the flow rate of the injected helium. After atmospheric pressure helium is injected into the main gas passage 1, the helium detection device 200 performs helium leak detection at multiple leak detection points in the main gas passage 1 through the helium detection terminal 210 to detect whether the amount of helium near the leak detection point is greater than the helium leak set value. The leak detection point is a position in the main gas passage 1 that is rigidly connected.

[0026] In an optional implementation, the helium detection path 100 is connected to the atmospheric diffusion furnace via a three-way valve 110 and is connected to the main gas path 1 via the atmospheric diffusion furnace.

[0027] For example, a quartz transition flange (not shown in the figure) is provided between the three-way valve 110 and the atmospheric diffusion furnace base, and the inner wall of the quartz transition flange is coated with a silicon nitride coating. By matching the thermal expansion coefficient of the quartz material with the silicon nitride coating, the interface stress concentration caused by the thermal deformation difference between the quartz tube and the metal or ceramic connector under high temperature conditions can be reduced, thereby extending the airtight service life of the flange under high temperature and atmospheric pressure environment.

[0028] It is worth noting that although helium detection can accurately identify minute leaks, traditional equipment lacks a dedicated interface, making it impossible to directly integrate the detection module. However, the atmospheric leak detection device for the atmospheric diffusion furnace in this embodiment uses a three-way valve 110 as an adapter to directly integrate the helium detection channel 100 into the main gas channel 1 at the inlet end near the main gas channel 1 without damaging the original sealing structure, thus giving full play to the efficiency advantage of helium detection.

[0029] For example, the flow controller 130 is an MFC mass flow controller, and its output is equipped with a pressure feedback module for real-time detection of the helium injection pressure and dynamic adjustment of the flow rate according to the injection pressure.

[0030] For example, since helium detection has low flow rate sensitivity, it is necessary to control the flow rate separately. In addition to using an MFC mass flow controller, the switching valve 120 can also be set as a manual switching ball valve, and a flow rate scale mark can be provided on the valve body surface of the manual switching ball valve to assist in adjusting the helium injection flow rate, that is, the injection flow rate can be assisted by the switching valve 120.

[0031] It should be noted that the leak detection points are, in order, position a between the helium detection path 100 and the quartz reaction chamber 2, position b between the quartz reaction chamber 2 and the first inlet pipe 3, position c between the first inlet pipe 3 and the second inlet pipe 4, and position d between the second inlet pipe 4 and the SiC reaction chamber 5. This is because these connection points all use rigid connections between quartz crystals, which requires high installation precision and is more prone to leakage. For example, the contact temperature between the quartz reaction chamber 2 and the first inlet pipe 3, and between the first inlet pipe 3 and the second inlet pipe 4, is greater than 1000℃, and there is no rubber ring transition between them. The contact temperature between the second inlet pipe 4 and the SiC reaction chamber 5 is even greater than 1200℃, and again, no rubber ring transition is used, making the probability of leakage even greater than 80%.

[0032] For example, the helium detection device 200 is a portable helium detector, and the helium detection terminal 210 is a helium detector suction pen.

[0033] Furthermore, the helium detector's suction pen is equipped with a flexible tip probe, and the flexible tip probe is covered with a ceramic protective sleeve.

[0034] like Figure 2 As shown, Figure 2 This is a schematic diagram of the structure of the auxiliary positioning component provided in an embodiment of the present invention.

[0035] In an optional embodiment, the leak detection point is covered with an auxiliary positioning component 300. The circumferential surface of the auxiliary positioning component 300 is evenly spaced with at least four auxiliary positioning holes. Each auxiliary positioning hole cooperates with the flexible tip probe of the helium detection terminal 210. The auxiliary positioning component 300 can quickly locate the leak detection point, realizing rapid and accurate leak defect detection of the sealing point using positioning rigid docking.

[0036] For example, the auxiliary positioning holes on the auxiliary positioning component 300 are respectively set along the 3 / 6 / 9 / 12 o'clock direction.

[0037] Understandably, the auxiliary positioning component 300 can be set up one-to-one with each leak detection point and connected in an active manner. The attached figure is only an example and can also be adapted according to the connection points.

[0038] The working process of the atmospheric pressure leak detection device for the atmospheric pressure diffusion furnace in this embodiment is as follows: After the machine operation is completed, the helium detection passage 100 and the main gas passage 1 are connected respectively. Then, helium detection standard data is collected and the helium detection device 200 is set according to the helium detection standard data. Helium cylinders are used as helium sources. Helium is injected into the main gas passage 1 through the three-way valve 110. The switching valve 120 is opened and the opening degree of the flow controller 130 is controlled to control the maximum flow rate of injected helium to 2 liters / minute, so as to ensure that helium flows in while ensuring that the helium in the environment is not excessive, so as to facilitate the location of leaks. In addition, helium needs to be injected intermittently, such as injecting for 30 seconds and then closing and starting leak detection, to avoid interference from other leak detection points on the same passage. During the detection process of the same leak detection point, the helium detection terminal 210 needs to be used to test one point at a time along the 3 / 6 / 9 / 12 o'clock direction according to the position of the auxiliary positioning hole on the auxiliary positioning component 300, to ensure that multiple directions of each leak detection point are normal.

