Objective lens conversion device for laser direct writing equipment
By designing an objective lens switching device for laser direct writing equipment, automatic objective lens replacement and angle adjustment are achieved, solving the problems of low efficiency and damage caused by manual objective lens replacement, and improving processing efficiency and objective lens life.
Patent Information
- Application Number
- CN202520367339.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-04
- Publication Date
- 2026-02-24
- Estimated Expiration
- 2035-03-04
AI Technical Summary
Existing laser direct writing equipment requires manual replacement of the objective lens, resulting in low processing efficiency and easy damage to the objective lens.
Design a lens changing device for a laser direct writing device, including a base, a lens mounting base and a drive mechanism. The drive mechanism enables automatic lens changing, and the first adjustment component and the second adjustment component are used for angle adjustment, replacing manual operation.
It improves the efficiency of objective lens replacement, reduces the risk of objective lens damage, increases the processing and production efficiency of laser direct writing equipment, and adapts to normal use under different working conditions.
Smart Images
Figure CN223941161U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of laser direct writing technology equipment, and in particular to an objective lens conversion device for laser direct writing equipment. Background Technology
[0002] Laser direct writing technology is a technique that focuses a laser beam into an extremely small spot to act on photosensitive or thermosensitive thin film materials, directly generating micro- and nano-patterns. Compared to other micro- and nano-fabrication methods, it has many advantages, including low cost, short processing cycle, flexible use, and low environmental requirements. Laser direct writing technology has been widely used in microelectronics, DOE (Distributed Optics), microelectromechanical systems (MEMS), hybrid integrated circuits, and microwave integrated circuit fabrication, and is a practical technology with broad development prospects. Three-dimensional laser direct writing equipment typically requires the use of objective lenses of different magnifications and working distances for product processing and imaging.
[0003] However, to achieve different magnifications and working distances on existing equipment, the original objective lens needs to be unscrewed and manually replaced with the required objective lens. Since manual objective lens replacement is slow, it affects the efficiency of subsequent processing. In addition, frequent manual objective lens replacement may damage the objective lens. Utility Model Content
[0004] This invention addresses the problem that current laser direct writing equipment requires manual replacement of the objective lens, resulting in low processing efficiency and easy damage to the objective lens. It proposes an objective lens conversion device for laser direct writing equipment.
[0005] To achieve the above objectives, the present invention adopts the following technical solution:
[0006] This utility model provides an objective lens conversion device for a laser direct writing equipment, including a base and an objective lens mounting base. The base is provided with a mounting component that mates with the laser direct writing equipment, and a drive mechanism. The objective lens mounting base is movably connected to the base. The objective lens mounting base is provided with a plurality of objective lens mounting adjustment mechanisms along a first direction for mounting the objective lens. The drive mechanism is connected to the objective lens mounting base to at least drive the objective lens mounting base to move along the first direction. The objective lens mounting adjustment mechanism is provided with a first adjustment component and a second adjustment component. The first adjustment component can drive the objective lens to pitch and rotate along the first direction, and the second adjustment component can drive the objective lens to pitch and rotate along a second direction. The first direction and the second direction intersect.
[0007] Furthermore, the objective lens mount includes a movable plate and a connecting plate. The movable plate is movably connected to the base, and the drive mechanism is connected to the movable plate. The connecting plate includes a first section, a second section, and a third section connected in sequence. The first and third sections are perpendicular to the second section. The first section is fixedly connected to the movable plate, and the third section has multiple objective lens openings along a first direction. The objective lens mounting and adjustment mechanism is connected to the connecting plate so that the objective lens corresponds to the objective lens openings.
[0008] Furthermore, the objective lens mounting and adjustment mechanism includes a mounting housing and an adjustment plate. The mounting housing is fixedly connected to the connecting plate. The mounting housing is provided with an adjustment chamber. The adjustment plate is provided with a connecting part for mounting and connecting the objective lens. The adjustment chamber is provided with multiple tension springs. One end of the tension spring is fixedly connected to the bottom wall of the adjustment chamber, and the other end is connected to the adjustment plate, so that the adjustment plate is movably connected to the adjustment chamber. Both the first adjustment component and the second adjustment component can drive the adjustment plate to move.
[0009] Furthermore, the objective lens mounting and adjustment mechanism includes a positioning pin, an adjustment plate with multiple fixing slots, one end of a tension spring passing through a fixing slot to form a fixing part, the positioning pin being connected to the fixing part, and the length of the positioning pin being greater than the diameter of the fixing slot.
[0010] Furthermore, the first adjustment assembly includes a first adjustment screw, a first adjustment ball, and a first inclined block; the second adjustment assembly includes a second adjustment screw, a second adjustment ball, and a second inclined block; a third adjustment ball is provided inside the adjustment chamber; the first, second, and third adjustment balls are respectively located at each corner of the adjustment chamber; the first and second inclined blocks are both fixed inside the adjustment chamber and are distributed diagonally along the adjustment chamber; the first inclined block has a first inclined surface, and the second inclined block has a second inclined surface; the first and second adjustment balls are both movably disposed in the adjustment chamber; the first adjustment ball can move on the first inclined surface, and the second adjustment ball can move on the second inclined surface; the first adjustment screw and the second adjustment screw are both movably connected to the adjustment chamber and can both move in the adjustment chamber along a second direction.
