Mass spectrometer

Abstract

The utility model belongs to the field of mass spectrum detection, and particularly relates to a mass spectrometer. The mass spectrometer comprises a vacuum cavity used for sample ionization, ion flight and mass spectrometry detection; the transition cabin is used for transitionally transmitting the sample from the atmosphere to the vacuum cavity, and the transition cabin has a sample feeding state and a sample discharging state; the backing pump is used for vacuumizing; the molecular pump is used for vacuumizing, the molecular pump comprises an input electrode, an intermediate electrode and an output electrode, the intermediate electrode is connected with the transition cabin to exhaust the transition cabin, the output electrode is connected with the vacuum cavity to exhaust the vacuum cavity, and the backing pump is connected with the input electrode to exhaust the vacuum cavity. The intermediate pole of the molecular pump is connected with the transition cabin to exhaust the transition cabin, so that the vacuumizing efficiency of the transition cabin can be improved, the interference to the vacuum cavity is reduced, and the improvement of the sample conveying efficiency and the guarantee of the sample analysis effect are facilitated.

Description

Technical Field

[0001] This utility model belongs to the field of mass spectrometry detection, and in particular relates to a mass spectrometer. Background Technology

[0002] During sample analysis, the sample needs to be sent to the ionization region under vacuum for ionization analysis. Since the sample cannot directly enter the vacuum environment from atmospheric pressure, it is generally necessary to gradually transition from atmospheric pressure to vacuum. However, the traditional transition chamber is slow to evacuate and has poor effect, which is not conducive to improving the sample delivery efficiency and analysis effect. Utility Model Content

[0003] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a mass spectrometer to solve the problems of slow vacuuming speed and poor effect of the transition chamber in the prior art mass spectrometer, improve the vacuuming efficiency of the transition chamber, thereby improving the sample transport efficiency and ensuring the sample analysis effect.

[0004] To achieve the above and other related objectives, this utility model provides a mass spectrometer, comprising:

[0005] Vacuum chambers are used for sample ionization, ion flight, and mass spectrometry detection.

[0006] A transition chamber is used for transferring samples from the atmosphere to the vacuum chamber. The transition chamber has a sample inlet state and a sample outlet state. In the sample inlet state, the transition chamber is isolated from the atmosphere and connected to the vacuum chamber. In the sample outlet state, the transition chamber is connected to the atmosphere and isolated from the vacuum chamber.

[0007] A backing pump is used for vacuuming.

[0008] A molecular pump for evacuating a vacuum includes an input electrode, an intermediate electrode, and an output electrode. The intermediate electrode is connected to the transition chamber to vent the transition chamber, the output electrode is connected to the vacuum chamber to vent the vacuum chamber, and the forepump is connected to the input electrode to vent the vacuum chamber.

[0009] Optionally, a first electric valve is provided on the communication path between the intermediate pole and the transition chamber to control the opening and closing of the communication path.

[0010] Optionally, a second electric valve for controlling the connection between the first electric valve and the transition chamber is provided on the communication path between the first electric valve and the transition chamber.

[0011] Optionally, when the transition chamber is in the sample injection state, the first electric valve is open and the second electric valve is closed.

[0012] Optionally, when the transition chamber is in the sample discharge state, the first electric valve is closed and the second electric valve is open.

[0013] Optionally, a low vacuum gauge is provided on the communication path between the intermediate electrode and the first electric valve.

[0014] Optionally, the mass spectrometer further includes a high vacuum gauge, which is connected to the vacuum chamber.

[0015] Optionally, the transition chamber has a first door and a second door. When the first door is open, the transition chamber is connected to the vacuum cavity; when the second door is open, the transition chamber is connected to the atmosphere.

[0016] Optionally, the backing pump is a diaphragm pump; and / or, the molecular pump is a turbomolecular pump.

[0017] Optionally, the turbomolecular pump includes a first pump stage and a second pump stage connected together, the input electrode is disposed in the first pump stage, the output electrode is disposed in the second pump stage, and the intermediate electrode is disposed between the first pump stage and the second pump stage.

