Power supply power distribution cabinet for semiconductor PVD (Physical Vapor Deposition) equipment

Abstract

The utility model provides a power distribution cabinet for semiconductor PVD equipment, which comprises a main cabinet and at least one expansion cabinet, a protection control module is arranged in the main cabinet, an output module is arranged in the expansion cabinet, and the protection control module comprises a main circuit breaker, a main contactor, a first branch circuit breaker and a second branch circuit breaker; the input ends of the first branch circuit breaker and the second branch circuit breaker are connected in parallel and then are sequentially connected in series with the main contactor and the main circuit breaker to an external alternating current power grid, and the first branch circuit breaker and the second branch circuit breaker are connected with a plurality of first connectors through a first branch bus and a second branch copper bar respectively; the first connectors are respectively and sequentially arranged and fixed on the side plates of the main cabinet; the output module comprises a plurality of output units which are sequentially arranged in the expansion cabinet, each output unit comprises a power supply and a second connector which are connected, the second connectors are arranged on the side plates of the expansion cabinet, the second connectors are connected with the first connectors through external cables respectively, and the power supplies are connected with PVD equipment to supply power.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, and in particular relates to a power distribution cabinet for semiconductor PVD equipment. Background Technology

[0002] In semiconductor technology, multiple PVD (Physical Vapor Deposition) devices are typically powered centrally by a single power distribution cabinet. Traditional power distribution cabinets are usually fixed configurations, unable to flexibly adjust output parameters according to the process requirements of the PVD devices. Furthermore, under high load conditions, they are prone to problems such as insufficient heat dissipation and voltage fluctuations, affecting the quality of thin film deposition. In addition, the semiconductor manufacturing environment places extremely high demands on the equipment's electromagnetic interference immunity and safety, requirements that traditional power distribution cabinets struggle to fully meet. Therefore, it is necessary to provide a power distribution cabinet for semiconductor PVD devices that enables flexible configuration and safe power supply for multiple PVD devices. Utility Model Content

[0003] This utility model provides a power distribution cabinet for semiconductor PVD equipment, enabling flexible configuration and safe power supply for multiple PVD devices.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A power distribution cabinet for semiconductor PVD equipment includes a main cabinet and at least one expansion cabinet. The main cabinet houses a protection control module, and the expansion cabinet houses an output module. The protection control module includes a main circuit breaker, a main contactor, a first branch circuit breaker, and a second branch circuit breaker. The input terminals of the first and second branch circuit breakers are connected in parallel and then in series with the main contactor and the main circuit breaker to an external AC power grid. The output terminals of the first and second branch circuit breakers are respectively connected to a first branch busbar and a second branch copper busbar. The first and second branch busbars are each connected to multiple first connectors. The first connectors are sequentially arranged and fixed on the side panel of the main cabinet. The output module includes multiple output units arranged in layers within the expansion cabinet. Each output unit includes an interconnected power supply and a second connector. The second connector is located on the side panel of the expansion cabinet, and each second connector is connected to one of the first connectors via an external cable. The power supply is connected to the PVD equipment for power supply.

[0006] Preferably, multiple unit circuit breakers are respectively provided on the first branch busbar and the second branch copper busbar, and the unit circuit breakers are connected to the first connector one-to-one through internal cables; the internal cables are plugged into the first connector.

[0007] Preferably, the main circuit breaker, the main contactor and the first branch circuit breaker, and the main contactor and the second branch circuit breaker are all connected sequentially via a main busbar. A main residual current transformer is installed on the main busbar connecting the main circuit breaker and the main contactor. The main residual current transformer is connected to a main residual current relay, which is connected to the trip coil of the main circuit breaker. When the main residual current transformer detects leakage current, the main residual current relay controls the trip coil of the main circuit breaker to de-energize, causing the main circuit breaker to open.

[0008] Preferably, a current transformer is installed on the main busbar connecting the main circuit breaker and the main contactor. The current transformer is connected to a multi-function energy meter, and the multi-function energy meter is connected to the output terminal of the main circuit breaker through a leakage current circuit breaker.

