Quality inspection device for semiconductor production

Abstract

The utility model discloses a quality inspection device for semiconductor production, which relates to the technical field of semiconductor production, and comprises a base, the upper end of the base is rotatably connected with a supporting column through a bearing, the upper end of the supporting column is fixedly connected with a rotating supporting plate, and the upper end of the base is fixedly provided with a rotating mechanism for driving the supporting column to rotate. A plurality of embedding grooves which are annularly distributed are uniformly formed in the upper end of the rotary supporting plate, and ejecting and discharging mechanisms are arranged at the upper end of the base and in the embedding grooves. According to the utility model, continuous semiconductor product quality inspection work can be realized, the quality inspection efficiency is effectively improved, and the use is convenient.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and specifically to a quality inspection device for semiconductor manufacturing. Background Technology

[0002] Semiconductors are materials whose electrical conductivity at room temperature falls between that of conductors and insulators. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, and high-power power conversion, among other fields. For example, diodes are devices made using semiconductors.

[0003] Semiconductors require quality inspection after production. During quality inspection, the detection terminals are pressed down to contact the finished semiconductor product to form an electronic circuit. This is to test whether the finished semiconductor product can perform the intended function in the electronic circuit. If it can, the finished semiconductor product is considered good; otherwise, it is considered defective. Currently, quality inspection requires placing each semiconductor one by one for inspection and then removing them one by one after inspection, which greatly affects the efficiency of quality inspection and cannot meet the actual use requirements. Utility Model Content

[0004] In view of the problems existing in the quality inspection equipment for semiconductor production, this utility model is proposed.

[0005] Therefore, the purpose of this invention is to provide a quality inspection device for semiconductor manufacturing, which solves the problems mentioned above.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A quality inspection device for semiconductor manufacturing includes a base. A support column is rotatably connected to the upper end of the base via a bearing. A rotating tray is fixedly connected to the upper end of the support column. A rotating mechanism for driving the support column to rotate is fixedly installed on the upper end of the base. Multiple circularly distributed insertion slots are evenly formed on the upper end of the rotating tray. A push-out mechanism is installed on the upper end of the base and within the insertion slots. A first L-shaped vertical plate is fixedly connected to one side of the upper end of the base. An electric push rod is fixedly inserted into the horizontal portion of the first L-shaped vertical plate. A detection terminal is fixedly connected to the lower end of the electric push rod. A second L-shaped vertical plate is fixedly connected to the other side of the upper end of the base. A push-out mechanism is fixedly installed at the lower end of the horizontal portion of the second L-shaped vertical plate. A belt conveyor is also fixedly installed on the upper end of the base.

[0008] Preferably, the rotating mechanism includes a rotary motor fixedly connected to the upper end of the base, an active bevel gear fixedly connected to the output end of the rotary motor, and a driven bevel gear meshing with the active bevel gear fixedly sleeved on the column wall of the support column.

[0009] Preferably, the ejector mechanism includes multiple ejector rods that are movably inserted into the bottom of the corresponding slots on the rotating pallet. The upper ends of the multiple ejector rods are fixedly connected to the same ejector plate, and the lower ends of the multiple ejector rods are fixedly connected to the same force plate. The upper end of the force plate and the lower end of the rotating pallet are fixedly connected to multiple return springs sleeved on the ejector rods. A thrust electromagnetic plate is fixedly connected to one side of the upper end of the base, and a thrust permanent magnet plate is fixedly connected to the lower side of the force plate. The lower end of the rotating pallet is fixedly connected to multiple arc-shaped pressing blocks corresponding to the positions of the slots, and the upper end of the base is fixedly connected to a trigger switch corresponding to the positions of the arc-shaped pressing blocks.

[0010] Preferably, the pushing mechanism includes two side plates symmetrically fixedly connected to the lower end of the horizontal part of the second L-shaped upright plate. A reciprocating screw is rotatably connected between the two side plates via a bearing. A drive motor is fixedly installed on the outer wall of one of the side plates. The output end of the drive motor is fixedly connected to one end of the reciprocating screw. A reciprocating seat is threaded onto the rod wall of the reciprocating screw. A pushing plate is fixedly connected to the lower end of the reciprocating seat.

[0011] Preferably, a limiting slider is fixedly connected to the upper end of the reciprocating seat, and a limiting groove that matches and slides with the limiting slider is provided at the lower end of the horizontal part of the second L-shaped vertical plate.

[0012] Preferably, rubber pads are fixedly connected to the four corners of the bottom of the base.