[0018] As described above, the mass spectrometer of this invention has at least the following beneficial effects: the input poles of the forepump and the molecular pump are connected, allowing the vacuum chamber to be vented first by the forepump to reach the preset vacuum level, and then the molecular pump and the forepump are turned on to vent the vacuum chamber together; based on this, the intermediate pole of the molecular pump is connected to the transition chamber to vent the transition chamber, which can improve the vacuuming efficiency of the transition chamber and reduce interference with the vacuum chamber, which is conducive to improving the sample delivery efficiency and ensuring the sample analysis effect. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort, wherein:

[0020] Figure 1 This is a schematic diagram of the operation of an embodiment of the mass spectrometer of this utility model;

[0021] Figure 2 This is a partial structural diagram of the vacuum cavity of an embodiment of the mass spectrometer of this utility model.

[0022] Part Number Explanation

[0023] 1. Housing, 11. Vacuum chamber, 12. Transition chamber, 121. First door, 122. Second door, 13. Motion module, 14. Cover plate, 15. Foreboard pump, 21. Exhaust port, 3. Molecular pump, 31. Input electrode, 32. Intermediate electrode, 33. Output electrode, 34. First pump stage, 35. Second pump stage, 41. First electric valve, 42. Second electric valve, 43. Fine-tuning valve, 51. Low vacuum gauge, 52. High vacuum gauge, 6. Quick-release flange. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] It should be noted that if the embodiments of this application involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0026] Furthermore, if the embodiments of this application involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0027] See Figure 1In some optional embodiments, this application provides a mass spectrometer, which includes a vacuum chamber 11, a transition chamber 12, a backing pump 2 for evacuation, and a molecular pump 3 for evacuation. The vacuum chamber 11 is used for sample ionization, ion flight, and mass spectrometry detection. The transition chamber 12 is used for the transfer of samples from the atmosphere to the vacuum chamber 11. The transition chamber 12 has a sample inlet state and a sample outlet state. In the sample inlet state, the transition chamber 12 is isolated from the atmosphere and connected to the vacuum chamber 11, at which time the sample can be sent into the vacuum chamber 11. In the sample outlet state, the transition chamber 12 is connected to the atmosphere and isolated from the vacuum chamber 11, at which time the sample can be removed for external operations. The molecular pump 3 includes an input electrode 31, an intermediate electrode 32, and an output electrode 33. The intermediate electrode 32 is connected to the transition chamber 12 to exhaust the air from the transition chamber 12, thereby changing the pressure inside the transition chamber 12 and reducing the influence of the transition chamber 12 on the vacuum chamber 11. This allows the sample to move between the transition chamber 12 and the vacuum chamber 11 to reach a designated position. The output electrode 33 is connected to the vacuum chamber 11 to exhaust the air from the vacuum chamber 11. The forepump 2 is connected to the input electrode 31 to exhaust the air from the vacuum chamber 11. The forepump 2 and the molecular pump 3 work together to exhaust the air from the vacuum chamber 11, so that the vacuum chamber 11 can be in a vacuum state.

[0028] Specifically, the forepump 2 is connected to the input of the molecular pump 3, thereby achieving communication with the vacuum chamber 11. When evacuating, the vacuum chamber 11 is first vented through the forepump 2. After the vacuum chamber 11 reaches the preset vacuum level, the molecular pump 3 is turned on. The molecular pump 3 and the forepump 2 work together to vent the vacuum chamber 11.

[0029] Optionally, the backing pump 2 and the molecular pump 3 can be connected by a quick-release flange 6, and the molecular pump 3 can be connected to the vacuum chamber 11 by a quick-release flange 6, which is simple and convenient.

[0030] Optionally, the back pump 2 can be a diaphragm pump, which has an exhaust port 21 for exhausting gas.

[0031] Optionally, the molecular pump 3 can be a turbomolecular pump. Further, the turbomolecular pump includes a first pump stage 34 and a second pump stage 35 connected together, an input electrode 31 is disposed in the first pump stage 34, an output electrode 33 is disposed in the second pump stage 35, and an intermediate electrode 32 is disposed between the first pump stage 34 and the second pump stage 35.