[0009] Preferably, a first branch residual current transformer and a second branch residual current transformer are respectively installed on the first branch busbar and the second branch copper busbar. The first branch residual current transformer and the second branch residual current transformer are respectively connected to a first branch residual current relay and a second branch residual current relay. The first branch residual current relay and the second branch residual current relay are both connected to a safety relay. The safety relay is connected to the coil of the main contactor. When the first branch residual current relay and / or the second branch residual current relay detects leakage current, the safety relay controls the coil of the main contactor to de-energize, causing the normally open contact of the main contactor to open.

[0010] Preferably, a power indicator light is connected to the input terminal of the main circuit breaker.

[0011] Preferably, both the main cabinet and the expansion cabinet are equipped with a heat dissipation module, which includes a temperature controller and a cooling fan. The cooling fan is located at the top of the main cabinet and the expansion cabinet for exhaust ventilation. Both the main cabinet and the expansion cabinet are equipped with air inlets at the bottom.

[0012] Preferably, both the main cabinet and the expansion cabinet are equipped with a leakage detection device, which issues an alarm when it detects a leak.

[0013] Preferably, the side panels of the main cabinet and the side panels of the extension cabinet are detachable.

[0014] Preferably, the main cabinet is equipped with a grounding copper busbar.

[0015] Compared with the prior art, the technical solution of this utility model has beneficial effects.

[0016] For example, a power distribution cabinet for semiconductor PVD equipment includes a main cabinet and at least one expansion cabinet. The main cabinet is equipped with a protection and control module, and the expansion cabinet is equipped with an output module. The protection and control module includes a main circuit breaker, a main contactor, a first branch circuit breaker, and a second branch circuit breaker. The input terminals of the first and second branch circuit breakers are connected in parallel and then connected in series with the main contactor and the main circuit breaker to the external AC power grid. The output terminals of the first and second branch circuit breakers are respectively connected to a first branch busbar and a second branch copper busbar. The first and second branch busbars are respectively connected to multiple first connectors. The first connectors are arranged and fixed on the side panel of the main cabinet. The output module includes multiple output units arranged in layers in the expansion cabinet. Each output unit includes an interconnected power supply and a second connector. The second connector is located on the side panel of the expansion cabinet. Each second connector is connected to a first connector via an external cable. The power supply is connected to the PVD equipment for power supply. This enables flexible power supply configuration for multiple PVD equipment. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the power distribution cabinet structure for semiconductor PVD equipment in an embodiment of this utility model;

[0018] Figure 2 This is an electrical architecture diagram of the power distribution cabinet for semiconductor PVD equipment in an embodiment of this utility model;

[0019] Figure 3 This is the main control diagram of the electrical schematic diagram of the power distribution cabinet for semiconductor PVD equipment in this embodiment of the utility model;

[0020] Figure 4 This is the first branch connection diagram of the electrical schematic diagram of the power distribution cabinet for semiconductor PVD equipment in this embodiment of the utility model;

[0021] Figure 5 This is the second branch connection diagram of the electrical schematic diagram of the power distribution cabinet for semiconductor PVD equipment in this embodiment of the present invention.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1-Main cabinet; 11-Main circuit breaker; 111-Main residual current transformer; 112-Main residual current relay; 113-Current transformer; 114-Multi-function energy meter; 115-Residual current circuit breaker; 12-Main contactor; 13-First branch circuit breaker; 131-First branch busbar; 132-First branch residual current transformer; 133-First branch residual current relay; 14-Second branch circuit breaker; 141-Second branch busbar; 142-Second branch residual current transformer; 143-Second branch residual current relay; 15-First connector; 16-Unit circuit breaker; 17-Main busbar; 18-Power indicator light; 19-Grounding copper busbar;

[0024] 2-Expansion cabinet; 21-Output unit; 211-Power supply; 212-Second connector;

[0025] 3-External cable. Detailed Implementation

[0026] To make the objectives, features, and beneficial effects of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It is to be understood that the specific embodiments described below are merely for explaining this utility model and are not intended to limit it. Furthermore, the same or similar reference numerals may be used in the drawings to refer to the same or similar elements in different embodiments, and descriptions of the same or similar elements in different embodiments, as well as descriptions of prior art elements, features, effects, etc., may be omitted.

