Clamp for fixing wafer

Abstract

The utility model provides a fixture for fixing a wafer, the fixture for fixing the wafer comprises a base, a clamping device and a fastening device, through the design of multi-site clamping of a first clamping piece, a second clamping piece, a fastening block and the like in the clamping device, the number of clamping sites of the wafer is more, the stress of the wafer is more uniform, and the wafer is more stable. The wafer is clamped more compactly, so that the safety of the wafer in the SEM Review process is guaranteed, in addition, through synchronous clamping and fixing of the first clamping piece and the second clamping piece, self-calibration of the center position of the wafer can be achieved, a mechanical self-locking principle is adopted, the wafer is prevented from rotating possibly in the SEM Review process, and an operator only needs to move the sliding block, so that the wafer can be clamped more tightly, and the wafer can be prevented from rotating in the SEM Review process. Therefore, the clamping or loosening operation of the wafer can be automatically realized, and the risks of wafer collision and wafer falling are greatly reduced.

Description

Technical Field

[0001] This utility model relates to the technical field of wafer processing, and in particular to a fixture for fixing wafers. Background Technology

[0002] Chip manufacturing primarily involves two processes: wafer fabrication and wafer processing. During wafer fabrication on the wafer fabrication line, real-time monitoring of the wafer is crucial to track its status. To observe wafer defects and surface morphology, SEM (Surface Mount Electron) review is necessary. However, before using SEM, the wafer must be mounted on a fixture to facilitate movement and rotation within the SEM chamber. The wafer mounting process involves numerous manual steps, inevitably leading to damage or contamination. Furthermore, unsuitable fixtures can cause collisions or wafer detachment during review. All these factors ultimately affect wafer quality and significantly reduce product yield.

[0003] Therefore, how to reduce the damage to wafers during SEM review is a problem that needs to be solved. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a fixture for fixing wafers, so as to solve the problem of how to reduce the damage to wafers during SEM review in the prior art.

[0005] To achieve the above and other related objectives, this utility model provides a fixture for fixing a wafer, the fixture comprising:

[0006] The base includes a clamp body and side plates located on both sides of the clamp body. The top of the clamp body is provided with a limiting boss, the bottom of the clamp body is provided with an opening, a guide rail is provided in the opening, and a through groove is provided on the side plate.

[0007] A clamping device is provided, which is distributed on the front and back of the fixture body and can slide along the through groove.

[0008] A clamping device includes a clamping block and a slider. The slider is fixedly connected to the clamping device, and the guide rail passes through a first opening on the slider so that the slider can slide up and down along the guide rail. The clamping block is provided with a protrusion, the shape of which is consistent with the notch shape of the wafer.

[0009] Optionally, the fixture body is circular, the limiting boss is semi-circular, and the radius of the limiting boss is equal to the radius of the base.

[0010] Optionally, the width of the locking block is smaller than the width of the opening.

[0011] Optionally, the through groove is arc-shaped, and the through groove includes a first through groove and a second through groove, and the first through groove and the second through groove are symmetrically distributed about the central axis of the fixture body.

[0012] Optionally, the clamping device includes a first clamping device and a second clamping device, wherein the first clamping device and the second clamping device are symmetrically distributed about the central axis of the clamp body.

[0013] Optionally, the first locking device includes a first rocker-slider mechanism, a first card, and a first bracket, wherein the first rocker-slider mechanism includes a first link, a second link, and a third link, wherein the first link and the second link are located on the back of the base, and the third link, the first card, and the first bracket are located on the front of the base.

[0014] Optionally, one end of the first connecting rod is fixedly connected to the slider, the other end of the first connecting rod is connected to one end of the second connecting rod, and the other end of the first connecting rod is also provided with a first connecting member that passes through the first through groove. The first connecting member can slide along the first through groove. The first connecting member is connected to one end of the first card, the other end of the first card is connected to one end of the third connecting rod, and the other end of the third connecting rod is connected to the first bracket.

[0015] Optionally, the second locking device includes a second rocker-slider mechanism, a second card, and a second bracket, wherein the second rocker-slider mechanism includes a fourth link, a fifth link, and a sixth link, wherein the fourth link and the fifth link are located on the back of the base, and the sixth link, the second card, and the second bracket are located on the front of the base.

[0016] Optionally, one end of the fourth link is fixedly connected to the slider, the other end of the fourth link is connected to one end of the fifth link, the other end of the fifth link is connected to one end of the second link, and the other end of the fourth link is also provided with a second connecting member that passes through the second through groove. The second connecting member can slide along the second through groove. The second connecting member is connected to one end of the second card, the other end of the second card is connected to one end of the sixth link, and the other end of the sixth link is connected to the second bracket.