[0032] Optionally, the transition chamber 12 has a first door 121 and a second door 122. When the first door 121 is opened, the transition chamber 12 is connected to the vacuum chamber 11 so that the sample can be sent into the vacuum chamber 11; when the second door 122 is opened, the transition chamber 12 is connected to the atmosphere so that the sample can be taken out.

[0033] In the mass spectrometer of the above embodiment, the gas in the vacuum chamber 11 is first pre-evacuated by the forepump 2, and then the vacuum is evacuated by the cooperation of the forepump 2 and the molecular pump 3, which helps to speed up the vacuum evacuation efficiency. The intermediate pole 32 of the molecular pump 3 is connected to the transition chamber 12 to evacuate the gas in the transition chamber 12. The transition chamber 12 can switch between being connected to the atmosphere and being in a vacuum state. When the transition chamber 12 is connected to the atmosphere, it is convenient to change the sample. When the transition chamber 12 is in a vacuum state and is connected to the vacuum chamber 11, the vacuum environment of the vacuum chamber 11 is not disturbed, and it is convenient to transport the sample to the designated position in the vacuum chamber 11.

[0034] See Figure 1 and Figure 2 In some embodiments, a first electric valve 41 for controlling the opening and closing of the communication path between the intermediate pole 32 and the transition chamber 12 is provided. A second electric valve 42 for controlling the connection with the atmosphere is provided in the communication path between the first electric valve 41 and the transition chamber 12.

[0035] Optionally, when the transition chamber 12 is in the sample injection state, the first electric valve 41 is open and the second electric valve 42 is closed. When the transition chamber 12 is in the sample discharge state, the first electric valve 41 is closed and the second electric valve 42 is open.

[0036] Optionally, the mass spectrometer has a housing 1, a cover 14, a flip cover 15, and a motion module 13. The housing 1 and the cover 14 cooperate to define a first space, a portion of which is formed as a vacuum chamber 11. The housing 1 has a window for sample introduction and sampling. The motion module 13 is located in the first space and can move within the first space. The flip cover 15 is mounted on the housing 1 and can be flipped to open and close the window. When the flip cover 15 closes the window, the flip cover 15, the cover 14, and the motion module 13 cooperate to define a transition chamber 12. Specifically, during sample injection, the flip cover 15 is opened, the target plate containing the sample is placed on the motion module 13, the flip cover 15 is closed, the second electric valve 42 is closed, and the first electric valve 41 is opened. The forepump 2 and the molecular pump 3 are connected in series to form a pumping force to evacuate the transition chamber 12, causing the internal pressure of the transition chamber 12 to decrease in a short time. This lower pressure in the transition chamber 12 helps to reduce the pressure of the transition chamber 12 on the vacuum chamber 11 when the motion module 13 moves and disengages from the flip cover 15 and the cover plate 14. The forepump 2 and molecular pump 3 continue to operate, allowing the transition chamber 12 and vacuum chamber 11 to reach the required pressure for normal operation in a short time. When the sample is ejected, the motion module 13 moves and contacts the cover plate 14 and the flip cover 15 to form the transition chamber 12. At this time, the transition chamber 12 is isolated from the vacuum chamber 11. The second electric valve 42 is opened and the first electric valve 41 is closed. The pressure in the transition chamber 12 changes from negative pressure to normal pressure. The flip cover 15 is opened to take out the target plate, which does not affect the pressure in the vacuum chamber 11 and facilitates the removal and placement of the target plate.

[0037] Optionally, the fore-pump 2 is also connected to a fine-tuning valve 43.

[0038] In the mass spectrometer of the above embodiment, the first electric valve 41, the second electric valve 42, the forepump 2 and the molecular pump 3 work together to adjust the pressure in the transition chamber 12, which not only reduces the pressure influence of the transition chamber 12 on the vacuum chamber 11, but also makes sample loading and unloading simple and convenient.

[0039] See Figure 1 In some alternative embodiments, a low vacuum gauge 51 is provided on the communication path between the intermediate electrode 32 and the first electric valve 41.

[0040] Optionally, the low vacuum gauge 51 can be connected to the communication path via the quick-release flange 6, making installation and connection convenient.