[0027] Figure 1 This is a schematic diagram of the power distribution cabinet structure for semiconductor PVD equipment in an embodiment of this utility model; Figure 2 This is an electrical architecture diagram of the power distribution cabinet for semiconductor PVD equipment in an embodiment of this utility model; Figure 3 This is the main control diagram of the electrical schematic diagram of the power distribution cabinet for semiconductor PVD equipment in this embodiment of the utility model; Figure 4 This is the first branch connection diagram of the electrical schematic diagram of the power distribution cabinet for semiconductor PVD equipment in this embodiment of the utility model; Figure 5 This is the second branch connection diagram of the electrical schematic diagram of the power distribution cabinet for semiconductor PVD equipment in this embodiment of the present invention.

[0028] Reference Figures 1-5 This utility model provides a power distribution cabinet for semiconductor PVD equipment.

[0029] Specifically, the power distribution cabinet for semiconductor PVD equipment includes a main cabinet 1 and at least one expansion cabinet 2. The main cabinet 1 houses a protection control module, and the expansion cabinet 2 houses an output module. The protection control module includes a main circuit breaker 11, a main contactor 12, a first branch circuit breaker 13, and a second branch circuit breaker 14. The input terminals of the first branch circuit breaker 13 and the second branch circuit breaker 14 are connected in parallel and then connected in series with the main contactor 12 and the main circuit breaker 11 to the external AC power grid. The output terminals of the first branch circuit breaker 13 and the second branch circuit breaker 14 are respectively connected to the first branch busbar 1. The first branch bus 131 and the second branch bus 141 are respectively connected to multiple first connectors 15; the first connectors 15 are arranged and fixed on the side panel of the main cabinet 1 in sequence; the output module includes multiple output units 21 arranged in layers in the expansion cabinet 2, each output unit 21 including an interconnected power supply 211 and a second connector 212, the second connector 212 being disposed on the side panel of the expansion cabinet 2, each second connector 212 being plugged into a first connector 15 via an external cable 3, and the power supply 211 being connected to the PVD equipment for power supply. The protection control module and the output module are designed separately, and a reliable connection is achieved through an external cable 3, significantly improving the flexibility and maintainability of the distribution cabinet. The left or right expansion cabinet 2 can be selected according to actual needs, realizing flexible expansion of the distribution cabinet capacity; the output module adopts a modular design, and the number of output units 21 can be flexibly configured according to needs, making it highly adaptable.

[0030] Specifically, the first connector 15 and the second connector 212 adopt heavy-duty aviation plugs and achieve electrical connection through matching connectors set at both ends of the external cable 3 to ensure the stability and reliability of high current transmission.

[0031] In some embodiments, a plurality of unit circuit breakers 16 are respectively provided on the first branch bus 131 and the second branch bus 141. The unit circuit breakers 16 are connected to the first connector 15 one by one through internal cables. The internal cables are plugged into the first connector 15. The unit circuit breakers 16 realize the individual on / off control of each output unit 21. The internal cables are plugged into the first connector 15. This facilitates quick wiring and installation and improves installation efficiency.

[0032] In some embodiments, the main circuit breaker 11, the main contactor 12 and the first branch circuit breaker 13, and the main contactor 12 and the second branch circuit breaker 14 are all connected sequentially via the main busbar 17. A main residual current transformer 111 is installed on the main busbar 17 connecting the main circuit breaker 11 and the main contactor 12. The main residual current transformer 111 is connected to a main residual current relay 112, which is connected to the trip coil of the main circuit breaker 11. When the main residual current transformer 111 detects leakage current, the main residual current relay 112 controls the trip coil of the main circuit breaker 11 to de-energize, causing the main circuit breaker 11 to open. This achieves leakage current detection and disconnection of leakage faults in the main circuit, ensuring electrical safety.