[0011] One end of the first adjusting screw abuts against the first adjusting ball and pushes the first adjusting ball to move along the second direction on the first inclined surface. The first adjusting ball moves to abut against the adjusting plate body, thereby driving the adjusting plate body to pitch in the first direction with the line connecting the centers of the second and third adjusting balls as the axis.
[0012] One end of the second adjusting screw abuts against the second adjusting ball and pushes the first adjusting ball to move along the second direction on the second inclined plane. The second adjusting ball moves to abut against the adjusting plate, thereby driving the adjusting plate to pitch in the second direction with the line connecting the centers of the first and third adjusting balls as the axis.
[0013] Furthermore, the first inclined surface is provided with a first limiting groove, and the first adjusting ball is movably disposed in the first limiting groove; the second inclined surface is provided with a second limiting groove, and the second adjusting ball is movably disposed in the second limiting groove.
[0014] Furthermore, the first adjustment assembly includes a first locking plate and a first locking screw. The first locking plate has a first screw hole and a second screw hole. The first locking screw passes through the first screw hole and is movably connected to the mounting housing. The first adjustment screw passes through the second screw hole, and the first locking screw can rotate around its own axis to drive the first locking plate to move. It has a locked state and an unlocked state. In the locked state, the thread of the second screw hole intersects with the thread of the first adjustment screw to lock the rotation of the first adjustment screw. In the unlocked state, the thread of the second screw hole engages with the thread of the first adjustment screw.
[0015] Furthermore, the second adjustment assembly includes a second locking plate and a second locking screw. The second locking plate has a third screw hole and a fourth screw hole. The second locking screw passes through the third screw hole and is movably connected to the mounting housing. The second adjustment screw passes through the fourth screw hole, and the second locking screw can rotate around its own axis to drive the second locking plate to move. It has a locked state and an unlocked state. In the locked state, the thread of the fourth screw hole intersects with the thread of the second adjustment screw to lock the rotation of the second adjustment screw. In the unlocked state, the thread of the fourth screw hole engages with the thread of the second adjustment screw.
[0016] Furthermore, the connecting part is provided with a connecting through hole, and the objective lens mounting and adjustment mechanism includes multiple objective lens adapter rings. Each objective lens adapter ring has a first end and a second end that are opposite to each other. The first end is inserted into the connecting through hole, and the second end is connected to the objective lens.
[0017] Furthermore, the drive mechanism includes a drive motor and a drive screw. The drive motor is fixed on the base, and the drive screw extends along a first direction. The output end of the drive motor is connected to one end of the drive screw. The movable plate is provided with ball bearings, and the drive screw is connected to the ball bearings in a transmission manner. The drive motor can drive the drive screw to rotate around its own axis to move the movable plate.
[0018] Furthermore, the base is provided with a guide rail extending in the first direction, and the movable plate is provided with a guide groove extending in the first direction, with the guide rail and the guide groove being connected in cooperation.
[0019] Furthermore, the mounting component includes a mounting plate with multiple mounting holes arranged in an array, through which the mounting component is connected to the laser direct writing device.
[0020] As can be seen from the above technical solutions, the advantages of this utility model are:
[0021] (1) This utility model automatically replaces the objective lenses by installing multiple objective lenses on the objective lens mounting base along the first direction and driving the objective lens mounting base to move along the first direction through a drive mechanism. This improves the efficiency of objective lens replacement and further improves the processing and production efficiency of subsequent laser direct writing equipment. At the same time, it replaces the manual replacement of objective lenses, effectively avoids frequent direct contact between operators and objective lenses, reduces damage to objective lenses, and improves the service life of objective lenses.
[0022] (2) The objective lens can be angled by the first adjustment component and the second adjustment component, which makes it convenient for the laser direct writing equipment to be used and adjusted normally under different working conditions. Attached Figure Description
[0023] To more clearly illustrate the technical solution of this utility model, the drawings used in the description will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0024] Figure 1 This is a schematic diagram of the structure of the device in one embodiment of the present invention;
[0025] Figure 2 This is a partial cross-sectional structural schematic diagram of the drive mechanism in one embodiment of the present invention;
[0026] Figure 3 This is a cross-sectional structural schematic diagram of the device in one embodiment of the present invention;
[0027] Figure 4 This is a schematic diagram of the objective lens mounting and adjustment mechanism in one embodiment of the present invention;
[0028] Figure 5 This is a schematic diagram of the internal structure of the objective lens mounting and adjustment mechanism in one embodiment of this utility model.
[0029] Explanation of key figure labels:
[0030] 100. Base; 110. Mounting plate; 111. Fixing hole; 120. Drive mechanism; 121. Drive motor; 122. Drive screw; 130. Guide rail; 200. Objective lens mount; 210. Movable plate; 211. Ball bearing; 212. Guide groove; 220. Connecting plate; 221. First section; 222. Second section; 223. Third section; 224. Objective lens opening; 300. Objective lens mounting and adjustment mechanism; 310. Mounting housing; 311. Adjustment chamber; 320. Adjustment plate; 32 ...23. Guide screw; 124. Guide screw; 225. Guide screw; 226. Guide screw; 227. Guide screw; 228. Guide screw; 229. Guide screw; 220. Guide screw; 221. Guide screw; 222. Guide screw; 222. Guide screw; 223. Guide screw; 224. Guide screw; 225. Guide screw; 226. Guide screw; 227. Guide screw; 228. Guide screw; 229. Guide screw; 220 322. Fixed slot; 330. Connecting through hole; 340. Tension spring; 350. Positioning pin; 351. First adjusting assembly; 352. First adjusting screw; 353. First inclined block; 354. First locking plate; 355. First locking screw; 360. Second adjusting assembly; 361. Second adjusting screw; 362. Second adjusting ball; 363. Second inclined block; 364. Second locking plate; 365. Second locking screw; 370. Objective lens adapter ring; 380. Third adjusting ball; 400. Objective lens. Detailed Implementation
[0031] To make the objectives, features, and advantages of this utility model more apparent and understandable, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings of the specific embodiments. Obviously, the embodiments described below are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this patent, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this patent.