[0041] In the mass spectrometer of the above embodiment, when the second electric valve 42 is closed and the first electric valve 41 is opened, the pressure inside the transition chamber 12 can be detected by the low vacuum gauge 51 so as to detect whether the pressure inside the transition chamber 12 has reached the preset state.

[0042] See Figure 1 In some alternative embodiments, the mass spectrometer also includes a high vacuum gauge 52, which is connected to the vacuum chamber 11.

[0043] Optionally, the high vacuum gauge 52 can be connected to the vacuum chamber 11 via the quick-release flange 6, making installation and connection convenient.

[0044] The mass spectrometer in the above embodiment can detect the pressure inside the vacuum chamber 11 through the high vacuum gauge 52, so as to detect whether the pressure inside the vacuum chamber 11 is in a preset state.

[0045] In this mass spectrometer, the forepump 2 and the molecular pump 3 work together to evacuate the transition chamber 12 and the vacuum chamber 11, which improves operational efficiency. In particular, the intermediate pole 32 of the molecular pump 3 is connected to the transition chamber 12, which allows the pressure inside the transition chamber 12 to change rapidly to the required working pressure, reducing the impact on the vacuum chamber 11. When samples are being moved in or out, the time required to adjust the pressure in the transition chamber 12 can be effectively shortened, which is beneficial to improving the efficiency of sample transport and detection and ensuring the effectiveness of sample detection and analysis.

[0046] In the description of this specification, the references to terms such as "this embodiment," "example," and "specific example" refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0047] The above are merely embodiments of this application and do not limit the scope of this patent application. Any equivalent structural or procedural changes made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection of this application.

Claims

1. A mass spectrometer, characterized in that, include: Vacuum chambers are used for sample ionization, ion flight, and mass spectrometry detection. A transition chamber is used for transferring samples from the atmosphere to the vacuum chamber. The transition chamber has a sample inlet state and a sample outlet state. In the sample inlet state, the transition chamber is isolated from the atmosphere and connected to the vacuum chamber. In the sample outlet state, the transition chamber is connected to the atmosphere and isolated from the vacuum chamber. A backing pump is used for vacuuming. A molecular pump for evacuating a vacuum includes an input electrode, an intermediate electrode, and an output electrode. The intermediate electrode is connected to the transition chamber to vent the transition chamber, the output electrode is connected to the vacuum chamber to vent the vacuum chamber, and the forepump is connected to the input electrode to vent the vacuum chamber.

2. The mass spectrometer according to claim 1, characterized in that, A first electric valve is provided on the communication path between the intermediate pole and the transition chamber to control the opening and closing of the communication path.

3. The mass spectrometer according to claim 2, characterized in that, A second electric valve is provided on the communication path between the first electric valve and the transition chamber to control the opening and closing of the air supply.

4. The mass spectrometer according to claim 3, characterized in that, When the transition chamber is in the sample injection state, the first electric valve is open and the second electric valve is closed.

5. The mass spectrometer according to claim 3, characterized in that, When the transition chamber is in the sample discharge state, the first electric valve is closed and the second electric valve is open.

6. The mass spectrometer according to claim 2, characterized in that, A low vacuum gauge is provided on the communication path between the intermediate electrode and the first electric valve.

7. The mass spectrometer according to any one of claims 1 to 6, characterized in that, The mass spectrometer also includes a high vacuum gauge, which is connected to the vacuum chamber.

8. The mass spectrometer according to any one of claims 1 to 6, characterized in that, The transition chamber has a first door and a second door. When the first door is open, the transition chamber is connected to the vacuum cavity; when the second door is open, the transition chamber is connected to the atmosphere.

9. The mass spectrometer according to any one of claims 1 to 6, characterized in that, The forepump is a diaphragm pump; and / or, the molecular pump is a turbomolecular pump.

10. The mass spectrometer according to claim 9, characterized in that, The turbomolecular pump includes a first pump stage and a second pump stage connected together. The input electrode is disposed in the first pump stage, the output electrode is disposed in the second pump stage, and the intermediate electrode is disposed between the first pump stage and the second pump stage.

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