[0033] In some embodiments, a current transformer 113 is installed on the main busbar 17 connecting the main circuit breaker 11 and the main contactor 12. The current transformer 113 is connected to a multi-function energy meter 114. The multi-function energy meter 114 is connected to the output terminal of the main circuit breaker 11 through a residual current circuit breaker 115. The multi-function energy meter 114 can display electrical parameters such as current, voltage, power, and power factor in real time, and upload the data through a communication interface.

[0034] In some embodiments, the first branch busbar 131 and the second branch busbar 141 are respectively provided with a first branch residual current transformer 132 and a second branch residual current transformer 142. The first branch residual current transformer 132 and the second branch residual current transformer 142 are respectively connected to a first branch residual current relay 133 and a second branch residual current relay 143. The first branch residual current relay 133 and the second branch residual current relay 143 are both connected to a safety relay (not shown). The safety relay is connected to the coil of the main contactor 12. When the first branch residual current relay 133 and / or the second branch residual current relay 143 detects leakage current, the safety relay controls the coil of the main contactor 12 to de-energize, causing the normally open contact of the main contactor 12 to open; thereby realizing the detection and disconnection of leakage current faults in the first branch circuit and the second branch circuit, ensuring electrical safety.

[0035] In some embodiments, a power indicator light 18 is connected to the input terminal of the main circuit breaker 11.

[0036] In some embodiments, both the main cabinet 1 and the expansion cabinet 2 are equipped with a heat dissipation module, which includes a temperature controller (not shown) and a cooling fan (not shown). The cooling fan speed is automatically adjusted according to the temperature inside the cabinet to ensure heat dissipation efficiency. The cooling fans are respectively located at the top of the main cabinet 1 and the expansion cabinet 2 for exhaust. The bottom of both the main cabinet 1 and the expansion cabinet 2 are equipped with air inlets, which form air convection with the cooling fans at the top to improve the heat dissipation effect.

[0037] In some embodiments, both the main cabinet 1 and the expansion cabinet 2 are equipped with a leakage detection device (not shown), which issues an alarm when it detects a leak.

[0038] In some embodiments, the side panels of the main cabinet 1 and the side panels of the expansion cabinet 2 are detachable, which facilitates the installation of components and improves installation efficiency.

[0039] In some embodiments, the main cabinet 1 is provided with a grounding copper busbar 19 for convenient unified grounding.

[0040] In summary, the power distribution cabinet for semiconductor PVD equipment provided by this utility model includes a main cabinet 1 and at least one expansion cabinet 2. The main cabinet 1 is equipped with a protection control module, and the expansion cabinet 2 is equipped with an output module. The protection control module includes a main circuit breaker 11, a main contactor 12, a first branch circuit breaker 13, and a second branch circuit breaker 14. The input terminals of the first branch circuit breaker 13 and the second branch circuit breaker 14 are connected in parallel and then connected in series with the main contactor 12 and the main circuit breaker 11 to the external AC power grid. The output terminals of the first branch circuit breaker 13 and the second branch circuit breaker 14 are respectively connected to the first branch circuit breaker 14. The main cabinet 1 has a branch busbar 131 and a second branch busbar 141, each connected to a plurality of first connectors 15. The first connectors 15 are sequentially arranged and fixed on the side panel of the main cabinet 1. The output module includes a plurality of output units 21 arranged in layers within the expansion cabinet 2. Each output unit 21 includes an interconnected power supply 211 and a second connector 212. The second connector 212 is located on the side panel of the expansion cabinet 2, and each second connector 212 is connected to a first connector 15 via an external cable 3. The power supply 211 is connected to the PVD equipment for power supply. The protection and control module is designed separately from the output module, and a reliable connection is achieved via an external cable 3, significantly improving the flexibility and maintainability of the distribution cabinet. The expansion cabinet 2 on the left or right side can be selected according to actual needs, allowing for flexible expansion of the distribution cabinet capacity. The output module adopts a modular design, allowing for flexible configuration of the number of output units 21 according to requirements, making it highly adaptable.