[0032] Please see Figures 1-5 A conversion device for an objective lens 400 in a laser direct writing device includes a base 100 and an objective lens mounting base 200. The base 100 is provided with a mounting component that mates with the laser direct writing device and a drive mechanism 120. The objective lens mounting base 200 is movably connected to the base 100. The objective lens mounting base 200 is provided with a plurality of objective lens mounting adjustment mechanisms 300 along a first direction for mounting the objective lens 400. The drive mechanism 120 is connected to the objective lens mounting base 200 to at least drive the objective lens mounting base 200 to move along the first direction. The objective lens mounting adjustment mechanism 300 is provided with a first adjustment component 350 and a second adjustment component 360. The first adjustment component 350 can drive the objective lens 400 to pitch and rotate along the first direction, and the second adjustment component 360 can drive the objective lens 400 to pitch and rotate along a second direction. The first direction and the second direction intersect.
[0033] In this embodiment, as Figure 1As shown, the base 100 is a rectangular plate structure placed horizontally. The first direction is the length direction of the base 100, and the second direction is its width direction. A mounting component is connected to the upper end surface of the base 100, and the mounting component is fixedly connected to the optical breadboard on the laser direct writing device. An objective lens mount 200 is movably connected to the lower end surface of the base 100 opposite to the mounting component. A drive mechanism 120 is connected to the base 100, and the drive mechanism 120 is connected to the objective lens mount 200, so that the drive mechanism 120 can drive the objective lens mount 200 to move in the first direction. The objective lens mount 200 is provided with multiple objective lens mounting adjustment mechanisms 300 along the first direction, which can mount multiple objective lenses 400 of different specifications. Each objective lens mounting adjustment mechanism 300 mounts one objective lens 400. For example, in this embodiment, the objective lens mount 200 is provided with two objective lens mounting adjustment mechanisms 300, which respectively mount a 10x objective lens 400 and a 20x objective lens 400. The driving mechanism 120 drives the objective lens mount 200 to move along the first direction, so that different objective lenses 400 correspond to the laser direct writing device, thereby automatically completing the replacement and use of the objective lenses 400. In addition, each objective lens mounting and adjustment mechanism 300 is provided with a first adjustment component 350 and a second adjustment component 360. One end of the objective lens 400 is mounted on the objective lens mounting and adjustment mechanism 300 to form a mounting end. The first adjustment component 350 can drive the mounting end of the objective lens 400 to make a pitch movement in the first direction, thereby adjusting the angle of the objective lens 400 in the first direction. The second adjustment component 360 can drive the mounting end of the objective lens 400 to make a pitch movement in the second direction, thereby adjusting the angle of the objective lens 400 in the second direction. This facilitates the adjustment of the working angle between the laser direct writing device and the objective lens 400, making the work more convenient.
[0034] In use, first connect the objective lens mount 200 to the base 100. Then, install the various objective lenses 400 onto the multiple objective lens mounting adjustment mechanisms 300. Next, fix the mounting to the bottom of the optical breadboard of the laser direct-writing device. By activating the drive mechanism 120, the objective lens mount 200 is moved along the first direction, aligning one objective lens 400 with the laser direct-writing device. Furthermore, the angle of the objective lens 400 can be changed using the first adjustment component 350 and the second adjustment component 360 to accommodate direct-writing operations at different angles. Since multiple objective lenses 400 of different specifications are mounted on the objective lens mount 200 along the first direction, when it is necessary to replace an objective lens 400, simply activate the drive mechanism 120 to move the objective lens mount 200 relative to the base 100 along the first direction, thus aligning different objective lenses 400 with the laser direct-writing device and enabling objective lens replacement.
[0035] In the above structure, by mounting multiple objective lenses 400 on the objective lens mounting base 200 along the first direction and driving the objective lens mounting base 200 to move along the first direction through the drive mechanism 120, the objective lenses 400 can be automatically replaced, which improves the work efficiency of replacing objective lenses 400 and further improves the processing and production efficiency of subsequent laser direct writing equipment. At the same time, it replaces the manual replacement of objective lenses 400, effectively avoiding frequent direct contact between operators and objective lenses 400, reducing damage to objective lenses 400 and increasing the service life of objective lenses 400. In addition, the objective lenses 400 can be angled through the first adjustment component 350 and the second adjustment component 360, which facilitates the normal use and adjustment of the laser direct writing equipment for different working conditions.