[0013] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0014] 1. This utility model, through a base and a rotating tray, places the semiconductor product to be tested into multiple slots. Starting the rotary motor drives the driving bevel gear to rotate. The meshing of the driving and driven bevel gears drives the support column, which in turn rotates the rotating tray, causing the semiconductor product to move to the underside of the testing terminal. An electric push rod then pushes the testing terminal downwards, bringing it into contact with the semiconductor product, thus completing the testing process. When the tested semiconductor product moves to the other side, an arc-shaped pressing block acts on a trigger switch. A trigger switch controls the power supply equipment to supply power to the thrust electromagnetic plate. When the thrust electromagnetic plate is energized, it generates magnetism, which, together with the thrust permanent magnet plate, drives the push rod to overcome the elastic force of the return spring and push the push plate upward. This pushes the inspected semiconductor product out of the upper end of the rotating tray. The trigger switch then starts the drive motor, which drives the reciprocating screw to rotate. Through the threaded connection between the reciprocating screw and the reciprocating seat, the reciprocating seat drives the push plate to move, thus pushing the semiconductor product onto the belt conveyor. This enables continuous semiconductor product quality inspection, effectively improving inspection efficiency and making it easy to use. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0016] Figure 1 This is a schematic diagram of the structure of this utility model;

[0017] Figure 2 This is a cross-sectional view of the ejector mechanism of this utility model.

[0018] Explanation of reference numerals in the attached figures:

[0019] 1. Base; 2. Support column; 3. Rotating tray; 4. Insertion slot; 5. First L-shaped upright plate; 6. Electric push rod; 7. Detection terminal; 8. Second L-shaped upright plate; 9. Belt conveyor; 10. Rotary motor; 11. Driving bevel gear; 12. Driven bevel gear; 13. Push rod; 14. Push plate; 15. Force plate; 16. Return spring; 17. Thrust electromagnetic plate; 18. Thrust permanent magnet plate; 19. Arc-shaped pressing block; 20. Trigger switch; 21. Side plate; 22. Reciprocating screw; 23. Drive motor; 24. Reciprocating seat; 25. Push plate. Detailed Implementation

[0020] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0021] This utility model discloses a quality inspection device for semiconductor production.

[0022] This utility model provides, for example Figure 1-2 The semiconductor manufacturing quality inspection device shown includes a base 1. A support column 2 is rotatably connected to the upper end of the base 1 via a bearing. A rotating pallet 3 is fixedly connected to the upper end of the support column 2. A rotating mechanism for driving the support column 2 to rotate is fixedly installed on the upper end of the base 1. A plurality of circularly distributed insert slots 4 are evenly opened on the upper end of the rotating pallet 3. A push-out mechanism is installed on the upper end of the base 1 and in the insert slots 4. A first L-shaped vertical plate 5 is fixedly connected to one side of the upper end of the base 1. An electric push rod 6 is fixedly inserted into the horizontal part of the first L-shaped vertical plate 5. A detection terminal 7 is fixedly connected to the lower end of the electric push rod 6. A second L-shaped vertical plate 8 is fixedly connected to the other side of the upper end of the base 1. A push-out mechanism is fixedly installed at the lower end of the horizontal part of the second L-shaped vertical plate 8. A belt conveyor 9 is also fixedly installed on the upper end of the base 1.

[0023] The rotating mechanism includes a rotary motor 10 fixedly connected to the upper end of the base 1. The output end of the rotary motor 10 is fixedly connected to a drive bevel gear 11, and the support column 2 is fixedly sleeved with a driven bevel gear 12 that meshes with the drive bevel gear 11.

[0024] The ejector mechanism includes multiple ejector rods 13 that are movably inserted into the bottom of the slots 4 corresponding to the mounting slots 4 of the rotating pallet 3. The upper ends of the multiple ejector rods 13 are fixedly connected to the same ejector plate 14, and the lower ends of the multiple ejector rods 13 are fixedly connected to the same force plate 15. The upper end of the force plate 15 and the lower end of the rotating pallet 3 are fixedly connected to multiple return springs 16 sleeved on the ejector rods 13. A thrust electromagnetic plate 17 is fixedly connected to one side of the upper end of the base 1, and a thrust permanent magnet plate 18 is fixedly connected to the lower side of the force plate 15. Multiple arc-shaped pressing blocks 19 corresponding to the positions of the mounting slots 4 are fixedly connected to the lower end of the rotating pallet 3, and a trigger switch 20 corresponding to the positions of the arc-shaped pressing blocks 19 is fixedly connected to the upper end of the base 1.

[0025] The feeding mechanism includes two symmetrically fixed side plates 21 at the lower end of the horizontal part of the second L-shaped vertical plate 8. A reciprocating screw 22 is rotatably connected between the two side plates 21 through a bearing. A drive motor 23 is fixedly installed on the outer wall of one of the side plates 21. The output end of the drive motor 23 is fixedly connected to one end of the reciprocating screw 22. A reciprocating seat 24 is threaded onto the rod wall of the reciprocating screw 22. A feeding plate 25 is fixedly connected to the lower end of the reciprocating seat 24.

[0026] The upper end of the reciprocating seat 24 is fixedly connected to a limit slider, and the lower end of the horizontal part of the second L-shaped vertical plate 8 is provided with a limit groove that matches and slides with the limit slider.

[0027] Rubber pads are fixedly connected to the four corners of the bottom of base 1.