[0017] Optionally, the slider and the retaining block are hinged together, the retaining block rotates axially around the slider, and the upper end of the retaining block is provided with a second opening, and the slider is also provided with a third opening. A pin is used to pass through the second opening and the third opening to fix the wafer.

[0018] As described above, compared with traditional SEM fixtures, the fixture for fixing wafers of this invention has the following advantages: The fixture of this invention adopts a multi-point clamping design with cards and locking blocks, which increases the number of clamping points for the wafer, makes the wafer more evenly stressed, and clamps the wafer more tightly, thereby ensuring wafer safety. In addition, the synchronous clamping and fixing of the first and second cards can also achieve self-calibration of the wafer's center position. The mechanical self-locking principle prevents the wafer from rotating during the review process. Furthermore, the user only needs to move the slider to automatically clamp or release the wafer, which greatly reduces the risk of wafer collision and falling off. Attached Figure Description

[0019] Figure 1 The diagram shown is a structural schematic of a fixture for fixing wafers according to this utility model.

[0020] Figure 2 The diagram shown is a structural schematic of the base of a fixture for fixing wafers according to this utility model.

[0021] Figure 3 The diagram shown is a structural schematic of a clamping device for fixing a wafer according to the present invention.

[0022] Figure 4 The diagram shows a working schematic of a clamping device for fixing wafers according to this utility model.

[0023] Component designation explanation

[0024] 101. Fixture body; 102. Side plate; 103. Limiting boss; 104. Opening; 105. Guide rail; 106. First clamping device; 107. Second clamping device; 108. Slider; 109. Locking block; 1011. Second through groove; 1012. First through groove; 112. First clamping device; 1121. First bracket; 1122. Second connecting rod; 1123. First connecting rod; 1124. Third connecting rod; 1125. First clip; 113. Second clamping device; 1131. Second bracket; 1132. Fifth connecting rod; 1133. Fourth connecting rod; 1134. Sixth connecting rod; 1135. Second clip; 114. Wafer. Detailed Implementation

[0025] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification.

[0026] Please see Figures 1 to 4 It should be understood that the structures, proportions, sizes, etc., illustrated in the accompanying drawings are merely for illustrative purposes to aid those skilled in the art and are not intended to limit the scope of this invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of this invention, should still fall within the scope of the technical content disclosed in this invention. Furthermore, terms such as "above," "on top of," "on the upper surface of," and "on the surface" are used to describe the spatial relationship between one device or feature as shown in the figures and other devices or features, solely for clarity of description and not to limit the scope of this invention. Changes or adjustments to these relative relationships, without substantially altering the technical content, should also be considered within the scope of this invention.

[0027] In this utility model, unless otherwise explicitly specified, terms such as "assembly," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can also refer to a mechanical connection; they can refer to a direct connection or a connection through an intermediate medium; or they can refer to the internal connection of two components. Furthermore, the use of terms such as "first," "second," and "third" to define components is merely for the purpose of distinguishing these components. Unless otherwise stated, these terms have no special meaning and therefore should not be construed as limiting the scope of protection of this utility model.

[0028] like Figure 1 As shown, this utility model provides a fixture for fixing a wafer, the fixture comprising:

[0029] The base includes a clamp body 101 and side plates 102 located on both sides of the clamp body 101. The top of the clamp body 101 is provided with a limiting boss 103, the bottom of the clamp body 101 is provided with an opening 104, the opening 104 is provided with a guide rail 105, and the side plates 102 are provided with a through groove.

[0030] A clamping device is provided, which is distributed on the front and back sides of the clamp body 101 and can slide along the through groove.

[0031] The fastening device includes a fastening block 109 and a slider 108. The slider 108 is fixedly connected to the clamping device, and the guide rail 105 passes through a first opening on the slider 108 so that the slider 108 can slide up and down along the guide rail 105. The fastening block 109 is provided with a protrusion, the shape of which is consistent with the notch shape of the wafer 114.

[0032] As an example, the fixture body 101 is circular in shape, the limiting boss 103 is semi-circular in shape, and the radius of the limiting boss 103 is equal to the radius of the base.

[0033] Specifically, such as Figure 1 and Figure 2 As shown, in this embodiment, the fixture body 101 is designed to be circular. Symmetrical side plates 102 are provided on both sides of the fixture body 101, and the side plates 102 are integrated with the fixture body 101. The fixture body 101 has a top and a bottom that are arranged opposite to each other. A limiting boss 103 is provided on the top of the fixture body 101. The limiting boss 103 is designed to be semi-circular, and the radius of the limiting boss 103 is equal to the radius of the base. The limiting boss 103 is used to cooperate with the wafer 114 to achieve the initial positioning of the wafer 114. In addition, the limiting boss 103 contacts the edge of the wafer 114. Due to the combined action of friction and the fastening device, it plays a mechanical self-locking role, thereby preventing the wafer 114 from rotating during the review process. Furthermore, during the review process of wafer 114, in order to prevent the generation of static electricity, the base material is generally selected as copper, which has good conductivity. The coefficient of friction of copper is generally 0.16 to 0.20, which can also meet the requirements of friction generated when in contact with wafer 114.