[0036] In the specific structure of the mounting components, such as Figure 1 As shown, the mounting component includes a mounting plate 110, which has a plurality of mounting holes 111 arranged in an array. The mounting component is connected to the laser direct writing device through the mounting holes 111. In this embodiment, the mounting plate 110 is a rectangular plate structure. The length direction of the mounting plate 110 is consistent with the length direction of the base 100, and its width direction is consistent with the width direction of the base 100. The lower end face of the mounting plate 110 is fixedly connected to the upper end face of the base 100. The mounting plate 110 has a plurality of mounting holes 111 arranged in a rectangular array. The mounting plate 110 and the base 100 can be fixedly connected through the mounting holes 111 and bolts. The mounting plate 110 and the optical breadboard of the laser direct writing device can also be fixedly connected through the mounting holes 111 and bolts, which facilitates the connection.
[0037] In the specific structure of the objective lens mount 200, the objective lens mount 200 includes a movable plate 210 and a connecting plate 220. The movable plate 210 is movably connected to the base 100. The drive mechanism 120 is connected to the movable plate 210. The connecting plate 220 includes a first segment 221, a second segment 222, and a third segment 223 connected in sequence. The first segment 221 and the third segment 223 are both perpendicular to the second segment 222. The first segment 221 is fixedly connected to the movable plate 210. The third segment 223 has multiple objective lens openings 224 along a first direction. The objective lens mounting adjustment mechanism 300 is connected to the connecting plate 220 so that the objective lens 400 corresponds to the objective lens openings 224.
[0038] In this embodiment, as Figure 3As shown, the objective lens mount 200 includes a movable plate 210 and a connecting plate 220. The movable plate 210 is a rectangular plate structure that is movably connected to the lower end face of the base 100. The length direction of the movable plate 210 is aligned with the length direction of the base 100 (a first direction), and the width direction of the movable plate 210 is aligned with the width direction of the base 100 (a second direction). A drive mechanism 120 is connected to the movable plate 210, causing the drive mechanism 120 to drive the movable plate 210 to move along the first direction. The connecting plate 220 can be a "Z"-shaped plate structure, where the first segment 221 and the third segment 223 are placed horizontally, and the second segment 222 is placed vertically, causing the first segment 221 to move horizontally. Both the first segment 221 and the third segment 223 are perpendicular to the second segment 222. The first segment 221 is fixedly connected to the bottom side of the movable plate 210 and extends to one side of the base 100, so that the second segment 222 extends vertically upward from one side of the base 100. The third segment 223 extends in a direction away from the base 100. Multiple objective lens mounting and adjustment mechanisms 300 are installed on the third segment 223 along the first direction. When the objective lens 400 is installed, it extends downward from the lower surface of the third segment 223 in a vertical direction. The third segment 223 has an objective lens opening 224 that extends vertically through the corresponding position where the objective lens 400 is installed, so that the laser direct writing device can be used in conjunction with the objective lens 400 through the objective lens opening 224 and avoids obstruction.
[0039] In this embodiment, the movable plate 210 connected to the drive mechanism 120 and the connecting plate 220 for mounting the objective lens 400 are configured as separate structures. This facilitates the replacement of different sized connecting plates 220 for different objective lenses 400, improving the modularity of the device, simplifying replacement and maintenance, effectively reducing the impact of the drive mechanism 120 on the objective lens 400 during operation, and better protecting the objective lens 400. Furthermore, configuring the connecting plate 220 as a "Z"-shaped structure further enhances its structural strength and support effect, and can further reduce installation space, resulting in a more compact structure.
[0040] Specifically, the objective lens mounting and adjustment mechanism 300 includes a mounting housing 310 and an adjustment plate 320. The mounting housing 310 is fixedly connected to the connecting plate 220. The mounting housing 310 has an adjustment chamber 311. The adjustment plate 320 has a connecting part for mounting and connecting the objective lens 400. Multiple tension springs 330 are provided inside the adjustment chamber 311. One end of each tension spring 330 is fixedly connected to the bottom wall of the adjustment chamber 311, and the other end is connected to the adjustment plate 320, allowing the adjustment plate 320 to be movably connected to the adjustment chamber 311. Both the first adjustment component 350 and the second adjustment component 360 can drive the adjustment plate 320 to move. The objective lens mounting and adjustment mechanism 300 includes a positioning pin 340. The adjustment plate 320 has multiple fixing slots 321. One end of each tension spring 330 passes through a fixing slot 321 to form a fixing part. The positioning pin 340 is connected to the fixing part, and the length of the positioning pin 340 is greater than the diameter of the fixing slot 321.
[0041] In this embodiment, as Figure 4 As shown, the mounting housing 310 is a cuboid shell structure with a hollow structure open at the bottom. The hollow part forms an adjustment chamber 311. The upper end is also provided with an opening corresponding to and communicating with the objective lens opening 224, which facilitates the alignment of the laser direct writing device with the objective lens 400. The adjustment plate 320 is a rectangular plate structure. The outer dimensions of the adjustment plate 320 are smaller than the opening size of the mounting housing 310. The adjustment plate 320 is movably connected to the adjustment chamber 311 through the opening. Multiple tension springs 330 are provided in the adjustment chamber 311. One end of the tension spring 330 is fixedly connected to the bottom wall of the adjustment chamber 311, and the other end is connected to the adjustment plate 320, so that the adjustment plate 320 can be movably connected to the adjustment chamber 311. In use, the mounting housing 310 is fixedly connected to the second section 222, and the mounting end of the objective lens 400 is mounted on the adjustment plate 320. The first adjustment component 350 and the second adjustment component 360 adjust the angle of the objective lens 400 by driving the adjustment plate 320 to rotate relative to the mounting housing 310. The structure is simple and easy to implement. The adjustment plate 320 and the mounting housing 310 are connected by a tension spring 330. The elastic deformation of the tension spring allows the adjustment plate 320 to move relative to the mounting housing 310 while ensuring the connection between the adjustment plate 320 and the mounting housing 310.