[0028] The semiconductor product to be tested is placed in multiple mounting slots 4 via the base 1 and rotating tray 3. The rotary motor 10 is started, driving the drive bevel gear 11 to rotate. The meshing of the drive bevel gear 11 and driven bevel gear 12 drives the support column 2 to rotate the rotating tray 3, thus moving the semiconductor product to the underside of the detection terminal 7. The electric push rod 6 pushes the detection terminal 7 downwards, bringing it into contact with the semiconductor product, thereby completing the testing. When the tested semiconductor product moves to the other side, the arc-shaped pressing block 19 acts on the trigger switch 20, which controls the power supply. The electrical equipment supplies power to the thrust electromagnetic plate 17. When the thrust electromagnetic plate 17 is energized, it generates magnetism, which, together with the thrust permanent magnet plate 18, drives the push rod 13 to overcome the elastic force of the reset spring 16 and push the push plate 14 upward. This pushes the inspected semiconductor product out of the upper end of the rotating tray 3, triggering the switch 20 to start the drive motor 23. The drive motor 23 drives the reciprocating screw 22 to rotate. Through the threaded connection between the reciprocating screw 22 and the reciprocating seat 24, the reciprocating seat 24 drives the push plate 25 to move, so that the push plate 25 pushes the semiconductor product onto the belt conveyor 9. This enables continuous semiconductor product quality inspection, effectively improving quality inspection efficiency and making it easy to use.

[0029] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A quality inspection device for semiconductor manufacturing, comprising a base (1), characterized in that, The upper end of the base (1) is rotatably connected to a support column (2) via a bearing. The upper end of the support column (2) is fixedly connected to a rotating pallet (3). The upper end of the base (1) is fixedly equipped with a rotating mechanism for driving the support column (2) to rotate. The upper end of the rotating pallet (3) is evenly provided with multiple ring-shaped insertion slots (4). The upper end of the base (1) and the insertion slots (4) are equipped with a push-out mechanism. The upper side of the base (1) is fixedly connected to a first L-shaped vertical plate (5). The horizontal part of the first L-shaped vertical plate (5) is fixedly fitted with an electric push rod (6). The lower end of the electric push rod (6) is fixedly connected to a detection terminal (7). The other side of the upper end of the base (1) is fixedly connected to a second L-shaped vertical plate (8). The lower end of the horizontal part of the second L-shaped vertical plate (8) is fixedly equipped with a push-out mechanism. The upper end of the base (1) is also fixedly equipped with a belt conveyor (9).

2. The quality inspection device for semiconductor manufacturing according to claim 1, characterized in that, The rotating mechanism includes a rotary motor (10) fixedly connected to the upper end of the base (1), and a driving bevel gear (11) fixedly connected to the output end of the rotary motor (10). A driven bevel gear (12) that meshes with the driving bevel gear (11) is fixedly sleeved on the column wall of the support column (2).

3. The quality inspection device for semiconductor manufacturing according to claim 1, characterized in that, The ejector mechanism includes multiple ejector rods (13) that are movably inserted into the bottom of the slots (4) of the rotating pallet (3). The upper ends of the multiple ejector rods (13) are fixedly connected to the same ejector plate (14). The lower ends of the multiple ejector rods (13) are fixedly connected to the same force plate (15). The upper end of the force plate (15) and the lower end of the rotating pallet (3) are fixedly connected to multiple return springs (16) sleeved outside the ejector rods (13). The upper side of the base (1) is fixedly connected to a thrust electromagnetic plate (17). The lower side of the force plate (15) is fixedly connected to a thrust permanent magnet plate (18). The lower end of the rotating pallet (3) is fixedly connected to multiple arc-shaped pressing blocks (19) corresponding to the position of the slots (4). The upper end of the base (1) is fixedly connected to a trigger switch (20) corresponding to the position of the arc-shaped pressing blocks (19).

4. The quality inspection device for semiconductor manufacturing according to claim 1, characterized in that, The feeding mechanism includes two side plates (21) symmetrically fixedly connected to the lower end of the horizontal part of the second L-shaped vertical plate (8). A reciprocating screw (22) is rotatably connected between the two side plates (21) through a bearing. A drive motor (23) is fixedly installed on the outer wall of one of the side plates (21). The output end of the drive motor (23) is fixedly connected to one end of the reciprocating screw (22). A reciprocating seat (24) is threaded onto the rod wall of the reciprocating screw (22). A feeding plate (25) is fixedly connected to the lower end of the reciprocating seat (24).

5. The quality inspection device for semiconductor manufacturing according to claim 4, characterized in that, The upper end of the reciprocating seat (24) is fixedly connected to a limiting slider, and the lower end of the horizontal part of the second L-shaped vertical plate (8) is provided with a limiting groove that matches and slides with the limiting slider.

6. The quality inspection device for semiconductor manufacturing according to claim 1, characterized in that, Rubber pads are fixedly connected to the four corners of the bottom of the base (1).

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