[0034] As an example, the width of the locking block 109 is smaller than the width of the opening 104.

[0035] Specifically, such as Figure 2As shown, to provide operating space for the loading and unloading process of wafer 114, an opening 104 is provided at the bottom of the fixture body 101. A guide rail 105 is provided in the opening 104. The guide rail 105 passes through a first opening on the slider 108 in the clamping device, allowing the slider 108 to slide up and down along the guide rail 105. The slider 108 is hinged to the clamping block 109, and the clamping block 109 rotates axially around the slider 108. The clamping block 109 has a protrusion, the shape of which matches the notch shape of the wafer 114. Specifically, when loading or unloading wafer 114, the clamping block 109 is parallel to the horizontal plane; when the wafer 114 is fixed, the clamping block 109 is perpendicular to the horizontal plane. Considering that the clamping block 109 needs to be clamped / released repeatedly during the review process, the width of the clamping block 109 in the clamping device is smaller than the width of the opening 104, so that it does not take up too much time and is more convenient and faster to operate.

[0036] As an example, the through groove is arc-shaped, and the through groove includes a first through groove 1012 and a second through groove 1011, and the first through groove 1012 and the second through groove 1011 are symmetrically distributed about the central axis of the fixture body 101.

[0037] Specifically, such as Figure 1 and Figure 2 As shown, in this embodiment, a through groove is provided on the side plate 102, wherein the through groove includes a first through groove 1012 and a second through groove 1011, and the first through groove 1012 and the second through groove 1011 are symmetrically distributed about the central axis of the fixture body 101. The shape of the through groove is designed to be arc-shaped. The existence of the through groove enables the clamping devices distributed on the front and back of the fixture body 101 to slide along the through groove, thereby realizing the self-calibration of the center position of the wafer 114.

[0038] As an example, the clamping device includes a first clamping device 112 and a second clamping device 113, which are symmetrically distributed about the central axis of the clamp body 101.

[0039] Specifically, such as Figure 3As shown, the clamping device includes a first clamping device 112 and a second clamping device 113. The first clamping device 112 and the second clamping device 113 are symmetrically distributed about the central axis of the fixture body 101. The first clamping device 112 is used in conjunction with the first through groove 1012, and the second clamping device 113 is used in conjunction with the second through groove 1011. By moving the slider 108 located on the guide rail 105, the first card 1125 and the second card 1135 can be clamped and fixed synchronously, thereby realizing the self-calibration of the center position of the wafer 114.

[0040] In this embodiment, the design requirements for the clamping device are as follows: Figure 4 As shown in b, when the clamping device is in the released state, sufficient space needs to be reserved for wafer 114 so that it can be installed on the base; as Figure 4 As shown in Figure a, when the clamping device is in the clamping state, the first clip 1125 and the second clip 1135 can precisely fix the wafer 114. Specifically, as shown in Figure a... Figure 3As shown, the first clamping device 112 includes a first rocker-slider mechanism, a first card 1125, and a first bracket 1121. The first rocker-slider mechanism includes a first connecting rod 1123, a second connecting rod 1122, and a third connecting rod 1124. The first connecting rod 1123 and the second connecting rod 1122 are located on the back of the base, while the third connecting rod 1124, the first card 1125, and the first bracket 1121 are located on the front of the base. One end of the first connecting rod 1123 is fixedly connected to the slider 108, and the other end of the first connecting rod 1123 is connected to one end of the second connecting rod 1122. The other end of the first connecting rod 1123 is also provided with a first connecting member that passes through the first through groove. The first connecting member can slide along the first through groove 1012. The first connecting member is connected to one end of the first card 1125, and the other end of the first card 1125 is connected to one end of the third connecting rod 1124. The other end of the third connecting rod 1124 is connected to the first bracket 1121. The second locking device 113 includes a second rocker-slider mechanism, a second card 1135, and a second bracket 1131. The second rocker-slider mechanism includes a fourth link 1133, a fifth link 1132, and a sixth link 1134. The fourth link 1133 and the fifth link 1132 are located on the back of the base, while the sixth link 1134, the second card 1135, and the second bracket 1131 are located on the front of the base. One end of the fourth link 1133 is fixedly connected to the slider 108. The other end of the fourth link 1133 is connected to one end of the fifth link 1132, and the other end of the fifth link 1132 is connected to one end of the second link 1122. The other end of the fourth link 1133 is also provided with a second connector that passes through the second through groove. The second connector can slide along the second through groove 1011. The second connector is connected to one end of the second card 1135, and the other end of the second card 1135 is connected to one end of the sixth link 1134. The other end of the sixth link 1134 is connected to the second bracket 1131. When operating this fixture, only the sliding block 108 and the clamping / releasing block need to be slid. The movement of the sliding block 108 on the guide rail 105 can drive the first clamping device 112 and the second clamping device 113 to move along the through groove, thereby realizing the clamping or releasing of the wafer 114. During the SEM review process, the wafer 114 is not only convenient for the operator, but also reduces the risk of collision and wafer drop.