[0042] Furthermore, a fixing groove 321 is provided on the adjusting plate 320 at the corresponding connection point with the tension spring 330. One end of the tension spring 330 extends out of the adjusting plate 320 through the fixing groove 321, and the extended part forms a fixing part. The positioning pin 340 passes through the fixing part. Since the length of the positioning pin 340 is greater than the diameter of the fixing groove 321, the positioning pin 340 fixes the tension spring 330 to the adjusting plate 320. Through this fixing structure, the distance between the tension spring 330 extending out of the adjusting plate 320 can be adjusted, thereby adjusting the connection force between the mounting housing 310 and the adjusting plate 320, and further adjusting the rotatable angle range of the objective lens 400, thereby improving its applicability and facilitating the disassembly and installation of the adjusting plate 320 and the mounting housing 310.
[0043] In the structure of the connecting part, the connecting part is provided with a connecting through hole 322. The objective lens mounting and adjustment mechanism 300 includes a plurality of objective lens adapter rings 370. The objective lens adapter ring 370 is provided with a first end and a second end opposite to each other. The first end is inserted into the connecting through hole 322, and the second end is connected to the objective lens 400. The connecting part has a connecting through hole 322 in the center of the adjusting plate 320. The connecting through hole 322 is connected to the opening of the mounting housing 310 and the objective lens opening 224 of the third section 223. One end of the objective lens 400 is fixedly mounted on the second end of the objective lens adapter ring 370. The first end of the objective lens adapter ring 370 is fixedly connected to the connecting through hole 322. The connecting through hole 322 includes a fixing screw. During installation, the first end of the objective lens adapter ring 370 is inserted into the connecting through hole 322. Then, by rotating the fixing screw, the fixing screw passes through the connecting through hole 322 and abuts against the outer wall of the objective lens adapter ring 370 for fixation. This fixing structure is simple and easy to fix, and it can be used to fix objective lens adapter rings 370 of different sizes. By using the objective lens adapter ring 370 to connect the objective lens 400, objective lenses of different specifications can be effectively connected. At the same time, when installing with the adjustment plate 320, direct contact between the objective lens 400 and the adjustment plate 320 can be avoided, further protecting the objective lens 400.
[0044] In the specific structures of the first adjusting assembly 350 and the second adjusting assembly 360, the first adjusting assembly 350 includes a first adjusting screw 351, a first adjusting ball 352, and a first inclined block 353; the second adjusting assembly 360 includes a second adjusting screw 361, a second adjusting ball 362, and a second inclined block 363; a third adjusting ball 380 is provided inside the adjusting chamber 311; the first adjusting ball 352, the second adjusting ball 362, and the third adjusting ball 380 are respectively located at each corner of the adjusting chamber 311; the first inclined block 353 and the second inclined block 363 are both fixed inside the adjusting chamber 311, and the first inclined block 353 and the second inclined block 363 are distributed diagonally along the adjusting chamber 311; the first inclined block 353 has a first inclined surface, and the second inclined block 363 has a second inclined surface; the first adjusting ball 352 and the second adjusting ball 362 are both movably disposed in the adjusting chamber 311; the first adjusting ball 352 can move on the first inclined surface. The second adjusting ball 362 can move on the second inclined plane. The first adjusting screw 351 and the second adjusting screw 361 are both movably connected to the adjusting chamber 311 and can both move in the adjusting chamber 311 along the second direction. One end of the first adjusting screw 351 abuts against the first adjusting ball 352 and pushes the first adjusting ball 352 to move along the second direction on the first inclined plane. The first adjusting ball 352 moves to abut against the adjusting plate body to drive the adjusting plate body to pitch in the first direction with the line connecting the centers of the second adjusting ball 362 and the third adjusting ball 380 as the axis. One end of the second adjusting screw 361 abuts against the second adjusting ball 362 and pushes the first adjusting ball 352 to move along the second direction on the second inclined plane. The second adjusting ball 362 moves to abut against the adjusting plate body to drive the adjusting plate body to pitch in the second direction with the line connecting the centers of the first adjusting ball 352 and the third adjusting ball 380 as the axis.