[0039] During the detection process of the helium detection device 200, the helium detection device 200 is in adsorption mode. If the detection value of the helium detection device 200 remains constant or the value changes within one order of magnitude, it indicates that the test is normal, that is, there is no leak at the leak detection point; if the detection value of the helium detection device 200 changes, such as the value change being greater than one order of magnitude, it indicates that there is a leak.

[0040] It is worth noting that the use of the atmospheric pressure leak detection device for atmospheric pressure diffusion furnace in this embodiment for leak detection eliminates the cumbersome process of building a vacuum sealing system and repeatedly vacuuming compared to the traditional vacuum detection method. The device directly utilizes the original gas passage structure of the machine and only needs to integrate the helium detection passage 100 through the three-way valve 110, which improves the leak location accuracy while reducing operation and maintenance costs.

[0041] This invention relates to an atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace. By integrating the helium detection path directly into the main gas path via a three-way valve, it achieves vacuum-free atmospheric pressure detection under atmospheric pressure by utilizing the diffusion characteristics of helium molecules, significantly reducing downtime for maintenance. The helium detection terminal, combined with an auxiliary positioning component, can perform multi-angle positioning detection at quartz rigid mating points, capturing even minute helium leakage signals. Simultaneously, the flow controller dynamically adjusts the helium injection rate, improving detection accuracy.

[0042] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations are intended to cover non-exclusive inclusion, such that an article or device comprising a list of elements includes not only those elements but also other elements not expressly listed. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the article or device comprising said element. Terms such as "connected" or "linked" are not limited to physical or mechanical connections but can include electrical connections, whether direct or indirect. The orientations or positional relationships indicated by terms such as "upper," "lower," "left," and "right" are based on the orientations or positional relationships shown in the accompanying drawings and are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention.

[0043] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the protection scope of the present invention.

Claims

1. An atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace, characterized in that, include: A helium detection passage (100) and a helium detection device (200) are provided. The helium detection passage (100) includes a three-way valve (110), a switching valve (120), and a flow controller (130) arranged sequentially and connected by a pipeline. The helium detection passage (100) is connected to the main gas passage (1) through the three-way valve (110) and helium is injected into the main gas passage (1) through the three-way valve (110). The switching valve (120) is used to control the opening and closing of the helium detection passage (100), and the flow controller (130) is used to control the flow rate of the injected helium. After atmospheric pressure helium is injected into the main gas passage (1), the helium detection device (200) performs helium leakage detection on multiple leak detection points in the main gas passage (1) through the helium detection terminal (210) to detect whether the amount of helium near the leak detection point is greater than the helium leakage set value. The leak detection point is a position in the main gas passage (1) where a rigid connection is used. The leak detection point is covered with an auxiliary positioning component (300). The circumferential surface of the auxiliary positioning component (300) is provided with at least four auxiliary positioning holes at uniform intervals, and each of the auxiliary positioning holes cooperates with the helium detection terminal (210).

2. The atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace according to claim 1, characterized in that, The helium detection path (100) is connected to the atmospheric diffusion furnace via the three-way valve (110) and is connected to the main gas path (1) via the atmospheric diffusion furnace.

3. The atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace according to claim 2, characterized in that, A quartz transition flange is provided between the three-way valve (110) and the atmospheric diffusion furnace platform, and the inner wall of the quartz transition flange is coated with a silicon nitride coating.

4. The atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace according to claim 1, characterized in that, The switching valve (120) is a manually operated ball valve. The valve body surface of the manually operated ball valve is provided with flow rate scale markings to assist in adjusting the injection flow rate of helium.

5. The atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace according to claim 1, characterized in that, The flow controller (130) is an MFC mass flow controller, and its output is equipped with a pressure feedback module for real-time detection of the helium injection pressure and dynamic adjustment of the flow rate according to the injection pressure.

6. The atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace according to claim 1, characterized in that, The leak detection points are, in order, the docking positions of the helium detection path (100) and the quartz reaction chamber (2), the docking positions of the quartz reaction chamber (2) and the first inlet pipe (3), the docking positions of the first inlet pipe (3) and the second inlet pipe (4), and the docking positions of the second inlet pipe (4) and the SiC reaction chamber (5).

7. The atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace according to claim 1, characterized in that, The helium detection device (200) is a portable helium detector, and the helium detection terminal (210) is a helium detector suction pen.

8. The atmospheric pressure leak detection device for an atmospheric pressure diffusion furnace according to claim 7, characterized in that, The helium detector's suction pen is equipped with a flexible tip probe, and the flexible tip probe is covered with a ceramic protective sleeve.

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