[0041] In summary, the wafer clamping fixture of this invention includes a base, a clamping device, and a locking device. Through the multi-point clamping design of the first card, second card, and locking block in the clamping device, more clamping points are provided for the wafer, resulting in more uniform force distribution and a tighter clamping, thus ensuring the safety of the wafer during SEM review. Furthermore, the synchronous clamping and fixing of the first and second cards enables self-calibration of the wafer's center position. The mechanical self-locking principle prevents possible rotation of the wafer during SEM review. Operators only need to move the slider to automatically clamp or release the wafer, significantly reducing the risk of wafer collisions and detachment. Therefore, this invention effectively overcomes the various shortcomings of existing technologies and has high industrial application value.

[0042] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A fixture for fixing a wafer, characterized in that, The fixture for fixing the wafer includes: The base includes a clamp body and side plates located on both sides of the clamp body. The top of the clamp body is provided with a limiting boss, the bottom of the clamp body is provided with an opening, a guide rail is provided in the opening, and a through groove is provided on the side plate. A clamping device is provided, which is distributed on the front and back of the fixture body and can slide along the through groove. A clamping device includes a clamping block and a slider. The slider is fixedly connected to the clamping device, and the guide rail passes through a first opening on the slider so that the slider can slide up and down along the guide rail. The clamping block is provided with a protrusion, the shape of which is consistent with the notch shape of the wafer.

2. The fixture for fixing a wafer according to claim 1, characterized in that: The main body of the clamp is circular, the limiting boss is semi-circular, and the radius of the limiting boss is equal to the radius of the base.

3. The fixture for fixing a wafer according to claim 1, characterized in that: The width of the locking block is smaller than the width of the opening.

4. The fixture for fixing a wafer according to claim 1, characterized in that: The through groove is arc-shaped and includes a first through groove and a second through groove, and the first through groove and the second through groove are symmetrically distributed about the central axis of the fixture body.

5. The fixture for fixing a wafer according to claim 4, characterized in that: The clamping device includes a first clamping device and a second clamping device, which are symmetrically distributed about the central axis of the fixture body.

6. The fixture for fixing a wafer according to claim 5, characterized in that: The first clamping device includes a first rocker-slider mechanism, a first card, and a first bracket. The first rocker-slider mechanism includes a first connecting rod, a second connecting rod, and a third connecting rod. The first connecting rod and the second connecting rod are located on the back of the base, and the third connecting rod, the first card, and the first bracket are located on the front of the base.

7. The fixture for fixing a wafer according to claim 6, characterized in that: One end of the first connecting rod is fixedly connected to the slider, and the other end of the first connecting rod is connected to one end of the second connecting rod. The other end of the first connecting rod is also provided with a first connecting member that passes through the first through groove. The first connecting member can slide along the first through groove. The first connecting member is connected to one end of the first card, and the other end of the first card is connected to one end of the third connecting rod. The other end of the third connecting rod is connected to the first bracket.

8. The fixture for fixing a wafer according to claim 6, characterized in that: The second clamping device includes a second rocker-slider mechanism, a second card, and a second bracket. The second rocker-slider mechanism includes a fourth link, a fifth link, and a sixth link. The fourth link and the fifth link are located on the back of the base, and the sixth link, the second card, and the second bracket are located on the front of the base.

9. The fixture for fixing a wafer according to claim 8, characterized in that: One end of the fourth link is fixedly connected to the slider, the other end of the fourth link is connected to one end of the fifth link, the other end of the fifth link is connected to one end of the second link, and the other end of the fourth link is also provided with a second connecting member that passes through the second through groove. The second connecting member can slide along the second through groove. The second connecting member is connected to one end of the second card, the other end of the second card is connected to one end of the sixth link, and the other end of the sixth link is connected to the second bracket.

10. The fixture for fixing a wafer according to claim 1, characterized in that: The slider and the retaining block are hinged together. The retaining block rotates axially around the slider. The upper end of the retaining block is provided with a second opening. The slider is also provided with a third opening. A pin is used to pass through the second opening and the third opening to fix the wafer.

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