[0045] In this embodiment, as Figure 5As shown, the bottom end of the first inclined block 353 is fixed to the bottom wall of the adjustment chamber 311, and the first inclined block 353 is installed at one corner of the adjustment chamber 311. The first adjusting screw 351 is movably connected to the adjustment chamber 311 along the second direction. The first inclined surface on the first inclined block 353 is opposite to the first adjusting screw 351 located at one end of the adjustment chamber 311. The first adjusting ball 352 is placed between the first adjusting screw 351 and the first inclined block 353. The other end of the first adjusting screw 351 extends out of the mounting housing 310 to form a first handle. In addition, the second adjusting ball 362 and the third adjusting ball 380 are respectively located at corners of the adjustment chamber 311 that are different from the first adjusting ball 352. The third adjusting ball 380 is located between the first adjusting ball 352 and the second adjusting ball 362. In the initial state, the connecting lines of the centers of the third adjusting ball 380, the first adjusting ball 352 and the second adjusting ball 362 form a right-angled triangle structure. In actual operation, rotating the first handle clockwise causes the first adjusting screw 351 to move inward along the second direction. The end of the first adjusting screw 351 pushes the first adjusting ball 352 upward along the first inclined surface. During this movement, the first adjusting ball 352 abuts against the adjusting plate 320, and as it moves upward, it pushes one side of the adjusting plate 320 upward along the second direction, overcoming the tension of the tension spring 330. Meanwhile, the second adjusting ball 362 and the third adjusting ball 380 remain fixed. The connecting line of the center of the three adjusting balls 380 is in the same direction as one side of the adjusting plate 320. Therefore, the adjusting plate 320 rotates with this side as the hinge. When the first handle is turned counterclockwise, the first adjusting screw 351 moves outward in the second direction, the first adjusting ball 352 loses its thrust and moves downward along the first inclined plane. Under the elastic force of the tension spring 330, it drives one side of the adjusting plate 320 to rotate downward, realizing the pitch movement of the adjusting plate 320 in the first direction, thereby realizing the angle adjustment of the objective lens 400 in the first direction.
[0046] The bottom end of the second inclined block 363 is fixed on the bottom wall of the regulating chamber 311, and the second inclined block 363 is installed at the other corner of the regulating chamber 311. The second inclined block 363 and the first inclined block 353 are diagonally distributed on the regulating chamber 311. The second adjusting screw 361 is movably connected to the regulating chamber 311 along the second direction. The second inclined surface on the second inclined block 363 and the second adjusting screw 361 are located at one end of the regulating chamber 311 and are opposite to each other. The second adjusting ball 362 is placed between the second adjusting screw 361 and the second inclined block 363. The other end of the second adjusting screw 361 extends out of the mounting housing 310 to form a second handle. In actual operation, rotating the second handle clockwise causes the second adjusting screw 361 to move inward along the second direction. The end of the second adjusting screw 361 pushes the second adjusting ball 362 upward along the second inclined plane. During this movement, the second adjusting ball 362 abuts against the adjusting plate 320, and as it moves upward, it pushes one side of the adjusting plate 320 upward along the first direction, overcoming the tension of the tension spring 330. Meanwhile, the first adjusting ball 352 and the third adjusting ball 380 remain fixed. The connecting line of the center of the three adjusting balls 380 is in the same direction as one side of the adjusting plate 320. Therefore, the adjusting plate 320 rotates with this side as the hinge. When the first handle is turned counterclockwise, the second adjusting screw 361 moves outward in the second direction, the second adjusting ball 362 loses its thrust and moves downward along the first inclined plane. Under the elastic force of the tension spring 330, it drives one side of the adjusting plate 320 to rotate downward, realizing the pitch movement of the adjusting plate 320 in the second direction, thereby realizing the angle adjustment of the objective lens 400 in the second direction.
[0047] Furthermore, to prevent the first adjusting ball 352 from shifting position during movement and thus affecting the normal rotation of the adjusting plate 320, a first limiting groove is provided on the first inclined surface. The first adjusting ball 352 is movably placed within the first limiting groove. The first limiting groove is an arc-shaped groove structure, and its curvature matches that of the first adjusting ball 352, facilitating the movement of the first adjusting ball 352 within the first limiting groove. Correspondingly, to prevent the second adjusting ball 362 from shifting position during movement and thus affecting the normal rotation of the adjusting plate 320, a second limiting groove is also provided on the second inclined surface. The second adjusting ball 362 is movably placed within the second limiting groove. The second limiting groove is an arc-shaped groove structure, and its curvature matches that of the second adjusting ball 362, facilitating the movement of the second adjusting ball 362 within the second limiting groove.
[0048] In addition, the first adjustment assembly 350 includes a first locking plate 354 and a first locking screw 355. The first locking plate 354 is provided with a first screw hole and a second screw hole. The first locking screw 355 passes through the first screw hole and is movably connected to the mounting housing 310. The first adjustment screw 351 passes through the second screw hole, and the first locking screw 355 can rotate around its own axis to drive the first locking plate 354 to move. It has a locked state and an unlocked state. In the locked state, the thread of the second screw hole intersects with the thread of the first adjustment screw 351 to lock the rotation of the first adjustment screw 351. In the unlocked state, the thread of the second screw hole engages with the thread of the first adjustment screw 351. The second adjusting assembly 360 includes a second locking plate 364 and a second locking screw 365. The second locking plate 364 is provided with a third screw hole and a fourth screw hole. The second locking screw 365 passes through the third screw hole and is movably connected to the mounting housing 310. The second adjusting screw 361 passes through the fourth screw hole, and the second locking screw 365 can rotate around its own axis to drive the second locking plate 364 to move. It has a locked state and an unlocked state. In the locked state, the thread of the fourth screw hole intersects with the thread of the second adjusting screw 361 to lock the rotation of the second adjusting screw 361. In the unlocked state, the thread of the fourth screw hole engages with the thread of the second adjusting screw 361.