[0041] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of this utility model disclosure, even when only a single embodiment is described with respect to a particular feature. The feature examples provided in this utility model disclosure are intended to be illustrative and not limiting, unless otherwise stated. In practice, one or more technical features of the dependent claims may be combined with the technical features of the independent claims as needed and where technically feasible, and may be derived from the technical features of the respective independent claims in any suitable manner rather than solely by the specific combinations listed in the claims.

[0042] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A power distribution cabinet for semiconductor PVD equipment, characterized in that, The system includes a main cabinet and at least one expansion cabinet. The main cabinet houses a protection control module, and the expansion cabinet houses an output module. The protection control module includes a main circuit breaker, a main contactor, a first branch circuit breaker, and a second branch circuit breaker. The input terminals of the first and second branch circuit breakers are connected in parallel and then in series with the main contactor and the main circuit breaker, connected to an external AC power grid. The output terminals of the first and second branch circuit breakers are respectively connected to a first branch busbar and a second branch copper busbar. The first and second branch busbars are each connected to multiple first connectors. The first connectors are sequentially arranged and fixed on the side panel of the main cabinet. The output module includes multiple output units arranged in layers within the expansion cabinet. Each output unit includes an interconnected power supply and a second connector. The second connector is located on the side panel of the expansion cabinet, and each second connector is connected to one of the first connectors via an external cable. The power supply is connected to a PVD device for power supply.

2. The power distribution cabinet for semiconductor PVD equipment according to claim 1, characterized in that, Multiple unit circuit breakers are respectively installed on the first branch busbar and the second branch copper busbar, and the unit circuit breakers are connected to the first connector one by one through internal cables; The internal cable is plugged into and connected to the first connector.

3. The power distribution cabinet for semiconductor PVD equipment according to claim 1, characterized in that, The main circuit breaker, the main contactor and the first branch circuit breaker, and the main contactor and the second branch circuit breaker are all connected sequentially via a main busbar. A main residual current transformer is installed on the main busbar connecting the main circuit breaker and the main contactor. The main residual current transformer is connected to a main residual current relay, which is connected to the trip coil of the main circuit breaker. When the main residual current transformer detects leakage current, the main residual current relay controls the trip coil of the main circuit breaker to de-energize, causing the main circuit breaker to open.

4. The power distribution cabinet for semiconductor PVD equipment according to claim 3, characterized in that, A current transformer is installed on the main busbar connecting the main circuit breaker and the main contactor. The current transformer is connected to a multi-function energy meter, and the multi-function energy meter is connected to the output terminal of the main circuit breaker through a leakage current circuit breaker.

5. The power distribution cabinet for semiconductor PVD equipment according to claim 1, characterized in that, The first branch busbar and the second branch copper busbar are respectively equipped with a first branch residual current transformer and a second branch residual current transformer. The first branch residual current transformer and the second branch residual current transformer are respectively connected to a first branch residual current relay and a second branch residual current relay. The first branch residual current relay and the second branch residual current relay are both connected to a safety relay. The safety relay is connected to the coil of the main contactor. When the first branch residual current relay and / or the second branch residual current relay detects leakage current, the safety relay controls the coil of the main contactor to de-energize, causing the normally open contact of the main contactor to open.

6. The power distribution cabinet for semiconductor PVD equipment according to claim 1, characterized in that, A power indicator light is connected to the input terminal of the main circuit breaker.

7. The power distribution cabinet for semiconductor PVD equipment according to claim 1, characterized in that, Both the main cabinet and the expansion cabinet are equipped with a heat dissipation module, which includes a temperature controller and a cooling fan. The cooling fan is located at the top of the main cabinet and the expansion cabinet for exhaust. Both the main cabinet and the expansion cabinet are equipped with air inlets at the bottom.

8. The power distribution cabinet for semiconductor PVD equipment according to claim 1, characterized in that, Both the main cabinet and the expansion cabinet are equipped with leakage detection devices, which issue an alarm when a leakage is detected.

9. The power distribution cabinet for semiconductor PVD equipment according to claim 1, characterized in that, The side panels of the main cabinet and the side panels of the expansion cabinet are detachable.

10. The power distribution cabinet for semiconductor PVD equipment according to claim 1, characterized in that, The main cabinet is equipped with a grounding copper busbar.

Images