[0049] In this embodiment, to prevent accidental contact with the first adjusting screw 351 and the second adjusting screw 361 during operation, which would cause the objective lens 400 to rotate, the first adjusting assembly 350 is provided with a first locking plate 354 and a first locking screw 355 to lock the first adjusting screw 351. The second adjusting assembly 360 is provided with a second locking plate 364 and a second locking screw 365 to lock the second adjusting screw 361. The structures and working processes of the first locking plate 354 and the first locking screw 355 are similar to those of the second locking plate 364 and the second locking screw 365. The first locking plate 354 and the first locking screw 355 will be used as an example for explanation. The first locking plate 354 is a plate-shaped structure. The first locking plate 354 has a first screw hole and a second screw hole that penetrate its body. The first locking plate 354 is located on one side of the mounting housing 310 and is set on the same side as the first handle. First, the first adjusting screw 351 is fitted through the second screw hole and movably connected in the adjusting chamber 311. Then, the first locking screw 355 is fitted through the first screw hole. One end of the first locking screw 355 is movably connected to the side wall of the mounting housing 310. In the initial state, that is, in the unlocked state, the first screw hole and the first locking screw 355 are threadedly connected, and the second screw hole and the first adjusting screw 351 are threadedly engaged. When switching to the locked state, rotating the first locking screw 355 clockwise causes the first locking plate 354 to move outward as the first locking screw 355 rotates. This alters the threaded pair between the first locking plate 354 and the first adjusting screw 351, causing the thread of the second screw hole to interlock with the thread of the first adjusting screw 351, thus locking the rotation of the first adjusting screw 351. When switching to the unlocked state, rotating the first locking screw 355 counterclockwise moves the first locking plate 354 inward, changing the threaded pair between the first locking plate 354 and the first adjusting screw 351 back to its initial state, where the thread of the second screw hole engages with the thread of the first adjusting screw 351, allowing the first adjusting screw 351 to rotate and unlock. Similarly, by rotating the second locking screw 365 clockwise or counterclockwise, the second locking plate 364 moves outward or inward, changing the threaded pair between the second locking plate 364 and the second adjusting screw 361, thereby locking or unlocking the second adjusting screw 361. This locking structure is simple, effectively avoiding the problem of accidental changes to the objective lens angle of 400°, and further improving the processing quality.
[0050] In the specific structure of the drive mechanism 120, the drive mechanism 120 includes a drive motor 121 and a drive screw 122. The drive motor 121 is fixed on the base 100, and the drive screw 122 extends along a first direction. The output end of the drive motor 121 is connected to one end of the drive screw 122. The movable plate 210 is provided with a ball bearing 211. The drive screw 122 is connected to the ball bearing 211 in a transmission manner. The drive motor 121 can drive the drive screw 122 to rotate around its own axis, so as to move the movable plate 210.
[0051] In this embodiment, as Figure 2 As shown, a drive motor 121 is installed and connected to one end of the base 100. A drive screw 122 extends along a first direction on the base 100. One end of the drive screw 122 is connected to the output end of the drive motor 121. For example, a coupling can be used to connect the drive screw 122 and the drive motor 121, ensuring that the drive motor 121 can drive the drive screw 122 to rotate around its own axis. A ball bearing 211 is provided on the movable plate 210, which is connected to the drive screw 122. When the drive screw 122 rotates, the movable plate 210 can reciprocate along the first direction, thereby realizing the automatic changing of the objective lens 400. This drive mechanism 120 is relatively simple and has high movement accuracy, further improving the accuracy of objective lens 400 switching.
[0052] In addition, the base 100 is provided with a guide rail 130 extending along the first direction, and the movable plate 210 is provided with a guide groove 212 extending along the first direction. The guide rail 130 and the guide groove 212 are connected in cooperation. In this embodiment, the base 100 has guide rails 130 extending along the first direction on both sides of the drive screw 122 on the bottom end surface, and the movable plate 210 is correspondingly provided with a guide groove 212. The guide rail 130 is movably disposed in the guide groove 212. When the drive screw 122 rotates and drives the movable plate 210 to move, the guide rail 130 and the guide groove 212 cooperate to limit and guide, further improving the accuracy of the movement of the movable plate 210 and avoiding the situation where the movable plate 210 deviates during the movement, affecting the normal replacement of the objective lens 400.
[0053] In the connection structure of this embodiment, bolts can be used for connection. For example, the mounting plate 110 and the base 100 can be fixedly connected by M5 hexagon countersunk screws, the first section 221 of the connecting plate 220 can be fixedly connected to the movable plate 210 by M6 countersunk screws, and the mounting housing 310 can be fixedly connected to the second section 222 of the connecting plate 220 by M4 countersunk screws.
[0054] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A lens conversion device for a laser direct writing apparatus, characterized in that, The device includes a base and an objective lens mount. The base is provided with a mounting component that mates with a laser direct writing device, and a drive mechanism. The objective lens mount is movably connected to the base. The objective lens mount is provided with multiple objective lens mounting adjustment mechanisms along a first direction for mounting an objective lens. The drive mechanism is connected to the objective lens mount to at least drive the objective lens mount to move along the first direction. The objective lens mounting adjustment mechanism is provided with a first adjustment component and a second adjustment component. The first adjustment component can drive the objective lens to pitch and rotate along the first direction, and the second adjustment component can drive the objective lens to pitch and rotate along a second direction. The first direction and the second direction intersect.
2. The objective lens conversion device for a laser direct writing device according to claim 1, characterized in that, The objective lens mount includes a movable plate and a connecting plate. The movable plate is movably connected to the base. The driving mechanism is connected to the movable plate. The connecting plate includes a first segment, a second segment, and a third segment connected in sequence. The first segment and the third segment are both perpendicular to the second segment. The first segment is fixedly connected to the movable plate. The third segment has multiple objective lens openings along the first direction. The objective lens mounting and adjustment mechanism is connected to the connecting plate so that the objective lens corresponds to the objective lens openings.
3. The objective lens conversion device for a laser direct writing device according to claim 2, characterized in that, The objective lens mounting and adjustment mechanism includes a mounting housing and an adjustment plate. The mounting housing is fixedly connected to the connecting plate. The mounting housing has an adjustment chamber. The adjustment plate has a connecting part for mounting and connecting the objective lens. The adjustment chamber has multiple tension springs. One end of each tension spring is fixedly connected to the bottom wall of the adjustment chamber, and the other end is connected to the adjustment plate, so that the adjustment plate is movably connected to the adjustment chamber. Both the first adjustment component and the second adjustment component can drive the adjustment plate to move. And / or, the objective lens mounting and adjustment mechanism includes a positioning pin, the adjustment plate is provided with multiple fixing slots, one end of the tension spring passes through the fixing slot to form a fixing part, the positioning pin is connected to the fixing part, and the length of the positioning pin is greater than the diameter of the fixing slot.
4. The objective lens conversion device for a laser direct writing device according to claim 3, characterized in that, The first adjustment assembly includes a first adjustment screw, a first adjustment ball, and a first inclined block. The second adjustment assembly includes a second adjustment screw, a second adjustment ball, and a second inclined block. A third adjustment ball is provided inside the adjustment chamber. The first, second, and third adjustment balls are respectively located at each corner of the adjustment chamber. The first and second inclined blocks are both fixed inside the adjustment chamber and are distributed diagonally along the adjustment chamber. The first inclined block has a first inclined surface, and the second inclined block has a second inclined surface. The first and second adjustment balls are both movably disposed in the adjustment chamber. The first adjustment ball can move on the first inclined surface, and the second adjustment ball can move on the second inclined surface. The first adjustment screw and the second adjustment screw are both movably connected to the adjustment chamber and can both move in the adjustment chamber along the second direction. One end of the first adjusting screw abuts against the first adjusting ball and pushes the first adjusting ball to move along the second direction on the first inclined surface. The first adjusting ball moves to abut against the adjusting plate body, thereby driving the adjusting plate body to pitch in the first direction with the line connecting the centers of the second adjusting ball and the third adjusting ball as the axis. One end of the second adjusting screw abuts against the second adjusting ball and pushes the first adjusting ball to move along the second direction on the second inclined plane. The second adjusting ball moves to abut against the adjusting plate body, thereby driving the adjusting plate body to pitch in the second direction with the line connecting the centers of the first adjusting ball and the third adjusting ball as the axis.
5. The objective lens conversion device for a laser direct writing device according to claim 4, characterized in that, The first inclined surface is provided with a first limiting groove, and the first adjusting ball is movably disposed in the first limiting groove. The second inclined surface is provided with a second limiting groove, and the second adjusting ball is movably disposed in the second limiting groove.
6. The objective lens conversion device for a laser direct writing device according to claim 4, characterized in that, The first adjusting assembly includes a first locking plate and a first locking screw. The first locking plate has a first screw hole and a second screw hole. The first locking screw passes through the first screw hole and is movably connected to the mounting housing. The first adjusting screw passes through the second screw hole, and the first locking screw can rotate around its own axis to drive the first locking plate to move. It has a locked state and an unlocked state. In the locked state, the thread of the second screw hole intersects with the thread of the first adjusting screw to lock the rotation of the first adjusting screw. In the unlocked state, the thread of the second screw hole engages with the thread of the first adjusting screw. And / or, the second adjusting assembly includes a second locking plate and a second locking screw. The second locking plate has a third screw hole and a fourth screw hole. The second locking screw passes through the third screw hole and is movably connected to the mounting housing. The second adjusting screw passes through the fourth screw hole, and the second locking screw can rotate about its own axis to drive the second locking plate to move. It has a locked state and an unlocked state. In the locked state, the thread of the fourth screw hole intersects with the thread of the second adjusting screw to lock the rotation of the second adjusting screw. In the unlocked state, the thread of the fourth screw hole engages with the thread of the second adjusting screw.
7. The objective lens conversion device for a laser direct writing device according to claim 3, characterized in that, The connecting part is provided with a connecting through hole, and the objective lens mounting and adjustment mechanism includes multiple objective lens adapter rings. Each objective lens adapter ring has a first end and a second end that are opposite to each other. The first end is inserted into the connecting through hole, and the second end is connected to the objective lens.
8. The objective lens conversion device for a laser direct writing device according to claim 2, characterized in that, The driving mechanism includes a drive motor and a drive screw. The drive motor is fixed to the base, and the drive screw extends along the first direction. The output end of the drive motor is connected to one end of the drive screw. The movable plate is provided with ball bearings, and the drive screw is connected to the ball bearings in a transmission manner. The drive motor can drive the drive screw to rotate around its own axis to move the movable plate.
9. The objective lens conversion device for a laser direct writing device according to claim 8, characterized in that, The base is provided with a guide rail extending along the first direction, and the movable plate is provided with a guide groove extending along the first direction. The guide rail and the guide groove are connected in cooperation.
10. The objective lens conversion device for a laser direct writing device according to claim 1, characterized in that, The mounting component includes a mounting plate with a plurality of mounting holes arranged in an array. The mounting component is connected to the laser direct writing device through the mounting holes.